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    • 21. 发明申请
    • INFORMATION PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUM
    • 信息处理设备,半导体制造系统,信息处理方法和存储介质
    • US20070282554A1
    • 2007-12-06
    • US11754643
    • 2007-05-29
    • Noriaki KOYAMAMinoru ObataWenling Wang
    • Noriaki KOYAMAMinoru ObataWenling Wang
    • G06F19/00
    • G05B23/0221G05B2219/32184G05B2219/32192G05B2219/45031Y02P90/22
    • A information processing apparatus 100 for processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatus 200 for performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portion 101 for receiving the set value; a state value receiving portion 102 for receiving the acquired value; a correction amount calculating portion 103 for calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portion 104 for correcting the acquired value received by the state value receiving portion 102, using the correction amount calculated by the correction amount calculating portion 103; and an output portion 105 for outputting a result of correction performed by the correcting portion 104.
    • 一种信息处理设备100,用于处理获取值,该获取值是由处理期间的状态获取的值,由半导体制造设备200执行,用于根据设定值对包含半导体的处理对象进行处理, 是用于设定治疗条件的值,包括:用于接收设定值的设定值接收部101; 用于接收所获取的值的状态值接收部分102; 校正量计算部分103,用于使用指示设定值和获取值之间的关系的校正函数来计算获取值的校正量; 校正部分104,用于使用由校正量计算部分103计算的校正量来校正由状态值接收部分102接收到的获取值; 以及输出部分105,用于输出校正部分104执行的校正结果。