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    • 25. 发明授权
    • Two mask MTJ integration for STT MRAM
    • 两个掩模MTJ集成为STT MRAM
    • US08125040B2
    • 2012-02-28
    • US12405461
    • 2009-03-17
    • Seung H. KangXia LiShiqun GuMatthew Nowak
    • Seung H. KangXia LiShiqun GuMatthew Nowak
    • H01L29/82
    • H01L43/08G11C11/161H01L43/12
    • A method for forming a magnetic tunnel junction (MTJ) for magnetic random access memory (MRAM) using two masks includes depositing over an interlevel dielectric layer containing an exposed first interconnect metallization, a first electrode, a fixed magnetization layer, a tunneling barrier layer, a free magnetization layer and a second electrode. An MTJ structure including the tunnel barrier layer, free layer and second electrode is defined above the first interconnect metallization by a first mask. A first passivation layer encapsulates the MTJ structure, leaving the second electrode exposed. A third electrode is deposited in contact with the second electrode. A second mask is used to pattern a larger structure including the third electrode, the first passivation layer, the fixed magnetization layer and the first electrode. A second dielectric passivation layer covers the etched plurality of layers, the first interlevel dielectric layer and the first interconnect metallization.
    • 使用两个掩模形成用于磁性随机存取存储器(MRAM)的磁性隧道结(MTJ)的方法包括在包含暴露的第一互连金属化的层间介质层上沉积,第一电极,固定磁化层,隧道势垒层, 自由磁化层和第二电极。 包括隧道势垒层,自由层和第二电极的MTJ结构通过第一掩模限定在第一互连金属化之上。 第一钝化层封装MTJ结构,留下第二电极。 沉积与第二电极接触的第三电极。 使用第二掩模来图案化包括第三电极,第一钝化层,固定磁化层和第一电极的较大结构。 第二电介质钝化层覆盖被蚀刻的多个层,第一层间介质层和第一互连金属化层。
    • 29. 发明申请
    • Two Mask MTJ Integration For STT MRAM
    • 两个掩模MTJ集成为STT MRAM
    • US20090261437A1
    • 2009-10-22
    • US12405461
    • 2009-03-17
    • Seung H. KangXia LiShiqun GuMatthew Nowak
    • Seung H. KangXia LiShiqun GuMatthew Nowak
    • H01L43/00H01L43/12
    • H01L43/08G11C11/161H01L43/12
    • A method for forming a magnetic tunnel junction (MTJ) for magnetic random access memory (MRAM) using two masks includes depositing over an interlevel dielectric layer containing an exposed first interconnect metallization, a first electrode, a fixed magnetization layer, a tunneling barrier layer, a free magnetization layer and a second electrode. An MTJ structure including the tunnel barrier layer, free layer and second electrode is defined above the first interconnect metallization by a first mask. A first passivation layer encapsulates the MTJ structure, leaving the second electrode exposed. A third electrode is deposited in contact with the second electrode. A second mask is used to pattern a larger structure including the third electrode, the first passivation layer, the fixed magnetization layer and the first electrode. A second dielectric passivation layer covers the etched plurality of layers, the first interlevel dielectric layer and the first interconnect metallization.
    • 使用两个掩模形成用于磁性随机存取存储器(MRAM)的磁性隧道结(MTJ)的方法包括在包含暴露的第一互连金属化的层间介质层上沉积,第一电极,固定磁化层,隧道势垒层, 自由磁化层和第二电极。 包括隧道势垒层,自由层和第二电极的MTJ结构通过第一掩模限定在第一互连金属化之上。 第一钝化层封装MTJ结构,留下第二电极。 沉积与第二电极接触的第三电极。 使用第二掩模来图案化包括第三电极,第一钝化层,固定磁化层和第一电极的较大结构。 第二电介质钝化层覆盖被蚀刻的多个层,第一层间介质层和第一互连金属化层。
    • 30. 发明申请
    • CAPACITIVE MEMS-BASED DISPLAY WITH TOUCH POSITION SENSING
    • 具有触摸位置感测功能的基于MEMS的电容显示器
    • US20120154333A1
    • 2012-06-21
    • US13404526
    • 2012-02-24
    • Shiqun GuMatthew Nowak
    • Shiqun GuMatthew Nowak
    • G06F3/045
    • G06F3/0412G06F3/044
    • A micro-electro-mechanical systems (MEMS) pixel for display and touch position sensing includes a substrate and a capacitive element. The capacitive element includes one or more pixels having a first conductive platelet above the substrate, and a second conductive platelet above and spaced apart from the first conductive platelet, the two platelets forming the capacitive element. A connection to each platelet provides for applying a voltage, wherein the platelet separation changes according to the applied voltage. A transparent dielectric plate, spaced apart from and positioned opposite the substrate, covers the at least one pixel. A capacitance sensing circuit attached to the connection to each platelet of the pixel senses changes in capacitance not resulting from the applied voltage.
    • 用于显示和触摸位置感测的微电子机械系统(MEMS)像素包括基板和电容元件。 电容元件包括一个或多个像素,其具有在衬底上方的第一导电片,以及在第一导电片上方并与第一导电片形成间隔开的第二导电片,所述两片片形成电容元件。 与每个血小板的连接提供施加电压,其中血小板分离根据所施加的电压而改变。 与衬底间隔开并与衬底相对设置的透明电介质板覆盖至少一个像素。 附接到与像素的每个血小板的连接的电容感测电路感测不是由施加电压引起的电容变化。