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21. 发明申请

US20080232208A1 High Frequency Central Aperture Tracking 审中-公开
标题翻译：高频中心光圈跟踪
公开(公告)号：US20080232208A1
公开(公告)日：2008-09-25
申请号：US12064085
申请日：2006-08-16
申请人： Alexander Marc Van Der Lee , Dominique Maria Bruls
发明人： Alexander Marc Van Der Lee , Dominique Maria Bruls
IPC分类号： G11B7/09
CPC分类号： G11B7/0903
摘要： The present invention relates to an optical system for performing radial tracking on an associated optical record carrier. The optical system contains at least one radiation-emitting device capable of emitting at least three beams: a first beam for reading and/or recording information, and at least a second beam and a third beam for tracking. The optical system is adapted for radial tracking of the first spot from a tracking error signal generated based on the high-frequency component of the central-aperture signal of the second and third beams. The tracking error signal may be generated based on a difference signal of a DC-level of the power of the high-frequency components of the central-aperture signal.
摘要翻译：本发明涉及一种用于在相关联的光学记录载体上进行径向跟踪的光学系统。该光学系统包含至少一个能够发射至少三个光束的辐射发射装置：用于读取和/或记录信息的第一光束，以及用于跟踪的至少第二光束和第三光束。光学系统适于从基于第二和第三光束的中心孔径信号的高频分量产生的跟踪误差信号中径向跟踪第一光点。可以基于中心孔径信号的高频分量的功率的直流电平的差信号来生成跟踪误差信号。

22. 发明授权

US09091573B2 Determining a flow characteristic of an object being movable in an element 有权
标题翻译：确定在元件中可移动的物体的流动特性
公开(公告)号：US09091573B2
公开(公告)日：2015-07-28
申请号：US14117635
申请日：2012-05-22
申请人： Alexander Marc Van Der Lee , Jeroen Veen
发明人： Alexander Marc Van Der Lee , Jeroen Veen
IPC分类号： G01N21/00 , G01F1/00 , A61B5/026 , A61B5/00 , G01P3/36 , G01P5/26 , G01S17/58 , G01S17/88 , G01S7/491 , G01N21/53
CPC分类号： G01F1/00 , A61B5/0261 , A61B5/6801 , A61B2562/0233 , A61B2562/146 , G01N21/53 , G01P3/366 , G01P5/26 , G01S7/4916 , G01S7/4917 , G01S17/58 , G01S17/88
摘要： A sensor device (340) for determining a flow characteristic of an object (341) being movable in an element (342) comprises a light emitting unit (344) configured for emitting light towards the element (342) and a light detecting unit (344) configured for detecting light scattered back from the element (342). The sensor device (340) comprises an optical unit (346) configured for spatially separating a light incidence element portion (348) of the element (342) and a light detection element portion (350) of the element (342) from one another, wherein the light incidence element portion (348) is associated with the emitted light inciding on the element (342) and the light detection element portion (350) is associated with the back-scattered light scattered back from the element (342) for detection. The sensor device (340) comprises a determining unit (358) configured for determining the flow characteristic of the object (341) being movable in the element (342) based on light indicative of the emitted light and the detected back-scattered light. The sensor device (340) allows for an accurate and easy determination of the flow characteristic of the object (341).
摘要翻译：一种用于确定在元件（342）中可移动的物体（341）的流动特性的传感器装置（340）包括被配置为朝向元件（342）发射光的发光单元（344）和光检测单元（344）），其被配置用于检测从所述元件（342）向后散射的光。传感器装置（340）包括被配置用于将元件（342）的光入射元件部分（348）和元件（342）的光检测元件部分（350）彼此空间分离的光学单元（346）其中所述光入射元件部分（348）与所述元件（342）上的发射光相关联，并且所述光检测元件部分（350）与从所述元件（342）返回的用于检测的后向散射光相关联。传感器装置（340）包括确定单元（358），其被配置为基于指示所发射的光和检测到的反向散射光的光来确定可在元件（342）中移动的物体（341）的流动特性。传感器装置（340）允许准确和容易地确定物体（341）的流动特性。

23. 发明申请

US20090279409A1 OPTIMAL DETECTION OF TWODOS SIGNALS 审中-公开
标题翻译： TWODOS信号的最佳检测
公开(公告)号：US20090279409A1
公开(公告)日：2009-11-12
申请号：US11720624
申请日：2005-11-25
申请人： Alexander Marc Van Der Lee , Coen Theodorus Hubertus Fran Liedenbaum , Teunis Willem Tukker
发明人： Alexander Marc Van Der Lee , Coen Theodorus Hubertus Fran Liedenbaum , Teunis Willem Tukker
IPC分类号： G11B7/135
CPC分类号： G11B7/133 , G11B7/0909 , G11B7/0916 , G11B7/131 , G11B7/14
摘要： A method and a device for simultaneously reading information from a plurality of data tracks (14) of an optical disc (22) by means of a detector illuminating said plurality of data tracks with laser spots (25), wherein light reflected from the laser spots is collected by means of a servo lens (29), further providing the detector with a plurality of detector elements (28a, 28b, 28c, 31a, 42a, 28bc, 28cc, 32a, 32b, 42ac, 51a, 52a, 52b) spaced apart from each other, arranging each detector element to detect (read) light reflected from a data track allotted to each element, arranging at most two detector elements (28bc, 28cc, 32a, 32b, 42ac, 52a, 52b) to be segmented detectors for providing both a power signal for the allotted track and an output signal for focus error control in a servo system guiding said detector along said tracks, reading only the power signal for each track by means of second detector elements (28a, 28b, 28c, 31a, 42a, 51a) and arranging each one of said second detector elements to be of substantially smaller area than the area of one of said first detector elements.
摘要翻译：一种用于通过利用激光点（25）照射所述多个数据轨道的检测器从光盘（22）的多个数据轨道（14）同时读取信息的方法和装置，其中从激光点反射的光通过伺服透镜（29）收集，进一步向检测器提供间隔开的多个检测器元件（28a，28b，28c，31a，42a，28bc，28cc，32a，32b，42ac，51a，52a，52b）将每个检测器元件布置成检测（读取）从分配给每个元件的数据轨道反射的光，将至少两个检测器元件（28bc，28cc，32a，32b，42ac，52a，52b）布置成分段检测器用于在所述轨道上引导所述检测器的伺服系统中提供用于分配轨道的功率信号和用于聚焦误差控制的输出信号，仅通过第二检测器元件（28a，28b，28c， 31a，42a，51a）并且布置所述第二检测中的每一个或元件具有比所述第一检测器元件之一的面积更小的面积。

24. 发明申请

US20090002692A1 Method of Measuring the Laser Power of a Forward Multiple Laser Beam in a Multibeam Optical Scanning System 审中-公开
标题翻译：在多光束光学扫描系统中测量正向多激光束的激光功率的方法
公开(公告)号：US20090002692A1
公开(公告)日：2009-01-01
申请号：US12097977
申请日：2006-12-12
申请人： Floris Maria Hermansz Crompvoets , Alexander Marc Van Der Lee
发明人： Floris Maria Hermansz Crompvoets , Alexander Marc Van Der Lee
IPC分类号： G01J1/42
CPC分类号： G01J1/4257 , G01J1/4228 , G11B7/1263 , G11B7/127 , G11B7/1376 , G11B7/1395
摘要： A method for measuring the laser power of a forward multiple beam generated by a laser diode array comprising at least two laser diodes, the method comprising a generation step, comprising generating the forward multiple beam; a separation step, comprising separating at least part of the forward multiple beam into individual beams (31, 32, 300, 301, 302, 303), the number of individual beams being equal to the number of laser diodes in the laser diode array, the arrangement being such that each individual beam comprises light originating from a single laser diode and a measurement step, comprising measuring the laser power of each individual beam by means of photo detectors (121, 122, 125, 126, 127, 128). The separation may be performed in space, by means of an imaging lens or making use of vignetting of the collimator lens, or in time.
摘要翻译：一种用于测量由包括至少两个激光二极管的激光二极管阵列产生的正向多光束的激光功率的方法，所述方法包括生成步骤，包括产生所述正向多光束; 分离步骤，包括将所述前向多束光束的至少一部分分离为单独的光束（31,32,3300,301,302,303），所述单个光束的数量等于所述激光二极管阵列中激光二极管的数量，该布置使得每个单独的光束包括源自单个激光二极管的光和测量步骤，包括通过光电检测器（121,122,125,126,127,128）测量每个单独的光束的激光功率。分离可以在空间中，借助于成像透镜或者使用准直透镜的渐晕或者在时间上进行。

25. 发明申请

US20080239897A1 Optical Reader/Writer With Dedicated Focus Tracking Beam 审中-公开
标题翻译：光学读写器与专用聚焦跟踪光束
公开(公告)号：US20080239897A1
公开(公告)日：2008-10-02
申请号：US11568479
申请日：2005-04-27
申请人： Christopher Busch , Alexander Marc Van Der Lee
发明人： Christopher Busch , Alexander Marc Van Der Lee
IPC分类号： G11B7/12
CPC分类号： G11B7/1275 , G11B7/0903 , G11B7/1353 , G11B2007/0013
摘要： The present invention relates to an optical reader/writer for a two dimensional storage disc, comprising means (21, 22, 23, 14, 16, 15) for generating a plurality of laser beams and projecting said beams onto a rotating disc, means (24, 25, 26) for detecting the beams after being diffracted by the disc, and means (24, 27, 28) for determining a focus error signal (29) based on one of said plurality of beams. The plurality of beams comprises an array of beams having a first wavelength, and a dedicated focus tracking beam having a second wavelength, and the focus error signal (29) is based on said focus tracking beam. According to the invention, beams having one wavelength is used for the actual accessing of the data on the disc, while a beam having a second wavelength is used for focus tracking. The focus tracking can then be based on one single beam without interference from adjacent beams.
摘要翻译：本发明涉及一种用于二维存储盘的光学读取器/写入器，包括用于产生多个激光束并将所述光束投影到旋转盘上的装置（21,22,23,14,16,15），装置 24,25,26），用于在由盘衍射之后检测光束;以及用于基于所述多个光束之一确定聚焦误差信号（29）的装置（24,27,28）。多个光束包括具有第一波长的光束阵列和具有第二波长的专用聚焦跟踪光束，并且聚焦误差信号（29）基于所述聚焦跟踪光束。根据本发明，具有一个波长的波束用于实际访问盘上的数据，而具有第二波长的波束用于聚焦跟踪。焦点跟踪可以基于一个单个波束而不受相邻波束的干扰。

26. 发明申请

US20080159112A1 Spot Size Focus Error Detection For Multiple Beam Optical Scanning Device 审中-公开
标题翻译：多光束光学扫描装置的斑点聚焦误差检测
公开(公告)号：US20080159112A1
公开(公告)日：2008-07-03
申请号：US11815107
申请日：2006-01-26
申请人： Alexander Marc Van Der Lee , Coen Theodorus Hubertus Fransiscus Liedenbaum , Teunis Willem Tukker
发明人： Alexander Marc Van Der Lee , Coen Theodorus Hubertus Fransiscus Liedenbaum , Teunis Willem Tukker
IPC分类号： G11B7/00
CPC分类号： G11B7/0912 , G11B7/131 , G11B7/14
摘要： A device (1) for scanning an optical disc (6), the disc (6) comprising substantially parallel data tracks (10). The device (1) comprises an optical unit for creating track light spots (12) on the data tracks (10) and a plurality of detector light spots on a plurality of signal detectors. The device further comprises a focus error unit for with a beam manipulating element (21, 22, 22a, 92) for providing for at least one of the reflected beams a first optical path (24) to a first segmented detector (8a) and a second optical path (25) to a second segmented detector (8b). The lengths of the first optical path (24) and the second optical path (25) exhibit a difference (Dd), such that an intensity distribution of a first detector light spot on the first segmented detector (8a) is equal to an intensity distribution of a second detector light spot on the second segmented detector (8b) when the at least one track light spot is correctly focussed and that the intensity distribution on the first segmented detector (8a) differs from the intensity distribution on the second segmented detector (8b) when the at least one track light spot is not correctly focussed. The difference (Dd) is substantially less than a quotient of a distance between two adjacent detector light spots (Ds) and a numerical aperture (NA) of the lens (7). A dimension (D1) of a light detecting area of the segmented detectors in a direction of adjacent detector light spots is less than the distance (Ds) between two adjacent detector light spots.
摘要翻译：一种用于扫描光盘（6）的设备（1），所述盘（6）包括基本上平行的数据轨道（10）。设备（1）包括用于在数据轨道（10）上创建轨道光点（12）的光学单元和多个信号检测器上的多个检测器光点。该装置还包括一个聚焦误差单元，用于与光束操纵元件（21,22,22a，92）一起提供至少一个反射光束到第一分段检测器（8a）的第一光路（24）以及到第二分段检测器（8b）的第二光路（25）。第一光路（24）和第二光路（25）的长度呈现差（Dd），使得第一分段检测器（8a）上的第一检测器光点的强度分布等于强度当所述至少一个轨道光点被正确聚焦并且所述第一分段检测器（8a）上的强度分布与所述第二分段检测器（8a）上的强度分布不同时，所述第二分段检测器（8b）上的第二检测器光点的分布当至少一个轨道光点未被正确聚焦时，检测器（8b）。差值（Dd）基本上小于两个相邻检测器光点（Ds）和透镜（7）的数值孔径（NA）之间的距离的商。分段检测器的光检测区域在相邻检测器光点的方向上的尺寸（D 1）小于两个相邻检测器光点之间的距离（Ds）。

27. 发明授权

US07345739B2 Lithographic alignment system and device manufacturing method 失效
标题翻译：光刻对准系统和器件制造方法
公开(公告)号：US07345739B2
公开(公告)日：2008-03-18
申请号：US10792909
申请日：2004-03-05
申请人： Robert Frans Maria Hendriks , Egbert Lenderink , Rene Monshouwer , Alexander Marc Van Der Lee , Gert Wim 'T Hooft
发明人： Robert Frans Maria Hendriks , Egbert Lenderink , Rene Monshouwer , Alexander Marc Van Der Lee , Gert Wim 'T Hooft
IPC分类号： G03B27/52 , G03B27/54
CPC分类号： G03F7/70483 , G03F7/70216 , G03F9/7065
摘要： A lithographic apparatus equipped with an improved alignment system, is presented herein. In one embodiment, the apparatus includes a radiation system for providing a projection beam of radiation, a support structure for supporting a patterning device that configures the projection beam according to a desired pattern, a substrate holder for holding a substrate, projection system for projecting the patterned beam onto a target portion of the substrate, and an alignment system. The alignment system includes a radiation source for illuminating at least one mark which is usable for alignment on a substrate and an imaging system for imaging light which has interacted with the at least one mark to generate alignment information.
摘要翻译：本文介绍了一种配有改进对准系统的光刻设备。在一个实施例中，该装置包括用于提供投影辐射束的辐射系统，用于支撑根据期望图案配置投影光束的图案形成装置的支撑结构，用于保持基板的基板保持器，图案化的光束到基板的目标部分上，以及对准系统。对准系统包括用于照亮可用于在基板上对准的至少一个标记的辐射源和用于对与至少一个标记相互作用的光进行成像的成像系统以产生对准信息。

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