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    • 21. 发明授权
    • Integrated circuit devices including a resistor pattern and methods for manufacturing the same
    • 包括电阻图案的集成电路器件及其制造方法
    • US06653155B2
    • 2003-11-25
    • US10051908
    • 2002-01-17
    • Seok-Jun WonYoung-Wook Park
    • Seok-Jun WonYoung-Wook Park
    • H01L2100
    • H01L28/20H01L27/0802H01L27/10894
    • Methods are provided for forming an integrated circuit device including a resistor pattern having a desired resistance value. A low resistive layer is formed on an integrated circuit substrate. An insulating layer is formed on the low resistive layer opposite the integrated circuit substrate. A high resistive layer, which may have a specific resistance of at least about a hundred &mgr;&OHgr;·cm, is formed on the insulating layer opposite the low resistive layer. The low resistive layer, the insulating layer and the high resistive layer define the resistor pattern in a region of the integrated circuit substrate. Integrated circuit devices including resistor patterns as provided by the methods are also provided and methods for forming metal contacts to the resistor pattern are also provided.
    • 提供了用于形成包括具有所需电阻值的电阻图案的集成电路器件的方法。 在集成电路基板上形成低电阻层。 在与集成电路基板相对的低电阻层上形成绝缘层。 在与低电阻层相反的绝缘层上形成可能具有至少约百μΩ·cm的电阻率的高电阻层。 低电阻层,绝缘层和高电阻层在集成电路基板的区域中限定电阻器图案。 还提供了包括由方法提供的电阻器图案的集成电路器件,并且还提供了用于形成与电阻器图案的金属触点的方法。