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21. 发明授权

US07023124B2 Micro-actuator array, micro-actuator device, optical switch, array, and optical switch system 有权
标题翻译：微致动器阵列，微执行器装置，光开关，阵列和光开关系统
公开(公告)号：US07023124B2
公开(公告)日：2006-04-04
申请号：US10724075
申请日：2003-12-01
申请人： Keiichi Akagawa
发明人： Keiichi Akagawa
IPC分类号： H02K1/00
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/3546 , G02B6/357 , G02B2006/12145 , H02N1/006
摘要： A microactuator array includes a plurality of first terminals equal in number to a first number, a plurality of second terminals equal in number to a second number, and a plurality of microactuators equal in number to the product of the first number and the second number. Each microactuator comprises a fixed electrode and a movable electrode which is movable with respect to the fixed electrode by electrostatic force. Each first terminal is electrically connected to fixed electrodes of microactuators equal in number to the second number. Each second terminal is electrically connected to movable electrodes of microactuators equal in number to the first number. The first terminals are not connected to any of the second terminals.
摘要翻译：微致动器阵列包括多个等于第一数量的多个第一端子，数量等于第二数量的多个第二端子以及与第一数量和第二数量的乘积相等的多个微致动器。每个微致动器包括可通过静电力相对于固定电极移动的固定电极和可动电极。每个第一端子电连接到数量等于第二数量的微致动器的固定电极。每个第二端子电连接到与第一数量相等的微型致动器的可移动电极。第一端子不连接到任何第二端子。

22. 发明授权

US06356305B1 Image-pickup apparatus and method for reading accumulated signal changes through transfer lines 失效
标题翻译：用于通过传输线读取累积信号变化的图像拾取装置和方法
公开(公告)号：US06356305B1
公开(公告)日：2002-03-12
申请号：US09016287
申请日：1998-01-30
申请人： Keiichi Akagawa
发明人： Keiichi Akagawa
IPC分类号： H04N5335
CPC分类号： H01L27/14843 , H04N5/3728
摘要： The present invention concerns an image-pickup apparatus and a method for driving the same, adapted for reading signal charges accumulated in a plurality of photodetection portions provided on a predetermined plane through vertical transfer lines and a horizontal transfer line. The image-pickup apparatus has the structure for establishing potential wells having a length not smaller than a vertical width of a horizontal line, in the vertical transfer lines, thereby permitting the horizontal width of the vertical transfer lines to be decreased. Since the image-pickup apparatus has the structure for establishing the plurality of potential wells having signal charges in the vertical transfer lines at a predetermined time, the signal charges can be transferred efficiently with keeping low driving speed of the vertical transfer lines.
摘要翻译：本发明涉及一种摄像装置及其驱动方法，适用于通过垂直传输线和水平传送线读取累积在设置在预定平面上的多个光检测部分中的信号电荷。图像拾取装置具有用于在垂直传输线中建立具有不小于水平线的垂直宽度的长度的势阱的结构，从而允许垂直传输线的水平宽度减小。由于图像拾取装置具有在预定时间内在垂直传输线中建立具有信号电荷的多个势阱的结构，所以可以在保持垂直传输线的低驱动速度的情况下有效地传送信号电荷。

23. 发明授权

US5569938A Imaging Apparatus with light pulses 失效
标题翻译：具有光脉冲的成像装置
公开(公告)号：US5569938A
公开(公告)日：1996-10-29
申请号：US213424
申请日：1994-03-15
申请人： Masahiro Shoda , Keiichi Akagawa
发明人： Masahiro Shoda , Keiichi Akagawa
IPC分类号： H01L27/148 , H01L27/15 , H01L31/12 , H01L33/00
CPC分类号： H01L27/14831
摘要： In an imaging apparatus using a semiconductor imaging device formed of CCDs, light from an object to be imaged is fed to the imaging device selectively by the operation of a light generator. Charges produced by photoelectric conversion elements of the imaging device are read out as an image signal. A control apparatus operates on the light generator and imaging device so that at least one light pulse is fed to the imaging device within one imaging period in which charges are read out of the photoelectric conversion elements to produce an image field. The resulting image signal does not include image fields that have been produced without illumination, and image fields based on a uniform illumination can be obtained.
摘要翻译：在使用由CCD形成的半导体成像装置的成像装置中，来自被成像物体的光通过光发生器的操作选择性地供给到成像装置。读出成像装置的光电转换元件产生的电荷作为图像信号。控制装置对光发生器和成像装置进行操作，使得在从光电转换元件读出电荷以产生图像场的一个成像周期内至少一个光脉冲被馈送到成像装置。所得到的图像信号不包括没有照明而产生的图像场，并且可以获得基于均匀照明的图像场。

24. 发明授权

US5205870A Vapor deposition apparatus 失效
标题翻译：蒸镀装置
公开(公告)号：US5205870A
公开(公告)日：1993-04-27
申请号：US890145
申请日：1992-05-29
申请人： Yuusuke Sato , Akio Ui , Keiichi Akagawa , Toshimitsu Ohmine
发明人： Yuusuke Sato , Akio Ui , Keiichi Akagawa , Toshimitsu Ohmine
IPC分类号： H01L21/205 , C23C16/48
CPC分类号： C23C16/483
摘要： An argon (Ar.sup.+) laser has a resonator. A reaction chamber is integrally formed in the resonator. A voltage is applied to electrodes, which discharge electricity to excite argon atoms in the resonator to produce a laser beam. The laser beam is continuously oscillated between total reflection mirrors disposed at opposite ends of the resonator. A substrate is disposed in the reaction chamber into which a material gas is introduced. The material gas absorbs the laser beam, to decompose and deposit as a thin film over the substrate.
摘要翻译：氩（Ar +）激光器具有谐振器。在谐振器中一体地形成反应室。电压被施加到电极，其放电以激发谐振器中的氩原子以产生激光束。激光束在设置在谐振器的相对端的全反射镜之间连续振荡。基板被设置在反应室中，材料气体被引入到该反应室中。材料气体吸收激光束，在衬底上分解和沉积成薄膜。

25. 发明授权

US5151133A Vapor deposition apparatus 失效
标题翻译：蒸镀装置
公开(公告)号：US5151133A
公开(公告)日：1992-09-29
申请号：US639182
申请日：1991-01-09
申请人： Toshimitsu Ohmine , Keiichi Akagawa , Akira Ishihata
发明人： Toshimitsu Ohmine , Keiichi Akagawa , Akira Ishihata
IPC分类号： C23C16/458
CPC分类号： C23C16/4588
摘要： A vapor deposition apparatus for forming thin films on substrates with reactive gases, by rotating and revolving the substrates while heating the substrates in a reactor vessel, comprises a hollow susceptor carrier rotatably disposed inside the reactor vessel, susceptors rotatably disposed on the susceptor carrier to hold the substrates respectively, a driving motor for rotating the susceptor carrier such that the substrates held by the susceptors are revolved with respect to the reactor vessel, and a converting mechanism for converting a rotation motion of the susceptor carrier rotated by the driving motor into a motion for rotating the susceptors together with the substrates around themselves. The converting mechanism is disposed within the hollow of the susceptor carrier.
摘要翻译：一种用于在具有反应气体的基板上形成薄膜的气相沉积设备，通过在反应器容器中加热基板的同时旋转和旋转基板，包括可旋转地设置在反应器容器内的中空基座托架，可旋转地设置在基座托架上的托架所述基板分别用于使所述基座托架旋转使得由所述基座保持的基板相对于所述反应堆容器旋转的驱动马达和用于将由所述驱动马达旋转的所述基座托架的旋转运动转换为运动的转换机构用于使基座与其周围的基板一起旋转。转换机构设置在基座托架的中空部内。

26. 发明授权

US5088444A Vapor deposition system 失效
标题翻译：蒸气沉积系统
公开(公告)号：US5088444A
公开(公告)日：1992-02-18
申请号：US487188
申请日：1990-03-01
申请人： Toshimitsu Ohmine , Keiichi Akagawa
发明人： Toshimitsu Ohmine , Keiichi Akagawa
IPC分类号： C23C16/54 , H01L21/677
CPC分类号： H01L21/67748 , C23C16/54
摘要： A vapor deposition system deposits a semiconductor film on a substrate. The system comprises a susceptor on which the substrate is positioned, and a reactor tube in which the susceptor having the substrate is positioned and the semiconductor film is deposited on the substrate. The reactor tube is composed of two parts to be fitted to and separated from each other. An airtight vessel airtightly covers the reactor tube. The system further comprises a mover for moving at least one of the two parts of the reactor tube relative to the other part, thereby fitting and separating the two parts to and from each other. A carrying device is provided for the system to carry the susceptor having the substrate from the airtight vessel into the reactor tube through an opening to be opened by separating the two parts of the reactor tube from each other, and to carry the susceptor from the reactor tube to the airtight vessel through the opening.
摘要翻译：蒸镀系统将半导体膜沉积在基板上。该系统包括其上定位有基底的感受体，以及反应器管，其中具有基底的基座被定位并且半导体膜沉积在基底上。反应器管由两部分组成，以便彼此装配和分离。气密的船舶气密地覆盖反应管。该系统还包括用于相对于另一部分移动反应器管的两个部分中的至少一个的移动器，从而将两个部件彼此配合和分离。提供了一种承载装置，用于将具有基材的基座从气密容器通过打开的开口携带到反应器管中，该开口通过将反应器管的两个部分彼此分离，并将基座从反应器通过开口管到气密的容器。

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