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    • 21. 发明申请
    • METHOD OF MAKING LIGHT TRANSMITTING OPTICAL FLUORIDE CRYSTALS
    • 制造光发射光氟化物晶体的方法
    • WO2003000460A1
    • 2003-01-03
    • PCT/US2002/017127
    • 2002-05-31
    • CORNING INCORPORATED
    • RETHERFORD, Rebecca, S.SABIA, RobertSOKIRA, Vincent, P.
    • B24B7/22
    • B24B37/0056B24B13/00B24B37/044C09G1/02
    • The invention relates to optical fluoride crystals, and particularly to optical fluoride crystals (20) such as calcium fluoride, which have high transmission levels to below 200nm light, such as produced by excimer lasers. In particular the invention relates to making optical fluoride crystals with improved transmission surfaces (23). The invention relates to the elimination of mid-spatial frequency roughness 1-1000 um spatial wavelengths and high-spatial frequency
    • 本发明涉及光氟化物晶体,特别涉及氟化钙晶体(20)如氟化钙,其具有高于200nm光的高透射率,例如由准分子激光器产生的。 特别地,本发明涉及制备具有改进的透射表面(23)的氟化物晶体。 本发明涉及从光氟化物晶体表面消除中空间频率粗糙度1-1000μm的空间波长和高空间频率<1um的空间波长。 从光氟化物晶体表面去除中空间频率1-1000μm的空间波长和高空间频率<1um的空间波长提供了在低于200nm的光刻波长例如193nm和157nm的改进的传输。 本发明包括最终完成的氟化物晶体(20),其具有最终光洁度高的光学透射表面(22),其无空间频率粗糙度1-1000μm的空间波长和高空间频率粗糙度1-1000μm的空间波长和高空间 频率粗糙度<1um,波长<200nm时具有高透射率的空间波长。
    • 22. 发明申请
    • METHOD USING MULTI-COMPONENT COLLOIDAL ABRASIVES FOR CMP PROCESSING OF SEMICONDUCTOR AND OPTICAL MATERIALS
    • 使用多组分胶体磨料进行半导体和光学材料的CMP处理的方法
    • WO2004053456A2
    • 2004-06-24
    • PCT/US2003/037844
    • 2003-11-25
    • CORNING INCORPORATED
    • BELLMAN, Robert ASABIA, RobertUKRAINCZYK, LjerkaWHALEN, Joseph M
    • G01N
    • C09K3/1472C09G1/02C09K3/1463H01L21/31053
    • A method is provided for using abrasive colloidal particles having multi-component composition comprising mixed 1) metal or metalloid oxides, 2) oxyfluorides, or 3) oxynitrides, each grouping (1, 2, or 3) individually alone or in combination thereof, in a chemical-mechanical manufacturing process for planarizing or polishing metal, semiconductor, dielectric, glass, polymer, optical, and ceramic materials. The particles exhibit a modified surface chemistry performance and have an isoelectric point (pH IEP ) greater than the pH of the dispersed particles in solution, and with a stabilized particle dispersion at pH values of interest for CMP operations. The composition of the multi-component particles may be adjusted as desired, in regard to their chemical or physical properties such as surface chemistry, hardness, solubility, or degree of compatibility with the workpiece material being planarized or polished. Also provided is a chemical-mechanical planarization slurry mixture incorporating such multi-component particles and with a solution chemistry that enhances the CMP effects by in-part adjusting the pH of the solution away from the pH IEP of the media to maximize dispersion.
    • 提供了一种使用具有多组分组合物的磨料胶体颗粒的方法,其包括混合1)金属或准金属氧化物,2)氟氧化物或3)氮氧化物,每个单独或组合使用(1,2或3)单独或组合在 用于平面化或抛光金属,半导体,电介质,玻璃,聚合物,光学和陶瓷材料的化学机械制造方法。 颗粒表现出改性的表面化学性能,并具有大于溶液中分散颗粒的pH的等电点(pHIEP),并且在CMP操作的pH值下具有稳定的颗粒分散体。 关于它们的化学或物理性质如表面化学性质,硬度,溶解度,或与被平坦化或抛光的工件材料的相容程度,可以根据需要调节多组分颗粒的组成。 还提供了一种化学机械平面化浆料混合物,其结合了这种多组分颗粒和溶液化学,其通过部分地将溶液的pH从介质的pHIEP调节以使分散最大化来增强CMP效果。
    • 23. 发明申请
    • FIBER ARRAY AND METHODS FOR FABRICATING THE FIBER ARRAY
    • 纤维阵列和用于制造纤维阵列的方法
    • WO2003079082A2
    • 2003-09-25
    • PCT/US2003/007336
    • 2003-03-11
    • CORNING INCORPORATED
    • FRANZEN, David SSABIA, RobertTRENTELMAN, Jackson PQUINN, Candace JDANNOUX, Thierry L A
    • G02B6/32
    • G02B6/3672G02B6/32G02B6/3644G02B6/3664G02B6/3692G02B6/3696G02B6/4249
    • A collimator array, a fiber array and a method for fabricating the fiber array are described herein. In one embodiment, that fiber array includes a plurality of optical fibers and a glass plate with a plurality of holes in each of which there is secured one of the optical fibers, wherein the holes were formed by etching away a plurality of opal regions within an exposed and heated photosensitive glass which after the etching became the glass plate. In another embodiment, the fiber array includes a plurality of optical fibers and a glass plate with a plurality of holes in each of which there is secured one of the optical fibers, wherein the holes were formed by etching away a plurality of opal regions within an exposed and heated photosensitive glass which after the etching became the glass plate that included a plurality of oversized holes which were filled with a moldable material that was then drilled to form the holes.
    • 本文描述了准直器阵列,光纤阵列和用于制造光纤阵列的方法。 在一个实施例中,该光纤阵列包括多个光纤和具有多个孔的玻璃板,每个孔中固定有一个光纤,其中通过在多个光纤内蚀刻掉多个蛋白石区域而形成孔 曝光和加热的感光玻璃,其在蚀刻后成为玻璃板。 在另一个实施例中,光纤阵列包括多个光纤和具有多个孔的玻璃板,每个孔中固定有一根光纤,其中通过蚀刻掉多个蛋白石区域形成孔 曝光和加热的感光玻璃,其在蚀刻后成为包括多个尺寸过大的孔的玻璃板,其中填充有可模制材料,然后钻出以形成孔。