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    • 21. 发明授权
    • Enhanced electroless deposition of dielectric precursor materials for use in in-laid gate MOS transistors
    • 用于嵌入栅极MOS晶体管的电介质前体材料的增强的无电沉积
    • US06465334B1
    • 2002-10-15
    • US09679369
    • 2000-10-05
    • Matthew S. BuynoskiPaul R. BesserPaul L. KingEric N. PatonQi Xiang
    • Matthew S. BuynoskiPaul R. BesserPaul L. KingEric N. PatonQi Xiang
    • H01L214763
    • H01L21/28194H01L21/288H01L21/31683H01L29/517H01L29/66545H01L29/66553H01L29/66583
    • High quality dielectric layers, e.g., high-k dielectric layers comprised of at least one refractory or lanthanum series transition metal oxide or silicate, for use as gate insulator layers in in-laid metal gate MOS transistors and CMOS devices, are fabricated by forming an ultra-thin catalytic metal layer, e.g., a monolayer thick layer of Pd or Pd, on a Si-based semiconductor substrate, electrolessly plating on the catalytic layer comprising at least one refractory or lanthanum series transition metal or metal-based dielectric precursor layer, such as of Zr and/or Hf, and then reacting the precursor layer with oxygen or with oxygen and the semiconductor substrate to form the at least one high-k metal oxide or silicate. The inventive methodology prevents, or at least substantially reduces, oxygen access to the substrate surface during at least the initial stage(s) of formation of the gate insulator layer, thereby minimizing deleterious formation of oxygen-induced surface states at the semiconductor substrate/gate insulator interface.
    • 通过形成高质量的电介质层,例如由至少一种难熔或镧系列过渡金属氧化物或硅酸盐构成的高k电介质层,用作在叠层金属栅极MOS晶体管和CMOS器件中用作栅极绝缘体层 超薄催化金属层,例如在Si基半导体衬底上的单层厚的Pd或Pd层,在包含至少一种难熔或镧系过渡金属或金属基电介质前体层的催化剂层上无电镀, 例如Zr和/或Hf,然后使前体层与氧或与氧和半导体衬底反应以形成至少一种高k金属氧化物或硅酸盐。 本发明的方法在至少形成栅极绝缘体层的初始阶段期间防止或至少基本上减少氧接触到衬底表面,从而最小化半导体衬底/栅极处的氧诱导表面状态的有害形成 绝缘子接口。
    • 24. 发明授权
    • Method of reducing electromigration by forming an electroplated copper-zinc interconnect and a semiconductor device thereby formed
    • 通过形成电镀铜 - 锌互连和由此形成的半导体器件来减少电迁移的方法
    • US06717236B1
    • 2004-04-06
    • US10084563
    • 2002-02-26
    • Sergey LopatinAlexander H. NickelPaul L. King
    • Sergey LopatinAlexander H. NickelPaul L. King
    • H01L27082
    • H01L21/2885C25D3/58C25D7/123C25D17/001H01L21/76877
    • A method of reducing electromigration in a dual-inlaid copper interconnect line (3) by filling a via (6) with a Cu-rich Cu—Zn alloy (30) electroplated on a Cu surface (200 from a stable chemical solution, and by controlling the Zn-doping thereof, which also improves interconnect reliability and corrosion resistance, and a semiconductor device thereby formed. The method involves using a reduced-oxygen Cu—Zn alloy as fill (30) for the via (6) in forming the dual-inlaid interconnect structure (35). The alloy fill (30) is formed by electroplating the Cu surface (20) in a unique chemical solution containing salts of Zn and Cu, their complexing agents, a pH adjuster, and surfactants, thereby electroplating the fill (30) on the Cu surface (20); and annealing the electroplated Cu—Zn alloy fill (30); and planarizing the Cu—Zn alloy fill (30), thereby forming the dual-inlaid copper interconnect line (35).
    • 通过在铜表面(200来自稳定的化学溶液和由稳定的化学溶液以及电解质的方式)电镀Cu富Cu Cu-Zn合金(30)填充通孔(6)来减少双镶嵌铜互连线(3)中的电迁移的方法 控制其Zn掺杂,这也提高了互连可靠性和耐腐蚀性,以及由此形成的半导体器件,该方法包括使用还原氧Cu-Zn合金作为通孔(6)的填充物(30),形成双重 所述合金填充物(30)通过以包含Zn和Cu的盐的独特的化学溶液,它们的络合剂,pH调节剂和表面活性剂电镀Cu表面(20)而形成,由此电镀 在Cu表面(20)上填充(30);对电镀的Cu-Zn合金填料(30)进行退火;以及平坦化Cu-Zn合金填料(30),由此形成双嵌入铜互连线(35)。
    • 25. 发明授权
    • Semiconductor device formed by calcium doping a copper surface using a chemical solution
    • 使用化学溶液通过钙掺杂铜表面形成的半导体器件
    • US06469387B1
    • 2002-10-22
    • US09728314
    • 2000-11-30
    • Sergey LopatinJoffre F. BernardPaul L. King
    • Sergey LopatinJoffre F. BernardPaul L. King
    • H01L2348
    • H01L21/7685H01L21/288H01L21/76862H01L21/76864H01L23/53238H01L2924/0002H01L2924/00
    • A method of fabricating a semiconductor device having contaminant-reduced Ca-doped Cu surfaces formed on Cu interconnects by cost-effectively depositing a Cu—Ca—X surface and subsequently removing the contaminant layer contained therein; and a device thereby formed. In the Cu—Ca—X surface, where contaminant X=C, S, and O, removal of the contaminant from such surface is achieved by (a) immersing the Cu interconnect surface into an electroless plating solution comprising Cu salts, Ca salts, their complexing agents, a reducing agent, a pH adjuster, and at least one surfactant for facilitating Ca-doping of the Cu interconnect material; and (b) annealing of the Cu—Ca—X surface under vacuum onto the underlying Cu interconnect material to form a Cu—Ca film on Cu interconnect structure, thereby producing a uniform Cu—Ca film (i.e., Cu-rich with 0.2-5% Ca) on the Cu surface of an interconnect for maximizing Ca—Cu/Cu interconnect structure reliability, electromigration resistance, and corrosion prevention. The annealing step primarily removes O and secondarily removes C and S, especially when performed under vacuum, an inert gas, or a reducing ambient such as ammonia (NH3) plasma. Thus, the resultant device then comprises a distinctive contaminant-reduced Ca—Cu/Cu interconnect structure.
    • 通过成本有效地沉积Cu-Ca-X表面并随后除去其中包含的污染物层,制造在Cu互连上形成的具有污染减少的Ca掺杂的Cu表面的半导体器件的方法; 和由此形成的装置。 在污染物X = C,S和O的Cu-Ca-X表面中,通过(a)将Cu互连表面浸入包含Cu盐,Ca盐, 它们的络合剂,还原剂,pH调节剂和用于促进Cu互连材料的Ca掺杂的至少一种表面活性剂; (b)将Cu-Ca-X表面在真空下退火到下面的Cu互连材料上,以在Cu互连结构上形成Cu-Ca膜,从而产生均匀的Cu-Ca膜(即富含Cu- 5%Ca)在铜互连的Cu表面,以最大限度地提高Ca-Cu / Cu互连结构的可靠性,抗电迁移和防腐蚀。 退火步骤主要去除O,并且二次除去C和S,特别是在真空,惰性气体或还原环境如氨(NH 3)等离子体下进行时)。 因此,所得到的器件然后包括不同的污染物减少的Ca-Cu / Cu互连结构。
    • 26. 发明授权
    • Method of reducing carbon, sulphur, and oxygen impurities in a calcium-doped copper surface and semiconductor device thereby formed
    • 由此形成的钙掺杂铜表面和半导体器件中的碳,硫和氧杂质的还原方法
    • US06444580B1
    • 2002-09-03
    • US09728312
    • 2000-11-30
    • Sergey LopatinPaul L. KingJoffre F. Bernard
    • Sergey LopatinPaul L. KingJoffre F. Bernard
    • H01L2144
    • H01L21/7685H01L21/288H01L21/76838H01L21/76862H01L21/76864H01L23/53238H01L2924/0002H01L2924/00
    • A method of fabricating a semiconductor device having contaminant-reduced calcium-copper (Ca—Cu) alloy surfaces formed on Cu interconnects by cost-effectively removing the contaminant layer and a device thereby formed. Contaminant removal from a Cu—Ca—X surface, where contaminant X=C, S, or O, is achieved by sputtering the Cu—Ca—X surface in an argon (Ar) atmosphere between the steps of (a) immersing the Cu interconnect surface into an electroless plating solution comprising Cu salts, Ca salts, their complexing agents, a reducing agent, a pH adjuster, and at least one surfactant for facilitating Ca-doping of the Cu interconnect material; and (b) annealing of the Ca—Cu alloy surface onto the underlying Cu interconnect material to form a Ca—Cu/Cu interconnect structure, whereby the sputtering step, under Ar, selectively and effectively removes contaminants from the Cu—Ca—X layer containing higher concentrations of C, S, or O, thereby minimizing the post-annealed contaminant level, and thereby producing a uniform Ca—Cu alloy surface (i.e., Cu-rich with 0.2-5% Ca) on the Cu interconnect material for maximizing Ca—Cu/Cu interconnect structure reliability, electromigration resistance, and corrosion prevention. The annealing step primarily removes O and secondarily removes C and S, especially when performed under vacuum, an inert gas, or a reducing ambient such as ammonia (NH3) plasma. Thus, the resultant device then comprises a distinctive contaminant-reduced Ca—Cu/Cu interconnect structure.
    • 通过成本有效地去除污染物层和由此形成的器件,制造在Cu互连上形成的具有污染物降低的钙 - 铜(Ca-Cu)合金表面的半导体器件的方法。 污染物X = C,S或O的Cu-Ca-X表面的污染物去除是通过在氩(Ar)气氛中溅射Cu-Ca-X表面,在(a)浸渍Cu 将互连表面连接成包含Cu盐,Ca盐,它们的络合剂,还原剂,pH调节剂和至少一种用于促进Cu互连材料的Ca掺杂的表面活性剂的化学镀溶液; 和(b)将Ca-Cu合金表面退火到下面的Cu互连材料上以形成Ca-Cu / Cu互连结构,由此在Ar下的溅射步骤选择性且有效地从Cu-Ca-X层去除污染物 含有较高浓度的C,S或O,从而使退火后的污染物水平最小化,从而在Cu互连材料上产生均匀的Ca-Cu合金表面(即,具有0.2-5%Ca的富含Cu的Cu),以使 Ca-Cu / Cu互连结构的可靠性,电迁移性和防腐蚀性。 退火步骤主要去除O,并且二次除去C和S,特别是在真空,惰性气体或还原环境如氨(NH 3)等离子体下进行时)。 因此,所得到的器件然后包括不同的污染物减少的Ca-Cu / Cu互连结构。
    • 28. 发明授权
    • Method of fabricating a semiconductor device by calcium doping a copper surface using a chemical solution
    • 使用化学溶液通过钙掺杂铜表面制造半导体器件的方法
    • US06624074B1
    • 2003-09-23
    • US10218532
    • 2002-08-13
    • Sergey LopatinJoffre F. BernardPaul L. King
    • Sergey LopatinJoffre F. BernardPaul L. King
    • H01L2144
    • H01L21/7685H01L21/288H01L21/76862H01L21/76864H01L23/53238H01L2924/0002H01L2924/00
    • A method of fabricating a semiconductor device having contaminant-reduced Ca-doped Cu surfaces formed on Cu interconnects by cost-effectively depositing a Cu—Ca—X surface and subsequently removing the contaminant layer contained therein; and a device thereby formed. In the Cu—Ca—X surface, where contaminant X═C, S, and O, removal of the contaminant from such surface is achieved by (a) immersing the Cu interconnect surface into an electroless plating solution comprising Cu salts, Ca salts, their complexing agents, a reducing agent, a pH adjuster, and at least one surfactant for facilitating Ca-doping of the Cu interconnect material; and (b) annealing of the Cu—Ca—X surface under vacuum onto the underlying Cu interconnect material to form a Cu—Ca film on Cu interconnect structure, thereby producing a uniform Cu—Ca film (i.e., Cu-rich with 0.2-5% Ca) on the Cu surface of an interconnect for maximizing Ca—Cu/Cu interconnect structure reliability, electromigration resistance, and corrosion prevention. The annealing step primarily removes O and secondarily removes C and S, especially when performed under vacuum, an inert gas, or a reducing ambient such as ammonia (NH3) plasma. Thus, the resultant device then comprises a distinctive contaminant-reduced Ca—Cu/Cu interconnect structure.
    • 通过成本有效地沉积Cu-Ca-X表面并随后除去其中包含的污染物层,制造在Cu互连上形成的具有污染减少的Ca掺杂的Cu表面的半导体器件的方法; 和由此形成的装置。 在污染物X = C,S和O的Cu-Ca-X表面中,通过(a)将Cu互连表面浸入包含Cu盐,Ca盐, 它们的络合剂,还原剂,pH调节剂和用于促进Cu互连材料的Ca掺杂的至少一种表面活性剂; (b)将Cu-Ca-X表面在真空下退火到下面的Cu互连材料上,以在Cu互连结构上形成Cu-Ca膜,从而产生均匀的Cu-Ca膜(即富含Cu- 5%Ca)在铜互连的Cu表面,以最大限度地提高Ca-Cu / Cu互连结构的可靠性,抗电迁移和防腐蚀。 退火步骤主要去除O,并且二次除去C和S,特别是在真空,惰性气体或还原环境如氨(NH 3)等离子体下进行时)。 因此,所得到的器件然后包括不同的污染物减少的Ca-Cu / Cu互连结构。
    • 29. 发明授权
    • Semiconductor device fabricated by reducing carbon, sulphur, and oxygen impurities in a calcium-doped copper surface
    • 通过在掺杂钙的铜表面中还原碳,硫和氧杂质制造的半导体器件
    • US06621165B1
    • 2003-09-16
    • US10154871
    • 2002-05-23
    • Sergey LopatinPaul L. KingJoffre F. Bernard
    • Sergey LopatinPaul L. KingJoffre F. Bernard
    • H01L2348
    • H01L21/7685H01L21/288H01L21/76838H01L21/76862H01L21/76864H01L23/53238H01L2924/0002H01L2924/00
    • A semiconductor device having contaminant-reduced calcium-copper (Ca—Cu) alloy surfaces formed on Cu interconnects fabricated by cost-effectively removing the contaminant layer. Contaminant removal from a Cu—Ca—X surface, where contaminant X═C, S, or O, is achieved by sputtering the Cu—Ca—X surface in an argon (Ar) atmosphere between the steps of (a) immersing the Cu interconnect surface into an electroless plating solution comprising Cu salts, Ca salts, their complexing agents, a reducing agent, a pH adjuster, and at least one surfactant for facilitating Ca-doping of the Cu interconnect material; and (b) annealing of the Ca—Cu alloy surface onto the underlying Cu interconnect material to form a Ca—Cu/Cu interconnect structure, whereby the sputtering step, under Ar, selectively and effectively removes contaminants from the Cu—Ca—X layer containing higher concentrations of C, S, or O, thereby minimizing the post-annealed contaminant level, and thereby producing a uniform Ca—Cu alloy surface (i.e., Cu-rich with 0.2-5% Ca) on the Cu interconnect material for maximizing Ca—Cu/Cu interconnect structure reliability, electromigration resistance, and corrosion prevention. The annealing step primarily removes O and secondarily removes C and S, especially when performed under vacuum, an inert gas, or a reducing ambient such as ammonia (NH3) plasma. Thus, the resultant device then comprises a distinctive contaminant-reduced Ca—Cu/Cu interconnect structure.
    • 具有通过成本有效地去除污染物层而制造的Cu互连上形成污染物降低的钙 - 铜(Ca-Cu)合金表面的半导体器件。 污染物X = C,S或O的Cu-Ca-X表面的污染物去除是通过在氩(Ar)气氛中溅射Cu-Ca-X表面,在(a)浸渍Cu 将互连表面连接成包含Cu盐,Ca盐,它们的络合剂,还原剂,pH调节剂和至少一种用于促进Cu互连材料的Ca掺杂的表面活性剂的化学镀溶液; 和(b)将Ca-Cu合金表面退火到下面的Cu互连材料上以形成Ca-Cu / Cu互连结构,由此在Ar下的溅射步骤选择性且有效地从Cu-Ca-X层去除污染物 含有较高浓度的C,S或O,从而使退火后的污染物水平最小化,从而在Cu互连材料上产生均匀的Ca-Cu合金表面(即,具有0.2-5%Ca的富含Cu的Cu),以使 Ca-Cu / Cu互连结构的可靠性,电迁移性和防腐蚀性。 退火步骤主要去除O,并且二次除去C和S,特别是在真空,惰性气体或还原环境如氨(NH 3)等离子体下进行时)。 因此,所得到的器件然后包括不同的污染物减少的Ca-Cu / Cu互连结构。
    • 30. 发明授权
    • Safety clamp device and apparatus utilizing same
    • 安全钳装置及利用该装置的装置
    • US4181194A
    • 1980-01-01
    • US914277
    • 1978-06-09
    • James H. BassettPaul L. King
    • James H. BassettPaul L. King
    • E04G3/32E04G3/10
    • E04G3/32Y10T24/3949
    • An improved safety clamp device for use with movable platforms and the like includes a body member having a safety cable receiving cradle, a lever arm having a safety cable engaging portion, the lever arm being pivotally connected to the body member and pivotally connected to an elongate bar member, and a modified bellcrank. The modified bellcrank has a first arm pivotally connected to the body member, a second arm pivotally coupled to a hoist line, and its apex pivotally connected to the elongate bar member. When the elongate bar member is in a first position relative to the body member, the safety cable engaging portion confronts but does not engage the safety cable. When the elongate bar member is in a second position relative to the body member, the safety cable engaging portion engages the safety cable thereby wedging the safety cable between the cradle and the safety cable engaging portions. The modified bellcrank and the lever arm operate cooperatively to maintain the body member and the elongate bar member in parallel relationship to the safety cable.
    • 一种用于可移动平台等的改进的安全夹紧装置包括具有安全电缆接收支架的主体构件,具有安全缆线接合部分的杠杆臂,杠杆臂可枢转地连接到主体构件并枢转地连接到细长 酒吧会员和修改后的曲拐。 改进的曲拐具有枢转地连接到主体构件的第一臂,枢转地联接到提升线的第二臂,并且其顶点枢转地连接到细长杆构件。 当细长杆构件相对于主体构件处于第一位置时,安全缆线接合部分面对但不接合安全缆线。 当细长杆构件相对于主体构件处于第二位置时,安全缆线接合部分接合安全缆线,从而将安全缆线楔入托架和安全缆线接合部分之间。 改进的曲拐和杠杆臂协同工作以使主体构件和细长杆构件保持与安全缆线平行的关系。