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21. 发明授权

US06440643B1 Method of making inkjet print head with patterned photoresist layer having features with high aspect ratios 有权
标题翻译：制造具有高纵横比特征的图案化光刻胶层的喷墨打印头的方法
公开(公告)号：US06440643B1
公开(公告)日：2002-08-27
申请号：US09921112
申请日：2001-08-02
申请人： Mildred Calistri-Yeh , Cathie J. Burke , Diane Atkinson
发明人： Mildred Calistri-Yeh , Cathie J. Burke , Diane Atkinson
IPC分类号： B41J2135
CPC分类号： B41J2/14129 , B41J2202/03
摘要： Patterned photoresist layers formed on substrates have features with high aspect ratios. The photoresist layers can be formed as single layers with aspect ratios as high as about 4:1. In addition, the features in the photoresist layers can have a wide range of aspect ratios in a given single layer. The photoresist layers can be used in ink jet print heads and other devices to provide controlled fluid flow. The photoresist layers are formed using a contrast enhancement material that enables features having substantially vertical side walls and high aspect ratios to be formed.
摘要翻译：形成在基板上的图案化光致抗蚀剂层具有高纵横比的特征。光致抗蚀剂层可以形成为具有高达约4:1的纵横比的单层。此外，光刻胶层中的特征可以在给定的单层中具有宽范围的纵横比。光致抗蚀剂层可用于喷墨打印头和其它装置中以提供受控的流体流动。使用对比增强材料形成光致抗蚀剂层，其使得能够形成具有基本上垂直的侧壁和高纵横比的特征。

22. 发明授权

US06294317B1 Patterned photoresist structures having features with high aspect ratios and method of forming such structures 有权
标题翻译：具有高纵横比特征的图案化光致抗蚀剂结构和形成这种结构的方法
公开(公告)号：US06294317B1
公开(公告)日：2001-09-25
申请号：US09352956
申请日：1999-07-14
申请人： Mildred Calistri-Yeh , Cathie J. Burke , Diane Atkinson
发明人： Mildred Calistri-Yeh , Cathie J. Burke , Diane Atkinson
IPC分类号： B41J2135
CPC分类号： B41J2/14129 , B41J2202/03
摘要： Patterned photoresist layers formed on substrates have features with high aspect ratios. The photoresist layers can be formed as single layers with aspect ratios as high as about 4:1. In addition, the features in the photoresist layers can have a wide range of aspect ratios in a given single layer. The photoresist layers can be used in ink jet print heads and other devices to provide controlled fluid flow. The photoresist layers are formed using a contrast enhancement material that enables features having substantially vertical side walls and high aspect ratios to be formed.
摘要翻译：形成在基板上的图案化光致抗蚀剂层具有高纵横比的特征。光致抗蚀剂层可以形成为具有高达约4:1的纵横比的单层。此外，光刻胶层中的特征可以在给定的单层中具有宽范围的纵横比。光致抗蚀剂层可用于喷墨打印头和其它装置中以提供受控的流体流动。使用对比增强材料形成光致抗蚀剂层，其使得能够形成具有基本上垂直的侧壁和高纵横比的特征。

23. 发明授权

US06183069B2 Ink jet printhead having a patternable ink channel structure 失效
标题翻译：喷墨打印头具有可图案化的墨水通道结构
公开(公告)号：US06183069B2
公开(公告)日：2001-02-06
申请号：US09004765
申请日：1998-01-08
申请人： Cathie J. Burke , Mildred Calistri-Yeh , Diane Atkinson , Almon P. Fisher
发明人： Cathie J. Burke , Mildred Calistri-Yeh , Diane Atkinson , Almon P. Fisher
IPC分类号： B41J205
CPC分类号： B41J2/1623 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1642
摘要： An ink jet printhead is disclosed which has a heater plate containing the heating elements and driving circuitry means monolithographically formed on one surface thereof and the ink flow directing channel structure is formed on the heater plate using a layer of patternable material, so that all critical alignments are done directly on the heater plate. In one embodiment, the patternable material is a photosensitive polymer which is exposed using a mask to define the channel and reservoir pattern, which is then developed and cured. After curing, the patterned channel structure is polished to provide a smooth coplanar surface and a cover plate with an aperture therein is aligned with a loose tolerance to the channel structure and bonded thereto to complete the printhead. The aperture serves as both ink inlet and a portion of the ink reservoir. The channels are open at one end and serve as the droplet ejecting nozzles, while the other ends are connected to the reservoir. In one embodiment, the cover plate is transparent and the channel structure material is polyimide or polyarylene ether ketone.
摘要翻译：公开了一种喷墨打印头，其具有包含加热元件的加热器板和在其一个表面上以光学方式形成的驱动电路装置，并且使用可图案化材料层在加热器板上形成墨流动引导通道结构，使得所有关键对准直接在加热器板上完成。在一个实施方案中，可图案材料是使用掩模曝光以限定通道和储存器图案的光敏聚合物，其然后显影和固化。固化后，对图案化的沟道结构进行抛光以提供平滑的共面表面，并且其中具有孔的盖板对准通道结构的松动公差并与其结合以完成打印头。该孔用作墨水入口和墨水储存器的一部分。通道在一端开口并用作液滴喷嘴，而另一端连接到储存器。在一个实施例中，盖板是透明的，并且通道结构材料是聚酰亚胺或聚亚芳基醚酮。

24. 发明授权

US5933166A Ink-jet printhead allowing selectable droplet size 失效
标题翻译：喷墨打印头允许可选择的液滴尺寸
公开(公告)号：US5933166A
公开(公告)日：1999-08-03
申请号：US794247
申请日：1997-02-03
申请人： John R. Andrews , Peter A. Torpey , Cathie J. Burke
发明人： John R. Andrews , Peter A. Torpey , Cathie J. Burke
IPC分类号： B41J2/05 , B41J2/14
CPC分类号： B41J2/04591 , B41J2/0458 , B41J2/0459 , B41J2/14112 , B41J2002/14177
摘要： A thermal ink-jet printhead includes ejectors wherein a heating surface is disposed within a channel retaining liquid ink. The heating element within each ejector includes a converter for converting applied electrical energy to heat energy, and a distributor, for distributing the heat energy over a portion of the heating surface. The structure of the heating element allows the effective area of nucleation within the heating area, the size of which directly affects the volume of the ejected liquid ink droplet, to be varied with voltage and/or pulse width.
摘要翻译：热喷墨打印头包括喷射器，其中加热表面设置在保持液体墨水的通道内。每个喷射器内的加热元件包括用于将所施加的电能转换成热能的转换器和用于将热能分布在加热表面的一部分上的分配器。加热元件的结构允许在加热区域内的有效的成核区域，其大小直接影响被喷射的液体墨滴的体积，以随着电压和/或脉冲宽度而变化。

25. 发明授权

US5738799A Method and materials for fabricating an ink-jet printhead 失效
标题翻译：用于制造喷墨打印头的方法和材料
公开(公告)号：US5738799A
公开(公告)日：1998-04-14
申请号：US712761
申请日：1996-09-12
申请人： William G. Hawkins , Cathie J. Burke , Mildred Calistri-Yeh , Diane Atkinson
发明人： William G. Hawkins , Cathie J. Burke , Mildred Calistri-Yeh , Diane Atkinson
IPC分类号： B41J2/05 , B41J2/16 , B41J2/04 , B41J2/01 , B41J2/21
CPC分类号： B41J2/1639 , B41J2/1601 , B41J2/1607 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2202/03
摘要： An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer is placed over the main surface of a silicon chip, the sacrificial layer being patterned in the form of the void formed by the desired ink channels. A permanent layer, comprising permanent material, is applied over the sacrificial layer, and, after polishing the two layers to form a uniform surface, the sacrificial layer is removed. Preferred materials for the sacrificial layer include polyimide while preferred materials for the permanent layer include polyarylene ether, although a variety of material combinations are possible.
摘要翻译：喷墨打印头制造技术使得用于液体油墨的毛细通道可以形成为方形或矩形横截面。将牺牲层放置在硅芯片的主表面上，牺牲层以由期望的墨水通道形成的空隙的形式构图。包括永久材料的永久层被施加在牺牲层上，并且在抛光两层以形成均匀的表面之后，去除牺牲层。用于牺牲层的优选材料包括聚酰亚胺，而用于永久层的优选材料包括聚亚芳基醚，尽管各种材料组合是可能的。

26. 发明授权

US5639386A Increased threshold uniformity of thermal ink transducers 失效
标题翻译：增加热油墨换能器的阈值均匀性
公开(公告)号：US5639386A
公开(公告)日：1997-06-17
申请号：US400638
申请日：1995-03-07
申请人： Cathie J. Burke , Daniel S. Brennan , Keith G. Kamekona , Roberto E. Proano
发明人： Cathie J. Burke , Daniel S. Brennan , Keith G. Kamekona , Roberto E. Proano
IPC分类号： B41J2/05 , B41J2/16 , H01L21/00
CPC分类号： B41J2/14129 , B41J2/1604 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1646
摘要： The resistors of heater elements are formed by chemical vapor deposition of polycrystalline silicon at at least one of a flat temperature profile of 620.degree. C. and a ramped temperature profile of 620.degree. C. to 640.degree. C. in a first embodiment. Such method of forming the polysilicon result in a predominantly uniform grain size of approximately 1000 .ANG., where grain size can vary between 200 .ANG. to 1000 .ANG.. Alternatively, the resistors are formed by chemical vapor deposition of amorphous polysilicon at at least one of a flat temperature profile at a temperature below 580.degree. C. and a ramped temperature profile of 565.degree. C. to 575.degree. C. In the alternative embodiment, the polysilicon has a grain size of at least 1000 .ANG.. During the ion implantation of either p-type or n-type dopants into the polysilicon, a flood gun located in an ion implanter emits low energy electrons to neutralize the build-up of positive charges on the polysilicon surface. Because the low energy electrons prevent the build-up of electric charges on the surface of the polysilicon, the usual build-up of an electrical field on the surface of the polysilicon is eliminated, and the polysilicon can be uniformly doped by ion implantation of dopants. By using the flood gun during the fabrication of the heater elements of the printhead, the resistors of the heater elements and printheads have substantially uniform sheet resistances relative to each other. The sheet resistances of the resistors in the printhead vary less than 3% and preferably less than 1%. Such low variations in sheet resistance prevent undervoltage and overvoltage from being applied to the resistors and extend the lifetime of the heater element and thus, the printhead.
摘要翻译：加热器元件的电阻器通过在620℃的平坦温度分布和620℃至640℃的升温温度分布中的至少一个上的多晶硅的化学气相沉积形成。在第一实施例中。这种形成多晶硅的方法导致大致均匀的晶粒尺寸约为1000，其中晶粒尺寸可以在200至1000之间变化。或者，电阻器通过在低于580℃的温度曲线和565℃至575℃的升温温度分布中的至少一个下的非晶多晶硅的化学气相沉积形成。在替代实施例中，多晶硅的晶粒尺寸至少为1000安培。在将p型或n型掺杂剂离子注入多晶硅期间，位于离子注入机中的喷枪发射低能电子以中和多晶硅表面上正电荷的积聚。因为低能电子阻止了多晶硅表面上的电荷的积聚，消除了在多晶硅表面上电场的通常积累，并且可以通过掺杂剂的离子注入均匀地掺杂多晶硅。通过在制造打印头的加热元件期间使用喷枪，加热器元件和打印头的电阻器相对于彼此具有基本均匀的薄片电阻。打印头中的电阻器的薄层电阻变化小于3％，优选小于1％。薄层电阻的这种低的变化防止欠电压和过压被施加到电阻器并延长加热器元件的寿命并因此延长打印头。

27. 发明授权

US4947192A Monolithic silicon integrated circuit chip for a thermal ink jet printer 失效
标题翻译：用于热喷墨打印机的单片硅集成电路芯片
公开(公告)号：US4947192A
公开(公告)日：1990-08-07
申请号：US336624
申请日：1989-04-07
申请人： William G. Hawkins , Cathie J. Burke
发明人： William G. Hawkins , Cathie J. Burke
IPC分类号： B41J2/16 , H01L27/02 , H01L27/06
CPC分类号： B41J2/1604 , B41J2/1626 , B41J2/1631 , H01L27/0211 , H01L27/0688 , B41J2202/13
摘要： A thermal jet ink printing system is provided with an inproved printhead. The printhead is formed by monolithic integration of MOS transistors switches onto the same silicon substrate containing the resistive elements. In a preferred embodiment, the transistor switches and resistive elements are formed from a single layer of polysilicon with the resistive element formed on a thermally grown field oxide layer having a thickness ranging from about one to four microns. The integrated circuit chips are formed by MOS technology, are thermally stable and can be operated at higher voltages.
摘要翻译：热喷墨打印系统设有一个未经授权的打印头。打印头通过将MOS晶体管开关单元集成到包含电阻元件的同一硅衬底上而形成。在优选实施例中，晶体管开关和电阻元件由单层多晶硅形成，其中电阻元件形成在厚度范围为约1至4微米的热生长场氧化物层上。集成电路芯片由MOS技术形成，热稳定，可在较高电压下工作。

28. 发明申请

US20080180485A1 DUAL FEED LIQUID DROP EJECTOR 有权
标题翻译：双进液滴喷枪
公开(公告)号：US20080180485A1
公开(公告)日：2008-07-31
申请号：US11626965
申请日：2007-01-25
申请人： Christopher N. Delametter , John A. Lebens , David P. Trauernicht , James M. Chwalek , Yonglin Xie , Gary A. Kneezel , Christopher R. Morton , Cathie J. Burke
发明人： Christopher N. Delametter , John A. Lebens , David P. Trauernicht , James M. Chwalek , Yonglin Xie , Gary A. Kneezel , Christopher R. Morton , Cathie J. Burke
IPC分类号： B41J2/14
CPC分类号： B41J2/1404 , B41J2/055 , B41J2/14072 , B41J2/14145 , B41J2002/14387 , B41J2002/14403 , B41J2002/14467 , B41J2002/14475 , B41J2202/18 , H04L43/0864 , H04L43/12 , Y04S40/168
摘要： A liquid ejector includes a structure defining a chamber. The chamber includes a first surface and a second surface. The first surface includes a nozzle orifice. A drop forming mechanism is located on the second surface of the chamber opposite the nozzle orifice. A first liquid feed channel and a second liquid feed channel are in fluid communication with the chamber. A first segment of a segmented liquid inlet is in fluid communication with the first liquid feed channel and a second segment of the segmented liquid inlet is in fluid communication with the second liquid feed channel.
摘要翻译：液体喷射器包括限定腔室的结构。腔室包括第一表面和第二表面。第一表面包括喷嘴孔。液滴形成机构位于与喷嘴孔相对的腔室的第二表面上。第一液体供给通道和第二液体供给通道与腔室流体连通。分段液体入口的第一段与第一液体进料通道流体连通，并且分段液体入口的第二段与第二液体进料通道流体连通。

29. 发明授权

US07048361B2 Ink jet apparatus 有权
标题翻译：喷墨设备
公开(公告)号：US07048361B2
公开(公告)日：2006-05-23
申请号：US10702247
申请日：2003-11-05
申请人： Richard Schmachtenberg, III , John R. Andrews , Cathie J. Burke , Peter J. Nystrom
发明人： Richard Schmachtenberg, III , John R. Andrews , Cathie J. Burke , Peter J. Nystrom
IPC分类号： B41J2/14 , B41J2/16
CPC分类号： B41J2/14233 , Y10T29/49401
摘要： A drop emitting apparatus including a diaphragm layer disposed on a fluid channel layer, a roughened bonding region formed on a surface of the diaphragm layer, a thin film circuit having conformal raised contact regions disposed on the bonding region, and a plurality of electromechanical transducers adhesively attached to the raised contact regions and electrically connected to the conformal raised contact regions by asperity contacts formed between the conformal raised contact regions and the electromechanical transducers.
摘要翻译：一种液滴发射装置，包括设置在流体通道层上的隔膜层，形成在隔膜层的表面上的粗糙结合区域，具有配置在接合区域上的共形凸起接触区域的薄膜电路和粘附的多个机电换能器附接到凸起的接触区域并且通过形成在共形凸起接触区域和机电换能器之间的凹凸接触电连接到共形凸起的接触区域。

30. 发明授权

US06987348B2 Piezoelectric transducers 有权
标题翻译：压电换能器
公开(公告)号：US06987348B2
公开(公告)日：2006-01-17
申请号：US10664472
申请日：2003-09-16
申请人： Steven A. Buhler , Karl A. Littau , John S. Fitch , John R. Andrews , Cathie J. Burke , Peter J. Nystrom , Richard Schmachtenberg, III
发明人： Steven A. Buhler , Karl A. Littau , John S. Fitch , John R. Andrews , Cathie J. Burke , Peter J. Nystrom , Richard Schmachtenberg, III
IPC分类号： H02K41/08
CPC分类号： B41J2/161 , B41J2/14233 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/0973 , H01L41/313
摘要： A system and method of operation for a piezoelectric transducer is described which utilizes a mesa structure interposed between a piezoelectric material element and a chamber diaphragm. The system can be used as a sensor where a net motion to the diaphragm causes a net charge equal to the sum of the charges on each piezoelectric diaphragm. Alternatively, the system can be used as an actuator wherein an applied voltage causes movement of the piezoelectric transducer and the chamber diaphragm.
摘要翻译：描述了一种用于压电传感器的系统和操作方法，其利用介于压电材料元件和室隔膜之间的台面结构。该系统可用作传感器，其中对隔膜的净运动导致与每个压电隔膜上的电荷之和相等的净电荷。或者，该系统可以用作致动器，其中施加的电压引起压电换能器和室隔膜的移动。

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