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21. 发明专利

JP2000356512A VISUAL INSPECTION SYSTEM AND VISUAL INSPECTION METHOD 失效
公开(公告)号：JP2000356512A
公开(公告)日：2000-12-26
申请号：JP16715499
申请日：1999-06-14
申请人： HITACHI LTD
发明人： KOSHISHIBA HIROYA , DOI HIDEAKI , ISOBE MITSUNOBU , YOSHIMURA KAZUSHI , KOBAYASHI HARUOMI , SHISHIDO CHIE
IPC分类号： G01B11/24 , G01B11/245 , G01N21/88 , G01N21/94 , G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To reduce costs and shorten a development period by taking images by a line image sensor, and extracting defects by a software process at plurality of personal computers connected by a communication network. SOLUTION: The visual inspection system for inspecting patterns of electronic circuit boards or the like has a group of personal computers 18a-18n connected, e.g. by a local area network 17. For example, the optical image of an object 1 to be inspected by an optical system 4 which moves on an XY stage 3 is taken into a line image sensor 5 of, e.g. a multi-tap output delay integration type or the like and inputted as a digital image signal to a personal computer 6 for image input, or the like. The image data is appropriately selected and distributed from the personal computer 6 and sent to each of personal computers 18a-18n for image processing, where the predetermined process of extracting defects from the detected image data is carried out. A required capability for the processing can be easily changed by increasing, decreasing the number of personal computers or the like manner.

22. 发明专利

JPH06259556A METHOD AND DEVICE FOR PROCESSING PICTURE 失效
公开(公告)号：JPH06259556A
公开(公告)日：1994-09-16
申请号：JP4106293
申请日：1993-03-02
申请人： HITACHI LTD
发明人： NINOMIYA TAKANORI , YOSHIMURA KAZUSHI
IPC分类号： G06F12/00 , G06T1/20 , G06T1/60 , G06T5/20 , G06T7/60 , G06F15/70 , G06F15/64 , G06F15/66 , G06F15/68
摘要： PURPOSE:To execute general picture processing at a high speed when the position of a picture element as a processing object depends upon a picture processing result executed just before the processing concerned. CONSTITUTION:Two-dimensional (2-D) local picture data are previously stored in a picture memory 20 in the unit of addresses, 2-D local picture data are read out from the memory 20 based upon a reading address from an operating position determining circuit 23 and arithmetic processing is executed by an arithmetic processing circuit 21. The processed result is saved and stored in a processed result memory 22 and simultaneously, the circuit 23 updates the reading address to be outputted to the memory 20 based upon the processed result to attain high speed picture processing.

23. 发明专利

JPH03150900A INDICATING METHOD AND INDICATOR AND CONFIRMING DEVICE HAVING THIS INDICATOR 失效
公开(公告)号：JPH03150900A
公开(公告)日：1991-06-27
申请号：JP28886489
申请日：1989-11-08
申请人： HITACHI LTD
发明人： NOMOTO MINEO , NINOMIYA TAKANORI , YOSHIMURA KAZUSHI
IPC分类号： B23Q17/00 , G09F9/00 , G09G3/18 , H05K3/00 , H05K13/00 , H05K13/08
摘要： PURPOSE:To increase workability and enable precise position indication even if a substance to be indicated is soft, by indicating a specified position of the substance by the optical indication of an optical 2-dimensional indicating means provided on the side opposite to the mounting surface of a substance holder. CONSTITUTION:A board holder 2 is made of light transmittable material and a mounting surface 4 on which a circuit board 1 is mounted has a plane shape. And an optical 2-dimensional indicating mechanism, that is, a plasma display 9, etc., are put on a base 5 on the side opposite to the mounting surface 4 of the board holder 2. Then a circuit board 1 whose defect has been detected beforehand is located and put on the mounting surface 4 of the board holder 2, and the coordinates of the defect position recorded in a floppy disk 8 are inputted into a microcomputer 7. And they are converted into X,Y-coordinates of the light-emitting element 10 group of the plasma display 9. Then the specified defect position of the circuit board 1 is lit from the side opposite to the mounting surface 4 of the board holder 2, by lighting the light-emitting element 10 at the specified position. And, this increases the workability and enables precise position indicating even in case of a soft circuit board 1.

24. 发明专利

JPH038505B2 失效
公开(公告)号：JPH038505B2
公开(公告)日：1991-02-06
申请号：JP12778781
申请日：1981-08-17
申请人： HITACHI LTD
发明人： HAMADA TOSHIMITSU , YOSHIMURA KAZUSHI , KUNI TOMOHIRO , AOKI NOBUHIKO
IPC分类号： G01N21/88 , G01N21/93 , G01N21/956 , G06T1/00

25. 发明专利

JPS6347334B2 失效
公开(公告)号：JPS6347334B2
公开(公告)日：1988-09-21
申请号：JP15581182
申请日：1982-09-09
申请人： HITACHI LTD
发明人： KUNI TOMOHIRO , HAMADA TOSHIMITSU , MAKIHIRA HIROSHI , YOSHIMURA KAZUSHI
IPC分类号： H01L21/66 , G01B7/00 , G01B15/04 , H01J37/28 , H01L21/027

26. 发明专利

JPS59217935A Scanning type electron microscope 失效
标题翻译：扫描型电子显微镜
公开(公告)号：JPS59217935A
公开(公告)日：1984-12-08
申请号：JP9154483
申请日：1983-05-26
申请人： Hitachi Ltd
发明人： KUJI TOMOHIRO , HAMADA TOSHIMITSU , YOSHIMURA KAZUSHI , SHIGEMURA TAKASHI
IPC分类号： G01B15/00 , H01J37/28
CPC分类号： H01J37/28
摘要： PURPOSE:To keep magnification in an externally preset value even when working distance varies by detecting the current amount applied to an electronic lens and varying the deviation of an electron beam interlocking with the current amount. CONSTITUTION:An electron emitted from an electron gun is accelerated by an anode and an electron beam is converged by a convergent lens and an objective lens 5 and then a sample is irradiated with the electron beam. A focal point current regulator 17 externally operates a knob and varies the current value. The lens 5 varies the current value and focal point position through a constant- current amplifier 18 by the output of the regulator 17. A current detection resistor 19 detects the current value of the lens 5 and amplifies it using a buffer amplifier 20. A magnification setting device 21 varies the size of a deflectionsignal interlocking with an external knob and sets the magnification of a picture. The output of the setting device 21 is issued to an attenuator 22. The attenuator 22. The attenuator 22 reduces attenuation as a signal from the amplifier 20 increases and increases the deflection signal. The output of the attenuator 22 is applied to a deflection coil 9 through a constant-current amplifier 23 and preset magnification can be maintained.
摘要翻译：目的：即使通过检测施加到电子透镜的电流量并改变与电流量互锁的电子束的偏差，即使工作距离变化，也可以将倍率保持在外部预设值。构成：由电子枪发射的电子被阳极加速，电子束被会聚透镜和物镜5会聚，然后用电子束照射样品。焦点电流调节器17从外部操作旋钮并改变电流值。透镜5通过调节器17的输出通过恒流放大器18改变电流值和焦点位置。电流检测电阻器19检测透镜5的电流值并使用缓冲放大器20放大。放大倍率设置装置21改变与外部旋钮互锁的偏转信号的尺寸并设置图像的放大率。设定装置21的输出被发送到衰减器22.衰减器22.衰减器22随着来自放大器20的信号的增加而减小衰减并增加偏转信号。衰减器22的输出通过恒流放大器23施加到偏转线圈9，并且可以保持预设倍率。

27. 发明专利

JPS59103256A Focusing method for scanning electron microscope 失效
标题翻译：用于扫描电子显微镜的聚焦方法
公开(公告)号：JPS59103256A
公开(公告)日：1984-06-14
申请号：JP21140382
申请日：1982-12-03
申请人： Hitachi Ltd
发明人： HAMADA TOSHIMITSU , KUJI TOMOHIRO , MAKIHIRA HIROSHI , YOSHIMURA KAZUSHI
IPC分类号： H01J37/21 , H01J37/28
CPC分类号： H01J37/21
摘要： PURPOSE:To reduce a charging phenomenon on a sample and the damage of the sample caused by an electron beam by mounting an optical microscope in a vacuum sample chamber and controlling the objective lens coil current of a scanning electron microscope based on the location in the optical axis direction. CONSTITUTION:The data at the time when an optical microscope 15 and a scanning electron microscope 12 are focused is written in memory 24 in advance. A sample is positioned in the optical microscope 15 and the microscope is focused. When focusing is completed, the operator notifies a control section 20 of the successful focusing through an operation board 25 and the control section 20 inputs the value of the laser range finder 18 and a linear encoder 19. The value of a D/A converter 23 that corresponds to the value measured by the laser range finder 18 is obtained by memory 24 and is set to the converter 23. A sample stage 16 is moved by the value of the encoder 19 and the distance between both microscopes 12 and 15 and the sample is positioned in the microscope 12. As a result, since the focused scanning electron microscope image can be obtained if the sample is irradiated by electrons, the sample need not be irradiated by excessive electrons for focusing and the damage and charging on the sample can be prevented.
摘要翻译：目的：通过将光学显微镜安装在真空样品室中，减少样品上的充电现象和电子束造成的样品损伤，并根据光学位置控制扫描电子显微镜的物镜线圈电流轴方向。构成：将光学显微镜15和扫描电子显微镜12聚焦时的数据预先写入存储器24。将样品定位在光学显微镜15中并且显微镜被聚焦。当聚焦完成时，操作者通过操作板25向控制部分20通知成功聚焦，并且控制部分20输入激光测距仪18和线性编码器19的值.D / A转换器23的值对应于由激光测距仪18测量的值由存储器24获得并被设置到转换器23.样品台16移动编码器19的值和两个显微镜12和15之间的距离以及样品结果，由于如果样品被电子照射可以获得聚焦的扫描电子显微镜图像，所以不需要用过量的电子照射样品进行聚焦，并且样品的损伤和充电可以是预防。

28. 发明专利

JPS5861448A PATTERN CHECK SYSTEM 失效
公开(公告)号：JPS5861448A
公开(公告)日：1983-04-12
申请号：JP16017081
申请日：1981-10-09
申请人： HITACHI LTD
发明人： HAMADA TOSHIMITSU , YOSHIMURA KAZUSHI , KUJI TOMOHIRO , AOKI NOBUHIKO
IPC分类号： G01N21/88 , G01B11/24 , G01N21/93 , G01N21/956
摘要： PURPOSE:To use various contracted patterns generated from a fault-free standard pattern, to check on dissidence with a pattern to be checked, and to eliminate an error in quantization by a system which uses the fault-free standard pattern, picks up the pattern to be checked through an image pickup device, and checks on both patterns by comparing both of them, one over another, after binary checking. CONSTITUTION:A pattern contracting circuit 4 and a dead zone generating circuit 5 are used to form a horizontally right contracted pattern (b) of a standard pattern 9, a left contracted pattern (c), a vertically downward contracted pattern (d), an upward contracted pattern (e), a pattern of said four patterns contracted in combined contraction directions, and the standard pattern 9. Every pattern is provided with a dead zone G at its boundary part circumference (only outside of the pattern). A video signal from an image pickup device 1 which picks up a pattern to be checked is coded into a binary signal to obtain a dissidence part between the binary-coded signal and each of said patterns within the permissible range of the position shift between the pattern to be checked and the standard pattern; when dissidence is detected with regard to all the patterns, a decision on the presence of a fault is made and when no dissidence is detected with regard to at least one pattern, the pattern is regarded as a normal pattern.

29. 发明专利

JPS57173258A BINARY-CODING SYSTEM FOR VIDEO SIGNAL 失效
公开(公告)号：JPS57173258A
公开(公告)日：1982-10-25
申请号：JP5721581
申请日：1981-04-17
申请人： HITACHI LTD
发明人： YOSHIMURA KAZUSHI , HAMADA TOSHIMITSU , KUJI TOMOHIRO , AOKI NOBUHIKO
IPC分类号： H04N1/403 , G06T5/00 , H01J37/22 , H01J37/28 , H04N7/18
摘要： PURPOSE:To shorten an inspection time by preventing unnecessary binary- coding at an edge part by discriminating the position of the edge of an objective pattern by referring to adjacent picture element values which have been inputted yet when performing the binary coding by discriminating whether adjacent picture elements are coincident with each other or not. CONSTITUTION:An thermoelectron emitted from a cathode 1 is accelerated and deflected to strike a sample 6. From the sample 6, a reflected electron which corresponds to the state of its surface is emitted, so it is detected at a part 8 and sent as a video signal to a binary-coding circuit 10. The binary-coded signal enters a one-bit register 11 and is then inputted to a shift register group 13 through a binary-coded signal control circuit 12. Among binary-coded signals stored in the shift register group 13, values of picture elements adjoining to a picture element stored in a register 11 at this time are outputted according to a timing signal and compared by a comparing circuit 14 to discriminate an edge position.

30. 发明专利

JP2012127897A Internal flaw inspection method and device therefor 审中-公开
标题翻译：内部检查方法及其设备
公开(公告)号：JP2012127897A
公开(公告)日：2012-07-05
申请号：JP2010281390
申请日：2010-12-17
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TACHIZAKI TAKEHIRO , NAKADA TOSHIHIKO , YOSHIMURA KAZUSHI , SHIBATA YUKIHIRO
IPC分类号： G01N21/88 , G01B9/02 , G01B11/00 , G01N21/45 , G01N29/04
CPC分类号： G01N29/2418
摘要： PROBLEM TO BE SOLVED: To inspect an internal flaw at high sensitivity in a non-destructive state and in a non-contact state with a compact configuration without an operating part by performing ultrasonic excitation to a sample surface in non-contact state, and by observing a sample interior in non-contact state by means for optical interference measurement of a point exciting an ultrasonic wave.SOLUTION: An internal flaw inspection method and a device therefor are so devised that an ultrasonic wave is emitted from a place distant from a sample to be inspected and the sample is irradiated with the ultrasonic wave; that a place irradiated with the ultrasonic wave on the sample surface is irradiated with polarized light whose polarized state is controlled; that light having the same polarization property as that of the irradiation polarized light among reflected and scattered light from the sample surface irradiated with the polarized light is detected by a photodetector; and that a signal detected by the photodetector is processed to detect an internal flaw inside the sample.
摘要翻译：要解决的问题：通过以非接触状态对样品表面进行超声波激发，以非破坏性状态和非接触状态以非紧凑形式检查内部缺陷，无需操作部件并且通过用于激发超声波的点的光学干涉测量来观察非接触状态的样本内部。解决方案：设计了一种内部缺陷检查方法及其装置，使得从远离检查样品的位置发射超声波，并用超声波照射样品; 用超声波在样品表面照射的地方照射极化状态被控制的偏振光; 通过光电检测器检测与来自被偏振光照射的样品表面的反射和散射光中具有与照射偏振光相同的偏振特性的光; 并且处理由光电检测器检测到的信号以检测样品内的内部缺陷。版权所有（C）2012，JPO＆INPIT

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