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    • 21. 发明授权
    • Process for the formation of a polycrystalline semiconductor film by
microwave plasma chemical vapor deposition method
    • 通过微波等离子体化学气相沉积法形成多晶半导体膜的工艺
    • US5192717A
    • 1993-03-09
    • US799900
    • 1991-12-02
    • Soichiro KawakamiMasahiro KanaiTakeshi Aoki
    • Soichiro KawakamiMasahiro KanaiTakeshi Aoki
    • H01L21/205
    • H01L21/02422H01L21/02521H01L21/02532H01L21/0262Y10S148/122
    • A process for forming a high quality polycrystalline semiconductor film on an insulating substrate which comprises using a MW-PCVD apparatus comprising a plasma generation chamber provided with a microwave introducing means and a film-forming chamber connected through a grid electrode to said plasma generation chamber, said film-forming chamber containing said insulating substrate positioned on a substrate holder made of a conductive material being installed therein, producing plasma by contacting a film-forming raw material gas with a microwave energy applied through said microwave introducing means in said plasma generation chamber and introducing said plasma into said film-forming chamber while applying a high frequency voltage with a frequency in the range of from 20 to 500 MHz between said grid electrode and said substrate holder to thereby cause the formation of said polycrystalline semiconductor film on said insulating substrate maintained at a desired temperature.
    • 一种用于在绝缘基板上形成高质量多晶半导体膜的方法,其包括使用包括具有微波引入装置的等离子体产生室和通过格栅电极连接到所述等离子体产生室的成膜室的MW-PCVD装置, 所述成膜室包含位于由导电材料制成的衬底保持器上的所述绝缘衬底,其安装在其中,通过使成膜原料气体与通过所述微波引入装置在所述等离子体产生室中施加的微波能量接触而产生等离子体;以及 将所述等离子体引入所述成膜室,同时在所述栅电极和所述衬底保持器之间施加频率范围为20-500MHz的高频电压,从而在所述绝缘衬底上形成所述多晶半导体膜保持 在期望的温度。
    • 30. 发明授权
    • Paper materials sorting apparatus
    • 纸料分选设备
    • US07708275B2
    • 2010-05-04
    • US11476734
    • 2006-06-29
    • Takeshi Aoki
    • Takeshi Aoki
    • B65H35/10
    • G07D11/0084G07D11/006
    • A paper materials sorting apparatus that includes note denomination discriminating mechanism for discriminating the paper materials based on note denominations of the paper materials, cassette assignment mechanism for assigning each of a plurality of wrapping devices and/or storage devices a note denomination, and a sorting mechanism for sorting the paper materials in accordance with their note denomination and for directing the sorted paper materials to the corresponding assigned wrapping devices and/or storage devices. The sorting mechanism further contains counting mechanism for counting throughput of the sorted paper materials into each of the assigned wrapping devices and/or storage devices, comparison mechanism for comparing the throughput of each of the assigned wrapping devices and/or storage devices, and an operation display for displaying a recommended operation to reassign the note denominations of the wrapping devices and/or storage devices in order to balance the sorting load among the wrapping devices and/or storage devices.
    • 一种纸材分类装置,其包括:纸币种类识别机构,用于基于纸材的纸币面值来辨别纸张材料,用于分配多个包装装置和/或存储装置中的每一个纸币分类的纸币分配机构和纸币分类机构 用于根据其纸币面额对纸张材料进行分类,以及将分类的纸张材料引导到相应的分配的包装装置和/或存储装置。 分拣机构还包括计数机构,用于将分拣的纸张材料的生产量计数到分配的包装装置和/或存储装置中的每一个中,用于比较每个分配的包装装置和/或存储装置的生产量的比较机构和操作 用于显示推荐操作以重新分配包装装置和/或存储装置的纸币面额,以平衡包装装置和/或存储装置之间的分类负载。