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    • 25. 发明授权
    • Method for manufacturing a pressure sensor
    • 制造压力传感器的方法
    • US06300169B1
    • 2001-10-09
    • US09603082
    • 2000-06-26
    • Kurt WeiblenAnton DoeringJuergen NiederFrieder Haag
    • Kurt WeiblenAnton DoeringJuergen NiederFrieder Haag
    • H01L2144
    • G01L19/143G01L19/141H01L21/565H01L2224/48091H01L2224/48247H01L2224/49171H01L2924/10253H01L2924/1815H01L2924/00014H01L2924/00
    • In a method for manufacturing a pressure sensor, in which a semiconductor pressure sensing element is applied to an assembly segment of a lead grid, the semiconductor pressure sensing element is electrically connected to contact segments of the lead grid. The lead grid having the semiconductor pressure sensing element is inserted into an injection molding die, and then the semiconductor pressure sensing element, in the injection molding die, is surrounded by a housing made of injection molding compound. A structure is present in the injection molding die through which a pressure feed for the semiconductor pressure sensing element is left free from the jacket of injection molding compound. A stamp is arranged in the injection molding die so as to be separated by a gap from the side of the assembly segment that is facing away from the semiconductor pressure sensing element or from the side of the semiconductor pressure sensing element that is facing away from the assembly segment. As a result of a change in the temperature of the stamp relative to the temperature of the liquefied injection molding compound, a reduction in the flow capacity of the injection molding compound in the area of the stamp is brought about and, as a result, at least a complete penetration of the injection molding compound into the gap is avoided.
    • 在用于制造压力传感器的方法中,其中半导体压力感测元件被施加到引线栅的组装段,半导体压力感测元件电连接到引线栅的接触段。 具有半导体压力感测元件的引线格栅被插入到注射成型模具中,然后在注射成型模具中的半导体压力感测元件被由注射成型化合物制成的壳体包围。 在注模模具中存在一种结构,通过该结构,半导体压力传感元件的压力进料不被注射模塑料的夹套留下。 在注射成型模具中布置有印模,以便与组件段的背离半导体压力感测元件的侧面或从半导体压力感测元件的背离背面的间隙分开 装配段 由于印模温度相对于液化注射模塑料的温度变化的结果,注塑模具在印模区域的流动能力降低,结果是在 避免了将注射成型化合物完全渗透到间隙中。