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22. 发明授权

US4938655A Wafer transfer method 失效
标题翻译：晶圆转移法
公开(公告)号：US4938655A
公开(公告)日：1990-07-03
申请号：US313902
申请日：1989-02-23
申请人： Takanobu Asano
发明人： Takanobu Asano
IPC分类号： H01L21/677
CPC分类号： H01L21/67781 , Y10S414/138
摘要： A wafer transfer method according to the present invention comprises taking out a plurality of wafers from a cassette while holding the wafers by a chuck mechanism, transporting the held wafers to a region over a boat, transferring all the wafers from the chuck mechanism to the boat so that the wafers are arranged in a predetermined position on the boat, relatively moving the chuck mechanism with respect to the boat for a distance equal to an integral multiple of a distance corresponding to the spacing of each wafer, and holding a required number of wafers, out of the plurality of wafers on the boat, by use of the chuck mechanism to dislocate the wafers on the boat or return the wafers to the cassette, and thereafter transferring a plurality of wafers from another cassette to the boat. According to the present invention, monitor wafers are arranged with predetermined distances between wafers on the boat, and product wafers are transferred from the second cassette to the spaces between the monitor wafers. Thus, the monitor wafers are arranged on the boat for each lot of product wafers. If the wafers in the cassette are subject to an omission, the wafers on the boat are moved for a distance corresponding to an omitted wafer or wafers so that the wafers are continuously arranged at regular pitches on the boat.
摘要翻译：根据本发明的晶片转印方法包括从卡带取出多个晶片，同时通过卡盘机构保持晶片，将保持的晶片传送到船上的区域，将所有晶片从卡盘机构转移到船使得晶片布置在船上的预定位置，相对于舟皿相对地移动卡盘机构等于与每个晶片的间隔对应的距离的整数倍的距离，并且保持所需数量的晶片在船上的多个晶片中，通过使用卡盘机构将晶片脱离在船上或将晶片返回到盒，然后将多个晶片从另一个盒转移到船上。根据本发明，监测晶片在船上的晶片之间以预定距离布置，并且产品晶片从第二盒转移到监视晶片之间的空间。因此，对于每批产品晶片，监视器晶片布置在船上。如果盒中的晶片被省略，则船上的晶片被移动一定距离，对应于省略的晶片或晶片，使得晶片以规则的间距连续地布置在船上。

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