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    • 22. 发明授权
    • ESD protection structure using LDMOS diodes with thick copper
interconnect
    • 使用具有厚铜互连的LDMOS二极管的ESD保护结构
    • US5468984A
    • 1995-11-21
    • US333407
    • 1994-11-02
    • Taylor R. EflandDave CottonDale J. Skelton
    • Taylor R. EflandDave CottonDale J. Skelton
    • H01L29/78H01L21/8234H01L27/02H01L27/088H01L29/866H01L27/085
    • H01L27/0255H01L23/4824H01L2924/0002Y10S438/983
    • An interconnection structure and method for a multiple zener diode ESD protectoin circuit for power semiconductor devices. A plurality of lateral Zener diodes is formed. Each device is formed of a plurality of cathode and anode diffusion regions to be coupled together to form the cathode and anode of one or more Zener diodes. Each diffusion region has a first metal layer stripe formed over it and in electrical contact with it. A second metal layer conductor is formed over a plurality of the first metal layer stripes, and selectively contacts the first metal layer stripes to form a bus. A thick third metal layer is then formed over each second metal layer bus, either physically contacting it or selectively electrically contacting it. The thick third level metal is fabricated of a highly conductive material, such as copper. The resulting Zener diodes are coupled together in an ESD structure using the second level busses and the thick copper third level busses. The ESD structure of the preferred embodiment has low overall resistance and fast time to breakdown and provides excellent protection for the circuits to be protected. Other devices, systems and methods are also disclosed.
    • 用于功率半导体器件的多齐纳二极管ESD保护电路的互连结构和方法。 形成多个侧向齐纳二极管。 每个器件由多个阴极和阳极扩散区域形成,以被耦合在一起以形成一个或多个齐纳二极管的阴极和阳极。 每个扩散区具有形成在其上并与其电接触的第一金属层条纹。 第二金属层导体形成在多个第一金属层条纹上,并且选择性地接触第一金属层条纹以形成总线。 然后在每个第二金属层母线上形成厚的第三金属层,或者物理地接触它或选择性地电接触它。 厚的第三级金属由诸如铜的高导电材料制成。 所得的齐纳二极管使用第二级总线和厚铜第三级总线以ESD结构耦合在一起。 优选实施例的ESD结构具有低的总体电阻和快速的击穿时间,并且为要保护的电路提供优异的保护。 还公开了其他装置,系统和方法。
    • 25. 发明授权
    • Low cost fabrication method for high voltage, high drain current MOS transistor
    • 低成本高漏极电流MOS晶体管制造方法
    • US06930005B2
    • 2005-08-16
    • US10725642
    • 2003-12-02
    • Taylor R. EflandJozef C. MitrosImran Khan
    • Taylor R. EflandJozef C. MitrosImran Khan
    • H01L21/336H01L21/8234H01L29/08H01L29/10H01L29/423H01L29/78
    • H01L29/0847H01L29/0878H01L29/1083H01L29/1087H01L29/42368H01L29/66659H01L29/7835
    • A method for reducing the drain resistance of a drain-extended MOS transistor in a semiconductor wafer, while maintaining a high transistor breakdown voltage. The method provides a first well (502) of a first conductivity type, operable as the extension of the transistor drain (501) of the first conductivity type; portions of the well are covered by a first insulator (503) having a first thickness. A second well (504) of the opposite conductivity type is intended to contain the transistor source (506) of the first conductivity type; portions of the second well are covered by a second insulator (507) thinner than the first insulator. The first and second wells form a junction (505) that terminates at the second insulator (530a, 530b). The method deposits a photoresist layer (510) over the wafer, which is patterned by opening a window (510a) that extends from the drain to the junction termination. Next, ions (540) of the first conductivity type are implanted through the window into the first well; these said ions have an energy to limit the penetration depth (541) to the first insulator thickness, and a dose to create a well region (560) of high doping concentration adjacent to the junction termination (530a).
    • 一种在保持高晶体管击穿电压的同时降低半导体晶片中的漏极扩展MOS晶体管的漏极电阻的方法。 该方法提供第一导电类型的第一阱(50​​2),其可操作为第一导电类型的晶体管漏极(501)的延伸; 阱的一部分被具有第一厚度的第一绝缘体(503)覆盖。 相反导电类型的第二阱(504)旨在包含第一导电类型的晶体管源(506); 第二阱的部分被比第一绝缘体薄的第二绝缘体(507)覆盖。 第一和第二阱形成终止于第二绝缘体(530a,530b)的结(505)。 该方法将光致抗蚀剂层(510)沉积在晶片之上,其通过打开从漏极延伸到结终端的窗口(510a)而被图案化。 接下来,通过窗口将第一导电类型的离子(540)注入到第一阱中; 这些所述离子具有将穿透深度(541)限制到第一绝缘体厚度的能量,以及用于产生邻近连接终端(530a)的高掺杂浓度的阱区(560)的剂量。
    • 26. 发明授权
    • MOS transistors having higher drain current without reduced breakdown voltage
    • MOS晶体管具有较高的漏极电流,而不降低击穿电压
    • US06873021B1
    • 2005-03-29
    • US10725641
    • 2003-12-02
    • Jozef C. MitrosImran KhanTaylor R. Efland
    • Jozef C. MitrosImran KhanTaylor R. Efland
    • H01L21/336H01L29/08H01L29/10H01L29/423H01L29/76H01L29/78
    • H01L29/7816H01L29/0878H01L29/1095H01L29/42368H01L29/66681
    • A drain-extended MOS transistor in a semiconductor wafer (300) of a first conductivity type comprises a first well (315) of the first conductivity type, operable as the extension of the transistor drain (305) of the first conductivity type, and covered by a first insulator (312) having a first thickness, and further a second well (302) of the opposite conductivity type, intended to contain the transistor source (304) of the first conductivity type, and covered by a second insulator (311) thinner than said first insulator (312). First and second wells form a junction (330) that terminates (320, 321) at the second insulator. The first well has a region (360) in the proximity of the junction termination, which has a higher doping concentration than the remainder of the first well and extends not deeper than the first insulator thickness. Region (360) of higher doping concentration reduces the transistor drain resistance so that the drain current is increased to approximately twice the value it had without the higher doping concentration, while the transistor breakdown voltage remains determined by the (low) doping concentration of the remainder of first well (315).
    • 第一导电类型的半导体晶片(300)中的漏极扩展MOS晶体管包括第一导电类型的第一阱(315),可用作第一导电类型的晶体管漏极(305)的延伸部分,并且被覆盖 通过具有第一厚度的第一绝缘体(312)和另外具有相反导电类型的第二阱(302),用于容纳第一导电类型的晶体管源(304),并被第二绝缘体(311)覆盖, 比所述第一绝缘体(312)薄。 第一和第二阱形成在第二绝缘体处终止(320,321)的结(330)。 第一阱具有在接合端子附近的区域(360),其具有比第一阱的其余部分更高的掺杂浓度,并且延伸不比第一绝缘体厚度更深。 掺杂浓度较高的区域(360)降低了晶体管漏极电阻,使得漏极电流增加到其没有较高掺杂浓度的值的两倍,而晶体管击穿电压保持由其余部分的(低)掺杂浓度确定 的第一井(315)。
    • 27. 发明授权
    • Distributed power device with dual function minority carrier reduction
    • 具有双功能少数载波减少的分布式功率器件
    • US06710427B2
    • 2004-03-23
    • US10167136
    • 2002-06-11
    • Taylor R. EflandDavid A. GrantRamanathan RamaniChin-Yu TsaiDavid D. BriggsDale Skelton
    • Taylor R. EflandDavid A. GrantRamanathan RamaniChin-Yu TsaiDavid D. BriggsDale Skelton
    • H01L2900
    • H01L29/1083H01L21/761H01L21/765H01L29/1045H01L29/7835
    • A distributed power device (100) including a plurality of tank regions (90) separated from one another by a deep n-type region (16), and having formed in each tank region a plurality of transistors (50). The plurality of transistors (50) in each tank region are interconnected to transistors in other tank regions to form a large power FET, whereby the deep n-type regions isolate the tank regions from one another. A first parasitic diode (D5) is defined from each tank region to a buried layer, and a second parasitic diode (D4) is defined between the buried layer and a substrate. The deep n-type regions distribute the first and second parasitic diodes with respect to the plurality of tank regions, preferably comprised of a P-epi tank. The deep n-type regions also distribute the resistance of an NBL layer (14) formed under the tank regions. The distributed parasitic diodes and resistance of the NBL layer advantageously provides that the parasitic diode (D4) between the NBL layer and the substrate will never be forward biased. In addition, each of the tank regions has a heavily doped p-type region (56) reducing the minority carrier lifetime to provide increased switching speed of the large power FET.
    • 一种分布式功率器件(100),包括通过深n型区域(16)彼此分离的多个槽区(90),并且在每个槽区中形成有多个晶体管(50)。 每个槽区中的多个晶体管(50)与其它罐区中的晶体管相互连接以形成大功率FET,由此深n型区域将罐区彼此隔离。 第一寄生二极管(D5)从每个槽区限定到埋层,并且在掩埋层和衬底之间限定第二寄生二极管(D4)。 深n型区域相对于多个罐区域分布第一和第二寄生二极管,优选地由P-epi罐组成。 深n型区域还分布形成在罐区域下方的NBL层(14)的电阻。 分布式寄生二极管和NBL层的电阻有利地提供NBL层和衬底之间的寄生二极管(D4)将永远不会被正向偏置。 此外,每个槽区具有重掺杂的p型区(56),减少了少量载流子寿命,以提供大功率FET的提高的开关速度。
    • 28. 发明授权
    • Sensing of current in a synchronous-buck power stage
    • 在同步降压功率级中检测电流
    • US6160388A
    • 2000-12-12
    • US213681
    • 1998-12-17
    • Dale J. SkeltonChao-Chih ChiuTaylor R. Efland
    • Dale J. SkeltonChao-Chih ChiuTaylor R. Efland
    • H02M3/158G05F1/563
    • H02M3/1588H02M2001/0009Y02B70/1466
    • A DC-DC converter that generates a sense signal representing a voltage drop across a low-side switch when the low-side switch is on. The sense signal is inverted and stored in a "hold" capacitor until the beginning of the next switching cycle. More specifically, an input node receives an input voltage V.sub.IN. A driver stage coupled to the input node and to a reference node chops V.sub.IN into a square wave under control of a PWM signal. The chopped V.sub.IN signal is coupled to an intermediate output node. An output stage coupled to the intermediate output node converts the chopped V.sub.IN signal to an output voltage V.sub.OUT to a load coupled to an output node. A sense unit coupled to sense a voltage on the intermediate output node generates a voltage signal indicating current flowing in the load.
    • DC-DC转换器,当低侧开关接通时,产生表示低侧开关上的电压降的感测信号。 感测信号被反相并存储在“保持”电容器中,直到下一个开关周期的开始。 更具体地,输入节点接收输入电压VIN。 耦合到输入节点和参考节点的驱动器级在PWM信号的控制下将VIN划分成方波。 斩波的VIN信号耦合到中间输出节点。 耦合到中间输出节点的输出级将斩波的VIN信号转换为耦合到输出节点的负载的输出电压VOUT。 耦合以感测中间输出节点上的电压的感测单元产生指示在负载中流动的电流的电压信号。