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21. 发明申请

US20110107858A1 PROBE APPARATUS AND SUBSTRATE TRANSFER METHOD 有权
标题翻译：探针装置和底板传送方法
公开(公告)号：US20110107858A1
公开(公告)日：2011-05-12
申请号：US12939323
申请日：2010-11-04
申请人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
发明人： Tadashi Obikane , Kazuya Yano , Hiroshi Yamada , Masaru Suzuki , Yasuhito Yamamoto
IPC分类号： G01D21/00
CPC分类号： G01R31/2893
摘要： A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.
摘要翻译：探针装置包括以直线布置的多个探针室; 以及具有从设置在探测室的上部区域的容器取出测试对象基板的基板传送机构的装载器室，将检测对象基板降低到与探测室的装载/卸载端口对应的高度，移动在一排平行于探测室的探测室前面，将测试目标衬底传送到探测室。用于读取记录在保持在基板转印机构上的测试目标基板上的信息的读取机构安装在水平移动机构上，该水平移动机构使得在一系列探测室中行进的探针室的前方的基板传送机构移动。

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