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21. 发明授权

US07684895B2 Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event 有权
标题翻译：晶圆加载站，响应于非计划事件，自动从运动的输送机回缩
公开(公告)号：US07684895B2
公开(公告)日：2010-03-23
申请号：US10987452
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： G06F19/00
CPC分类号： H01L21/67769 , H01L21/67775 , H01L21/67778 , Y10S414/135 , Y10S414/136
摘要： In a first aspect, a wafer loading station adapted to exchange wafer carriers with a wafer carrier transport system comprises a biasing element adapted to urge the end effector of the wafer loading station away from a moveable conveyor of the wafer carrier transport system upon the occurrence of a unscheduled event such as a power failure or an emergency shutdown. In a second aspect, an uninterruptible power supply commands a controller to cause the wafer carrier handler to retract the end effector from the wafer carrier transport system upon the occurrence of the unscheduled event, and provides the power necessary for the same. Numerous other aspects are provided.
摘要翻译：在第一方面，一种适于与晶片载体传输系统交换晶片载体的晶片装载站包括偏置元件，该偏置元件适于在晶片载体传输系统发生时将晶片载体站的末端执行器远离晶片载体传输系统的可移动传送器一个非计划的事件，如停电或紧急停机。在第二方面，不间断电源命令控制器使晶片载体处理器在发生非预定事件时从晶片载体传输系统缩回端部执行器，并提供其所需的功率。提供了许多其他方面。

22. 发明申请

US20090308030A1 LOAD PORT CONFIGURATIONS FOR SMALL LOT SIZE SUBSTRATE CARRIERS 审中-公开
标题翻译：小尺寸基板载体的负载端口配置
公开(公告)号：US20090308030A1
公开(公告)日：2009-12-17
申请号：US12545145
申请日：2009-08-21
申请人： Martin R. Elliott , Michael R. Rice , Jeffrey C. Hudgens , Eric A. Englhardt , Victor Belitsky
发明人： Martin R. Elliott , Michael R. Rice , Jeffrey C. Hudgens , Eric A. Englhardt , Victor Belitsky
IPC分类号： B65B43/00 , F16M13/02
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67769
摘要： In a first aspect, a method of opening a substrate carrier is provided. The method includes moving the substrate carrier such that a door of the substrate carrier contacts a supporting member; employing the supporting member to support the door; moving a housing of the substrate carrier away from the supporting member; and pivoting the supporting member and door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种打开衬底载体的方法。该方法包括移动衬底载体，使得衬底载体的门接触支撑构件; 使用支撑构件来支撑门; 使所述基板载体的壳体远离所述支撑构件移动; 以及使所述支撑构件和门在所述衬底载体的底表面下方枢转。提供了许多其他方面。

23. 发明授权

US07611318B2 Overhead transfer flange and support for suspending a substrate carrier 失效
公开(公告)号：US07611318B2
公开(公告)日：2009-11-03
申请号：US10764820
申请日：2004-01-26
申请人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/6773 , H01L21/67733 , H01L21/67769 , H01L21/67778
摘要： In a first aspect, a first apparatus is provided for use in supporting a substrate carrier. The first apparatus includes an overhead transfer flange adapted to couple to a substrate carrier body and an overhead carrier support. The overhead transfer flange has a first side and a second side opposite the first side that is wider than the first side. Numerous other aspects are provided.

24. 发明授权

US07597183B2 Kinematic pin with shear member and substrate carrier for use therewith 失效
标题翻译：具有剪切构件的运动销和与其一起使用的基板载体
公开(公告)号：US07597183B2
公开(公告)日：2009-10-06
申请号：US11932224
申请日：2007-10-31
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G15/64
CPC分类号： H01L21/68 , H01L21/67775 , Y10S414/14 , Y10S414/141
摘要： A kinematic pin and a substrate carrier adapted to deter dislodgment of the substrate carrier from the kinematic pin are provided. A shear member on the kinematic pin interacts with a shear feature of the substrate carrier to deter lateral movement of the substrate carrier relative to the kinematic pin. A substrate carrier handler that employs the kinematic pin is also provided.
摘要翻译：提供了一种用于阻止衬底载体从运动销上移动的运动销和衬底载体。运动销上的剪切构件与衬底载体的剪切特征相互作用，以阻止衬底载体相对于运动销的横向移动。还提供了采用运动销的衬底载体处理器。

25. 发明申请

US20090205930A1 BREAK-AWAY POSITIONING CONVEYOR MOUNT FOR ACCOMMODATING CONVEYOR BELT BENDS 有权
标题翻译：用于承载输送机皮带的断开定位输送机
公开(公告)号：US20090205930A1
公开(公告)日：2009-08-20
申请号：US12430032
申请日：2009-04-24
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliot , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliot , Jeffrey C. Hudgens
IPC分类号： B65G47/38
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译：公开了一种用于连续运动的高速位置传送器系统的分离安装系统。支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力皮带和支撑架。安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

26. 发明授权

US07433756B2 Calibration of high speed loader to substrate transport system 失效
标题翻译：高速装载机对基板运输系统的校准
公开(公告)号：US07433756B2
公开(公告)日：2008-10-07
申请号：US10987956
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。提供了许多其他方面。

27. 发明授权

US07168553B2 Dynamically balanced substrate carrier handler 失效
标题翻译：动态平衡衬底载体处理器
公开(公告)号：US07168553B2
公开(公告)日：2007-01-30
申请号：US10988190
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G29/00
CPC分类号： H01L21/67733 , H01J37/32743 , H01L21/67736 , H01L21/67766 , H01L21/67775
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.
摘要翻译：在第一方面中，基板装载站由连续输送基板载体的输送机供给。作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。平衡块直接或间接地耦合到其上安装有基底载体处理器的框架上，并且适于在端部执行器加速时沿与端部执行器加速度的方向相反的方向加速。因此，惯性负载可以基本平衡，并且框架振动减小，尽管潜在的高加速率。提供了许多其他方面。

28. 发明授权

US07930061B2 Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback 有权
标题翻译：使用反馈装载和卸载移动输送机上的基板载体的方法和装置
公开(公告)号：US07930061B2
公开(公告)日：2011-04-19
申请号：US11867584
申请日：2007-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Jeffrey C. Hudgens , Kirk Van Katwyk
发明人： Michael R. Rice , Eric A. Englhardt , Jeffrey C. Hudgens , Kirk Van Katwyk
IPC分类号： G06F7/00 , G06F19/00 , G05B19/00 , H01L21/677 , B65G53/46 , B65G1/00 , E04H6/00
CPC分类号： H01L21/67775 , H01L21/67724 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769
摘要： The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to transfer a substrate carrier between a docking station and a transport system, the substrate carrier handler including an end effector adapted to support the substrate carrier; a controller coupled to the substrate carrier handler and operative to control the substrate carrier handler such that the end effector of the substrate carrier handler is operative to selectively engage and disengage the substrate carrier to and from the transport system while the substrate carrier is in motion; and a sensor coupled to the controller and operative to provide a signal to the controller indicative of information about the substrate carrier. The controller is operative to adjust operation of the substrate carrier handler based on the signal from the sensor if the adjustment may be performed within a load or unload stroke of the substrate carrier handler. Numerous other aspects are provided.
摘要翻译：本发明提供了用于将基板载体装载和卸载到运输系统上的系统和方法。本发明包括适于在对接站和传输系统之间传送衬底载体的衬底载体处理器，衬底载体处理器包括适于支撑衬底载体的端部执行器; 控制器，其耦合到所述衬底载体处理器并且可操作以控制所述衬底载体处理器，使得所述衬底载体处理器的末端执行器可操作以在所述衬底载体运动时选择性地将所述衬底载体接合和脱离所述传输系统; 以及耦合到所述控制器并且可操作地向控制器提供指示关于衬底载体的信息的信号的传感器。如果可以在衬底载体处理器的负载或卸载冲程中执行调整，则控制器可操作以基于来自传感器的信号来调整衬底载体处理器的操作。提供了许多其他方面。

29. 发明授权

US07912576B2 Calibration of high speed loader to substrate transport system 有权
标题翻译：高速装载机对基板运输系统的校准
公开(公告)号：US07912576B2
公开(公告)日：2011-03-22
申请号：US12245738
申请日：2008-10-04
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： G06F7/00
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In one aspect, a system is disclosed having a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; and a controller coupled to the substrate carrier loader, the controller adapted to assist in at least one of alignment of the substrate carrier loader to the moving conveyor and calibration of the substrate carrier loader to the moving conveyor or a storage location. Numerous other aspects are provided.
摘要翻译：在一个方面，公开了一种具有衬底载体加载器的系统，其适用于将衬底载体加载到移动的传送器上; 以及耦合到所述衬底载体装载器的控制器，所述控制器适于辅助所述衬底载体装载器对所述移动的传送器的对准中的至少一个以及所述衬底载体装载器校准到所述移动的传送器或存储位置。提供了许多其他方面。

30. 发明授权

US07798309B2 Stabilizing substrate carriers during overhead transport 有权
标题翻译：架空运输过程中稳定底物载体
公开(公告)号：US07798309B2
公开(公告)日：2010-09-21
申请号：US10988168
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G43/08
CPC分类号： B24B37/345 , H01L21/68707
摘要： In a first aspect, a first apparatus is provided for inter-station overhead transport of a substrate carrier. The first apparatus includes (1) an overhead transport mechanism; (2) a substrate carrier support suspended from the overhead transport mechanism and adapted to receive and support a substrate carrier; and (3) a stabilization apparatus adapted to limit rocking of the substrate carrier and substrate carrier support relative to the overhead transport mechanism. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种用于衬底载体的站间架空输送的第一装置。第一装置包括（1）架空运输机构; （2）悬架在架空运输机构上并适于接收和支撑衬底载体的衬底载体支撑件; 以及（3）稳定装置，其适于限制衬底载体和衬底载体支撑件相对于架空输送机构的摆动。提供了许多其他方面。

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