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21. 发明授权

US06710355B2 Optically powered resonant integrated microstructure pressure sensor 有权
标题翻译：光电谐振集成微结构压力传感器
公开(公告)号：US06710355B2
公开(公告)日：2004-03-23
申请号：US10071484
申请日：2002-02-07
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： G02B600
CPC分类号： G01L9/0079
摘要： A pressure sensor using an optically powered resonant integrated microstructure (O-RIMS). The pressure sensor comprises a planar substrate having a photodiode, a polysilicon shell, a microbeam having a resonant frequency and fastened to the shell, and one or more optical fibers. A fluorescent material, such as erbium, is placed on the surface of the substrate in proximity to the microbeam. A Fabry-Perot cavity is formed comprising the substrate, the microbeam, and the shell. Changes in the vibratory frequency of the microbeam caused by pressure on the shell causes light delivered by a optical fiber to be modulated as the microbeam vibrates. The modulated light is conveyed to a sensor electronics arrangement via the optical fiber. The sensor electronics arrangement determines the pressure surrounding the O-RIMS from the modulated light.
摘要翻译：一种使用光学谐振集成微结构（O-RIMS）的压力传感器。压力传感器包括具有光电二极管，多晶硅外壳，具有共振频率并紧固到外壳的微束和一根或多根光纤的平面基板。诸如铒的荧光材料被放置在靠近微束的衬底的表面上。形成法布里 - 珀罗腔，其包括基底，微束和壳。由壳体上的压力引起的微束振动频率的变化导致光纤传递的光随微波振动而被调制。经调制的光经由光纤传送到传感器电子装置。传感器电子装置从调制光确定O-RIMS周围的压力。

22. 发明授权

US5211816A Vacuum distillation apparatus for removal of volatile impurities from liquids 失效
标题翻译：用于从液体中除去挥发性杂质的真空蒸馏装置
公开(公告)号：US5211816A
公开(公告)日：1993-05-18
申请号：US774031
申请日：1991-10-07
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： B01D1/00 , B01D1/30 , B01D3/00 , B01D3/10 , B01D5/00
CPC分类号： B01D3/106 , B01D1/0094 , B01D1/305 , B01D3/007 , B01D3/10 , B01D5/0027 , Y10S159/16 , Y10S159/40
摘要： A low temperature vacuum distillation apparatus. The distillation apparatus includes an evaporation section and a condensation section. Fluid flow throughout the system is assisted by an appropriate pump, and heat exchangers, one in each of the evaporation and condensation sections, are interconnected by employment of a heat pump.The condensation section includes a condensation chamber downward from which bubble tubes extend into a collection chamber. Collection chamber is provided with a pump to effect transfer of distillate having volatile impurities entrained therein to a final collection vessel. A pump communicates with vessel to create a partial vacuum therein to ensure venting of the impurities.
摘要翻译：低温真空蒸馏装置。蒸馏装置包括蒸发部和冷凝部。整个系统中的流体流由适当的泵辅助，并且每个蒸发和冷凝段中的一个热交换器通过使用热泵相互连接。冷凝部分包括向下的冷凝室，气泡管从该冷凝室延伸到收集室中。收集室设置有泵，以将其中夹带有挥发性杂质的馏出物转移到最终的收集容器。泵与容器连通以在其中产生部分真空以确保杂质的排放。

23. 发明授权

US4679308A Process for controlling mobile ion contamination in semiconductor devices 失效
标题翻译：用于控制半导体器件中的移动离子污染的工艺
公开(公告)号：US4679308A
公开(公告)日：1987-07-14
申请号：US681768
申请日：1984-12-14
申请人： Chris J. Finn , Daniel W. Youngner
发明人： Chris J. Finn , Daniel W. Youngner
IPC分类号： H01L21/3215 , H01L23/00 , H01L23/29 , H01L23/31 , H01L29/06 , H01L21/20 , B01J17/00
CPC分类号： H01L23/564 , H01L21/32155 , H01L23/293 , H01L23/3171 , H01L29/0638 , H01L2924/0002 , Y10S148/024 , Y10S148/061
摘要： The present invention provides a method of protecting semiconductor integrated circuit from mobile ion contamination. In one embodiment a gettering agent is implanted into a dielectric layer. In an alternative embodiment a gettering agent is implanted into a photoresist layer which is ashed in an oxygen based plasma, leaving the gettering agent on the surface underlying the photoresist.
摘要翻译：本发明提供一种保护半导体集成电路免受移动离子污染的方法。在一个实施方案中，将吸气剂注入电介质层。在替代实施例中，将吸气剂注入到基于氧的等离子体中沉淀的光致抗蚀剂层中，将吸气剂留在光致抗蚀剂下面的表面上。

24. 发明授权

US08242851B2 Processes for stabilizing a VCSEL in a chip-scale atomic clock 有权
标题翻译：用于稳定芯片级原子钟中的VCSEL的过程
公开(公告)号：US08242851B2
公开(公告)日：2012-08-14
申请号：US12887259
申请日：2010-09-21
申请人： Daniel W. Youngner , Son T. Lu , Jeff A. Ridley
发明人： Daniel W. Youngner , Son T. Lu , Jeff A. Ridley
IPC分类号： H03B17/00 , H01S1/06
CPC分类号： G04F5/145 , H01S5/005 , H01S5/02 , H01S5/02208 , H01S5/02296 , H01S5/02453 , H01S5/02476 , H01S5/183 , H01S2301/02 , Y10T29/49579
摘要： A method to construct a chip-scale atomic clock is provided. The method comprises providing a scaffolding for components in a chip-scale atomic clock. The components include a laser and at least one other component. The method also includes operationally positioning the components on the scaffolding so that an emitting surface of the laser is non-parallel to partially reflective surfaces of the at least one other component.
摘要翻译：提供了一种构建芯片级原子钟的方法。该方法包括为芯片级原子钟中的组件提供脚手架。组件包括激光器和至少一个其它部件。该方法还包括将组件可操作地定位在脚手架上，使得激光的发射表面不平行于至少一个其它组件的部分反射表面。

25. 发明授权

US08218590B2 Designs and processes for thermally stabilizing a vertical cavity surface emitting laser (vcsel) in a chip-scale atomic clock 有权
标题翻译：用于在芯片级原子钟中热稳定垂直腔表面发射激光器（vcsel）的设计和工艺
公开(公告)号：US08218590B2
公开(公告)日：2012-07-10
申请号：US12884489
申请日：2010-09-17
申请人： Daniel W. Youngner , Son T. Lu , Jeff A. Ridley , Linda J. Forner
发明人： Daniel W. Youngner , Son T. Lu , Jeff A. Ridley , Linda J. Forner
IPC分类号： H01S3/04
CPC分类号： H01S5/183 , G04F5/14 , H01S5/005 , H01S5/02 , H01S5/02208 , H01S5/02296 , H01S5/02453 , H01S5/02476
摘要： Designs and processes for thermally stabilizing a vertical cavity surface emitting laser (vcsel) in a chip-scale atomic clock are provided. In one embodiment, a Chip-Scale Atomic Clock includes: a vertical cavity surface emitting laser (vcsel); a heater block coupled to a base of the vcsel; a photo detector; a vapor cell, wherein the vapor cell includes a chamber that defines at least part of an optical path for laser light between the vcsel and the photo detector; and an iso-thermal cage surrounding the vcsel on all sides, the iso-thermal cage coupled to the heater block via a thermally conductive path.
摘要翻译：提供了在芯片级原子钟中热稳定垂直腔表面发射激光器（vcsel）的设计和工艺。在一个实施例中，芯片级原子钟包括：垂直腔表面发射激光器（vcsel）; 耦合到所述vcsel的基座的加热器块; 光电检测器蒸汽池，其中所述蒸汽池包括限定用于所述vcsel和所述光电检测器之间的激光的光路的至少一部分的室; 以及围绕所有侧面上的vcsel的等温保持架，通过导热路径耦合到加热器块的等热笼。

26. 发明授权

US08076737B2 Systems and methods for acoustic sensing 失效
标题翻译：声学检测系统和方法
公开(公告)号：US08076737B2
公开(公告)日：2011-12-13
申请号：US12123628
申请日：2008-05-20
申请人： Daniel W. Youngner
发明人： Daniel W. Youngner
IPC分类号： H01L29/84
CPC分类号： G01H9/00 , G01L9/0017
摘要： An optical-based acoustic sensor system detects sound. An exemplary embodiment has a substrate with a surface and an internal region; a shell disposed above the substrate surface, the shell operable to receive incident light emitted by a light source; a beam disposed blow the shell; a photodiode on the substrate surface below the beam, and in response to receiving a first portion of light, the photodiode is operable to generate a charge that attracts the beam such that a motion is induced in the beam to cause the beam to resonate; and a microphone device coupled to the shell, the microphone device operable to detect acoustic waves, and operable to modulate the vibratory motion of the beam, wherein a second portion of light is modulated by the vibratory motion of the beam to generate sound-modulated light that is emitted from the sensor.
摘要翻译：基于光学的声学传感器系统检测声音。示例性实施例具有具有表面和内部区域的基板; 壳体，其设置在所述衬底表面上方，所述壳体可操作以接收由光源发射的入射光; 一束设置吹的外壳; 在光束下方的衬底表面上的光电二极管，并且响应于接收到第一部分光，光电二极管可操作以产生吸引光束的电荷，使得在光束中感应出运动以使光束共振; 麦克风装置，其耦合到壳体，麦克风装置可操作以检测声波，并且可操作以调制光束的振动运动，其中光的第二部分被光束的振动运动调制以产生声调制光这是从传感器发射的。

27. 发明申请

US20110189429A1 FABRICATION TECHNIQUES TO ENHANCE PRESSURE UNIFORMITY IN ANODICALLY BONDED VAPOR CELLS 有权
标题翻译：制造技术提高阳极粘结蒸汽电池的压力均匀性
公开(公告)号：US20110189429A1
公开(公告)日：2011-08-04
申请号：US12879394
申请日：2010-09-10
申请人： Daniel W. Youngner , Jeff A. Ridley , Son T. Lu
发明人： Daniel W. Youngner , Jeff A. Ridley , Son T. Lu
IPC分类号： B32B3/20 , B32B37/02 , B32B37/06 , B32B3/12
CPC分类号： G04F5/14 , Y10T428/24149
摘要： A method of fabricating vapor cells comprises forming a plurality of vapor cell dies in a first wafer having an interior surface region and a perimeter, and forming a plurality of interconnected vent channels in the first wafer. The vent channels provide at least one pathway for gas from each vapor cell die to travel outside of the perimeter of the first wafer. The method further comprises anodically bonding a second wafer to one side of the first wafer, and anodically bonding a third wafer to an opposing side of the first wafer. The vent channels allow gas toward the interior surface region of the first wafer to be in substantially continuous pressure-equilibrium with gas outside of the perimeter of the first wafer during the anodic bonding of the second and third wafers to the first wafer.
摘要翻译：一种制造蒸汽池的方法包括在具有内表面区域和周边的第一晶片中形成多个蒸汽池模具，并在第一晶片中形成多个互连的排气通道。通气通道为来自每个蒸汽池模具的气体提供至少一个通路，以便在第一晶片的周边外行进。该方法还包括将第二晶片阳极结合到第一晶片的一侧，并将第三晶片阳极结合到第一晶片的相对侧。在第二和第三晶片与第一晶片的阳极接合期间，排气通道允许气体朝向第一晶片的内表面区域与第一晶片的周边外的气体基本上连续的压力平衡。

28. 发明申请

US20090072146A1 Correlated ghost imager 有权
标题翻译：相关的鬼影片
公开(公告)号：US20090072146A1
公开(公告)日：2009-03-19
申请号：US11901508
申请日：2007-09-18
申请人： Daniel W. Youngner , Lisa M. Lust , Robert W. Boyd
发明人： Daniel W. Youngner , Lisa M. Lust , Robert W. Boyd
IPC分类号： G01J5/02
CPC分类号： G01V8/005 , G01S13/867 , G01S13/887
摘要： A method and system for detecting concealed weapons and explosives by imaging THz scenes using conventional optics and detectors is provided. Photon fields with two different wavelengths can be sent through a chopper and towards a wavelength-selective mirror. A light beam with a wavelength in the visible or IR range is sent toward a visible photon array detector. Similarly, light beams with wavelengths in the THz range can be sent towards a target, which are reflected and/or absorbed by objects in the target. The reflected or transmitted light continues on through an optional filter to remove background light, then into a non-imaging detector. The visible photon array detector can be coupled with the non-imaging detector, which will register an image of the scene that is illuminated by the THz photons.
摘要翻译：提供了一种通过使用常规光学和检测器对太赫兹场景进行成像检测隐藏的武器和爆炸物的方法和系统。具有两种不同波长的光子场可以通过斩波器和波长选择性反射镜发射。将具有可见光或IR范围波长的光束发送到可见光子阵列检测器。类似地，具有THz范围波长的光束可以被发送到目标，由靶中的物体反射和/或吸收。反射或透射的光继续通过可选的滤光器以去除背景光，然后进入非成像检测器。可见光子阵列检测器可以与非成像检测器耦合，该非成像检测器将对由THz光子照射的场景的图像进行寄存。

29. 发明授权

US07494598B2 Miniature optically transparent window 有权
标题翻译：微型光学透明窗
公开(公告)号：US07494598B2
公开(公告)日：2009-02-24
申请号：US11164445
申请日：2005-11-22
申请人： Daniel W. Youngner , Son T. Lu
发明人： Daniel W. Youngner , Son T. Lu
IPC分类号： G01R31/00
CPC分类号： B81B7/0067
摘要： Miniature optically transparent windows are disclosed that extend vertically from a plane, which may be used to transmit light traveling in a direction substantially parallel with the plane. In one illustrative embodiment, a method for forming such miniature optically transparent windows includes: providing a substrate having a first surface and an opposing second surface, the substrate having a first layer and an adjacent second layer; forming a recess in the first layer of the substrate, the recess extending to the second layer; providing an optically transparent material in the recess to form an optically transparent feature; and removing at least a portion of the first layer that extends adjacent the optically transparent feature so that light can pass through the optically transparent feature in a direction that is substantially parallel to the first surface of the substrate.
摘要翻译：公开了一种从平面垂直延伸的微型光学透明窗，该平面可用于透射在与该平面基本平行的方向上行进的光。在一个说明性实施例中，用于形成这种微型光学透明窗的方法包括：提供具有第一表面和相对的第二表面的基底，所述基底具有第一层和相邻的第二层; 在所述基板的第一层中形成凹部，所述凹部延伸到所述第二层; 在所述凹部中提供光学透明材料以形成光学透明特征; 以及去除邻近所述光学透明特征延伸的所述第一层的至少一部分，使得光可以在基本上平行于所述衬底的第一表面的方向上穿过所述光学透明特征。

30. 发明授权

US07379486B2 Technique for optically pumping alkali-metal atoms using CPT resonances 有权
标题翻译：使用CPT谐振光学泵浦碱金属原子的技术
公开(公告)号：US07379486B2
公开(公告)日：2008-05-27
申请号：US11161094
申请日：2005-07-22
申请人： Lisa M. Lust , Douglas R. Carlson , Daniel W. Youngner
发明人： Lisa M. Lust , Douglas R. Carlson , Daniel W. Youngner
IPC分类号： H01S3/091
CPC分类号： H03L7/26 , G04F5/145
摘要： Systems and methods for optically pumping alkali-metal atoms using Coherence Population Trapping (CPT) resonances are disclosed. An illustrative push-pull optical pumping system for inducing CPT resonances in a resonance cell containing an admixture of alkali-metal atoms and one or more buffer gasses may include a laser assembly adapted to produce alternating orthogonally polarized light, and at least one DC current source adapted to output a constant-intensity carrier current signal for inducing laser emission from the laser assembly at a carrier wavelength of the alkali-metal atoms. An RF modulated signal outputted from an RF modulation source can be rectified, split, and phase-shifted for inducing a time-dependent polarization of the laser light that can be used to enhance CPT resonances. The alternating orthogonally polarized light from the laser assembly can then be used to optically pump the alkali-metal atoms within the vapor cavity, producing a dark state that can be detected with a photodetector or the like.
摘要翻译：公开了使用Coherence群体捕获（CPT）共振光学泵浦碱金属原子的系统和方法。用于在含有碱金属原子和一种或多种缓冲气体的混合物的共振电池中诱导CPT共振的说明性推挽光泵送系统可以包括适于产生交替的正交偏振光的激光组件，以及至少一个DC电流源适于输出恒定强度的载流子电流信号，用于在碱金属原子的载流波长下激发来自激光组件的激光发射。可以对从RF调制源输出的RF调制信号进行整流，分频和相移，以引起可用于增强CPT谐振的激光的时间依赖极化。然后可以使用来自激光组件的交替正交偏振光来光学地泵送蒸气腔内的碱金属原子，产生可用光电检测器等检测的暗态。

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