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21. 发明授权

US07115892B2 Method and its apparatus for inspecting particles or defects of a semiconductor device 有权
公开(公告)号：US07115892B2
公开(公告)日：2006-10-03
申请号：US11302847
申请日：2005-12-13
申请人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
发明人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
IPC分类号： G01N21/88
CPC分类号： G01N21/4738 , G01N21/8806 , G01N21/93 , G01N21/94 , G01N21/9501 , G01N2015/1486 , G01N2015/1493
摘要： Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.

22. 发明申请

US20060194938A1 Process for production of uv-curable liquid polyurethane resin 失效
标题翻译：紫外可固化液体聚氨酯树脂的生产工艺
公开(公告)号：US20060194938A1
公开(公告)日：2006-08-31
申请号：US10552236
申请日：2004-04-07
申请人： Tetsuya Watanabe , Takashi Chiba , Shuzo Yamada
发明人： Tetsuya Watanabe , Takashi Chiba , Shuzo Yamada
IPC分类号： C08G18/00
CPC分类号： H04N5/782 , C08F290/067 , C08G18/672 , C09D175/16 , H04N7/0887 , H04N21/235 , H04N21/4147 , H04N21/435 , H04N21/4383 , H04N21/462 , H04N21/47214 , C08G18/6644
摘要： (A) a polycarbonatediol, (B) a trifunctional alcohol, and (C) a diisocyanate are subjected to reaction in the presence of (D) a (meth)acrylate compound represented by the general formula CH2═CRCO(OCnH2n)pR′ or CH2═CRCO(OCmH2m)qOCOCH═CH2, and (E) a di(meth)acrylate compound of alkylene glycol whose alkylene group is substituted as a lower alkyl group, and then (F) a hydroxyl group-containing (meth)acrylate is added to the resulting solution of urethane oligomers in (meth)acrylate to conduct terminal (meth)acrylating reaction of the urethane oligomers, thereby producing a UV-curable liquid polyurethane resin having a viscosity (25° C.) of preferably 150,000-1,000,000 mPa·s, where before or after the terminal (meth)acrylating reaction of the urethane oligomers (G) a photopolymerization initiator and (H) a hindered phenol-based antioxidant having a molecular weight of 500-2,000 are added thereto to form the UV-curable liquid polyurethane resin. The TV-curable liquid polyurethane resin can produce HDD gaskets, etc. in a cross-sectional shape with a good sealability by an automatic coating robot efficiently.
摘要翻译：（A）聚碳酸酯二醇，（B）三官能醇和（C）二异氰酸酯在（D）由通式CH 2（2）表示的（甲基）丙烯酸酯化合物的存在下进行反应， -CRCO（OC n H 2n）R'或CH 2 -CRCO（OC m）（E）二（甲基）丙烯酸亚烷基二醇的二（甲基）丙烯酸酯化合物，其亚烷基取代为低级烷基，然后向（甲基）丙烯酸酯中的氨基甲酸酯低聚物溶液中加入（F）含羟基的（甲基）丙烯酸酯，进行氨基甲酸酯低聚物的末端（甲基）丙烯酸酯化反应，从而生产粘度（25℃）优选为150,000-1,000,000mPa.s的UV可固化液体聚氨酯树脂，其中在氨基甲酸酯低聚物（G）为光聚合引发剂的末端（甲基）丙烯酸酯化反应之前或之后，和 H）分子量为500〜2000的受阻酚系抗氧化剂以形成UV可固化液体聚氨酯树脂。电视可固化液体聚氨酯树脂可以通过自动涂布机器人有效地生产具有良好密封性的横截面形状的HDD垫片等。

23. 发明授权

US07098055B2 Apparatus and method for testing defects 失效
公开(公告)号：US07098055B2
公开(公告)日：2006-08-29
申请号：US11244078
申请日：2005-10-06
申请人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
发明人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
IPC分类号： H01L21/66 , G01R31/26
CPC分类号： B82Y15/00 , G01N21/94 , G01N21/95623 , G01N21/95684 , G01N2021/8822 , G01R31/308 , H01J37/00 , H01J2237/022 , H01J2237/0225 , H01L21/67253 , H01L21/67288 , H01L21/681 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A defect inspection method includes radiating an illumination slit-shaped beam having lights substantially parallel to a longitudinal direction to a substrate having circuit patterns in a direction inclined at a predetermined gradient relative to the direction of a line normal to the substrate and inclined at a predetermined gradient on a surface with respect to a group of main straight lines of the circuit patterns with its longitudinal direction oriented almost perpendicularly to a direction of a movement of the substrate. Scattered light reflected by a defect such as a foreign particle existing on the illuminated substrate is received and converted into a detection signal by using an image sensor, and defect judging is effected of an extracted a signal indicating a defect such as a foreign particle on the basis of the detection signal output.

24. 发明申请

US20060170052A1 Semiconductor device, method of manufacture thereof and semiconductor integrated circuit 有权
标题翻译：半导体装置及其制造方法以及半导体集成电路
公开(公告)号：US20060170052A1
公开(公告)日：2006-08-03
申请号：US11336874
申请日：2006-01-23
申请人： Toshiki Kanamoto , Masumi Yoshida , Tetsuya Watanabe , Takashi Ippoushi
发明人： Toshiki Kanamoto , Masumi Yoshida , Tetsuya Watanabe , Takashi Ippoushi
IPC分类号： H01L27/12
CPC分类号： H01L21/76281 , H01L21/761 , H01L21/84 , H01L27/0207 , H01L27/11807 , H01L27/1203
摘要： An FTI structure is employed in an isolation region making contact in a Y direction with a P-type impurity region serving as a drain region of a PMOS transistor. First, second and third N-type impurity layers serving as body regions are connected to a high potential line via fourth, fifth and sixth N-type impurity layers, respectively, and further via a seventh N-type impurity layer. The fourth to sixth N-type impurity layers are provided between an insulating layer of an SOI substrate and an element isolation insulating film in a PTI region.
摘要翻译：在与用作PMOS晶体管的漏极区域的P型杂质区域在Y方向上接触的隔离区域中采用FTI结构。首先，用作体区的第二和第三N型杂质层分别经由第四，第五和第六N型杂质层连接到高电位线，并且还经由第七N型杂质层连接。第四至第六N型杂质层设置在SOI衬底的绝缘层和PTI区域中的元件隔离绝缘膜之间。

25. 发明授权

US07040852B2 Robot arm mechanism and robot apparatus 有权
公开(公告)号：US07040852B2
公开(公告)日：2006-05-09
申请号：US10421834
申请日：2003-04-24
申请人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno
发明人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno
IPC分类号： B25J18/00
CPC分类号： B25J9/1065 , H01L21/67739 , Y10S414/13 , Y10T74/20329
摘要： Herein disclosed is a robot arm mechanism comprising: a first handling member for supporting and handling a first object; a second handling member for supporting and handling a second object; a first robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, and the second end portion of the second arm link being connected to the first handling member to allow the first handling member to support the first object in a stable condition; a second robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, the second arm link being inclined with respect to the second arm link of the first robot arm at a preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm, and the second end portion of the second arm link being connected to the second handling member to allow the second handling member to support the second object in a stable condition; a robot arm moving mechanism for allowing one of the first arm links and of the first and second robot arms to be angularly moved with respect to the other of the first arm links of the first and second robot arms; and an angle keeping mechanism for keeping substantially fixed the preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm as one of the first arm links of the first and second robot arms is angularly moved with respect to the other of the first arm links of the first and second robot arms.

26. 发明授权

US07011875B2 Optical information-recording medium and dye 失效
标题翻译：光学信息记录介质和染料
公开(公告)号：US07011875B2
公开(公告)日：2006-03-14
申请号：US10826254
申请日：2004-04-19
申请人： Tetsuya Watanabe , Masatomi Sen , Hisashi Mikoshiba
发明人： Tetsuya Watanabe , Masatomi Sen , Hisashi Mikoshiba
IPC分类号： B32B3/02
CPC分类号： G11B7/2467 , B32B27/18 , C09B31/153 , C09B45/00 , G11B7/245 , G11B7/246 , G11B7/2472 , G11B7/2478 , G11B7/248 , G11B7/249 , G11B7/2531 , G11B7/2533 , G11B7/2534 , G11B7/2535 , G11B7/2542 , G11B7/2548 , G11B7/256 , G11B7/259 , G11B2007/24612 , G11B2007/25417 , Y10T428/21
摘要： The present invention provides an optical information-recording medium capable of recording and reproducing information with laser beams and having excellent recording characteristics, the optical information-recording medium comprising a support and a recording layer capable of recording information by laser beam exposure, wherein the recording layer contains a dye represented by the following formula (I): wherein R1, R2, R3 and R4 each independently represents a hydrogen atom or a substituent; B1 and B2 represent ═CR5— and —CR6═ respectively, or one of B1 and B2 represents a nitrogen atom and the other represents ═CR5— or —CR6═; R5 and R6 each independently represents a hydrogen atom or a substituent; Q1 represents a substituted or unsubstituted arylene group, or a substituted or unsubstituted divalent heterocyclic group; and Q2 represents a substituted or unsubstituted aryl group, or a substituted or unsubstituted heterocyclic group.
摘要翻译：本发明提供一种能够利用激光束记录和再现信息并且具有优异的记录特性的光学信息记录介质，该光学信息记录介质包括支持体和能够通过激光束曝光来记录信息的记录层，其中记录层包含由下式（I）表示的染料：其中R 1，R 2，R 3和R 4，各自独立地表示氢原子或取代基; B 1和B 2分别代表-CR 5和-CR 6，或者B <！ - SIPO 1和B 2表示氮原子，另一个表示-CR 5或-CR 6 - 。 R 5和R 6各自独立地表示氢原子或取代基; Q 1表示取代或未取代的亚芳基或取代或未取代的二价杂环基; 和Q 2表示取代或未取代的芳基或取代或未取代的杂环基。

27. 发明授权

US07001139B2 Robot arm mechanism 有权
公开(公告)号：US07001139B2
公开(公告)日：2006-02-21
申请号：US10308122
申请日：2002-12-03
申请人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno
发明人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno
IPC分类号： B25J18/04
CPC分类号： B25J9/1065 , Y10S414/13 , Y10T74/20329
摘要： Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the second arm link mechanism, and a link retaining mechanism for pivotably retaining the first arm link mechanism and the second arm link mechanism, in which a third arm link and a fourth arm link of the first arm link mechanism are kept forward in a first rotation direction, in which the first arm link mechanism and the second arm link mechanism are extended, thereby enabling to prevent the quadric crank chain constituting the robot arm mechanism from being flattened out while the first arm link mechanism and the second arm link mechanism are extended, and improving resistance to deformation, in comparison with the conventional robot arm mechanism.

28. 发明授权

US06597448B1 Apparatus and method of inspecting foreign particle or defect on a sample 有权
标题翻译：检查样品上的异物或缺陷的装置和方法
公开(公告)号：US06597448B1
公开(公告)日：2003-07-22
申请号：US09644069
申请日：2000-08-23
申请人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ohshima , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yuko Inoue , Keiichi Saiki , Kenji Watanabe
发明人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ohshima , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yuko Inoue , Keiichi Saiki , Kenji Watanabe
IPC分类号： G01N2188
CPC分类号： G01N21/898
摘要： A system and method of inspecting a foreign particle or a defect on a sample are provided. Such a method comprises irradiating light to an object to be inspected; detecting reflected light or scattered light from the object to be inspected irradiated with the light; detecting a signal of the foreign particle or the defect from the detected signal; providing information related to a size of the foreign particle or the defect from the signal of the detected foreign particle or the defect; and outputting information on a display screen a distribution of the size of the foreign particle or defect with information indicating a cause of the distribution of the foreign particle or defect.
摘要翻译：提供了检查样品上的外来颗粒或缺陷的系统和方法。这种方法包括将光照射到被检测物体上; 检测来自被检查物体的反射光或散射光用光照射; 从检测到的信号中检测外来粒子或缺陷的信号; 从检测到的异物或缺陷的信号提供与异物或缺陷的尺寸有关的信息; 并且在显示屏幕上输出外来粒子或缺陷的大小的分布，其中指示出异物或缺陷的分布原因的信息。

29. 发明授权

US06463734B1 Exhaust emission control device of internal combustion engine 有权
公开(公告)号：US06463734B1
公开(公告)日：2002-10-15
申请号：US09651653
申请日：2000-08-30
申请人： Yasuki Tamura , Osamu Nakayama , Tetsuya Watanabe , Kazuhito Kawashima
发明人： Yasuki Tamura , Osamu Nakayama , Tetsuya Watanabe , Kazuhito Kawashima
IPC分类号： F01N300
CPC分类号： F01N3/0842 , F01N3/0814 , F01N3/101 , F01N11/00 , F01N11/002 , F01N13/009 , F01N13/0093 , F01N13/0097 , F01N2550/02 , F01N2550/03 , F01N2560/026 , F02D41/0235 , F02D41/0275 , F02D41/1446 , F02D2200/0804 , Y02T10/22 , Y02T10/47
摘要： An exhaust emission control device of an internal combustion engine, which purifies exhaust gas exhausted from the internal combustion engine, comprises: a catalyst device composed of a three way catalyst for purifying harmful substance in the exhaust gas when an exhaust air-fuel ratio is substantially stoichiometrical and an NOx catalyst having a function of absorbing NOx in the exhaust gas when the air-fuel ratio is closer to a lean air-fuel ratio than to the stoichiometrical air-fuel ratio, the catalyst device being provided in an exhaust passage of the internal combustion engine; catalyst deterioration determination means for determining deterioration state of the catalyst device, the deterioration resulting from at least temperature; and control means for deteriorating exhaust gas components flowing into the catalyst device much more than exhaust gas components flowing into the catalyst device when an air-fuel ratio of a mixture supplied to the internal combustion engine is substantially stoichiometrical, if the catalyst deterioration determination means determines that the catalyst device is in a predetermined deterioration state. The deterioration of an NOx absorbing function of the NOx catalyst results from at least the destabilization of absorbing material in the NOx catalyst, which is caused by the rise in the temperature. Thus, if the catalyst deterioration determination means determines that the catalyst device is in the predetermined deterioration state, the exhaust gas components flowing into the catalyst device are deteriorated much more than the exhaust gas components flowing into the catalyst device when the air-fuel ratio of the mixture supplied to the internal combustion engine is substantially stoichiometrical. Therefore, CO, H2, NOx, O2, THC and the like are supplied to the absorbing material to thereby stabilize the absorbing material as carbonate, nitrite or acid oxide. This prevents the heat deterioration. This extends a heat-resisting life of the catalyst device, and prevents the deterioration of an exhaust gas characteristic and the increase in cost.

30. 发明授权

US06427300B2 Yarn relaxation-heating method and apparatus therefor 失效
标题翻译：纱线松弛加热方法及其装置
公开(公告)号：US06427300B2
公开(公告)日：2002-08-06
申请号：US09813388
申请日：2001-03-21
申请人： Shunzo Naito , Takashi Ikeuchi , Tetsuya Watanabe
发明人： Shunzo Naito , Takashi Ikeuchi , Tetsuya Watanabe
IPC分类号： D02J122
CPC分类号： D02J13/005 , D02G1/0266 , D02G1/20 , D02J1/22
摘要： In a relaxation-heating method and an apparatus therefor, relaxation-heating is performed by a heating apparatus which is provided between a yarn supply roller (5) and a take-up roller (7) having a speed lower than that of the supply roller (5) and which is constituted by a heating roller (6a) and an auxiliary bobbin (6b). In the relaxation-heating method and an apparatus therefor, the size is compact, the heat conductivity is high and yarn can be made to run at a high speed.
摘要翻译：在松弛加热方法及其装置中，通过设置在供给辊（5）和卷取辊（7）之间的加热装置进行松弛加热，所述卷取辊（7）的速度比供给辊的速度低（5），由加热辊（6a）和辅助筒管（6b）构成。在松弛加热方法及其装置中，尺寸紧凑，导热性高，纱线可以高速运转。

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