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    • 22. 发明申请
    • METHOD OF JOINING A SUPERCONDUCTOR
    • 加工超导体的方法
    • WO2015114359A1
    • 2015-08-06
    • PCT/GB2015/050231
    • 2015-01-30
    • OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
    • JEDAMZIK, Dieter
    • H01R4/68
    • H01R4/68
    • A method is provided of forming an electrically conductive joint between a first superconductor and a member. A first superconductor is provided having a first bonding surface. A member to be joined with the first superconductor, is provided having a second bonding surface. A reactive foil is located adjacent each of the first and second bonding surfaces. A joining material is positioned between the reactive foil and one or each of the first and second bonding surfaces. The joint is formed by initiating a reaction in the reactive foil so as to join the first and second bonding surfaces together. The method extends to joints between a first superconductor and a member using such a reactive foil.
    • 提供一种在第一超导体和构件之间形成导电接头的方法。 提供具有第一接合表面的第一超导体。 与第一超导体接合的部件设置有第二接合面。 反应箔位于第一和第二粘结表面附近。 接合材料位于反应箔和第一和第二粘合表面中的一个或每个之间。 通过在反应性箔中引发反应以将第一和第二粘合表面接合在一起而形成接头。 该方法延伸到使用这种反应箔的第一超导体和构件之间的接头。
    • 23. 发明申请
    • METHOD OF PROCESSING A PARTICLE SPECTRUM
    • 处理颗粒光谱的方法
    • WO2014188186A1
    • 2014-11-27
    • PCT/GB2014/051555
    • 2014-05-21
    • OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
    • STATHAM, Peter
    • G01T1/17G01T1/36
    • G01T1/36G01T1/171
    • A method is provided for processing a spectrum, obtained using a particle detection system, so as to reduce spectrum artefacts arising from unresolved particle events in the detection system. An input spectrum is obtained which contains artefacts due to "pile up" in the detector. A first effect upon the input spectrum of pairs of unresolved particle events is evaluated and a first corrected input spectrum is generated which comprises the input spectrum with the first effect removed. The effect of a pairs of unresolved particle events is then evaluated for this first corrected input spectrum so as to generate a second corrected input spectrum which comprises the input spectrum with the second effect removed. An output spectrum is then generated based upon a combination of the first and second corrected input spectra. The use of the method in improving sum spectra is also discussed.
    • 提供了一种用于处理使用粒子检测系统获得的光谱的方法,以便减少由检测系统中未解决的粒子事件引起的光谱伪像。 获得包含由于检测器“堆积”而产生的伪像的输入光谱。 评估对未解决的粒子事件对的输入光谱的第一影响,并且生成包括去除了第一效应的输入光谱的第一校正输入光谱。 然后针对该第一校正输入光谱评估一对未解决的粒子事件的影响,以便产生包括去除第二效应的输入光谱的第二校正输入光谱。 然后基于第一和第二校正输入光谱的组合产生输出光谱。 还讨论了该方法在改进和谱中的应用。
    • 27. 发明申请
    • RAPID TEM SAMPLE PREPARATION METHOD WITH BACKSIDE FIB MILLING
    • 具有背面FIB铣削的快速TEM样品制备方法
    • WO2016067039A1
    • 2016-05-06
    • PCT/GB2015/053259
    • 2015-10-29
    • OMNIPROBE, INCOXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
    • HAMMER, MikeDAWSON, MichaelHARTFIELD, Cheryl
    • G01N1/32H01J37/20H01J37/305
    • H01J37/3056G01N1/32H01J37/20H01J37/285H01J2237/202H01J2237/204H01J2237/31745H01J2237/31749
    • A method for TEM sample preparation with backside milling of a sample extracted from a workpiece in an energetic-beam instrument is disclosed, where the energetic-beam instrument comprises: a focused ion beam, a stage capable of motion and tilting, a TEM grid held in a fixed holder on the stage, the TEM grid having a plane and the holder mounted in a fixed orientation with respect to the stage, and a probe tip rotatably connected to a nanomanipulator; the sample having a top surface and a backside and a required plane for the TEM sample that is normal to the top surface of the sample, and the sample being attached to the probe tip; the method comprising: rotating the probe tip by an angle calculated according to the geometry of the apparatus; moving the stage to position the TEM grid so that the plane of the TEM grid is substantially parallel to the required plane for the TEM sample; attaching the extracted sample to the TEM grid and removing the attachment of the probe tip to the extracted sample; and, tilting the stage by a stage-tilt angle, while maintaining the holder in the fixed orientation with respect to the stage, so that the axis of the ion beam is made substantially parallel to the required plane for the TEM sample; thereby placing the extracted sample into position for allowing backside milling by the focused ion beam to prepare a thinned cross-sectional sample for TEM viewing.
    • 公开了一种用于在能量束仪器中从工件提取的样品进行背面研磨的TEM样品制备方法,其中能量束仪器包括:聚焦离子束,能够运动和倾斜的台架,保持有TEM网格 在舞台上的固定支架中,TEM格架具有平面,并且保持器以相对于平台的固定方向安装,以及可旋转地连接到纳米操纵器的探针尖端; 所述样品具有垂直于样品顶表面的TEM样品的顶表面和背面以及所需平面,并且样品附着到探针尖端; 所述方法包括:使所述探针尖端旋转根据所述装置的几何形状计算的角度; 移动舞台以定位TEM格栅,使得TEM格子的平面基本上平行于TEM样品的所需平面; 将提取的样品附着到TEM网格上,并将探针尖端附着到提取的样品上; 并且使台架相对于台架保持固定姿态,同时使台架倾斜角度,使得离子束的轴线基本上平行于TEM样品的所需平面; 从而将提取的样品放置在位置,以允许通过聚焦离子束的背面研磨以制备用于TEM观察的变薄的横截面样品。
    • 28. 发明申请
    • A METHOD FOR MEASURING THE MASS THICKNESS OF A TARGET SAMPLE FOR ELECTRON MICROSCOPY
    • 用于测量电子显微镜目标样品的质量浓度的方法
    • WO2016016644A1
    • 2016-02-04
    • PCT/GB2015/052188
    • 2015-07-29
    • OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
    • STATHAM, Peter
    • G01N23/225
    • G01N23/2252G01N2223/304G01N2223/633H01J37/261H01J2237/24578
    • A method is provided of measuring the mass thickness of a target sample for use in electron microscopy. Reference data are obtained which is representative of the X-rays (28) generated within a reference sample (12) when a particle beam (7) is caused to impinge upon a region (14) of the reference sample (12). The region (14) is of a predetermined thickness of less than 300 nm and has a predetermined composition. The particle beam (7) is caused to impinge upon a region (18) of the target sample (16). The resulting X-rays (29) generated within the target sample (16) are monitored (27) so as to produce monitored data. Output data are then calculated based upon the monitored data and the reference data, the output data including the mass thickness of the region (18) of the target sample (16).
    • 提供了一种测量用于电子显微镜的目标样品的质量厚度的方法。 获得参考数据,其表示当使粒子束(7)撞击参考样品(12)的区域(14)时在参考样品(12)内产生的X射线(28)。 区域(14)具有小于300nm的预定厚度并且具有预定的组成。 使粒子束(7)撞击到目标样品(16)的区域(18)上。 对目标样品(16)内生成的X射线(29)进行监测(27),以产生监测数据。 然后基于所监视的数据和参考数据计算输出数据,输出数据包括目标样本(16)的区域(18)的质量厚度。
    • 30. 发明申请
    • SUBSTRATE CARRIER
    • 基板载体
    • WO2014114927A1
    • 2014-07-31
    • PCT/GB2014/050162
    • 2014-01-21
    • OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
    • NEWTON, AndrewPIEKARNIAK, Piotr
    • H01L21/687
    • H01L21/68728
    • A substrate carrier for plasma processing apparatus is disclosed, comprising: a base plate assembly comprising a platform on which a substrate is placed in use, the volume to be occupied in use by a substrate placed on the platform constituting a substrate zone; and a top plate assembly on the base plate assembly, the top plate assembly comprising a top plate having an aperture therethrough surrounding the substrate zone and one or more retention members extending into the aperture, over a portion of the substrate zone, such that in use a substrate disposed in the substrate zone is retained in a fixed position between the base plate assembly and the top plate assembly. The upper surface of the top plate, facing away from the base plate assembly, is substantially planar and the one or more retention members protrude above the substantially planar upper surface of the top plate.
    • 公开了一种用于等离子体处理装置的基板载体,包括:基板组件,其包括在使用中放置基板的平台,被放置在构成基板区域的平台上的基板使用的待使用体积; 以及位于基板组件上的顶板组件,顶板组件包括顶板,该顶板具有穿过其的围绕基板区域的孔,以及在基板区域的一部分上延伸到孔中的一个或多个保持构件,使得在使用中 设置在基板区域中的基板被保持在基板组件和顶板组件之间的固定位置。 顶板的上表面背离基板组件,其基本上是平面的,并且一个或多个保持构件突出在顶板的基本平坦的上表面上方。