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    • 26. 发明授权
    • CVD flowable gap fill
    • CVD可流动缝隙填充
    • US07582555B1
    • 2009-09-01
    • US11323812
    • 2005-12-29
    • Chi-I LangJudy H. HuangMichael BarnesSunil Shanker
    • Chi-I LangJudy H. HuangMichael BarnesSunil Shanker
    • H01L21/4763
    • H01L21/76837H01L21/02164H01L21/02216H01L21/02271H01L21/0234H01L21/31612H01L21/76826
    • The present invention meets these needs by providing improved methods of filling gaps. In certain embodiments, the methods involve placing a substrate into a reaction chamber and introducing a vapor phase silicon-containing compound and oxidant into the chamber. Reactor conditions are controlled so that the silicon-containing compound and the oxidant are made to react and condense onto the substrate. The chemical reaction causes the formation of a flowable film, in some instances containing Si—OH, Si—H and Si—O bonds. The flowable film fills gaps on the substrates. The flowable film is then converted into a silicon oxide film, for example by plasma or thermal annealing. The methods of this invention may be used to fill high aspect ratio gaps, including gaps having aspect ratios ranging from 3:1 to 10:1.
    • 本发明通过提供填充间隙的改进方法来满足这些需要。 在某些实施方案中,所述方法包括将基材置于反应室中并将气相含硅化合物和氧化剂引入所述​​室中。 控制反应器条件使得含硅化合物和氧化剂反应并冷凝到基底上。 化学反应导致形成可流动的膜,在某些情况下,含有Si-OH,Si-H和Si-O键。 可流动膜填充基板上的间隙。 然后将可流动膜转化成氧化硅膜,例如通过等离子体或热退火。 本发明的方法可用于填充高纵横比间隙,包括具有3:1至10:1的纵横比的间隙。
    • 28. 发明申请
    • Combination Awning Bracket and Light Support System
    • 组合遮阳棚支架和灯支撑系统
    • US20080067304A1
    • 2008-03-20
    • US11948986
    • 2007-11-30
    • Michael Barnes
    • Michael Barnes
    • A47F5/08
    • F21V33/006E04F10/0662F21V19/006
    • Components for constructing and installing an awning and light support system to provide sun and weather protection to a window or door of a structure are disclosed. Included are a pair of uniquely-constructed bracket members having an L-shaped configuration used to removably secure horizontally-disposed supports and awning spars to provide a frame to support the awning material or skin. Also disclosed is an awning support structure comprising a support channel that extends along the top of an awning and supports a corresponding member attached to an awning frame. In some instances, the awning may be further supported by awning projection props secured between the awning frame and the building at a lower portion of the awning.
    • 公开了用于构造和安装遮阳篷和轻型支撑系统以向建筑物的窗户或门提供阳光和天气保护的部件。 包括一对独特构造的支架构件,其具有用于可移除地固定水平布置的支撑件和遮阳翼片的L形构造,以提供支撑遮阳篷材料或皮肤的框架。 还公开了一种遮阳篷支撑结构,其包括沿着遮篷的顶部延伸的支撑通道并且支撑附接到遮阳篷框架的相应构件。 在一些情况下,遮阳篷可以进一步由在遮篷框架和建筑物之间固定在遮篷的下部的遮阳篷投影道具进一步支撑。