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    • 24. 发明授权
    • Ferroelectric memory device and their manufacturing methods
    • 铁电存储器件及其制造方法
    • US06171871B2
    • 2001-01-09
    • US09078678
    • 1998-05-14
    • Akio MachidaNaomi NagasawaTakaaki AmiMasayuki Suzuki
    • Akio MachidaNaomi NagasawaTakaaki AmiMasayuki Suzuki
    • H01L2100
    • H01L27/11502H01L21/31691H01L27/11507
    • It is intended to provide a ferroelectric that exhibits superior ferroelectricity. A ferroelectric provided is an oxide having a layered crystal structure that is composed of Bi, a first element Me, a second element R, and O. The first element Me is at least one element selected from the group consisting of Na, K, Ca, Ba, Sr, Pb, and Bi. The second element R is at least one element selected from the group consisting of Fe, Ti, Nb, Ta, and W. Ninety-eight percent or more of the entire body of the ferroelectric exhibits ferroelectricity. After an oxide having a layered crystal structure has been grown by a vapor-phase method (crystal growth step), electrodes are attached to the oxide having a layered crystal structure and a voltage is applied thereto (voltage application step). As a result, strains of crystal lattices are corrected at least partially, whereby portions that did not exhibit ferroelectricity at all or did not exhibit superior ferroelectricity due to such large strains that the symmetry of crystal lattices is lost are changed so as to exhibit superior ferroelectricity.
    • 旨在提供具有优异的铁电性的铁电体。 提供的铁电体是具有由Bi,第一元素Me,第二元素R和O组成的层状晶体结构的氧化物。第一元素Me是选自Na,K,Ca ,Ba,Sr,Pb和Bi。 第二元素R是选自Fe,Ti,Nb,Ta和W中的至少一种元素。铁电体全体的98%以上表现出铁电性。 在通过气相法(晶体生长步骤)生长具有层状晶体结构的氧化物之后,将电极附着到具有层状晶体结构的氧化物并施加电压(电压施加步骤)。 结果,至少部分地校正晶格的应变,由于由于失去晶格的对称性的这种大的应变,完全不显示铁电性的部分或者没有表现出优异的铁电性,从而表现出优异的铁电性 。