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21. 发明授权

US06452291B1 Reduction of switching transients via large signal/small signal thresholding 有权
标题翻译：通过大信号/小信号阈值减小开关瞬变
公开(公告)号：US06452291B1
公开(公告)日：2002-09-17
申请号：US09348883
申请日：1999-07-01
申请人： Mark Erickson , Thorkell Gudmundsson , Pradeep Pandey
发明人： Mark Erickson , Thorkell Gudmundsson , Pradeep Pandey
IPC分类号： F02D3100
CPC分类号： G05B5/01 , F02D41/0007 , F02D41/1401 , F02D41/1488 , Y02T10/144 , Y10T307/865
摘要： The present invention includes a method and system for reducing switching transients via large signal/small signal thresholding. The present invention prevents a switch from occurring if when the system (i.e., the system under control) is in small signal mode and permits switches to occur when the system is in large signal mode. Large signal and small signal modes are determined by comparing the difference between the most current value of a comparator variable and the final setpoint with a threshold distance. The system is in small signal mode if the most current value of the comparator variable less the final setpoint value is less than the threshold distance. Otherwise, the system is in large signal mode.
摘要翻译：本发明包括用于通过大信号/小信号阈值处理来减少开关瞬变的方法和系统。本发明防止当系统（即被控制的系统）处于小信号模式时发生切换，并且当系统处于大信号模式时允许开关发生。通过将比较器变量的最新值与最终设定值之间的差与阈值距离进行比较来确定大信号和小信号模式。如果比较器变量的最大电流值小于最终设定值小于阈值距离，系统处于小信号模式。否则，系统处于大信号模式。

22. 发明授权

US6167360A Method and apparatus for dynamic optimization 失效
标题翻译：动态优化的方法和装置
公开(公告)号：US6167360A
公开(公告)日：2000-12-26
申请号：US121949
申请日：1998-07-24
申请人： Mark A. Erickson , Pradeep Pandey , Sunil C. Shah , Thorkell Gudmundsson
发明人： Mark A. Erickson , Pradeep Pandey , Sunil C. Shah , Thorkell Gudmundsson
IPC分类号： G05B13/04 , G05B17/02 , G06G7/48
CPC分类号： G05B13/042 , G05B13/04 , G05B17/02
摘要： The present invention is a method and apparatus for dynamic optimization of a dynamic physical system having a device under control and a controller along with a modeling system having an estimator and a constrained nonlinear program. The time varying trajectories of the dynamic physical system are parameterized and run through the modeling system in order to produce a set of optimal time varying setpoint trajectories to be used in the dynamic physical system. The optimal time varying setpoint trajectories optimize the physical system to produce the desired end result (or product) of the dynamic physical system.
摘要翻译：本发明是用于动态优化动态物理系统的方法和装置，其具有被控制的装置和控制器以及具有估计器和约束非线性程序的建模系统。动态物理系统的时变轨迹被参数化并运行在建模系统中，以便产生要在动态物理系统中使用的一组最佳时变设定点轨迹。最优时变设定点轨迹优化物理系统以产生动态物理系统的期望最终结果（或产品）。

23. 发明授权

US5991525A Method for real-time nonlinear system state estimation and control 失效
标题翻译：实时非线性系统状态估计与控制方法
公开(公告)号：US5991525A
公开(公告)日：1999-11-23
申请号：US917053
申请日：1997-08-22
申请人： Sunil C. Shah , Pradeep Pandey
发明人： Sunil C. Shah , Pradeep Pandey
IPC分类号： G05B13/04
CPC分类号： G05B13/04
摘要： A method for the estimation of the state variables of nonlinear systems with exogenous inputs is based on improved extended Kalman filtering (EKF) type techniques. The method uses a discrete-time model, based on a set of nonlinear differential equations describing the system, that is linearized about the current operating point. The time update for the state estimates is performed using integration methods. Integration, which is accomplished through the use of matrix exponential techniques, avoids the inaccuracies of approximate numerical integration techniques. The updated state estimates and corresponding covariance estimates use a common time-varying system model for ensuring stability of both estimates. Other improvements include the use of QR factorization for both time and measurement updating of square-root covariance and Kalman gain matrices and the use of simulated annealing for ensuring that globally optimal estimates are produced.
摘要翻译：用外推法估计非线性系统的状态变量的方法是基于改进的扩展卡尔曼滤波（EKF）类型技术。该方法使用离散时间模型，基于描述系统的一组非线性微分方程，其关于当前工作点线性化。使用集成方法执行状态估计的时间更新。通过使用矩阵指数技术实现的集成避免了近似数值积分技术的不准确性。更新的状态估计和相应的协方差估计使用通用的时变系统模型来确保两个估计的稳定性。其他改进包括使用QR因子分析进行时间和平方根协方差和卡尔曼增益矩阵的测量更新，以及使用模拟退火确保产生全局最优估计。

24. 发明授权

US5880959A Method for computer-aided design of a product or process 失效
标题翻译：产品或过程的计算机辅助设计方法
公开(公告)号：US5880959A
公开(公告)日：1999-03-09
申请号：US977781
申请日：1997-11-25
申请人： Sunil C. Shah , Pradeep Pandey
发明人： Sunil C. Shah , Pradeep Pandey
IPC分类号： G05B17/02 , G06F17/50 , G06F19/00
CPC分类号： G06F17/50 , G05B17/02
摘要： A method for computer-aided design. The method includes the steps of representing a computer-aided design activity as a design cycle and defining a goal of the design activity. The method also includes the steps of defining alternate design steps toward achieving the goal. According to one embodiment, the design activity is represented as a graph containing the alternate design steps. According to this embodiment, a cost metric is assigned for each of the alternate design steps that includes elements representing relative costs of taking each of a plurality of paths in the graph. Element values and bounds on the cost metric are the determined by searching the graph to project costs incurred upon execution of each of the alternate design steps to achieve the goal. The cost of achieving the goal is then optimized by selecting one of the alternate design steps associated with a smallest cost metric.
摘要翻译：一种计算机辅助设计方法。该方法包括将计算机辅助设计活动表示为设计周期并定义设计活动的目标的步骤。该方法还包括为实现目标定义替代设计步骤的步骤。根据一个实施例，设计活动被表示为包含替代设计步骤的图。根据该实施例，为每个备选设计步骤分配成本度量，所述替代设计步骤包括表示在图中取多个路径中的每个路径的相对成本的元素。成本指标的元素值和边界是通过搜索图来确定在执行每个替代设计步骤以实现目标时产生的成本。然后通过选择与最小成本度量相关联的备选设计步骤之一来优化实现目标的成本。

25. 发明授权

US07452793B2 Wafer curvature estimation, monitoring, and compensation 失效
标题翻译：晶圆曲率估计，监测和补偿
公开(公告)号：US07452793B2
公开(公告)日：2008-11-18
申请号：US11094715
申请日：2005-03-30
申请人： Sanjeev Kaushal , Kenji Sugishima , Pradeep Pandey
发明人： Sanjeev Kaushal , Kenji Sugishima , Pradeep Pandey
IPC分类号： H01L21/425
CPC分类号： H01L21/67248 , H01L21/67288 , H01L22/12
摘要： A method of determining wafer curvature in real-time is presented. The method includes establishing a first temperature profile for a hotplate surface, where the hotplate surface is divided into a plurality of temperature control zones. The method further includes positioning a wafer at a first height above the hotplate surface and determining a second temperature profile for the hotplate surface. The wafer curvature is then determined by using the second temperature profile. Also, a dynamic model of a processing system is presented and wafer curvature can be incorporated into the dynamic model.
摘要翻译：提出了一种实时确定晶片曲率的方法。该方法包括建立热板表面的第一温度曲线，其中将热板表面分成多个温度控制区。该方法还包括将晶片定位在加热板表面上方的第一高度处，并确定用于加热板表面的第二温度分布。然后通过使用第二温度分布来确定晶片曲率。此外，呈现处理系统的动态模型，并且可以将晶片曲率并入到动态模型中。

26. 发明授权

US07444572B2 Built-in self test for a thermal processing system 有权
标题翻译：热处理系统内置自检
公开(公告)号：US07444572B2
公开(公告)日：2008-10-28
申请号：US11217276
申请日：2005-09-01
申请人： Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima
发明人： Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima
IPC分类号： G01R31/28 , G06F11/30
CPC分类号： H01L22/10 , G05B19/41875 , G05B23/0254 , H01L21/67248 , Y02P90/22
摘要： A method of creating and/or modifying a built-in self test (BIST) table for monitoring a thermal processing system in real-time that includes positioning a plurality of wafers in a processing chamber in the thermal processing system; executing a real-time dynamic model to generate a predicted dynamic process response; creating a measured dynamic process response; determining a dynamic estimation error; determining if the determined dynamic estimation error can be associated with a pre-existing BIST rule in the BIST table; creating a new BIST rule when the dynamic estimation error cannot be associated with any pre-existing BIST rule in the BIST table; and stopping the process when a new BIST rule cannot be created.
摘要翻译：一种创建和/或修改内置自检（BIST）表的方法，用于实时监测热处理系统，包括将多个晶片定位在热处理系统中的处理室中; 执行实时动态模型以产生预测的动态过程响应; 创建一个测量的动态过程响应; 确定动态估计误差; 确定所确定的动态估计误差是否可以与BIST表中的预先存在的BIST规则相关联; 当动态估计错误不能与BIST表中的任何预先存在的BIST规则相关联时，创建新的BIST规则; 并在无法创建新的BIST规则时停止该进程。

27. 发明申请

US20070234953A1 MONITORING A MONOLAYER DEPOSITION (MLD) SYSTEM USING A BUILT-IN SELF TEST (BIST) TABLE 失效
标题翻译：使用内置自检（BIST）表监测单层沉积（MLD）系统
公开(公告)号：US20070234953A1
公开(公告)日：2007-10-11
申请号：US11278382
申请日：2006-03-31
申请人： Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima
发明人： Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima
IPC分类号： B05C5/00
CPC分类号： G05B19/41875 , C23C16/45546 , C23C16/52 , G05B23/0254 , G05B2219/1112 , G05B2219/37514 , G05B2219/37533 , G05B2219/45031 , G05B2223/02 , Y02P90/14 , Y02P90/22 , Y02P90/26
摘要： A method of monitoring a processing system in real-time using low-pressure based modeling techniques that include processing one or more of wafers in a processing chamber; determining a measured dynamic process response for a rate of change for a process parameter; executing a real-time dynamic model to generate a predicted dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the expected process response; and comparing the dynamic estimation error to operational limits.
摘要翻译：一种使用基于低压的建模技术实时监控处理系统的方法，所述技术包括处理处理室中的一个或多个晶片; 确定针对过程参数的变化率的测量的动态过程响应; 执行实时动态模型以产生预测的动态过程响应; 使用预测的动态过程响应和预期过程响应之间的差来确定动态估计误差; 并将动态估计误差与运算极限进行比较。

28. 发明申请

US20070061652A1 Built-in self test for a thermal processing system 有权
标题翻译：热处理系统内置自检
公开(公告)号：US20070061652A1
公开(公告)日：2007-03-15
申请号：US11217276
申请日：2005-09-01
申请人： Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima
发明人： Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima
IPC分类号： G01R31/28
CPC分类号： H01L22/10 , G05B19/41875 , G05B23/0254 , H01L21/67248 , Y02P90/22
摘要： A method of creating and/or modifying a built-in self test (BIST) table for monitoring a thermal processing system in real-time that includes positioning a plurality of wafers in a processing chamber in the thermal processing system; executing a real-time dynamic model to generate a predicted dynamic process response; creating a measured dynamic process response; determining a dynamic estimation error; determining if the determined dynamic estimation error can be associated with a pre-existing BIST rule in the BIST table; creating a new BIST rule when the dynamic estimation error cannot be associated with any pre-existing BIST rule in the BIST table; and stopping the process when a new BIST rule cannot be created.
摘要翻译：一种创建和/或修改内置自检（BIST）表的方法，用于实时监测热处理系统，包括将多个晶片定位在热处理系统中的处理室中; 执行实时动态模型以产生预测的动态过程响应; 创建一个测量的动态过程响应; 确定动态估计误差; 确定所确定的动态估计误差是否可以与BIST表中的预先存在的BIST规则相关联; 当动态估计错误不能与BIST表中的任何预先存在的BIST规则相关联时，创建新的BIST规则; 并在无法创建新的BIST规则时停止该进程。

29. 发明授权

US07165011B1 Built-in self test for a thermal processing system 有权
标题翻译：热处理系统内置自检
公开(公告)号：US07165011B1
公开(公告)日：2007-01-16
申请号：US11217230
申请日：2005-09-01
申请人： Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima , Anthony Dip , David Smith , Raymond Joe , Sundar Gandhi
发明人： Sanjeev Kaushal , Pradeep Pandey , Kenji Sugishima , Anthony Dip , David Smith , Raymond Joe , Sundar Gandhi
IPC分类号： G06F11/30 , G06F15/00
CPC分类号： H01L22/10 , G05B23/0254 , H01L21/67248
摘要： A method of monitoring a thermal processing system in real-time using a built-in self test (BIST) table that includes positioning a plurality of wafers in a processing chamber in the thermal processing system; executing a real-time dynamic model to generate a predicted dynamic process response for the processing chamber during the processing time; creating a first measured dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the measured dynamic process response; and comparing the dynamic estimation error to operational thresholds established by one or more rules in the BIST table.
摘要翻译：一种使用内置自检（BIST）表实时监测热处理系统的方法，其包括将多个晶片定位在热处理系统中的处理室中; 执行实时动态模型以在处理时间期间为处理室生成预测的动态过程响应; 创建第一个测量动态过程响应; 使用预测的动态过程响应和测量的动态过程响应之间的差来确定动态估计误差; 以及将动态估计误差与由BIST表中的一个或多个规则建立的操作阈值进行比较。

30. 发明授权

US07126957B1 Media flow method for transferring real-time data between asynchronous and synchronous networks 失效
标题翻译：用于在异步和同步网络之间传输实时数据的媒体流方法
公开(公告)号：US07126957B1
公开(公告)日：2006-10-24
申请号：US10094232
申请日：2002-03-07
申请人： Sridhar G. Sharma Isukapalli , Pradeep Pandey , Matthew D. Shaver , Neal A. Schneider , Gary Tsztoo
发明人： Sridhar G. Sharma Isukapalli , Pradeep Pandey , Matthew D. Shaver , Neal A. Schneider , Gary Tsztoo
IPC分类号： H04L12/56 , H04J3/06
CPC分类号： H04L47/283 , H04L47/10 , H04L47/22 , H04L49/90 , H04L49/901 , H04L49/9031
摘要： A system for transmitting real-time data between an asynchronous network (104) and a synchronous network (106) is disclosed. A method (100) may include an ingress path (102) for transmitting data from an asynchronous system (104) to a synchronous system (106), and an egress path (108) for transmitting data from a synchronous system (106) to an asynchronous system (104). An ingress path (102) may include a packet receiver (110) and write to synchronous system (112) steps. An egress path (108) may include read from synchronous system (114), packetizer (116), and packet transmitter (118) steps.
摘要翻译：公开了一种用于在异步网络（104）和同步网络（106）之间传送实时数据的系统。方法（100）可以包括用于将数据从异步系统（104）发送到同步系统（106）的入口路径（102）和用于将数据从同步系统（106）发送到异步系统（104）。入口路径（102）可以包括分组接收器（110）和写入同步系统（112）步骤。出口路径（108）可以包括从同步系统（114），分组器（116）和分组发送器（118）步骤的读取。

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