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    • 21. 发明授权
    • Medical image processing server and managing method for medical image processing server
    • 医学图像处理服务器和医学图像处理服务器的管理方法
    • US08751267B2
    • 2014-06-10
    • US13166015
    • 2011-06-22
    • Hiroshi Kurosawa
    • Hiroshi Kurosawa
    • G06Q50/00G06Q50/24
    • G06Q50/24G06F19/00G06F19/321
    • A medical image processing server, connected with terminals, has an access time obtaining unit, an update time obtaining unit, a determining unit and a data outputting unit. The access time obtaining unit obtains an access start time at which each of the terminals accesses medical image data selected by each of the terminals. The update time obtaining, if each of the terminals issues an update request for edited medical image data, obtains a last update time of the edited medical image data. The determining unit determines whether to generate updated data or copied data of medical image data edited by one of the terminals based on the access start time obtained by the terminal and the last update time obtained by another of the terminals. The data outputting unit outputs the updated data and the copied data based on identification information complying with a predetermined medical protocol.
    • 与终端连接的医疗图像处理服务器具有访问时间获取单元,更新时间获取单元,确定单元和数据输出单元。 访问时间获取单元获取每个终端访问由每个终端选择的医学图像数据的访问开始时间。 如果每个终端发出针对编辑的医学图像数据的更新请求,则获取更新时间获得编辑的医学图像数据的最后更新时间。 确定单元基于由终端获得的访问开始时间和由另一个终端获得的最后更新时间来确定是否生成由终端之一编辑的医学图像数据的更新数据或复制数据。 数据输出单元根据符合预定医疗协议的识别信息输出更新数据和复制数据。
    • 23. 发明授权
    • Exposure apparatus, reticle shape measurement apparatus and method
    • 曝光装置,掩模版形状测量装置和方法
    • US07315350B2
    • 2008-01-01
    • US10843462
    • 2004-05-12
    • Hiroshi Kurosawa
    • Hiroshi Kurosawa
    • G03B27/52G03B27/42
    • G03F7/70333G03F7/70783
    • An exposure apparatus exposes a substrate to light via a reticle while the substrate and the reticle are scanned based on information regarding a shape of the reticle. A projection optical system projects a reticle pattern onto the substrate and a reticle stage holds the reticle and moves in the scanning direction. A measurement system measures a position of the reticle surface in the optical axis direction. Information is generated on a position of each measurement point of the surface in the scanning direction with respect to which the measurement system measures a surface position based on pattern information. The measurement performed with respect to each measurement point is used to obtain reticle shape information. The position of the reticle stage and operation of the measurement system is controlled based on the generated information and the reticle stage position information.
    • 曝光装置根据关于掩模版的形状的信息,通过掩模版将基板曝光,同时基板和掩模版被扫描。 投影光学系统将掩模版图案投影到基板上,并且标线台保持标线并沿扫描方向移动。 测量系统测量光罩表面在光轴方向上的位置。 在扫描方向的表面的每个测量点的位置上生成信息,测量系统基于图案信息测量表面位置。 使用关于每个测量点执行的测量来获得掩模版形状信息。 基于生成的信息和标线片台位置信息来控制标线片的位置和测量系统的操作。
    • 24. 发明授权
    • Alignment apparatus, control method therefor, exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method
    • 对准装置,其控制方法,曝光装置,装置制造方法,半导体制造工厂和曝光装置的维护方法
    • US07016049B2
    • 2006-03-21
    • US10460178
    • 2003-06-13
    • Hiroshi Kurosawa
    • Hiroshi Kurosawa
    • G01B9/02G01B11/00
    • G03F7/70725G03F7/70775
    • An alignment apparatus including a first position measuring device and a second position measuring device which measure position information of an object to be controlled, a switching device which switches a position measuring system from the first position measuring device to the second position measuring device, depending on a moving area of the object to be controlled, a correction computing device which performs a correction calculation for a measurement result from the first position measuring device using a first correction parameter set to obtain a current position of the object to be controlled, a predicted coordinate computing unit which predicts coordinates of the object to be controlled on the basis of progress of a correction calculation result from the correction computing device, and a reverse correction computing device which performs a calculation for the coordinates predicted by the predicted coordinate computing unit using a second correction parameter set to obtain a command value for the second position measuring device.
    • 一种对准装置,包括测量被控制物体的位置信息的第一位置测量装置和第二位置测量装置,根据第一位置测量装置将位置测量系统从第一位置测量装置切换到第二位置测量装置的切换装置, 被控制物体的移动区域,对第1位置测定装置的测定结果进行校正计算的校正计算装置,使用第1校正参数,求出被控制物的当前位置,预测坐标 计算单元,其基于来自校正计算装置的校正计算结果的进度来预测要控制的对象的坐标;以及反向校正计算装置,其对由所述预测坐标计算单元使用第二预测坐标计算单元预测的坐标进行计算 校正参数设置得到a 第二位置测量装置的指令值。
    • 26. 发明授权
    • Scanning exposure technique
    • 扫描曝光技术
    • US07812927B2
    • 2010-10-12
    • US11770115
    • 2007-06-28
    • Hiroshi Kurosawa
    • Hiroshi Kurosawa
    • G03B27/42G03B27/52
    • G03F9/7026G03F7/70725G03F9/7003
    • A scanning exposure apparatus for performing exposure of a substrate to light includes a projection optical system to project light from the original onto the substrate, a stage to hold the substrate and to move in a scanning direction, and a focus detector to detect a position of a surface region of the substrate in a direction of the optical axis. The apparatus (i) detects the position of the surface region with respect to each of a plurality of measurement points and with respect to each of a plurality of shot regions of the substrate, (ii) averages the detected positions, (iii) obtains a function which approximates the averaged positions, (iv) calculates a difference between each of the averaged positions and a value of the obtained function, (v) offsets a detected position with a corresponding one of the calculated differences, (vi) controls a position of the stage based on the offset positions, and (vii) logs the obtained function.
    • 用于对基板进行曝光的扫描曝光装置包括:投影光学系统,用于将来自原稿的光投射到基板上;保持基板并沿扫描方向移动的台;以及焦点检测器, 基板的光轴方向的表面区域。 该装置(i)检测表面区域相对于多个测量点中的每一个以及相对于基板的多个照射区域中的每一个的位置,(ii)对检测到的位置进行平均,(iii)获得 函数近似于平均位置,(iv)计算每个平均位置之间的差值和所获得的函数的值,(v)用所计算的差分中的相应一个偏移检测位置,(vi)控制位置 基于偏移位置的阶段,(vii)记录所获得的函数。