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21. 发明授权

US08004154B2 Piezoelectric actuation structure including an integrated piezoresistive strain gauge and its production method 有权
标题翻译：包括压电应变计的压电致动结构及其制造方法
公开(公告)号：US08004154B2
公开(公告)日：2011-08-23
申请号：US12898292
申请日：2010-10-05
申请人： Matthieu Cueff , Emmanuel Defay , François Perruchot , Patrice Rey
发明人： Matthieu Cueff , Emmanuel Defay , François Perruchot , Patrice Rey
IPC分类号： H01L41/08
CPC分类号： H01L41/094 , H01L41/0825 , H01L41/29 , H01L41/318 , H01L41/332 , Y10T29/42
摘要： The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure.
摘要翻译：本发明涉及一种压电致动结构，其包括至少一个应变计和至少一个致动器，其由布置在底部电极层和顶部电极层之间的至少一层压电材料层的衬底的表面上的堆叠产生，形成致动器的堆的至少一部分被布置在衬底中产生的腔的上方，其特征在于应变计是位于顶电极层和/或底电极层中的压阻计，所述层包括电极不连续使得可以制造所述压阻计。本发明还涉及这种结构的制造方法。

22. 发明申请

US20110072901A1 DEVICE AND METHOD FOR DETECTING ELEMENTS IN A FLUID ENVIRONMENT 有权
标题翻译：用于检测流体环境中元素的装置和方法
公开(公告)号：US20110072901A1
公开(公告)日：2011-03-31
申请号：US12937856
申请日：2009-04-14
申请人： Emmanuel Defay , Marc Aid , Pierre-Patrick Lassagne , Nicolas Sarrut-Rio
发明人： Emmanuel Defay , Marc Aid , Pierre-Patrick Lassagne , Nicolas Sarrut-Rio
IPC分类号： G01N29/036
CPC分类号： G01N29/022 , G01N2291/014 , G01N2291/0255 , G01N2291/0256 , G01N2291/0427
摘要： The device for detecting elements in a fluidic medium comprises at least one acoustic resonator having a surface intended for fixing the elements. The resonator includes means for generating and measuring Lamb waves, favouring the generation of symmetrical Lamb waves. The device analyses the resonant frequency of the resonator in order to determine the variation in the resonant frequency of the symmetrical Lamb waves representative of the presence of the elements.
摘要翻译：用于检测流体介质中的元件的装置包括至少一个具有用于固定元件的表面的声谐振器。谐振器包括用于产生和测量兰姆波的装置，有利于产生对称的兰姆波。器件分析谐振器的谐振频率，以便确定代表元件存在的对称兰姆波的谐振频率的变化。

23. 发明申请

US20060170073A1 Capacitor with high breakdown field 审中-公开
标题翻译：具有高击穿场的电容器
公开(公告)号：US20060170073A1
公开(公告)日：2006-08-03
申请号：US11336763
申请日：2006-01-23
申请人： Emmanuel Defay
发明人： Emmanuel Defay
IPC分类号： H01L29/94
CPC分类号： H01G4/12 , H01G4/20 , H01G4/33
摘要： The capacitor is a thin-film capacitor comprising two metal electrodes separated by a dielectric. The dielectric is formed by superposition of at least two sub-layers of preferably perovskite-based dielectric material. Two adjacent superposed dielectric sub-layers are separated by an electrically insulated metal intermediate layer, for example made of platinum. Using very thin dielectric sub-layers, preferably with a thickness of less than 20 nm, separated from one another by metal intermediate layers enables the increase of the breakdown field and the reduction of the leakage currents linked to a reduction of the thickness of the dielectric to be transposed to the level of the capacitor, while preserving a reasonable working field.
摘要翻译：电容器是包括由电介质隔开的两个金属电极的薄膜电容器。电介质通过至少两个优选基于钙钛矿的介电材料的子层的叠加而形成。两个相邻叠加的介电子层由例如由铂制成的电绝缘金属中间层分开。使用非常薄的电介质子层，优选地具有小于20nm的厚度，通过金属中间层彼此分离，使得能够增加击穿场的增加和与电介质的厚度减小相关的漏电流的减少被转置到电容器的电平，同时保持合理的工作场。

24. 发明授权

US08736145B2 Electromechanical transducer device and method of forming a electromechanical transducer device 有权
标题翻译：机电换能器装置及形成机电换能装置的方法
公开(公告)号：US08736145B2
公开(公告)日：2014-05-27
申请号：US13128032
申请日：2009-11-25
申请人： Lianjun Liu , Sergio Pacheco , Francois Perruchot , Emmanuel Defay , Patrice Rey
发明人： Lianjun Liu , Sergio Pacheco , Francois Perruchot , Emmanuel Defay , Patrice Rey
IPC分类号： H01L41/06 , H01L41/09
CPC分类号： B81B3/0072 , B81B2201/032 , H01L41/0933 , H01L41/094
摘要： A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure having at least one mechanical layer having a first thermal response characteristic, at least one layer of the actuating structure having a second thermal response characteristic different to the first thermal response characteristic, and a thermal compensation structure having at least one thermal compensation layer. The thermal compensation layer is different to the at least one layer and is arranged to compensate a thermal effect produced by the mechanical layer and the at least one layer of the actuating structure such that the movement of the movable structure is substantially independent of variations in temperature.
摘要翻译：形成在半导体衬底上的微型或纳米机电换能器装置包括可移动结构，其被布置成响应于致动结构的致动而是可移动的。可移动结构包括具有至少一个具有第一热响应特性的机械层的机械结构，至少一层致动结构具有不同于第一热响应特性的第二热响应特性，以及至少具有至少一个热补偿层。热补偿层不同于至少一个层，并且被布置成补偿由机械层和致动结构的至少一个层产生的热效应，使得可移动结构的运动基本上与温度变化无关。

25. 发明授权

US08715517B2 Process for fabricating an acoustic wave resonator comprising a suspended membrane 有权
标题翻译：制造包括悬浮膜的声波谐振器的方法
公开(公告)号：US08715517B2
公开(公告)日：2014-05-06
申请号：US13314844
申请日：2011-12-08
申请人： Bruno Imbert , Emmanuel Defay , Chrystel Deguet , Hubert Moriceau , Mathieu Pijolat
发明人： Bruno Imbert , Emmanuel Defay , Chrystel Deguet , Hubert Moriceau , Mathieu Pijolat
IPC分类号： H03H3/08 , H03H3/00 , B32B37/30
CPC分类号： H03H3/08 , B32B37/30 , H03H3/00 , H03H3/02 , H03H9/173 , H03H2003/021
摘要： A process for fabricating an acoustic wave resonator comprising a suspended membrane comprising a piezoelectric material layer, comprises the following steps: production of a first stack comprising at least one layer of first piezoelectric material on the surface of a first substrate; production of a second stack comprising at least one second substrate; production of at least one non-bonding initiating zone by deposition or creation of particles of controlled sizes leaving the surface of one of said stacks endowed locally with projecting nanostructures before a subsequent bonding step; direct bonding of said two stacks creating a blister between the stacks, due to the presence of the non-bonding initiating zone; and, thinning of the first stack to eliminate at least the first substrate.
摘要翻译：一种用于制造包括压电材料层的悬浮膜的声波谐振器的方法，包括以下步骤：在第一衬底的表面上制备包括至少一层第一压电材料的第一叠层; 制备包括至少一个第二基底的第二叠层; 通过沉积或产生具有受控尺寸的颗粒的至少一个非结合起始区的产生，离开所述堆之一的表面在随后的结合步骤之前局部地赋予突出的纳米结构; 由于存在非结合起始区，所述两个堆叠的直接结合在堆叠之间产生泡罩; 以及使所述第一叠层变薄以至少消除所述第一衬底。

26. 发明授权

US08692443B2 Electrical component comprising a material with a perovskite structure and optimized electrodes and fabrication process 有权
标题翻译：电气部件包括具有钙钛矿结构的材料和优化的电极和制造工艺
公开(公告)号：US08692443B2
公开(公告)日：2014-04-08
申请号：US13481476
申请日：2012-05-25
申请人： Matthieu Cueff , Emmanuel Defay , Gwenael Le Rhun
发明人： Matthieu Cueff , Emmanuel Defay , Gwenael Le Rhun
IPC分类号： H01L41/047
CPC分类号： H01L41/29 , H01L41/0477 , H01L41/0478 , H01L41/0815
摘要： An electrical component comprises a lead-based perovskite crystal material layer between a lower electrode on the surface of a substrate and an upper electrode, characterized in that the lower electrode comprises a stabilizing first layer made of a first material and a seeding second layer made of a second material, the first and second materials having the same chemical composition but different structural parameters and/or densities. A process for fabricating a component is also provided, in which the material with a perovskite structure may be PZT with a (100) or (111) orientation.
摘要翻译：电气部件包括在基板表面的下电极和上电极之间的铅基钙钛矿晶体材料层，其特征在于，所述下电极包括由第一材料制成的稳定化第一层和由第二材料，第一和第二材料具有相同的化学组成但不同的结构参数和/或密度。还提供了一种制造组件的方法，其中具有钙钛矿结构的材料可以是具有（100）或（111）取向的PZT。

27. 发明授权

US08513042B2 Method of forming an electromechanical transducer device 有权
标题翻译：形成机电换能器装置的方法
公开(公告)号：US08513042B2
公开(公告)日：2013-08-20
申请号：US13320579
申请日：2010-06-15
申请人： Francois Perruchot , Lianjun Liu , Sergio Pacheco , Emmanuel Defay , Patrice Rey
发明人： Francois Perruchot , Lianjun Liu , Sergio Pacheco , Emmanuel Defay , Patrice Rey
IPC分类号： H01L21/00
CPC分类号： B81C1/00666 , B81B2203/0118 , B81C2201/0167 , B81C2201/0169
摘要： A method of forming an electromechanical transducer device comprises forming on a fixed structure a movable structure and an actuating structure of the electromechanical transducer device, wherein the movable structure is arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure. The method further comprises providing a stress trimming layer on at least part of the movable structure, after providing the stress trimming layer, releasing the movable structure from the fixed structure to provide a released electromechanical transducer device, and after releasing the movable structure changing stress in the stress trimming layer of the released electromechanical transducer device such that the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state.
摘要翻译：一种形成机电换能器装置的方法包括在固定结构上形成机电换能器装置的可移动结构和致动结构，其中可移动结构被布置成在机电换能器装置的操作中相对于固定结构可移动响应致动结构的致动。该方法还包括在提供应力修剪层之后，在可移动结构的至少一部分上提供应力修剪层，将可移动结构从固定结构释放以提供释放的机电换能器装置，以及在释放可移动结构之后，改变应力释放的机电换能器装置的应力修剪层，使得当机电换能器装置处于关闭状态时，可移动结构相对于固定结构偏转预定量。

28. 发明授权

US08460987B2 Method for obtaining a layer of AlN having substantially vertical sides 有权
标题翻译：获得具有大致垂直侧面的AlN层的方法
公开(公告)号：US08460987B2
公开(公告)日：2013-06-11
申请号：US13097686
申请日：2011-04-29
申请人： Marc Aid , Emmanuel Defay , Aude Lefevre , Guy-Michel Parat
发明人： Marc Aid , Emmanuel Defay , Aude Lefevre , Guy-Michel Parat
IPC分类号： H01L21/20
CPC分类号： H01L21/31122 , H01L21/31105 , H01L41/316 , H01L41/332
摘要： A method for producing a layer of AlN having substantially vertical sides relative to the surface of a substrate, including: the formation of an AlN growth layer on a substrate, the deposition of the AlN layer, on at least said growth layer, the formation of a mask layer over the AlN layer, at least one edge of which is aligned with at least one edge or side of the growth layer, in a plane which is substantially perpendicular to a surface of the substrate or a surface of the growth layer, and the etching of the AlN layer.
摘要翻译：一种制造具有相对于衬底表面具有大致垂直侧面的AlN层的方法，包括：在衬底上形成AlN生长层，在至少所述生长层上沉积AlN层，形成在AlN层上的掩模层，其至少一个边缘与生长层的至少一个边缘或一侧对准，该平面基本垂直于基底的表面或生长层的表面，以及蚀刻AlN层。

29. 发明申请

US20120206216A1 ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME 有权
标题翻译：包括表面波浪滤波器和大容量波形滤波器的声波装置及其制造方法
公开(公告)号：US20120206216A1
公开(公告)日：2012-08-16
申请号：US13500614
申请日：2010-10-04
申请人： Chrystel Deguet , Laurent Clavelier , Emmanuel Defay , Alexandre Reinhardt
发明人： Chrystel Deguet , Laurent Clavelier , Emmanuel Defay , Alexandre Reinhardt
IPC分类号： H03H9/205 , H03H3/02
CPC分类号： H03H3/08 , H03H3/02 , H03H2003/0071 , Y10T29/42
摘要： An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.
摘要翻译：一种声波装置，包括至少一个表面声波滤波器和一个体声波滤波器，该装置包括在包括第二压电材料的基板上，包括第一金属层和第一单晶压电材料层其中，所述层的一部分被部分蚀刻以限定其中存在所述第一和第二压电材料的第一区域和不存在所述第一压电材料的第二区域; 在第一区域处的第二金属化，用于限定集成第一压电材料的体声滤波器，以及在第二区域处的第三金属化，用于限定整合第二压电材料的表面声波滤波器。

30. 发明申请

US20120056308A1 METHOD OF FORMING AN ELECTROMECHANICAL TRANSDUCER DEVICE 有权
标题翻译：形成机电传感器装置的方法
公开(公告)号：US20120056308A1
公开(公告)日：2012-03-08
申请号：US13320579
申请日：2010-06-15
申请人： Francois Perruchot , Lianjun Liu , Sergio Pacheco , Emmanuel Defay , Patrice Rey
发明人： Francois Perruchot , Lianjun Liu , Sergio Pacheco , Emmanuel Defay , Patrice Rey
IPC分类号： H01L29/66 , H01L21/66
CPC分类号： B81C1/00666 , B81B2203/0118 , B81C2201/0167 , B81C2201/0169
摘要： A method of forming an electromechanical transducer device comprises forming on a fixed structure a movable structure and an actuating structure of the electromechanical transducer device, wherein the movable structure is arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure. The method further comprises providing a stress trimming layer on at least part of the movable structure, after providing the stress trimming layer, releasing the movable structure from the fixed structure to provide a released electromechanical transducer device, and after releasing the movable structure changing stress in the stress trimming layer of the released electromechanical transducer device such that the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state.
摘要翻译：一种形成机电换能器装置的方法包括在固定结构上形成机电换能器装置的可移动结构和致动结构，其中可移动结构被布置成在机电换能器装置的操作中相对于固定结构可移动响应致动结构的致动。该方法还包括在提供应力修剪层之后，在可移动结构的至少一部分上提供应力修剪层，将可移动结构从固定结构释放以提供释放的机电换能器装置，以及在释放可移动结构之后，改变应力释放的机电换能器装置的应力修剪层，使得当机电换能器装置处于关闭状态时，可移动结构相对于固定结构偏转预定量。

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