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21. 发明授权

US06479311B1 Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning 有权
标题翻译：用预制图案化制造微机械和微机电结构的方法
公开(公告)号：US06479311B1
公开(公告)日：2002-11-12
申请号：US09724506
申请日：2000-11-27
申请人： Bruce R. Scharf , Joel A. Kubby , Jingkuang Chen , Peter M. Gulvin , Chuang-Chia Lin , Alex T. Tran
发明人： Bruce R. Scharf , Joel A. Kubby , Jingkuang Chen , Peter M. Gulvin , Chuang-Chia Lin , Alex T. Tran
IPC分类号： H01L2100
CPC分类号： B81C1/00666 , B81B2201/047 , B81B2203/0118
摘要： The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a pattern on a single crystal silicon layer separated by an insulator layer from a substrate layer; defining a structure in the single-crystal silicon layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; and releasing the formed structure.
摘要翻译：本发明提供一种微机械或微机电结构。该结构通过一种工艺制造，该方法包括在由绝缘体层与衬底层隔开的单晶硅层上限定图案; 限定单晶硅层中的结构; 沉积和蚀刻单晶硅层上的多晶硅层，其余的聚硅氧烷形成该结构的机械或光学元件; 并释放形成的结构。

22. 发明授权

US06467879B1 Method and apparatus for preventing degradation of electrostatically actuated devices 有权
标题翻译：防止静电驱动装置退化的方法和装置
公开(公告)号：US06467879B1
公开(公告)日：2002-10-22
申请号：US09687096
申请日：2000-10-16
申请人： Joel A. Kubby , Elliott A. Eklund , Peter M. Gulvin
发明人： Joel A. Kubby , Elliott A. Eklund , Peter M. Gulvin
IPC分类号： B41J204
CPC分类号： F04B43/043 , B41J2/14314 , B81B3/0051 , B81B2201/036 , B81B2201/045 , B81B2201/052 , B81B2203/0127 , B81B2203/053
摘要： A micro-electromechanical fluid ejector having an inner structure on the bottom of the top of the membrane for isolating the conductor, and an outer structure, away from the center of the membrane, on the bottom of the top of the membrane to stop excessive flexing of the membrane leading to inter-electrode contact.
摘要翻译：微机电流体喷射器，其在膜的顶部底部具有用于隔离导体的内部结构，以及远离膜的中心的外部结构，位于膜的顶部的底部以阻止过度弯曲的膜导致电极间接触。

23. 发明授权

US08210690B2 Method of projecting image with tunable individually-addressable fabry-perot filters 有权
标题翻译：使用可调谐的单独寻址的法布里 - 珀罗滤镜投影图像的方法
公开(公告)号：US08210690B2
公开(公告)日：2012-07-03
申请号：US12568074
申请日：2009-09-28
申请人： Peter M. Gulvin , Lalit K. Mestha , Yao Rong Wang , Pinyen Lin
发明人： Peter M. Gulvin , Lalit K. Mestha , Yao Rong Wang , Pinyen Lin
IPC分类号： G03B21/14 , G03B21/60 , G02B5/22 , G01J3/45 , G01B9/02
CPC分类号： G02B26/001 , G02B3/0062 , G03B21/005 , G03B21/14 , G09G3/001 , G09G3/2018 , G09G3/3466
摘要： A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.
摘要翻译：投影系统包括：显示装置，包括多个可调的法布里 - 珀罗滤光器，每个滤光器被配置为在滤光器在电磁光谱的可见光范围内的带宽中透射辐射的状态和滤波器在电磁光谱的可见范围之外的带宽内传输辐射。照明器向多个法布里 - 珀罗滤光器提供光。控制系统接收图像数据并控制显示装置将图像投影到相关联的显示表面上。该控制系统包括调制器，该调制器向多个法布里 - 珀罗滤波器提供波长调制信号，以调制图像中的像素的颜色，并使选定的法布里 - 珀罗滤波器转移到可见光范围之外的带宽中，以调制图像中像素的亮度。

24. 发明授权

US07561133B2 System and methods of device independent display using tunable individually-addressable fabry-perot membranes 失效
标题翻译：使用可调谐单独寻址的fabry-perot膜进行设备独立显示的系统和方法
公开(公告)号：US07561133B2
公开(公告)日：2009-07-14
申请号：US11319395
申请日：2005-12-29
申请人： Lalit K. Mestha , Peter M. Gulvin , Pinyen Lin , Yao Rong Wang
发明人： Lalit K. Mestha , Peter M. Gulvin , Pinyen Lin , Yao Rong Wang
IPC分类号： G09G3/36
CPC分类号： G02B26/001 , G03B21/005
摘要： An apparatus may include an illuminator, a controller, a display panel, a modulator, and a plurality of Fabry-Perot cavities. The plurality of Fabry-Perot cavities generated an image from light provided by the illuminator, each pixel of the image corresponding to a respective one of the plurality of Fabry-Perot cavities. The controller controls the modulator to provide image modulation data to the plurality of Fabry-Perot cavities for generating the image, the modulator providing color information to a first cavity of the plurality of Fabry-Perot cavities for setting a size of the first cavity to correspond to a color of a first pixel of the image, the modulator providing gray level information to the first cavity for time-division multiplexing to correspond to a gray level of the first pixel. The display panel display pixels of the generated image based on colors and gray levels of each pixel of the generated image.
摘要翻译：装置可以包括照明器，控制器，显示面板，调制器和多个法布里 - 珀罗腔。多个法布里 - 珀罗腔由照明器提供的光产生图像，图像的每个像素对应于多个法布里 - 珀罗腔中的相应一个。所述控制器控制所述调制器以向所述多个法布里 - 珀罗腔提供图像调制数据以产生图像，所述调制器向所述多个法布里 - 珀罗腔中的第一空腔提供颜色信息，用于将所述第一腔的尺寸设定为对应对于图像的第一像素的颜色，调制器向第一腔提供灰度信息用于时分复用以对应于第一像素的灰度级。显示面板基于生成图像的每个像素的颜色和灰度等级来显示生成的图像的像素。

25. 发明申请

US20100007939A1 METHOD OF PROJECTING IMAGE WITH TUNABLE INDIVIDUALLY-ADDRESSABLE FABRY-PEROT FILTERS 有权
标题翻译：投影图像的方法可以使用可调式个性化的FABRY-PEROT过滤器
公开(公告)号：US20100007939A1
公开(公告)日：2010-01-14
申请号：US12568074
申请日：2009-09-28
申请人： Peter M. Gulvin , Lalit K. Mestha , Yao Rong Wang , Pinyen Lin
发明人： Peter M. Gulvin , Lalit K. Mestha , Yao Rong Wang , Pinyen Lin
IPC分类号： G02B26/00 , G03B21/00
CPC分类号： G02B26/001 , G02B3/0062 , G03B21/005 , G03B21/14 , G09G3/001 , G09G3/2018 , G09G3/3466
摘要： A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.
摘要翻译：投影系统包括：显示装置，包括多个可调的法布里 - 珀罗滤光器，每个滤光器被配置为在滤光器在电磁光谱的可见光范围内的带宽中透射辐射的状态和滤波器在电磁光谱的可见范围之外的带宽内传输辐射。照明器向多个法布里 - 珀罗滤光器提供光。控制系统接收图像数据并控制显示装置将图像投影到相关联的显示表面上。该控制系统包括调制器，该调制器向多个法布里 - 珀罗滤波器提供波长调制信号，以调制图像中的像素的颜色，并使选定的法布里 - 珀罗滤波器转移到可见光范围之外的带宽中，以调制图像中像素的亮度。

26. 发明授权

US07628493B2 Projector based on tunable individually-addressable Fabry-Perot filters 失效
标题翻译：基于可调谐单独寻址的法布里 - 珀罗滤镜的投影机
公开(公告)号：US07628493B2
公开(公告)日：2009-12-08
申请号：US11405941
申请日：2006-04-18
申请人： Peter M. Gulvin , Lalit K. Mestha , Yao Rong Wang , Pinyen Lin
发明人： Peter M. Gulvin , Lalit K. Mestha , Yao Rong Wang , Pinyen Lin
IPC分类号： G03B21/14 , G03B21/00 , G03B21/60 , G02B5/30 , G02B27/28 , G02B5/22 , G01J3/45 , G01B9/02
CPC分类号： G02B26/001 , G02B3/0062 , G03B21/005 , G03B21/14 , G09G3/001 , G09G3/2018 , G09G3/3466
摘要： A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.
摘要翻译：投影系统包括：显示装置，包括多个可调的法布里 - 珀罗滤光器，每个滤光器被配置为在滤光器在电磁光谱的可见光范围内的带宽中透射辐射的状态和滤波器在电磁光谱的可见范围之外的带宽内传输辐射。照明器向多个法布里 - 珀罗滤光器提供光。控制系统接收图像数据并控制显示装置将图像投影到相关联的显示表面上。该控制系统包括调制器，该调制器向多个法布里 - 珀罗滤波器提供波长调制信号，以调制图像中的像素的颜色，并使所选择的法布里 - 珀罗滤波器中的一个转换到可见光范围之外的带宽，以调制图像中像素的亮度。

27. 发明授权

US07623278B2 MEMS Fabry-Perot inline color scanner for printing applications using stationary membranes 有权
标题翻译： MEMS法布里 - 珀罗在线彩色扫描仪，用于使用固定膜打印应用
公开(公告)号：US07623278B2
公开(公告)日：2009-11-24
申请号：US11535382
申请日：2006-09-26
申请人： Lalit K. Mestha , Peter M. Gulvin , Pinyen Lin , Yao Rong Wang
发明人： Lalit K. Mestha , Peter M. Gulvin , Pinyen Lin , Yao Rong Wang
IPC分类号： H04N1/46 , G06K15/00 , G01D18/00 , G06K9/00
CPC分类号： H04N1/46 , G01J1/4223 , G01J3/02 , G01J3/0256 , G01J3/0264 , G01J3/0291 , G01J3/26 , G01J3/2803 , G01J3/36 , G01J3/50 , G01J3/51 , G01J3/513 , G01J3/52 , G01J3/524 , H04N1/6033
摘要： A Micro-Electro-Mechanical System (MEMS) based Fabry-Perot array may be used as a spectral filter to light sensing array, such as a CCD or CMOS photodetector. Applying different voltages to the electrodes of individual Fabry-Perot cells within the array allows a gradient in the Fabry-Perot air gap across the Fabry-Perot array. In this manner the MEMS Fabry-Perot array serves as a spectral filter of light passing through the Fabry-Perot array to the photodetector array. Embodiments of the disclosed sensor, used with LEDs that emit light outside the photosensitivity range of a photoreceptor belt, may be used to measure spectral information from toned patches placed upon a photoreceptor belt within a marking system. Other embodiments of the disclosed sensor, used with LEDs that emit light of any wavelength, may be used to measure spectral information from toned patches placed by a marking system upon a non-photosensitive output substrate, such as an intermediate belt or paper.
摘要翻译：基于微机电系统（MEMS）的法布里 - 珀罗阵列可用作光传感阵列的光谱滤波器，例如CCD或CMOS光电探测器。对阵列中的单个法布里 - 珀罗细胞的电极施加不同的电压允许跨法布里 - 珀罗阵列的法布里 - 珀罗气隙的梯度。以这种方式，MEMS法布里 - 珀罗阵列用作通过法布里 - 珀罗阵列到光电检测器阵列的光的光谱滤波器。所公开的传感器的实施例，与在感光带的光敏度范围外发出光的LED一起使用，可用于测量放置在标记系统内的感光带上的调色片的光谱信息。与发射任何波长的光一起使用的所公开的传感器的其它实施例可用于测量由标记系统放置在非光敏输出基底（例如中间带或纸）上的调色贴片的光谱信息。

28. 发明申请

US20080080027A1 ARRAY BASED SENSOR TO MEASURE SINGLE SEPARATION OR MIXED COLOR (OR IOI) PATCHES ON THE PHOTORECEPTOR USING MEMS BASED HYPERSPECTRAL IMAGING TECHNOLOGY 有权
标题翻译：基于阵列的传感器，使用基于MEMS的超分辨率成像技术测量光电元件上的单分离或混合色彩（或IOI）
公开(公告)号：US20080080027A1
公开(公告)日：2008-04-03
申请号：US11535400
申请日：2006-09-26
申请人： Lalit K. Mestha , Peter M. Gulvin , Pinyen Lin , Yao Rong Wang
发明人： Lalit K. Mestha , Peter M. Gulvin , Pinyen Lin , Yao Rong Wang
IPC分类号： H04N1/46
CPC分类号： H04N1/46 , G01J1/4223 , G01J3/02 , G01J3/0256 , G01J3/0264 , G01J3/0291 , G01J3/26 , G01J3/2803 , G01J3/36 , G01J3/50 , G01J3/51 , G01J3/513 , G01J3/52 , G01J3/524 , H04N1/6033
摘要： A Micro-Electro-Mechanical System (MEMS) based Fabry-Perot array may be used as a spectral filter to light sensing array, such as a CCD or CMOS photodetector. Applying different voltages to the electrodes of individual Fabry-Perot cells within the array allows a gradient in the Fabry-Perot air gap across the Fabry-Perot array. In this manner the MEMS Fabry-Perot array serves as a spectral filter of light passing through the Fabry-Perot array to the photodetector array. Embodiments of the disclosed sensor, used with LEDs that emit light outside the photosensitivity range of a photoreceptor belt, may be used to measure spectral information from toned patches and/or images placed upon a photoreceptor belt within a marking system. Other embodiments of the disclosed senor, used with LEDs that emit light of any wavelength, may be used to measure spectral information from toned patches or images placed by a marking system upon a non-photosensitive output substrate, such as an intermediate belt or paper.
摘要翻译：基于微机电系统（MEMS）的法布里 - 珀罗阵列可用作光传感阵列的光谱滤波器，例如CCD或CMOS光电探测器。对阵列中的单个法布里 - 珀罗细胞的电极施加不同的电压允许跨法布里 - 珀罗阵列的法布里 - 珀罗气隙的梯度。以这种方式，MEMS法布里 - 珀罗阵列用作通过法布里 - 珀罗阵列到光电检测器阵列的光的光谱滤波器。所公开的传感器与在感光带的光敏度范围外发出光的LED一起使用的实施例可用于测量放置在标记系统内的感光带上的调色片和/或图像的光谱信息。用于发射任何波长的光的LED的所公开的传感器的其它实施例可用于测量由标记系统放置在非感光输出基板（例如中间带或纸）上的调色片或图像的光谱信息。

29. 发明申请

US20090040616A1 Fabry-perot piezoelectric tunable filter 有权
标题翻译：法布里 - 珀罗压电可调滤波器
公开(公告)号：US20090040616A1
公开(公告)日：2009-02-12
申请号：US11890575
申请日：2007-08-07
申请人： Pinyen Lin , Peter M. Gulvin , Yao Rong Wang , Lalit Keshav Mestha
发明人： Pinyen Lin , Peter M. Gulvin , Yao Rong Wang , Lalit Keshav Mestha
IPC分类号： G02B27/00
CPC分类号： G02B26/001 , G01J3/02 , G01J3/0256 , G01J3/26 , G01J3/2803 , G03G2215/00616
摘要： Disclosed is a microelectromechanically tunable Fabry-Perot device and method of manufacturing tunable Fabry-Perot device and method of manufacturing. The F-P device comprises a first and second substrate which has partially reflective planar surfaces, and the partially reflective planar surfaces are separated by a predetermined separation distance and aligned to provide a F-P cavity, where one or more piezoelectric members are adapted to displace the first and second substrates when an electric field is applied.
摘要翻译：公开了一种微机电可调法布里 - 珀罗器件和制造可调谐法布里 - 珀罗器件的方法和制造方法。 FP器件包括第一和第二衬底，其具有部分反射的平面表面，并且部分反射的平面表面被隔开预定的间隔距离并对齐以提供FP腔，其中一个或多个压电元件适于使第一和施加电场时的第二基板。

30. 发明申请

US20080080026A1 MEMS FABRY-PEROT INLINE COLOR SCANNER FOR PRINTING APPLICATIONS USING STATIONARY MEMBRANES 有权
标题翻译：用于印刷使用静电膜的应用的MEMS FABRY-PEROT在线彩色扫描仪
公开(公告)号：US20080080026A1
公开(公告)日：2008-04-03
申请号：US11535382
申请日：2006-09-26
申请人： Lalit K. Mestha , Peter M. Gulvin , Pinyen Lin , Yao Rong Wang
发明人： Lalit K. Mestha , Peter M. Gulvin , Pinyen Lin , Yao Rong Wang
IPC分类号： H04N1/46
CPC分类号： H04N1/46 , G01J1/4223 , G01J3/02 , G01J3/0256 , G01J3/0264 , G01J3/0291 , G01J3/26 , G01J3/2803 , G01J3/36 , G01J3/50 , G01J3/51 , G01J3/513 , G01J3/52 , G01J3/524 , H04N1/6033
摘要： A Micro-Electro-Mechanical System (MEMS) based Fabry-Perot array may be used as a spectral filter to light sensing array, such as a CCD or CMOS photodetector. Applying different voltages to the electrodes of individual Fabry-Perot cells within the array allows a gradient in the Fabry-Perot air gap across the Fabry-Perot array. In this manner the MEMS Fabry-Perot array serves as a spectral filter of light passing through the Fabry-Perot array to the photodetector array. Embodiments of the disclosed sensor, used with LEDs that emit light outside the photosensitivity range of a photoreceptor belt, may be used to measure spectral information from toned patches placed upon a photoreceptor belt within a marking system. Other embodiments of the disclosed sensor, used with LEDs that emit light of any wavelength, may be used to measure spectral information from toned patches placed by a marking system upon a non-photosensitive output substrate, such as an intermediate belt or paper.
摘要翻译：基于微机电系统（MEMS）的法布里 - 珀罗阵列可用作光传感阵列的光谱滤波器，例如CCD或CMOS光电探测器。对阵列中的单个法布里 - 珀罗细胞的电极施加不同的电压允许跨法布里 - 珀罗阵列的法布里 - 珀罗气隙的梯度。以这种方式，MEMS法布里 - 珀罗阵列用作通过法布里 - 珀罗阵列到光电检测器阵列的光的光谱滤波器。所公开的传感器的实施例，与在感光带的光敏度范围外发出光的LED一起使用，可用于测量放置在标记系统内的感光带上的调色片的光谱信息。与发射任何波长的光一起使用的所公开的传感器的其它实施例可用于测量由标记系统放置在非光敏输出基底（例如中间带或纸）上的调色贴片的光谱信息。

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