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21. 发明专利

AU2003298507A8 Optical fiber array 未知
公开(公告)号：AU2003298507A8
公开(公告)日：2004-05-04
申请号：AU2003298507
申请日：2003-03-13
申请人： CORNING INC
发明人： PEANASKY JOHN S , SABIA ROBERT , TRENTELMAN JACKSON P , FRANZEN DAVID S , FILHABER JOHN F
IPC分类号： G02B6/32 , G02B6/36 , G02B6/38 , G02B6/08
摘要： A fiber array includes a substrate made of a soft drillable material and a plurality of holes drilled through the substrate for holding a plurality of glass fibers.

22. 发明专利

AU1925801A Semiconductor processing silica soot abrasive slurry method for integrated circuit microelectronics 未知
公开(公告)号：AU1925801A
公开(公告)日：2001-06-04
申请号：AU1925801
申请日：2000-11-22
申请人： CORNING INC
发明人： DARCANGELO CHARLES M , SABIA ROBERT , SELL ROBERT D , STEVENS HARRIE J , UKRAINCZYK LJERKA
IPC分类号： B24B37/04 , B24B57/02 , C09G1/02 , C09K3/14 , H01L21/304 , H01L21/321 , H01L21/302 , H01L21/461

23. 发明专利

AU5932500A Extreme ultraviolet soft x-ray projection lithographic method and mask devices 未知
公开(公告)号：AU5932500A
公开(公告)日：2001-02-13
申请号：AU5932500
申请日：2000-07-13
申请人： CORNING INC
发明人： DAVIS CLAUDE L , HRDINA KENNETH E , SABIA ROBERT
IPC分类号： G03F1/00 , G03F1/24 , G03F1/60 , G03F7/20 , G21K1/06 , H01L21/027 , G03C5/00

24. 发明专利

DE102007057626A1 未知
公开(公告)号：DE102007057626A1
公开(公告)日：2008-07-03
申请号：DE102007057626
申请日：2007-11-30
申请人： CORNING INC
发明人： ARSERIO GREGORY JOHN , SYLVIA BRIAN DANIEL , SABIA ROBERT
IPC分类号： G02B1/00 , B24B13/00 , C03C3/06 , C03C3/076 , C03C19/00 , G03F7/20
摘要： The invention is directed to polished glass substrates suitable for extreme ultraviolet lithography. The elements are silica-titania glass elements having a coefficient of thermal expansion of 0±30x10 -9 /° C. or less, and containing 5-10 wt. % titania. The polished elements have a mid-spatial frequency peak-to-valley roughness of 2.0 ml/cm 2 /min. Generally the flow rates are in the range of 2.0-10 ml/cm 2 /min. Glass substrates suitable for extreme ultraviolet lithography element have a coefficient of thermal expansion of 0±30x10 -9 /° C. or less. A particular glass suitable for EUVL use is silica-titania glass containing 5-10 wt. % titania.

26. 发明专利

DE10296958T5 未知
公开(公告)号：DE10296958T5
公开(公告)日：2004-04-29
申请号：DE10296958
申请日：2002-05-31
申请人： CORNING INC CORNING
发明人： RETHERFORD REBECCA , SABIA ROBERT , SOKIRA VINCENT P
IPC分类号： B24B57/02 , B24B1/00 , B24B13/00 , B24B37/04 , C09G1/02 , B24B7/22
摘要： The invention relates to optical fluoride crystals, and particularly to optical fluoride crystals such as calcium fluoride, which have high transmission levels to below 200 nm light, such as produced by excimer lasers. In particular the invention relates to making optical fluoride crystals with improved transmission surfaces. The invention relates to the elimination of mid-spatial frequency roughness 1-1000 mum spatial wavelengths and high-spatial frequency

27. 发明申请

WO2004053456A3 METHOD USING MULTI-COMPONENT COLLOIDAL ABRASIVES FOR CMP PROCESSING OF SEMICONDUCTOR AND OPTICAL MATERIALS 审中-公开
标题翻译：使用多组分胶体磨料进行半导体和光学材料的CMP处理的方法
公开(公告)号：WO2004053456A3
公开(公告)日：2005-01-13
申请号：PCT/US0337844
申请日：2003-11-25
申请人： CORNING INC
发明人： BELLMAN ROBERT A , SABIA ROBERT , UKRAINCZYK LJERKA , WHALEN JOSEPH M
IPC分类号： C09G1/02 , C09K3/14 , H01L21/3105 , H01L21/302 , H01L21/461
CPC分类号： C09K3/1472 , C09G1/02 , C09K3/1463 , H01L21/31053
摘要： A method is provided for using abrasive colloidal particles having multi-component composition comprising mixed 1) metal or metalloid oxides, 2) oxyfluorides, or 3) oxynitrides, each grouping (1, 2, or 3) individually alone or in combination thereof, in a chemical-mechanical manufacturing process for planarizing or polishing metal, semiconductor, dielectric, glass, polymer, optical, and ceramic materials. The particles exhibit a modified surface chemistry performance and have an isoelectric point (pHIEP) greater than the pH of the dispersed particles in solution, and with a stabilized particle dispersion at pH values of interest for CMP operations. The composition of the multi-component particles may be adjusted as desired, in regard to their chemical or physical properties such as surface chemistry, hardness, solubility, or degree of compatibility with the workpiece material being planarized or polished. Also provided is a chemical-mechanical planarization slurry mixture incorporating such multi-component particles and with a solution chemistry that enhances the CMP effects by in-part adjusting the pH of the solution away from the pHIEP of the media to maximize dispersion.
摘要翻译：提供了一种使用具有多组分组合物的磨料胶体颗粒的方法，其包括混合1）金属或准金属氧化物，2）氟氧化物或3）氮氧化物，每个单独或组合使用（1,2或3）单独或组合在用于平面化或抛光金属，半导体，电介质，玻璃，聚合物，光学和陶瓷材料的化学机械制造方法。颗粒表现出改性的表面化学性能，并具有大于溶液中分散颗粒的pH的等电点（pHIEP），并且在CMP操作的pH值下具有稳定的颗粒分散体。关于它们的化学或物理性质如表面化学性质，硬度，溶解度，或与被平坦化或抛光的工件材料的相容程度，可以根据需要调节多组分颗粒的组成。还提供了一种化学机械平面化浆料混合物，其结合了这种多组分颗粒和溶液化学，其通过部分地将溶液的pH从介质的pHIEP调节以使分散最大化来增强CMP效果。

28. 发明申请

WO2004058655A3 POLARIZERS AND ISOLATORS AND METHODS OF MANUFACTURE 审中-公开
标题翻译：偏振器和隔离器以及制造方法
公开(公告)号：WO2004058655A3
公开(公告)日：2004-09-02
申请号：PCT/US0340135
申请日：2003-12-09
申请人： CORNING INC
发明人： PAVLIK JR ROBERT S , SABIA ROBERT , TROTTER JR DONALD M , NAYLOR AMY J , NEUMANN JESSICA L , ROSSINGTON KATHERINE R
IPC分类号： C03C4/00 , C03C14/00 , G02B5/30
CPC分类号： G02B5/3008 , C03C4/00 , C03C14/006 , C03C2214/08 , Y10S372/703
摘要： Polarizing glass articles, optical isolators including polarizing glass articles, and methods of manufacturing polarizing glass articles and optical isolators are disclosed. The methods manufacture can be used to manufacture isolators exhibiting improved contrast ratio.
摘要翻译：公开了偏振玻璃制品，包括偏振玻璃制品的光学隔离器，以及制造偏振玻璃制品和光学隔离器的方法。制造方法可用于制造显示出改善的对比度的隔离器。

29. 发明公开

EP1817390A4 DEVICE COMPRISING LOW OUTGASSING PHOTO OR ELECTRON BEAM CURED RUBBERY POLYMER MATERIAL 审中-公开
标题翻译：光或ELEKTRONENSTRAHLGEHÄRTETEM橡胶聚合物材料具有低脱气装置
公开(公告)号：EP1817390A4
公开(公告)日：2010-10-20
申请号：EP05852664
申请日：2005-11-29
申请人： CORNING INC
发明人： SHUSTACK PAUL J , COYKENDALL KELSEE L , DEWA PAUL G , SABIA ROBERT , SAUER DAVID C , SONI KAMAL K
IPC分类号： C09J149/00 , B32B25/00 , B32B25/04 , B32B25/08 , B32B27/00 , B32B27/04 , B32B27/16 , C08F255/02 , C08F279/02 , C08J3/28 , C08K3/00 , C08K5/00 , C09J107/00 , C09J109/00 , C09J113/00 , C09J119/00 , C09J121/00 , G02B1/10 , G02B1/12
CPC分类号： C08L15/00 , C08C19/02 , C08F255/00 , C08F255/02 , C08F279/02 , C08F290/06 , C08K3/013 , C08K5/0025 , C08L2666/02 , C09J4/06 , C09J123/02 , Y10T428/1059 , Y10T428/1082 , Y10T428/28 , Y10T428/2809 , Y10T428/2852 , Y10T428/287 , Y10T428/2878 , Y10T428/2883 , Y10T428/2891 , Y10T428/31855 , Y10T428/31938
摘要： Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.

30. 发明专利

DE102006060362B4 Verfahren zum Vermindern von Schlieren in einem Siliciumoxid-Titanoxid-Glas 未知
公开(公告)号：DE102006060362B4
公开(公告)日：2015-12-17
申请号：DE102006060362
申请日：2006-12-20
申请人： CORNING INC
发明人： BEALL LORRIE F , MAXON JOHN E , ROSCH WILLIAM R , SABIA ROBERT
IPC分类号： C03B32/00 , C03B25/00
摘要： Verfahren zum Vermindern von Schlieren in einem Siliciumoxid-Titanoxid-Glas, wobei das Verfahren umfasst: Herstellen eines Siliciumoxid-Titanoxid-Glases mit einer Form; Wärmebehandeln des Glases in einem Ofen bei einer Temperatur von oberhalb 1600°C über einen Zeitraum im Bereich von 72–288 Stunden; und Abkühlen des Glases auf Umgebungstemperatur, um ein Siliciumoxid-Titanoxid-Glas mit verminderten Schlieren zu ergeben.

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