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21. 发明授权

US07109111B2 Method of annealing metal layers 有权
公开(公告)号：US07109111B2
公开(公告)日：2006-09-19
申请号：US10074353
申请日：2002-02-11
申请人： Zhonghui Alex Wang , Bo Zheng
发明人： Zhonghui Alex Wang , Bo Zheng
IPC分类号： H01L21/44
CPC分类号： H01L21/76882
摘要： A method of annealing a metal layer on a substrate in a chamber is provided. The method comprises positioning a substrate with a metal layer thereon in a chamber, removing atmospheric gases from the chamber, providing process gas to the chamber, and annealing the metal layer at a temperature greater than about 80 degrees Celsius. Also provided is a method of forming a feature on a substrate. The method comprises depositing a dielectric layer on the substrate, forming at least one opening within the dielectric layer, depositing a metal layer in the opening, positioning the substrate in an annealing chamber, removing atmospheric gases from the annealing chamber, providing process gas to the annealing chamber, and annealing the metal layer at temperature greater than about 80 degrees Celsius.

22. 发明申请

US20060057228A1 Weight loss composition 审中-公开
标题翻译：减肥组成
公开(公告)号：US20060057228A1
公开(公告)日：2006-03-16
申请号：US11178239
申请日：2005-07-08
申请人： Qun Zheng , Bo Zheng , Kan He , Bao Cui , Naisheng Bai
发明人： Qun Zheng , Bo Zheng , Kan He , Bao Cui , Naisheng Bai
IPC分类号： A61K36/82 , A61K36/75 , A61K36/484 , A61K31/375 , A61K31/198
CPC分类号： A61K31/375 , A23L33/105 , A23L33/30 , A61K31/198 , A61K36/185 , A61K36/48 , A61K36/484 , A61K36/704 , A61K36/75 , A61K36/82 , A61K2300/00
摘要： The present invention provides a dietary supplement and methods of using the same to promote body weight reduction and/or loss of body fat in a subject, and for the management of obesity. The supplement can further be used to reduce one or more metabolic parameters in a subject, such as blood glucose levels, blood triglyceride levels, and blood cholesterol levels.
摘要翻译：本发明提供了一种饮食补充剂及其使用方法，以促进受试者体重减轻和/或体内脂肪的丧失，以及肥胖的管理。该补充剂可进一步用于减少受试者中的一种或多种代谢参数，例如血糖水平，血液甘油三酯水平和血液胆固醇水平。

23. 发明授权

US06970373B2 Method and apparatus for improving stability of a 6T CMOS SRAM cell 有权
标题翻译：提高6T CMOS SRAM单元的稳定性的方法和装置
公开(公告)号：US06970373B2
公开(公告)日：2005-11-29
申请号：US10679124
申请日：2003-10-02
申请人： Suman Datta , Brian S. Doyle , Robert S. Chau , Jack Kavalieros , Bo Zheng , Scott A. Hareland
发明人： Suman Datta , Brian S. Doyle , Robert S. Chau , Jack Kavalieros , Bo Zheng , Scott A. Hareland
IPC分类号： G11C11/412 , H01L21/336 , H01L21/8244 , H01L27/11 , H01L29/423 , H01L29/786 , G11C11/00
CPC分类号： G11C11/412 , H01L21/845 , H01L27/11 , H01L27/1104 , H01L27/1211 , H01L29/42384 , H01L29/66795 , H01L29/785 , H01L29/7854
摘要： The present invention is a CMOS SRAM cell comprising two access devices, each access device comprised of a tri-gate transistor having a single fin; two pull-up devices, each pull-up device comprised of a tri-gate transistor having a single fin; and two pull-down devices, each pull-down device comprised of a tri-gate transistor having multiple fins. A method for manufacturing the CMOS SRAM cell, including the dual fin tri-gate transistor is also provided.
摘要翻译：本发明是包括两个存取装置的CMOS SRAM单元，每个存取装置由具有单个鳍片的三栅晶体管组成; 两个上拉装置，每个上拉装置由具有单个鳍片的三栅极晶体管组成; 和两个下拉器件，每个下拉器件由具有多个鳍片的三栅晶体管组成。还提供了一种用于制造包括双鳍三栅极晶体管的CMOS SRAM单元的方法。

24. 发明授权

US06911136B2 Method for regulating the electrical power applied to a substrate during an immersion process 有权
标题翻译：用于调节在浸入过程中施加到基底的电功率的方法
公开(公告)号：US06911136B2
公开(公告)日：2005-06-28
申请号：US10135546
申请日：2002-04-29
申请人： Bo Zheng , Rajeev Bajaj , Zhonghui Alex Wang
发明人： Bo Zheng , Rajeev Bajaj , Zhonghui Alex Wang
IPC分类号： C25D7/12 , C25D21/12 , H01L21/288 , H01L21/768
CPC分类号： C25D7/123 , C25D17/001 , C25D21/12 , H01L21/2885 , H01L21/76877
摘要： A method and apparatus for providing a uniform current density across an immersed surface of a substrate during an immersion process. The method includes the steps of determining a time varying area of an immersed portion of the substrate during the immersion process, and supplying a time varying current to the substrate during the immersion process, wherein the time varying current is proportional to the time varying area and is configured to provide a constant current density to the immersed portion of the substrate.
摘要翻译：一种用于在浸入工艺期间在衬底的浸入表面上提供均匀电流密度的方法和装置。该方法包括以下步骤：在浸入过程期间确定衬底的浸入部分的时变面积，以及在浸入过程期间向衬底提供时变电流，其中时变电流与时变面积成正比，被配置为向衬底的浸没部分提供恒定的电流密度。

25. 发明授权

US6050506A Pattern of apertures in a showerhead for chemical vapor deposition 失效
标题翻译：用于化学气相沉积的喷头中的孔的图案
公开(公告)号：US6050506A
公开(公告)日：2000-04-18
申请号：US23437
申请日：1998-02-13
申请人： Xin Sheng Guo , Keith Koai , Ling Chen , Mohan K. Bhan , Bo Zheng
发明人： Xin Sheng Guo , Keith Koai , Ling Chen , Mohan K. Bhan , Bo Zheng
IPC分类号： C23C16/44 , C23C16/455 , B05B1/14
CPC分类号： C23C16/45565 , C23C16/455
摘要： A showerhead used for dispensing gas over a wafer in chemical vapor deposition (CVD), especially for CVD of metals. The patterns of holes is tailored to compensate for thermal and other effects, in particular by increasing the density of holes toward the periphery of the wafer in three or more zones. Such a variable pattern is particularly useful for liquid precursors that are atomized in a carrier gas, in which case a second perforated plate in back of the showerhead face can be eliminated, thereby reducing the flow impedance and the required pressure of the liquid-entrained gas, which tends to deposit out at higher pressures. The reduce flow impedance is particularly useful for CVD of copper.
摘要翻译：用于在化学气相沉积（CVD）中分散气体在晶片上的喷头，特别是用于金属CVD。孔的图案被定制以补偿热和其他效果，特别是通过在三个或更多个区域中增加朝向晶片周边的孔的密度。这种可变图案对于在载气中被雾化的液体前体特别有用，在这种情况下可以消除喷头表面背面的第二个穿孔板，从而减少液体夹带气体的流动阻抗和所需的压力，其倾向于在较高压力下沉积。减少流阻抗对于铜的CVD特别有用。

26. 发明授权

US09350810B2 Constructing an integrated road network 有权
标题翻译：构建综合道路网
公开(公告)号：US09350810B2
公开(公告)日：2016-05-24
申请号：US13979012
申请日：2011-01-18
申请人： Guiheng Zhou , Yizhen Zhao , Bo Zheng
发明人： Guiheng Zhou , Yizhen Zhao , Bo Zheng
IPC分类号： G06G7/48 , H04L29/08 , G01C21/34 , G01C21/32 , G06F17/50
CPC分类号： H04L67/12 , G01C21/32 , G01C21/3484 , G06F17/509
摘要： Information about different road networks is retrieved from different sources. Applicable rules and parameter values for constructing an integrated road network are determined for each road network. Roads are first extended at their endpoints. Intersection points among the extended roads are detected. Roads are then divided into road segments at the detected intersection points, and shorted by removing road segments extended beyond intersection points. To process a large scale of road information, extended roads are divided into road segments and distributed to reducers based on their geographic locations for the reducers to detect intersection points among the received road segments. The resulting road segments are then distributed to reducers based on the roads they belong to for the reducers to first reassemble the road segments, then divide the reassembled roads at the detected intersection points, and finally remove road segments extended beyond intersection points.
摘要翻译：从不同来源检索有关不同道路网络的信息。为每个道路网络确定用于构建综合道路网络的适用规则和参数值。道路首先在其终点延伸。检测到延长道路之间的交点。然后将道路在检测的交叉点分成道路段，并通过移除超出交叉点的道路段进行短路。为了处理大量的道路信息，扩展道路被划分为道路段，并根据其地理位置分配给减速器，以减少接收路段之间的交点。然后将所得到的路段分配到减速机，基于其所属的道路用于减速机，以首先重新组装路段，然后将重新组装的道路划分在检测的交叉点，最后移除超出交叉点的道路段。

27. 发明授权

US08747686B2 Methods of end point detection for substrate fabrication processes 失效
标题翻译：基板制造工艺的终点检测方法
公开(公告)号：US08747686B2
公开(公告)日：2014-06-10
申请号：US13360633
申请日：2012-01-27
申请人： Bo Zheng , Mei Chang , Arvind Sundarrajan
发明人： Bo Zheng , Mei Chang , Arvind Sundarrajan
IPC分类号： G01L21/30 , G01R31/00
CPC分类号： C23C14/54 , C23C14/564 , C23C16/4401 , C23C16/4404 , C23C16/52
摘要： Methods and substrate processing systems for analyzing an end point of a process are provided. By-products of the process are detected and monitored to determine the completion of various types of reaction processes within a substrate processing chamber. The methods provide real time process monitoring, thereby reducing the need to rigidly constrain other substrate processing parameters, increasing chamber cleaning efficiency, and/or increasing substrate processing throughput.
摘要翻译：提供了用于分析过程终点的方法和底物处理系统。检测和监测该方法的副产物以确定基材处理室内各种类型的反应过程的完成。这些方法提供了实时过程监控，从而减少了刚性限制其他衬底处理参数，提高室清洁效率和/或增加衬底处理生产量的需要。

28. 发明授权

US08642473B2 Methods for contact clean 有权
标题翻译：接触清洁方法
公开(公告)号：US08642473B2
公开(公告)日：2014-02-04
申请号：US13411398
申请日：2012-03-02
申请人： Mei Chang , Linh Thanh , Bo Zheng , Arvind Sundarrajan , John C. Forster , Umesh M. Kellkar , Murali K. Narasimhan
发明人： Mei Chang , Linh Thanh , Bo Zheng , Arvind Sundarrajan , John C. Forster , Umesh M. Kellkar , Murali K. Narasimhan
IPC分类号： H01L21/311
CPC分类号： H01L21/02063 , H01L21/76802 , H01L21/76814 , H01L21/76829
摘要： Methods and apparatus for removing oxide from a surface, the surface comprising at least one of silicon and germanium, are provided. The method and apparatus are particularly suitable for removing native oxide from a metal silicide layer of a contact structure. The method and apparatus advantageously integrate both the etch stop layer etching process and the native oxide removal process in a single chamber, thereby eliminating native oxide growth or other contaminates redeposit during the substrate transfer processes. Furthermore, the method and the apparatus also provides the improved three-step chemical reaction process to efficiently remove native oxide from the metal silicide layer without adversely altering the geometry of the contact structure and the critical dimension of the trenches or vias formed in the contact structure.
摘要翻译：提供了从表面除去氧化物的方法和装置，所述表面包括硅和锗中的至少一种。所述方法和装置特别适用于从接触结构的金属硅化物层去除天然氧化物。该方法和装置有利地将蚀刻停止层蚀刻工艺和自然氧化物去除工艺集成在单个室中，从而在衬底转移过程期间消除自然氧化物生长或其它污染物再沉积。此外，该方法和装置还提供了改进的三步化学反应过程，以有效地从金属硅化物层去除天然氧化物，而不会不利地改变接触结构的几何形状和形成在接触结构中的沟槽或通孔的临界尺寸。

29. 发明申请

US20130290400A1 Constructing an Integrated Road Network 有权
标题翻译：建设综合道路网
公开(公告)号：US20130290400A1
公开(公告)日：2013-10-31
申请号：US13979012
申请日：2011-01-18
申请人： Guiheng Zhou , Yizhen Zhao , Bo Zheng
发明人： Guiheng Zhou , Yizhen Zhao , Bo Zheng
IPC分类号： H04L29/08
CPC分类号： H04L67/12 , G01C21/32 , G01C21/3484 , G06F17/509
摘要： Information about different road networks is retrieved from different sources. Applicable rules and parameter values for constructing an integrated road network are determined for each road network. Roads are first extended at their endpoints. Intersection points among the extended roads are detected. Roads are then divided into road segments at the detected intersection points, and shorted by removing road segments extended beyond intersection points. To process a large scale of road information, extended roads are divided into road segments and distributed to reducers based on their geographic locations for the reducers to detect intersection points among the received road segments. The resulting road segments are then distributed to reducers based on the roads they belong to for the reducers to first reassemble the road segments, then divide the reassembled roads at the detected intersection points, and finally remove road segments extended beyond intersection points.
摘要翻译：从不同来源检索有关不同道路网络的信息。为每个道路网络确定用于构建综合道路网络的适用规则和参数值。道路首先在其终点延伸。检测到延长道路之间的交点。然后将道路在检测的交叉点分成道路段，并通过移除超出交叉点的道路段进行短路。为了处理大量的道路信息，扩展道路被划分为道路段，并根据其地理位置分配给减速器，以减少接收路段之间的交点。然后将所得到的路段分配到减速机，基于其所属的道路用于减速机，以首先重新组装路段，然后将重新组装的道路划分在检测的交叉点，最后移除超出交叉点的道路段。

30. 发明授权

US08429204B2 Short point-of-interest title generation 有权
标题翻译：短期利益标题产生
公开(公告)号：US08429204B2
公开(公告)日：2013-04-23
申请号：US13549340
申请日：2012-07-13
申请人： Jiang Qian , Vincent Zhou , Bo Zheng , Yu Zheng
发明人： Jiang Qian , Vincent Zhou , Bo Zheng , Yu Zheng
IPC分类号： G06F17/30 , G06F17/28
CPC分类号： G06F17/2745
摘要： Short POI titles are generated by removing unnecessary administrative area prefixes from existing POI titles and replacing necessary administrative area prefixes with shorter aliases. Administrative area prefixes are identified and analyzed to determine whether they are necessary. The analysis includes determining (1) whether the remainders with the prefixes excluded include a common suffix as a prefix, and (2) whether the remainders are unique in an applicable metropolis area. If a remainder does not include as a prefix a common suffix and is unique in the applicable metropolis area, the corresponding prefix is determined unnecessary and removed from the existing POI title to generate a short POI title. Otherwise, the corresponding prefix is determined necessary and replaced with a shorter alias to generate a short POI title.
摘要翻译：通过从现有POI标题中删除不必要的管理区域前缀，并用较短的别名替换必要的管理区域前缀来生成简短的POI标题。对行政区域前缀进行识别和分析，以确定它们是否必要。分析包括确定（1）排除前缀的余数是否包括作为前缀的公共后缀，以及（2）在适用的大都会区域中剩余部分是否是唯一的。如果余数不包括作为前缀的公共后缀，并且在适用的大都市区域中是唯一的，则相应的前缀被确定为不必要的并且从现有POI标题中移除以生成短的POI标题。否则，相应的前缀被确定为必需，并用较短的别名替换以生成短的POI标题。

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