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21. 发明申请

US20090168260A1 Layered return poles for magnetic write heads 有权
标题翻译：磁性写头的分层返回极
公开(公告)号：US20090168260A1
公开(公告)日：2009-07-02
申请号：US12005558
申请日：2007-12-26
申请人： Donald G. Allen , Hieu Lam , Terence Tin-Lok Lam , Steve C. Puga
发明人： Donald G. Allen , Hieu Lam , Terence Tin-Lok Lam , Steve C. Puga
IPC分类号： G11B5/33
CPC分类号： G11B5/3153 , G11B5/1278
摘要： Methods and structures for the fabrication of both thin film longitudinal and perpendicular write heads are disclosed. A unique feature of these write heads is the inclusion of layered return poles, which comprise alternating layers of 22/78 and 80/20 NiFe alloys. The alternating layers also vary in thickness, the 22/78 NiFe layers having a nominal thickness of 1500 angstroms and the 80/20 NiFe layers having a nominal thickness of about 75 angstroms. Head efficiency and signal to noise ratios are significantly improved in heads having layered return pole construction.
摘要翻译：公开了用于制造薄膜纵向和垂直写入头的方法和结构。这些写头的一个独特之处在于包含层叠的返回极，其包括22/78和80/20 NiFe合金的交替层。交替层的厚度也变化，22/78 NiFe层的标称厚度为1500埃，而80/20 NiFe层的标称厚度为约75埃。在具有分层回极结构的头部中，头部效率和信噪比显着提高。

22. 发明申请

US20050252884A1 Method and system for predicting process performance using material processing tool and sensor data 审中-公开
标题翻译：使用材料加工工具和传感器数据预测工艺性能的方法和系统
公开(公告)号：US20050252884A1
公开(公告)日：2005-11-17
申请号：US10517762
申请日：2003-06-27
申请人： Hieu Lam , Hongyu Yue , John Shriner
发明人： Hieu Lam , Hongyu Yue , John Shriner
IPC分类号： H01L21/3065 , C23F1/00 , G05B19/418 , G05B23/02 , H01L21/66
CPC分类号： H01L22/20 , G05B19/41875 , G05B23/0254 , G05B2219/31357 , G05B2219/32179 , G05B2219/32194 , G05B2219/45028 , G05B2219/45031 , H01J37/32935 , Y02P90/14 , Y02P90/22
摘要： A material processing system including a process tool and a process performance prediction system. The performance prediction system includes sensors coupled to the tool to measure tool data and a controller coupled to the sensors to receive tool data, where the controller is configured to predict the process performance for the tool using the tool data. A method for detecting a fault in a material processing system using a process performance prediction model is also provided. The method includes preparing the tool, initiating a process in the tool, and recording tool data to form to a tool data matrix. The method also includes performing a matrix multiplication of the tool data matrix and a correlation matrix to form predicted process performance data, where the correlation matrix includes the performance prediction model, comparing the predicted data with target data, and determining a fault condition of the processing system from the comparing step.
摘要翻译：一种材料处理系统，包括处理工具和过程性能预测系统。性能预测系统包括耦合到工具以测量工具数据的传感器和耦合到传感器以接收工具数据的控制器，其中控制器被配置为使用工具数据预测工具的过程性能。还提供了使用过程性能预测模型来检测材料处理系统中的故障的方法。该方法包括准备工具，启动工具中的过程，以及记录工具数据以形成工具数据矩阵。该方法还包括执行刀具数据矩阵和相关矩阵的矩阵乘法以形成预测过程性能数据，其中相关矩阵包括性能预测模型，将预测数据与目标数据进行比较，以及确定处理的故障状况系统从比较步骤。

23. 发明申请

US20050211669A1 Method and system of discriminating substrate type 有权
标题翻译：识别基板类型的方法和系统
公开(公告)号：US20050211669A1
公开(公告)日：2005-09-29
申请号：US10809474
申请日：2004-03-26
申请人： Hieu Lam , Hongyu Yue
发明人： Hieu Lam , Hongyu Yue
IPC分类号： G01L21/30 , G01N21/68
CPC分类号： G01N21/68
摘要： A method and system for determining a substrate type during a seasoning process is presented. An optical signal is acquired from a process in a plasma processing system, and the optical signal is compared to a pre-determined threshold value. Depending upon the comparison, the substrate type is determined to be of a correct type, or an incorrect type.
摘要翻译：提出了一种在调味过程中确定底物类型的方法和系统。从等离子体处理系统中的处理获取光信号，将光信号与预定阈值进行比较。根据比较，基板类型被确定为正确的类型或不正确的类型。

24. 发明授权

US07990651B2 Method of manufacturing a perpendicular magnetic write head with stepped trailing magnetic shield with electrical lapping guide control 有权
标题翻译：使用带电研磨导向器控制的具有阶梯式后跟磁屏蔽的垂直磁性写头的制造方法
公开(公告)号：US07990651B2
公开(公告)日：2011-08-02
申请号：US11956292
申请日：2007-12-13
申请人： Wen-Chien David Hsiao , Hieu Lam , Vladimir Nikitin , Sue Siyang Zhang , Yi Zheng
发明人： Wen-Chien David Hsiao , Hieu Lam , Vladimir Nikitin , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/187
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3166 , G11B5/3169
摘要： A method for manufacturing a magnetic write head having a stepped trailing shield. The stepped trailing shield is formed by forming a non-magnetic bump over a write pole prior to electroplating a wrap-around magnetic shield. The method allows the location of the front edge of the bump relative to the back edge of the wrap-around shield to be monitored by measuring the electrical resistance of an electrical lapping guide formed concurrently with these features. This concurrent formation of a lapping guide can be used to define the relative location of other features as well, such as the location of a back edge of a wrap-around shield relative to a flare point of a write pole.
摘要翻译：一种用于制造具有阶梯式后挡板的磁写头的方法。在电镀环绕磁屏蔽之前，通过在写入极上形成非磁性凸块来形成阶梯式后屏蔽。该方法允许通过测量与这些特征同时形成的电研磨引导件的电阻来监测凸块的前边缘相对于环绕护罩的后边缘的位置。研磨引导件的这种同时形成也可以用于限定其它特征的相对位置，例如环绕屏蔽件的后边缘相对于写入极点的扩张点的位置。

25. 发明授权

US07933096B2 Layered return poles for magnetic write heads 有权
标题翻译：用于磁性写入头的分层返回极
公开(公告)号：US07933096B2
公开(公告)日：2011-04-26
申请号：US12005558
申请日：2007-12-26
申请人： Donald G. Allen , Hieu Lam , Terence Tin-Lok Lam , Steve C. Puga
发明人： Donald G. Allen , Hieu Lam , Terence Tin-Lok Lam , Steve C. Puga
IPC分类号： G11B5/33
CPC分类号： G11B5/3153 , G11B5/1278
摘要： Methods and structures for the fabrication of both thin film longitudinal and perpendicular write heads are disclosed. A unique feature of these write heads is the inclusion of layered return poles, which comprise alternating layers of 22/78 and 80/20 NiFe alloys. The alternating layers also vary in thickness, the 22/78 NiFe layers having a nominal thickness of 1500 angstroms and the 80/20 NiFe layers having a nominal thickness of about 75 angstroms. Head efficiency and signal to noise ratios are significantly improved in heads having layered return pole construction.
摘要翻译：公开了用于制造薄膜纵向和垂直写入头的方法和结构。这些写头的一个独特之处在于包含层叠的返回极，其包括22/78和80/20 NiFe合金的交替层。交替层的厚度也变化，22/78 NiFe层的标称厚度为1500埃，而80/20 NiFe层的标称厚度为约75埃。在具有分层回极结构的头部中，头部效率和信噪比显着提高。

26. 发明申请

US20080110761A1 Metal capped seed layers for the fabrication of wrap around and trailing shields 失效
标题翻译：金属盖种子层用于制造包裹和后盾
公开(公告)号：US20080110761A1
公开(公告)日：2008-05-15
申请号：US11595764
申请日：2006-11-10
申请人： Hieu Lam , Patrick Rush Webb , Yi Zheng
发明人： Hieu Lam , Patrick Rush Webb , Yi Zheng
IPC分类号： C25D3/56
CPC分类号： C25D5/022 , C23C28/021 , C23C28/023 , C23C28/04 , C23C28/343 , G11B5/112 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Methods and structures for the fabrication of wrap around and trailing shield structures are disclosed. Capped seed layers having a dual layer structure are utilized, improving photo resist adhesion and plated shield adhesion, without the need to deposit, then remove, traditional inorganic anti-reflection coatings prior to shield plating.
摘要翻译：公开了用于制造包裹和后挡板结构的方法和结构。利用具有双层结构的覆盖种子层，提高光致抗蚀剂粘附性和镀层屏蔽粘附性，而不需要在屏蔽电镀之前沉积，然后除去传统的无机抗反射涂层。

27. 发明申请

US20050234574A1 Controlling a material processing tool and performance data 有权
标题翻译：控制材料加工工具和性能数据
公开(公告)号：US20050234574A1
公开(公告)日：2005-10-20
申请号：US10512863
申请日：2003-06-27
申请人： Hieu Lam , Hongyu Yue
发明人： Hieu Lam , Hongyu Yue
IPC分类号： H01L21/3065 , G05B19/418 , G06F19/00 , H01L21/205
CPC分类号： G05B19/41865 , G05B2219/31443 , G05B2219/32366 , G05B2219/45031 , Y02P90/20 , Y02P90/26
摘要： According to an embodiment of the present invention, a material processing systeme (1) including a process tool (10) and a process performance control system (100). The process performance control system (100) includes a process performance controller (55) coupled to the process tool (10), where the process performance controller (55) includes a process performance prediction model (110), a process recipe correction filter (120), a process controller (130), and process performance model correction algorithm (150). The process performance prediction model (110) is configured to receive tool data from a plurality of sensors coupled to process tool (10) and to predict process performance data. The process recipe correction filter (120) is coupled to the process performance prediction model (110) and configured to receive predicted process performance data and generate a process recipe correction for run-to-run process control. The process controller (130) is coupled to the process recipe correction filter (120) and is configured to update a process recipe according to the process recipe correction.
摘要翻译：根据本发明的实施例，一种包括处理工具（10）和过程执行控制系统（100）的材料处理系统（1）。过程性能控制系统（100）包括耦合到处理工具（10）的过程性能控制器（55），其中过程性能控制器（55）包括过程性能预测模型（110），过程配方校正过滤器（120）），过程控制器（130）和过程执行模型校正算法（150）。过程性能预测模型（110）被配置为从耦合到过程工具（10）的多个传感器接收工具数据并预测过程性能数据。过程配方校正滤波器（120）耦合到过程性能预测模型（110）并且被配置为接收预测的过程性能数据并且生成用于运行过程控制的过程配方校正。过程控制器（130）耦合到过程配方校正过滤器（120），并被配置为根据处理配方校正更新过程配方。

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