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    • 26. 发明申请
    • INERTIAL SENSOR
    • 惯性传感器
    • US20130152683A1
    • 2013-06-20
    • US13438361
    • 2012-04-03
    • Jung Eun NohSeung Heon HanJong Woon KimJun LimSeung Hun HanMin Kyu Choi
    • Jung Eun NohSeung Heon HanJong Woon KimJun LimSeung Hun HanMin Kyu Choi
    • G01P15/08
    • G01P15/105G01V7/04
    • Disclosed herein is an inertial sensor. The inertial sensor includes a sensing unit and a driving-mass-position initialization module. The sensing unit includes a driving mass, a flexible board unit which displaceably supports the driving mass, and a support which supports the flexible board unit to allow the driving mass to move in a suspended state. The flexible board unit has driving electrodes which move the driving mass, and sensing electrodes which sense the movement of the driving mass. The driving-mass-position initialization module includes a position initialization member which reciprocates to initialize the position of the driving mass, and a coil unit which surrounds the position initialization member. An initialization-member-receiving depression is formed in the driving mass. The shape of the initialization-member-receiving depression corresponds to that of the position initialization member.
    • 这里公开了惯性传感器。 惯性传感器包括感测单元和驱动质量位置初始化模块。 感测单元包括驱动质量块,可移动地支撑驱动质量块的柔性板单元,以及支撑柔性板单元以允许驱动质量块在悬挂状态下移动的支撑件。 柔性板单元具有使驱动质量块移动的驱动电极和感测驱动质量块运动的检测电极。 驱动质量位置初始化模块包括位移初始化构件,其往复运动以初始化驱动质量块的位置;以及线圈单元,其围绕位置初始化构件。 在驾驶体中形成初始化构件接收凹部。 初始化构件接受凹部的形状对应于位置初始化构件的形状。