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    • 22. 发明授权
    • Method of manufacturing a display substrate
    • 制造显示基板的方法
    • US08608971B2
    • 2013-12-17
    • US12862580
    • 2010-08-24
    • Hong-Kee ChinSang-Gab KimMin-Seok Oh
    • Hong-Kee ChinSang-Gab KimMin-Seok Oh
    • B29D11/00C30B33/00
    • H01L27/1288G02F1/136204H01L27/1244
    • A method of manufacturing a display substrate includes forming a first metallic pattern including gate and storage conductors and a gate electrode of a switching device on a base substrate, forming a gate insulation layer, forming a second metallic pattern and a channel portion including a source line, source and drain electrodes of the switching device, forming a passivation layer and a photoresist film on the second metallic pattern, patterning the photoresist film to form a first pattern portion corresponding to the gate and source conductors and the switching device, and a second pattern portion formed on the storage line, etching the passivation layer and the gate insulation layer, and forming a pixel electrode using the first pattern portion. Therefore, excessive etching of the stepped portion may be prevented, so that a short-circuit defect between a metallic pattern and a pixel electrode may be prevented
    • 一种制造显示基板的方法包括在基底基板上形成包括栅极和存储导体的第一金属图案和开关器件的栅电极,形成栅极绝缘层,形成第二金属图案和包括源极线的沟道部分 开关器件的源极和漏极,在第二金属图案上形成钝化层和光致抗蚀剂膜,图案化光致抗蚀剂膜以形成对应于栅极和源极导体和开关器件的第一图案部分,以及第二图案 形成在存储线上的部分,蚀刻钝化层和栅极绝缘层,以及使用第一图案部分形成像素电极。 因此,可以防止阶梯部分的过度蚀刻,从而可以防止金属图案和像素电极之间的短路缺陷
    • 23. 发明申请
    • TOUCH SCREEN SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
    • 触摸屏幕基板及其制造方法
    • US20110234536A1
    • 2011-09-29
    • US12903688
    • 2010-10-13
    • Yun-Jong YeoHong-Kee Chin
    • Yun-Jong YeoHong-Kee Chin
    • G06F3/042H01H11/00
    • G02F1/13338G06F3/0412G06F3/042H01L27/12H01L27/1214Y10T29/49105
    • In a touch screen substrate and a method of manufacturing the same, the touch screen substrate includes a base substrate, a light blocking pattern, a first sensing element and a first switching element. The light blocking pattern includes an inorganic layer formed on the base substrate and a light blocking layer formed on the inorganic layer, the light blocking layer transmitting an infrared light and absorbing a visible light. The first sensing element is formed on the light blocking pattern and senses the infrared light. The first switching element is electrically connected to the first sensing element. Thus, an undercut may be prevented from being formed at a lower portion of the light blocking pattern, and an adhesive strength between the light blocking pattern and the base substrate may be enhanced.
    • 在触摸屏基板及其制造方法中,触摸屏基板包括基底基板,遮光图案,第一感测元件和第一开关元件。 遮光图案包括形成在基底基板上的无机层和形成在无机层上的遮光层,遮光层透射红外光并吸收可见光。 第一感测元件形成在遮光图案上并感测红外光。 第一开关元件电连接到第一感测元件。 因此,可以防止在遮光图案的下部形成底切,并且可以提高遮光图案和基底基板之间的粘合强度。
    • 28. 发明授权
    • Thin film transistor array substrate for a display panel and a method for manufacturing a thin film transistor array substrate for a display panel
    • 用于显示面板的薄膜晶体管阵列基板和用于制造用于显示面板的薄膜晶体管阵列基板的方法
    • US08476633B2
    • 2013-07-02
    • US12560652
    • 2009-09-16
    • Hyeong-Suk YooHo-Jun LeeSung-ryul KimO-Sung SeoHong-Kee Chin
    • Hyeong-Suk YooHo-Jun LeeSung-ryul KimO-Sung SeoHong-Kee Chin
    • H01L29/786
    • H01L27/1288H01L27/1214H01L27/124H01L27/1248
    • A method of manufacturing a thin film transistor capable of simplifying a substrate structure and a manufacturing process is disclosed. The method of manufacturing a thin film transistor array substrate comprising a three mask process. The 3 mask process comprising, forming a gate pattern on a substrate, forming a gate insulating film on the substrate, forming a source/drain pattern and a semiconductor pattern on the substrate, forming a first, second, and third passivation film successively on the substrate. Over the above multi-layers of the passivation film forming a first photoresist pattern comprising a first portion formed on part of the drain electrode and on the pixel region, and a second portion wherein, the second portion thicker than the first portion, and then patterning the third passivation film using the first photoresist pattern, forming a second photoresist pattern by removing the first portion of the first photoresist pattern, forming a transparent electrode film on the substrate, removing the second photoresist pattern and the transparent electrode film disposed on the second photoresist pattern; and forming a transparent electrode pattern on the second passivation layer.
    • 公开了一种能够简化衬底结构和制造工艺的制造薄膜晶体管的方法。 制造包括三掩模工艺的薄膜晶体管阵列基板的方法。 3掩模工艺包括:在衬底上形成栅极图案,在衬底上形成栅极绝缘膜,在衬底上形成源极/漏极图案和半导体图案,在第一,第二和第三钝化膜上依次形成第一,第二和第三钝化膜 基质。 在上述多层钝化膜上形成第一光致抗蚀剂图案,该第一光致抗蚀剂图案包括形成在漏电极的一部分上和在像素区域上的第一部分,以及第二部分,其中第二部分比第一部分厚, 使用第一光致抗蚀剂图案的第三钝化膜,通过去除第一光致抗蚀剂图案的第一部分形成第二光致抗蚀剂图案,在基板上形成透明电极膜,去除第二光致抗蚀剂图案和设置在第二光致抗蚀剂上的透明电极膜 模式; 以及在所述第二钝化层上形成透明电极图案。