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    • 21. 发明授权
    • Dry etching method and manufacturing method of manufacturing EL element
using same
    • 干蚀刻方法和使用其制造EL元件的制造方法
    • US5888410A
    • 1999-03-30
    • US825579
    • 1997-03-31
    • Hajime IshiharaKazuhiro InoguchiYutaka HattoriNobuei ItoTadashi Hattori
    • Hajime IshiharaKazuhiro InoguchiYutaka HattoriNobuei ItoTadashi Hattori
    • C23F4/00H01L21/302H01L21/3065H01L21/461H01L21/465H05B33/10H05B33/12H05B33/14B44C1/22
    • H05B33/10H01L21/465
    • A dry etching method performing dry etching of a material containing zinc forms and patterns a resist on the material to be etched, and etches the material using an etching gas which is a mixed gas of methane gas and an inert gas. A dry etching method that dry etches a material containing zinc etches the material using an etching gas that consists only of methane gas, an inert gas, and hydrogen gas alone. Another dry etching method that dry etches a material containing zinc introduces an etching gas that contains methane gas, an inert gas, and hydrogen gas into a dry etching device, in which the flow rate of the hydrogen gas is set such that it is equal to or greater than the value at which the amount of dissociated hydrogen becomes saturated, and etches the material using the etching gas. An EL element manufacturing method forms a first luminescent material containing zinc in its composition on a first insulated layer, forms a first resist that has a first pattern on the first luminescent material, dry etches the first luminescent material through the first resist, thereby forming the first luminescent layer; forms a second luminescent material having zinc in its composition on the first luminescent layer, forms a second resist on the second luminescent material, and dry etches the second luminescent material through the second resist.
    • 对含有锌的材料进行干蚀刻的干式蚀刻方法形成并在待蚀刻材料上形成抗蚀剂,并使用作为甲烷气体和惰性气体的混合气体的蚀刻气体蚀刻材料。 使用仅由甲烷气体,惰性气体和氢气单独构成的蚀刻气体来干燥蚀刻含锌材料的干蚀刻方法蚀刻材料。 对含有锌的材料进行干蚀刻的另一种干蚀刻方法将含有甲烷气体,惰性气体和氢气的蚀刻气体引入到干法蚀刻装置中,其中氢气的流量设定为等于 或大于解离氢的量饱和的值,并且使用蚀刻气体蚀刻该材料。 EL元件制造方法在第一绝缘层上形成含有锌的第一发光材料,在第一发光材料上形成具有第一图案的第一抗蚀剂,通过第一抗蚀剂干燥蚀刻第一发光材料,从而形成 第一发光层; 在第一发光层上形成具有锌组成的第二发光材料,在第二发光材料上形成第二抗蚀剂,并通过第二抗蚀剂干蚀刻第二发光材料。
    • 23. 发明授权
    • Transparent thin-film EL display apparatus with ambient light adaptation
means
    • 具有环境光适应装置的透明薄膜EL显示装置
    • US5757127A
    • 1998-05-26
    • US489157
    • 1995-06-09
    • Kazuhiro InoguchiTomoya UchidaNobuei ItoTadashi Hattori
    • Kazuhiro InoguchiTomoya UchidaNobuei ItoTadashi Hattori
    • H05B33/22
    • B60K35/00H05B33/22B60K2350/2021B60K2350/2034B60K2350/2082
    • A transparent thin-film EL display apparatus has a transparent thin-film EL element formed on a glass substrate. A rear substrate consisting of photochromic glass and the glass substrate on which the EL element is formed are disposed facing each other with the EL element located in between. A light-transmitting insulation material is inserted in a space between the two substrates and hermetically sealed. When the display on the EL element becomes hard to see due to light entering from the rear of the display apparatus, the photochromic glass reacts in response to the light and darkens the rear of the EL element, thereby blocking the light. Accordingly, normally the display apparatus displays various items of information through the front substrate and ensures visibility of the background through the display apparatus, and when high-intensity external light enters through the rear, the display apparatus reacts and blocks this light by means of a light shutter function, thereby enabling reliable display of the information without impairment of display contrast, thus guaranteeing a stable and highly reliable display.
    • 透明薄膜EL显示装置具有形成在玻璃基板上的透明薄膜EL元件。 由光致变色玻璃构成的后基板和形成有EL元件的玻璃基板相互配置,EL元件位于其间。 将透光绝缘材料插入两个基板之间的空间中并进行气密密封。 当EL元件的显示由于从显示装置的后部进入的光变得难以看见时,光致变色玻璃响应于光而反应并使EL元件的后部变暗,从而阻挡光。 因此,通常,显示装置通过前面基板显示各种信息,并且通过显示装置确保背景的可视性,并且当高强度外部光通过后方进入时,显示装置通过 光快门功能,从而可以可靠地显示信息,而不会影响显示对比度,从而保证稳定高可​​靠的显示。
    • 26. 发明授权
    • Thin-film electroluminescence display device
    • 薄膜电致发光显示装置
    • US5539424A
    • 1996-07-23
    • US197492
    • 1994-02-16
    • Yutaka HattoriAtsushi MizutaniNobuei ItoTadashi Hattori
    • Yutaka HattoriAtsushi MizutaniNobuei ItoTadashi Hattori
    • H05B33/12H05B33/22G09G3/30
    • H05B33/12H05B33/22
    • A thin-film EL display device of red luminescent color having high luminous intensity and high reliability is disclosed. The thin-film EL display device has a first transparent electrode, a first transparent insulating layer, a light-emitting layer of zinc sulfide (ZnS) with the addition of manganese (Mn), a red-light transmitting filter of amorphous silicon (a-Si), a second transparent insulating layer, and a second transparent electrode (second electrode), which are successively deposited one on top of another on a glass substrate. The EL display device produces red light from orange light emission from the light-emitting layer. High temperature resistance of the filter permits the insertion of the filter to a desired position during the fabrication process for the thin-film EL display device. Furthermore, since the filter characteristics of the thin-film EL display do not suffer degradation by the heat generated during the light emitting operation thereof, there is no concern for luminescent color deterioration with time.
    • 公开了一种具有高发光强度和高可靠性的红色发光颜色的薄膜EL显示装置。 薄膜EL显示装置具有第一透明电极,第一透明绝缘层,添加有锰(Mn)的硫化锌(ZnS)发光层,非晶硅的红光透射滤光片(a -Si),第二透明绝缘层和第二透明电极(第二电极),其在玻璃基板上依次彼此沉积。 EL显示装置产生来自发光层的橙色发光的红光。 过滤器的耐高温性允许在薄膜EL显示装置的制造过程中将滤光片插入所需位置。 此外,由于薄膜EL显示器的滤光器特性不会因其在发光操作期间产生的热而劣化,所以不关心发光颜色随时间劣化。
    • 28. 发明授权
    • Combined display panel
    • 组合显示面板
    • US06224222B1
    • 2001-05-01
    • US09578858
    • 2000-05-26
    • Kazuhiro InoguchiNobuei ItoTadashi Hattori
    • Kazuhiro InoguchiNobuei ItoTadashi Hattori
    • G01D1128
    • B60K37/02B60K2350/203G01D11/28G01D13/28
    • A transparent display panel such as an electroluminescent panel is overlapped on a part of a conventional instrument panel for use in an automobile. The overlapped display panel displays additional information such as navigation maps when required and is turned off under a normal driving condition. When the overlapped transparent display panel is turned off, the conventional instrument panel displays information such as a vehicle speed, an engine speed and so forth. In this situation, overall luminance on the combined display panel is made uniform throughout a whole surface including the area where the transparent display panel is overlapped. To realize the uniformity of luminance, brightness of back lamps for illuminating the instrument panel is adjusted or a filter having an adequate transparency is used. The combined display panel may be also made by combining a non-transparent display panel with a conventional instrument panel. A filter may be used in this case to attain an overall uniform luminance on the combined display panel.
    • 诸如电致发光面板的透明显示面板重叠在用于汽车的常规仪表板的一部分上。 重叠显示面板在需要时显示导航地图等附加信息,并在正常驾驶状态下关闭。 当重叠的透明显示面板关闭时,传统的仪表板显示诸如车速,发动机转速等信息。 在这种情况下,组合显示面板的整体亮度在包括透明显示面板重叠的区域的整个表面上均匀。 为了实现亮度的均匀性,调节用于照明仪表板的背灯的亮度,或者使用具有足够透明度的滤光片。 组合的显示面板也可以通过将不透明显示面板与常规仪表板组合而制成。 在这种情况下可以使用滤光器以在组合的显示面板上获得整体均匀的亮度。