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    • 23. 发明申请
    • Reduction of thermal non-cyclic error effects in interferometers
    • 降低干涉仪中的热非循环误差效应
    • US20050094155A1
    • 2005-05-05
    • US10879681
    • 2004-06-28
    • Henry HillMichael SchroederAndrew Carlson
    • Henry HillMichael SchroederAndrew Carlson
    • G01B9/02G03F7/20
    • G01B9/02049G01B9/02003G01B2290/70G03F7/70775G03F7/70858
    • In general, in one aspect, the invention features an interferometer assembly for use in a lithography tool used for fabricating integrated circuits on a wafer, wherein the lithography tool includes a support structure and a stage for positioning the wafer relative to the support structure, the interferometer assembly including an interferometer configured to direct a measurement beam between the stage and the support structure and combine the measurement beam with another beam to form an output beam which includes a phase related to a position of the stage relative to the support structure, wherein the interferometer is mechanically secured to the lithography tool through an interferometer surface selected to cause the phase of the output beam to be insensitive to thermal changes of the interferometer over a range of temperatures.
    • 通常,在一个方面,本发明的特征在于一种用于在用于在晶片上制造集成电路的光刻工具中使用的干涉仪组件,其中所述光刻工具包括支撑结构和用于相对于支撑结构定位晶片的台, 干涉仪组件,包括干涉仪,其被配置为将测量光束引导在所述平台和所述支撑结构之间并且将所述测量光束与另一个光束组合以形成输出光束,所述输出光束包括与所述平台相对于所述支撑结构的位置相关的相位,其中, 干涉仪通过干涉仪表面被机械地固定到光刻工具,所述干涉仪表面被选择为使得输出光束的相位对于干涉仪在一定温度范围内的热变化不敏感。
    • 25. 发明授权
    • Stylet for controlled deformation of a tube
    • 用于受管管变形的管心针
    • US5758656A
    • 1998-06-02
    • US712083
    • 1996-09-11
    • Michael Schroeder
    • Michael Schroeder
    • A61M25/01A61B5/00
    • A61M25/0147A61M25/0152A61M2025/0161
    • A tube and stylet assembly for the controlled deflection of the tube is shown. The stylet is received in the lumen of the tube. The stylet includes a first filament having proximal and distal ends and a second filament having proximal and distal ends wherein the proximal and distal ends of the second filament are joined to the first filament such that a surface of the second filament abuts a surface of the first filament. Deflection of the first and second filaments along a plane substantially perpendicular to the abutting surfaces of the first and second filaments necessarily results in a corresponding, opposite deflection of the first and second filaments a spaced distance from the first deflection point. Therefore, a user can control deflection of one portion of the tube and stylet through manipulation of a second portion of the tube and stylet. This structure is particularly useful in inserting a gastric tube either nasally or orally.
    • 示出了用于管的可控偏转的管和指针管组件。 探针被收纳在管腔内。 探针包括具有近端和远端的第一细丝和具有近端和远端的第二细丝,其中第二细丝的近端和远端与第一丝接合,使得第二丝的表面邻接第一丝的表面 灯丝。 沿着基本上垂直于第一和第二细丝的邻接表面的平面的第一和第二细丝的偏转必然导致第一和第二细丝相对于第一偏转点间隔距离的相反的偏转。 因此,用户可以通过操纵管和探针的第二部分来控制管和探针的一部分的偏转。 这种结构特别适用于鼻内或口腔插入胃管。
    • 26. 发明授权
    • Pollen protection device
    • 花粉保护装置
    • US4784131A
    • 1988-11-15
    • US931131
    • 1986-11-17
    • Michael Schroeder
    • Michael Schroeder
    • A62B18/02A41D13/11A61F9/02A61F9/04A62B23/02
    • A41D13/1146A41D13/1184A61F9/029
    • A pollen protection device comprising a holder and an elastic band for retaining the holder on the face of the user so as to enclose the eyes and nose. The holder is comprised of upper and lower flange walls in which are mounted filter members having a mesh size to pass air but not pollen, with additional filters being positioned between the walls at the sides thereof. Also mounted between the flange walls at the front is a viewing lens. A protective cloth impermeable to pollen can be secured to the lower flange wall and extends downwardly over the mouth and around the neck of the user to permit inhalation through the mouth.
    • 一种花粉保护装置,其包括保持器和弹性带,用于将所述保持器保持在使用者的脸部上以包围眼睛和鼻子。 保持器包括上凸缘壁和下凸缘壁,其中安装有筛孔尺寸以过滤空气而不是花粉的过滤构件,附加的过滤器位于其侧壁之间。 还安装在前面的法兰壁之间的是一个观察镜头。 不可渗透花粉的防护布可以固定在下法兰壁上,并向下延伸到使用者的嘴和周围,以允许通过口吸入。
    • 27. 发明授权
    • Interferometric encoder systems
    • 干涉编码器系统
    • US08300233B2
    • 2012-10-30
    • US13028787
    • 2011-02-16
    • Leslie L. DeckPeter J. De GrootMichael Schroeder
    • Leslie L. DeckPeter J. De GrootMichael Schroeder
    • G01B9/02
    • G01D5/266G01D5/38
    • A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
    • 用于确定关于沿着编码器刻度的自由度的变化的信息的方法包括沿不同的路径引导第一波束和第二波束,并组合第一和第二波束以形成输出波束,其中第一和第二波束从 公共源,第一和第二光束具有不同的频率,其中第一光束以非Littrow角接触编码器刻度,并且第一光束从编码器刻度至少一次衍射; 基于所述输出光束检测干扰信号,所述干扰信号包括与所述第一光束和所述第二光束之间的光程差有关的外差相位; 以及基于所述外差相位确定关于所述编码器刻度的自由度的信息。
    • 28. 发明申请
    • INTERFEROMETRIC HETERODYNE OPTICAL ENCODER SYSTEM
    • 干涉非线性光学编码器系统
    • US20120194824A1
    • 2012-08-02
    • US13361492
    • 2012-01-30
    • Peter de GrootMichael Schroeder
    • Peter de GrootMichael Schroeder
    • G01B9/02
    • G01B9/02059G01B9/02003G01B9/02007G01B9/02076G01B2290/15G01B2290/70G01D5/266G01D5/347G01D5/34723G03F7/70775
    • An encoder interferometry system includes an interferometer positioned to receive first and second beams having different frequencies, in which the interferometer has at least one polarizing beam splitting element for directing the first beam along a measurement path to define a measurement beam and the second beam along a reference path to define a reference beam. The encoder interferometry system further includes a encoder scale positioned to diffract the measurement beam at least once, a detector positioned to receive the measurement and reference beams after the measurement beam diffracts from the encoder scale, and an output component positioned to receive the measurement and reference beams before they reach the detector and deflect spurious portions of the first and second beam away from the detector.
    • 编码器干涉测量系统包括干涉仪,其定位成接收具有不同频率的第一和第二波束,其中干涉仪具有至少一个偏振分束元件,用于沿着测量路径引导第一光束以限定测量光束,并且第二光束沿着 参考路径来定义参考光束。 编码器干涉测量系统还包括一个定位成将测量光束衍射至少一次的编码器刻度;定位成在测量光束从编码器尺度衍射之后接收测量和参考光束的检测器;以及定位成接收测量和参考的输出部件 光束在它们到达检测器之前并且将第一和第二光束的杂散部分偏离检测器。
    • 29. 发明申请
    • INTERFEROMETRIC ENCODER SYSTEMS
    • INTERFEROMETRIC编码器系统
    • US20110255096A1
    • 2011-10-20
    • US13028787
    • 2011-02-16
    • Leslie L. DeckPeter J. de GrootMichael Schroeder
    • Leslie L. DeckPeter J. de GrootMichael Schroeder
    • G01B9/02
    • G01D5/266G01D5/38
    • A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
    • 用于确定关于沿着编码器刻度的自由度的变化的信息的方法包括沿不同的路径引导第一波束和第二波束,并组合第一和第二波束以形成输出波束,其中第一和第二波束从 公共源,第一和第二光束具有不同的频率,其中第一光束以非Littrow角接触编码器刻度,并且第一光束从编码器刻度至少一次衍射; 基于所述输出光束检测干扰信号,所述干扰信号包括与所述第一光束和所述第二光束之间的光程差有关的外差相位; 以及基于所述外差相位确定关于所述编码器刻度的自由度的信息。