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    • 21. 发明授权
    • Acoustic wave element and acoustic wave element sensor
    • 声波元件和声波元件传感器
    • US09160299B2
    • 2015-10-13
    • US13391416
    • 2010-08-30
    • Rei GotoHidekazu NakanishiHiroyuki Nakamura
    • Rei GotoHidekazu NakanishiHiroyuki Nakamura
    • H03H9/25H03H9/02G01N29/02
    • H03H9/0222G01N29/022G01N2291/0423H03H9/02818H03H9/02984
    • An acoustic wave element includes a piezoelectric body, an input IDT electrode, an output IDT electrode, a propagation path provided between the input IDT electrode and the output IDT electrode, a first dielectric layer provided on the piezoelectric body so as to cover the input IDT electrode and the output IDT electrode, and a reactive portion provided on the propagation path and configured to react to a substance to be detected or a binding substance configured to bind with the substance to be detected. The main acoustic wave becomes, in the input IDT electrode and the output IDT electrode, a boundary acoustic wave that propagates between the piezoelectric body and the first dielectric layer, and becomes, in the propagation path, a surface acoustic wave that propagates on an upper surface of the propagation path.
    • 声波元件包括压电体,输入IDT电极,输出IDT电极,设置在输入IDT电极和输出IDT电极之间的传播路径,设置在压电体上以覆盖输入IDT的第一介质层 电极和输出IDT电极,以及设置在传播路径上并被配置为与待检测物质反应的反应部分或被配置为与待检测物质结合的结合物质。 在输入IDT电极和输出IDT电极中,主声波成为在压电体和第一电介质层之间传播的声界面波,并且在传播路径中成为在上部传播的表面声波 传播路径的表面。
    • 22. 发明申请
    • ACOUSTIC WAVE ELEMENT AND ACOUSTIC WAVE ELEMENT SENSOR
    • 声波元件和声波元件传感器
    • US20120146457A1
    • 2012-06-14
    • US13391416
    • 2010-08-30
    • Rei GotoHidekazu NakanishiHiroyuki Nakamura
    • Rei GotoHidekazu NakanishiHiroyuki Nakamura
    • H01L41/08
    • H03H9/0222G01N29/022G01N2291/0423H03H9/02818H03H9/02984
    • An acoustic wave element includes a piezoelectric body, an input IDT electrode, an output IDT electrode, a propagation path provided between the input IDT electrode and the output IDT electrode, a first dielectric layer provided on the piezoelectric body so as to cover the input IDT electrode and the output IDT electrode, and a reactive portion provided on the propagation path and reacting to a substance to be detected or a binding substance that binds with the substance to be detected. The main acoustic wave becomes, in the input IDT electrode and the output IDT electrode, a boundary acoustic wave that propagates between the piezoelectric body and the first dielectric layer, and becomes, in the propagation path, a surface acoustic wave that propagates on an upper surface of the propagation path. With this structure, deterioration of the element characteristic is suppressed.
    • 声波元件包括压电体,输入IDT电极,输出IDT电极,设置在输入IDT电极和输出IDT电极之间的传播路径,设置在压电体上以覆盖输入IDT的第一介电层 电极和输出IDT电极,以及设置在传播路径上并与被检测物质或与待检测物质结合的结合物质反应的反应部分。 在输入IDT电极和输出IDT电极中,主声波成为在压电体和第一电介质层之间传播的声界面波,并且在传播路径中成为在上部传播的表面声波 传播路径的表面。 由此,能够抑制元件特性的劣化。
    • 25. 发明授权
    • Acoustic wave device
    • 声波装置
    • US07939988B2
    • 2011-05-10
    • US12428577
    • 2009-04-23
    • Rei GotoHidekazu NakanishiHiroyuki Nakamura
    • Rei GotoHidekazu NakanishiHiroyuki Nakamura
    • H01L41/08
    • H03H9/02559H03H9/02834
    • An acoustic wave device includes a piezoelectric substrate having a surface adapted to allow a leaky surface wave to propagate thereon, an interdigital electrode provided on a portion of the surface of the piezoelectric substrate, and a dielectric layer provided on the surface of the piezoelectric substrate to cover the interdigital electrode. The piezoelectric substrate is made of lithium niobate. The dielectric layer is made of tantalum pentoxide. The piezoelectric substrate is made of a rotated Y-cut substrate having a cut angle which is not smaller than 2.5 degrees and is not larger than 22.5 degrees. A ratio H/λ of a film thickness H of the dielectric layer to a wavelength λ of a center frequency of the leaky surface wave ranges from 0.034 to 0.126. This acoustic wave device works in a wide band width.
    • 声波装置包括压电基板,其具有适于允许泄漏的表面波传播的表面,设置在压电基板的表面的一部分上的叉指电极和设置在压电基板的表面上的电介质层 覆盖指状电极。 压电基板由铌酸锂制成。 电介质层由五氧化二钽制成。 压电基板由具有不小于2.5度且不大于22.5度的切割角度的旋转Y切割基板制成。 电介质层的膜厚H与漏表面波的中心频率的波长λ的比H /λ为0.034〜0.126。 该声波装置工作在宽带宽。