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21. 发明申请

US20060144418A1 Components for film forming device and method of washing the component 有权
标题翻译：用于成膜装置的部件和洗涤部件的方法
公开(公告)号：US20060144418A1
公开(公告)日：2006-07-06
申请号：US10538087
申请日：2004-01-22
申请人： Akisuke Hirata , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
发明人： Akisuke Hirata , Shinji Isoda , Yutaka Kadowaki , Katsuhiko Mushiake
IPC分类号： B08B6/00
CPC分类号： H01L21/6704 , C23C16/4407
摘要： Herein disclosed are a component of a film-forming device, in which a thin films is formed on a substrate using a film-forming material, whose surface structure makes any breakage, peeling off and/or falling off of a film adhered to the component quite difficult, while the structure permits easy removal of such an adhered film within a short period of time when cleaning the component as sell as a method for cleaning the component. A large number of through holes each extending from the back face to the top face of the component are formed for the penetration of a cleaning solution into the boundary between the component and a film of the film-forming material adhered to the surface of the component and formed during the formation of the foregoing thin film. This easily allows the peeling off and removal of the film adhered to the component within a short period of time as compared when the adhered film is dissolved only from the surface thereof.
摘要翻译：本文公开了一种成膜装置的组件，其中在使用成膜材料的基板上形成薄膜，其表面结构使得附着到部件上的膜的断裂，剥离和/或脱落相当困难，而结构允许在清洁作为销售的部件作为清洁部件的方法的短时间内容易地去除这种粘附膜。形成从组件的背面延伸到顶面的大量通孔，用于将清洁溶液渗透到粘附到部件表面的成膜材料和成膜材料的膜之间的边界中并且在形成上述薄膜期间形成。与粘附膜仅从其表面溶解的情况相比，容易在短时间内剥离和除去附着在部件上的膜。

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