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    • 22. 发明授权
    • Microscope system
    • 显微镜系统
    • US08264768B2
    • 2012-09-11
    • US12132097
    • 2008-06-03
    • Hideyuki KawanabeTetsuya ShirotaYasuko IshiiTakashi Yoneyama
    • Hideyuki KawanabeTetsuya ShirotaYasuko IshiiTakashi Yoneyama
    • G02B21/06G02B21/00
    • G01N21/6458G02B21/241G02B21/361G02B21/365
    • A microscope system that is capable of changing a status of observation of a sample comprises an instruction unit for giving instruction for driving one or more optical members including an objective lens or for changing a relative position of the sample and the objective lens; and an image capturing unit for capturing an observed image of the sample as a still image or a live image. The microscope system changes an order for performing operations in accordance with the instruction from the instruction unit, the operations including an operation of driving the one or more optical members or changing the relative position; an operation of switching the illumination light for the sample from being cut-off or reduced to being applied; and an operation of switching the image displayed in a display unit from the still image to the live image.
    • 能够改变样本的观察状态的显微镜系统包括指示单元,用于指示用于驱动包括物镜的一个或多个光学构件或用于改变样品和物镜的相对位置; 以及用于捕获作为静止图像或实况图像的样本的观察图像的图像捕获单元。 显微镜系统根据来自指示单元的指令改变执行操作的顺序,操作包括驱动一个或多个光学构件的操作或改变相对位置; 将样品的照明光切换或减少到施加的操作; 以及将从显示单元显示的图像从静止图像切换到实时图像的操作。
    • 29. 发明授权
    • Microscope system
    • 显微镜系统
    • US06980359B2
    • 2005-12-27
    • US10794163
    • 2004-03-04
    • Takashi YoneyamaNobuaki Sakai
    • Takashi YoneyamaNobuaki Sakai
    • G02B21/24G02B21/26G02B21/00
    • G02B21/26G02B21/24
    • In a microscope system in which at least one of a stage on which a sample 4 is mounted and an objective lens 6 can move relatively in a direction of an optical axis, a contact judgment section 12 judges the possibility of contact between the sample 4 and the objective lens 6 based on a result of comparison between a detection output from a contact sensor 11 which detects contact between the sample 4 and the objective lens 6 and a preset threshold value, excessive contact between the sample 4 and the objective lens 6 is avoided based on a result of this judgment, and a threshold value in the contact judgment section 12 is updated based on the output from the contact sensor 11 every predetermined time.
    • 在其中安装有样品4的阶段和物镜6可以沿光轴方向相对移动的阶段中的至少一个的显微镜系统中,接触判断部12判断样品4与样品4之间的接触的可能性 物镜6基于来自检测样品4与物镜6之间的接触的接触传感器11的检测输出与预设阈值之间的比较结果,避免了样品4与物镜6之间的过度接触 基于该判定结果,根据来自接触传感器11的每一预定时间的输出来更新接触判定部12中的阈值。
    • 30. 发明申请
    • Defect inspection apparatus and defect inspection method
    • 缺陷检查装置和缺陷检查方法
    • US20050175233A1
    • 2005-08-11
    • US10773524
    • 2004-02-06
    • Takashi YoneyamaEriko Tsuji
    • Takashi YoneyamaEriko Tsuji
    • G01B11/30G01N21/95G01N21/956G02B7/28G02B7/36G03B15/00G06K9/00G06T7/00
    • G06T7/0004G01N21/9501G01N21/95607G02B21/245
    • A defect inspection apparatus comprises a pattern image obtaining unit obtaining a pattern image of a predetermined part by causing focusing control to be performed in order to achieve focus on the predetermined part within an observation object according to set focusing control parameters, a pattern image storing unit storing the pattern image, and a detecting unit detecting the presence/absence of an abnormal condition of a part to be inspected by making a comparison between the pattern image of a reference part within the observation object, and the pattern image of the part to be inspected within the observation object. The focusing control parameters set when the pattern image of the part to be inspected is obtained are determined based on sample information obtained when the pattern image of the reference part is obtained.
    • 缺陷检查装置包括:图案图像获取单元,通过进行聚焦控制来获得预定部分的图案图像,以便根据设定的聚焦控制参数来对观察对象内的预定部分进行聚焦;图案图像存储单元 存储图案图像,以及检测单元,通过对观察对象内的基准部分的图案图像与待观察对象部分的图案图像进行比较,来检测待检查部位的异常状况的存在/不存在 在观察对象内检查。 当获取被检测部件的图案图像时设置的聚焦控制参数是基于获得参考部分的图案图像时获得的样本信息来确定的。