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    • 24. 发明授权
    • Three-dimensional scanning probe microscope
    • 三维扫描探针显微镜
    • US06215121B1
    • 2001-04-10
    • US09124128
    • 1998-07-29
    • Masamichi FujihiraMasatoshi YasutakeTatsuya MiyataniToshihiko SakuharaKazutoshi Watanabe
    • Masamichi FujihiraMasatoshi YasutakeTatsuya MiyataniToshihiko SakuharaKazutoshi Watanabe
    • G01N1316
    • G01Q60/32Y10S977/851
    • A signal having a resonant frequency of a cantilever is output by a first oscillator, and supplied to a vibrating element and a control unit to oscillate a probe. A low frequency signal having a large amplitude is output by a second oscillator and supplied to a piezoelectric scanning apparatus. The probe is periodically and relatively moved with respect to the sample between a position where the sample surface is penetrated by the probe and another position where the probe does not penetrate the sample surface and is outside the range of atomic forces caused by the sample. During this movement, the probe movement may be analyzed to obtain a plurality of physical characteristics about the sample, e.g., hardness information of the sample, surface shape information, information related to an adsorption layer of the sample, and information related to physical qualities (for example, electromagnetic field, adsorption force, surface reaction force, electric double layer force in fluid) irradiated from the sample surface along a depth direction.
    • 具有悬臂的共振频率的信号由第一振荡器输出,并被提供给振动元件和控制单元以使探头振荡。 具有大振幅的低频信号由第二振荡器输出并提供给压电扫描装置。 探针在样品表面被探针穿透的位置与探针不穿透样品表面的另一个位置之间相对于样品周期性地相对移动并且处于由样品引起的原子力范围之外。 在该移动期间,可以分析探针运动以获得关于样品的多个物理特性,例如样品的硬度信息,表面形状信息,与样品的吸附层相关的信息,以及与物理性质相关的信息( 例如从样品表面沿着深度方向照射的电磁场,吸附力,表面反作用力,流体中的双电层力)。