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21. 发明申请

WO2002082647A1 FILTER DEVICE 审中-公开
标题翻译：过滤器
公开(公告)号：WO2002082647A1
公开(公告)日：2002-10-17
申请号：PCT/EP2001/003328
申请日：2001-03-23
申请人： INFINEON TECHNOLOGIES AG , NOKIA MOBILE PHONES LTD. , AIGNER, Robert , TIKKA, Pasi , ELLÄ, Juha
发明人： AIGNER, Robert , TIKKA, Pasi , ELLÄ, Juha
IPC分类号： H03H9/46
CPC分类号： H03H9/0028 , H03H9/0095
摘要： The present invention provides a filter device constructed of a combined ladder and lattice filter topology. The filter device according to the present invention synergetically combines the good features of both types of filters. Using the filter device according to the present invention an integrated unbalanced-to-balanced filter device can be realized. Accordingly, a substantial decrease in the number of components can be achieved. Furthermore, the filter device according to the present invention can be integrated with further components, preferably active RF-components, on a single chip.
摘要翻译：本发明提供一种由组合的梯形滤波器和格子滤波器拓扑结构构成的滤波器装置。根据本发明的过滤装置协同地组合了两种类型的过滤器的良好特征。使用根据本发明的过滤装置，可以实现集成的不平衡平衡过滤装置。因此，可以实现部件数量的显着减少。此外，根据本发明的滤波器装置可以与单个芯片上的其它组件，优选地是有源RF组件集成。

22. 发明申请

WO2003058809A3 BULK ACOUSTIC WAVE RESONATOR WITH TWO PIEZOELECTRIC LAYERS AS BALUN IN FILTERS AND DUPLEXERS 审中-公开
公开(公告)号：WO2003058809A3
公开(公告)日：2003-07-17
申请号：PCT/IB2003/000010
申请日：2003-01-03
申请人： NOKIA CORPORATION , NOKIA INC. , INFINEON TECHNOLOGIES AG
发明人： ELLÄ, Juha , AIGNER, Robert
IPC分类号： H03H7/42
摘要： A bulk acoustic wave device (20) having two resonators (92, 94) in a stacked-up configuration separated by a dielectric layer (50). The device (20) can be coupled to a lattice filter or a ladder filter to form a passband filter with an unbalanced input port (41) and two balanced output ports (16, 18). One or more such passband filters can be used, together with another lattice or ladder filter, to form a duplexer having an unbalanced antenna port, two balanced ports for one transceiver part and two balanced ports for another transceiver part.

23. 发明申请

WO2005091501A1 COUPLED BAW RESONATOR BASED DUPLEXERS 审中-公开
标题翻译：基于双联谐振器的耦合双工器
公开(公告)号：WO2005091501A1
公开(公告)日：2005-09-29
申请号：PCT/IB2005/000629
申请日：2005-03-11
申请人： NOKIA CORPORATION , NOKIA INC. , ELLÄ, Juha , AIGNER, Robert
发明人： ELLÄ, Juha , AIGNER, Robert
IPC分类号： H03H9/58
CPC分类号： H03H7/42 , H03H9/584 , H03H9/589 , H03H9/706
摘要： A duplexer comprising a transmit resonator device and a receive resonator device for filtering transmit and receive signals. The resonator device has a first BAW resonator for generating an acoustic wave signal from an input electric signal, a first acoustic delay for delaying the acoustic wave signal, and an intermediate BAW resonator for receiving the delayed acoustic wave signal at one end and converting the delayed acoustic wave signal to an electric signal. Through electrical coupling, the electric signal also appears at another end of the intermediate BAW resonator for generating a further acoustic wave signal at the other end. The resonator further comprises a second delay for delaying the further acoustic wave signal, and a second BAW resonator for producing an output electric signal from the delayed further acoustic wave signal. The duplexer can be used in a transceiver in a mobile phone.
摘要翻译：一种双工器，包括发射谐振器装置和用于滤波发射和接收信号的接收谐振器装置。谐振器装置具有用于从输入电信号产生声波信号的第一BAW谐振器，用于延迟声波信号的第一声学延迟和用于在一端接收延迟的声波信号的中间BAW谐振器，并将延迟的声波信号到电信号。通过电耦合，电信号也出现在中间BAW谐振器的另一端，用于在另一端产生另外的声波信号。谐振器还包括用于延迟另外的声波信号的第二延迟，以及用于从延迟的进一步的声波信号产生输出电信号的第二BAW谐振器。双工器可用于手机中的收发器。

24. 发明授权

EP2035776B1 APPARATUS AND METHOD FOR DETECTING A ROTATION 有权
标题翻译：用于检测旋转的装置和方法
公开(公告)号：EP2035776B1
公开(公告)日：2017-06-28
申请号：EP07724834.2
申请日：2007-05-03
申请人： Infineon Technologies AG
发明人： AIGNER, Robert
IPC分类号： G01C19/5698
CPC分类号： G01C19/5698

25. 发明授权

EP1105344B1 MIKROMECHANISCHER SENSOR UND VERFAHREN ZU SEINER HERSTELLUNG 有权
标题翻译：微机械传感器和方法用于生产
公开(公告)号：EP1105344B1
公开(公告)日：2012-04-25
申请号：EP99952247.7
申请日：1999-08-03
申请人： Infineon Technologies AG
发明人： AIGNER, Robert , BEVER, Thomas , TIMME, Hans-Jörg
IPC分类号： B81B3/00 , B81C1/00
CPC分类号： B81C1/00801 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2207/015 , B81C2201/0136 , H04R19/005 , H04R19/04 , H04R31/00
摘要： The invention relates to a micromechanical sensor and to a corresponding production method, comprising the following steps: a) preparing a doped semiconductor wafer (4); b) applying an epitaxial layer (1) that is doped in such a way that a jump in the charge carrier density in the interface (11) between the semiconductor wafer and the epitaxial layer occurs; c) optionally etching ventilation holes (2) traversing the epitaxial layer and optionally filling the ventilation holes with a sacrificial material; d) depositing at least one sacrificial layer (9), at least one spacing layer (10), a membrane (5) and optionally a semiconductor circuit (8) on the top side of the epitaxial layer using a technology known per se, wherein the semiconductor circuit may be applied after the membrane is formed or while depositing the layers required to form the membrane; e) etching a hole (6) on the back part of the sensor, wherein the etching method is selected in such a way that etching advances in the direction of the top side and ceases in the interface between the wafer (4) and the epitaxial layer (1) by changing charge carrier concentration. The invention also relates to the utilization of the micromechanical sensor in pressure sensors or microphones.

26. 发明授权

EP1464115B1 BULK ACOUSTIC WAVE RESONATOR WITH TWO PIEZOELECTRIC LAYERS AS BALUN IN FILTERS AND DUPLEXERS 有权
标题翻译：与两个压电层比平衡 - 不平衡滤波器和双工器主要部件表面声波
公开(公告)号：EP1464115B1
公开(公告)日：2009-10-14
申请号：EP03729291.9
申请日：2003-01-03
申请人： Avago Technologies Wireless IP (Singapore) Pte. Ltd. , Infineon Technologies AG
发明人： ELLÄ, Juha , AIGNER, Robert
IPC分类号： H03H7/42 , H03H9/00 , H03H9/205 , H03H9/70 , H03H9/58
CPC分类号： H03H9/0571 , H03H7/42 , H03H9/0095 , H03H9/589 , H03H9/706
摘要： A bulk acoustic wave device having two resonators in a stacked-up configuration separated by a dielectric layer. The device can be coupled to a lattice filter or a ladder filter to form a passband filter with an unbalanced input port and two balanced output ports. One or more such passband filters can be used, together with another lattice or ladder filter, to form a duplexer having an unbalanced antenna port, two balanced ports for one tranceiver part and two balanced ports for another tranceiver part.

27. 发明授权

EP1301949B1 VERFAHREN ZUR HERSTELLUNG EINES HALBLEITERBAUELEMENTS MIT EINER PIEZO- ODER PYROELEKTRISCHEN SCHICHT 有权
标题翻译：法用于制造半导体组件与压电或热电层
公开(公告)号：EP1301949B1
公开(公告)日：2008-01-09
申请号：EP01967197.3
申请日：2001-07-17
申请人： Infineon Technologies AG
发明人： AIGNER, Robert , ELBRECHT, Lueder , HERZOG, Thomas, Rainer , MARKSTEINER, Stephan , NESSLER, Winfried
IPC分类号： H01L37/02 , H01L41/24 , H03H3/02
CPC分类号： H03H3/02 , H01L37/02 , H01L41/319 , H03H2003/025
摘要： At least one bottom electrode (U), a piezoelectric or pyroelectric layer (S) over said bottom electrode and a top electrode (O) over said layer are produced as parts of the layer sequence. The bottom electrode (U) is produced by depositing a conductive material and then chemically-mechanically polished in order to smooth out surface roughness. The thickness of the deposited conductive material is preferably reduced by 10 nm to 100 nm by the chemical-mechanical polishing process.

28. 发明公开

EP1726093A1 COUPLED BAW RESONATOR BASED DUPLEXERS 有权
标题翻译： DUPLEX在配对BAW谐振器的基础
公开(公告)号：EP1726093A1
公开(公告)日：2006-11-29
申请号：EP05708723.1
申请日：2005-03-11
申请人： Nokia Corporation , Infineon Technologies AG
发明人： ELLÄ, Juha , AIGNER, Robert
IPC分类号： H03H9/58
CPC分类号： H03H7/42 , H03H9/584 , H03H9/589 , H03H9/706
摘要： A duplexer comprising a transmit resonator device and a receive resonator device for filtering transmit and receive signals. The resonator device has a first BAW resonator for generating an acoustic wave signal from an input electric signal, a first acoustic delay for delaying the acoustic wave signal, and an intermediate BAW resonator for receiving the delayed acoustic wave signal at one end and converting the delayed acoustic wave signal to an electric signal. Through electrical coupling, the electric signal also appears at another end of the intermediate BAW resonator for generating a further acoustic wave signal at the other end. The resonator further comprises a second delay for delaying the further acoustic wave signal, and a second BAW resonator for producing an output electric signal from the delayed further acoustic wave signal. The duplexer can be used in a transceiver in a mobile phone.

29. 发明授权

EP1108203B1 VOR UMWELTEINFLÜSSEN GESCHÜTZTES MIKROMECHANISCHES BAUELEMENT 有权
标题翻译：对环境变化有保护的微机械部件
公开(公告)号：EP1108203B1
公开(公告)日：2005-03-16
申请号：EP99953629.5
申请日：1999-08-27
申请人： Infineon Technologies AG
发明人： AIGNER, Robert , HIEROLD, Christofer , KAPELS, Hergen , KOLB, Stefan , MAIER-SCHNEIDER, Dieter , OPPERMANN, Klaus-Günter , TIMME, Hans-Jörg , SCHEITER, Thomas , WERNER, Wolfgang
IPC分类号： G01L9/00 , G01L9/12 , G01P15/08 , H04R7/10
CPC分类号： G01L9/0042 , B81B2201/0235 , B81B2201/0257 , B81B2201/0264 , B81C1/00896 , B81C2201/053 , H01L2924/0002 , H01L2924/00
摘要： Disclosed is a method for the production of a micromechanical component, comprising the production of a micromechanical component with sensor holes, wherein at least one component protective layer and/or spacer coating is applied on the component before separating the wafer into chips, wherein the component protective layer sealingly covers at least the walls of the holes extending parallel to the surface of the wafer and perpendicular to the surface of the wafer and the spacer coating sealingly covers at least the walls of the holes extending parallel to the surface of the wafer. The invention also relates to a micromechanical component produced according to the method disclosed in the invention and to the use of said components in microphones, pressure sensors or acceleration sensors.

30. 发明公开

EP1371135A1 FILTER DEVICE 有权
标题翻译：过滤设备
公开(公告)号：EP1371135A1
公开(公告)日：2003-12-17
申请号：EP01917108.1
申请日：2001-03-23
申请人： Infineon Technologies AG , Nokia Corporation
发明人： AIGNER, Robert , TIKKA, Pasi , ELLÄ, Juha
IPC分类号： H03H9/46
CPC分类号： H03H9/0028 , H03H9/0095
摘要： The present invention provides a filter device constructed of a combined ladder and lattice filter topology. The filter device according to the present invention synergetically combines the good features of both types of filters. Using the filter device according to the present invention an integrated unbalanced-to-balanced filter device can be realized. Accordingly, a substantial decrease in the number of components can be achieved. Furthermore, the filter device according to the present invention can be integrated with further components, preferably active RF-components, on a single chip.
摘要翻译：本发明提供了一种由组合梯形和格子滤波器拓扑结构构成的滤波器装置。根据本发明的过滤器装置协同地组合了两种过滤器的良好特征。使用根据本发明的过滤装置可以实现集成的不平衡 - 平衡过滤装置。因此，可以实现部件数量的实质性减少。此外，根据本发明的滤波器装置可以与另外的部件，优选有源RF部件集成在单个芯片上。

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