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    • 21. 发明专利
    • X-RAY TUBE TARGET
    • JPS63124352A
    • 1988-05-27
    • JP26761086
    • 1986-11-12
    • HITACHI LTD
    • CHIBA AKIOMATSUSHITA YASUONAKAMURA KOSUKESOFUE MASAHISA
    • H01J35/10H01J35/08
    • PURPOSE:To enable the manufacture of a target which resists high-speed rotation and has high performance and high efficiency by forming a X-ray target in a X-ray CT device so that it is composed of graphite/carbon fiber composite/ graphite. CONSTITUTION:Graphite 1, ceramics 3, a carbon fiber composite 2, ceramics 3, and graphite 1 are incorporated serially inside a metallic mold 4, and they are molded with a molding pressure 500 kg/cm in order to uniformalize the thickness of the ceramics 3. Then the thickness after the sintering of the ceramics 3 is made 0.5 mm to 1 mm or so. This molded composite target is sintered by a hot press. The sintering conditions are as follows; this target is heated for about 15 min. until its temperature rises up to 1900 deg.C from a room temperature, and pressure 300 kg/cm is applied to the target at 1900 deg.C, and moreover the target is heated up to 2150 deg.C at the rate of 10 deg.C/min, and after the target is held at 2150 deg.C for 30 min., it is cooled, and the pressure is released at 1500 deg.C.
    • 24. 发明专利
    • Substrate for integrated circuit device
    • 集成电路设备基板
    • JPS5951534A
    • 1984-03-26
    • JP15156183
    • 1983-08-22
    • Hitachi Ltd
    • CHIBA AKIOSHIMIZU SEIKIKUNIYA KEIICHISOGA TASAO
    • H01L23/15H01L21/52H01L21/58
    • H01L24/83H01L24/29H01L2224/8319H01L2224/8385H01L2924/01006H01L2924/01024H01L2924/01029H01L2924/01047H01L2924/07802H01L2924/14H01L2924/3512H01L2924/00
    • PURPOSE:To easily join an insulating plate and heat radiating plate thereby to obtain a low thermal resistivity substrate without warpage and crack by joining an alumina insulating plate and heat radiating plate made of Cu and carbon fiber composite material through Cr layer, Cr-Ag layer and vacuum-deposited layer of Ag. CONSTITUTION:An insulating plate, Al2O3 plate is, for example, degreased and washed and is then dried up sufficiently. Thereafter, it is placed under the vacuum condition of 1X10 Torr or higher. First, Cr2 is deposited and a mixed layer of Cr-Ag and finally Ag 4 are also deposited. A heat radiating plate can be manufactured, for example, by disposing the Cu and carbon fiber composite material like a mesh and by hot pressing it. Thereafter, the insulating plate, Al2O3 vacuum deposited as described above and a heat radiating plate consisting of the Cu and carbon fiber composite material are stacked directly and are joined with a pressure of 1kg/cm unde a temperature of 600 deg.C and a period of 300mm.. Thereby, a substrate for integrated circuit device can be obtained.
    • 目的:为了容易地加入绝缘板和散热板,从而通过Cr层和Cr-Ag层将由Cu和碳纤维复合材料制成的氧化铝绝缘板和散热板接合而获得低热阻基板而没有翘曲和裂纹 和Ag的真空沉积层。 构成:绝缘板,Al2O3板例如脱脂和洗涤,然后充分干燥。 此后,将其置于1×10 -6乇或更高的真空条件下。 首先沉积Cr2并沉积Cr-Ag和最终的Ag 4的混合层。 散热板可以例如通过将铜和碳纤维复合材料设置成网状并通过热压而制造。 然后,将如上所述的真空蒸镀的Al 2 O 3,Cu和碳纤维复合材料构成的散热板直接层叠,并在600℃的温度下以1kg / cm 2的压力进行接合 并且300mm的周期。由此,可以获得用于集成电路器件的衬底。