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21. 发明授权

US09384285B1 Methods for identifying related documents 有权
标题翻译：识别相关文件的方法
公开(公告)号：US09384285B1
公开(公告)日：2016-07-05
申请号：US13717788
申请日：2012-12-18
申请人： Yiyang Joy Ding , Kelvin Chan
发明人： Yiyang Joy Ding , Kelvin Chan
IPC分类号： G06F17/30
CPC分类号： G06F17/30867 , G06F17/30705 , G06F17/30864
摘要： A method includes storing two or more documents at a storage system that is associated with a document editing system and receiving usage pattern information regarding each document from the two or more documents. The method also includes determining a likelihood that the two or more documents are related documents based at least in part on the usage pattern information and defining a collection including the two or more documents if the likelihood that the two or more documents are related exceeds a threshold value.
摘要翻译：一种方法包括在与文档编辑系统相关联的存储系统处存储两个或多个文档，并从两个或多个文档接收关于每个文档的使用模式信息。该方法还包括至少部分地基于使用模式信息确定两个或多个文档是相关文档的可能性，并且如果两个或多个文档相关的可能性超过阈值则定义包括两个或多个文档的集合值。

22. 发明申请

US20120270339A1 UV ASSISTED SILYLATION FOR RECOVERY AND PORE SEALING OF DAMAGED LOW K FILMS 有权
标题翻译： UV辅助硅酸盐用于恢复和破坏低K膜的密封
公开(公告)号：US20120270339A1
公开(公告)日：2012-10-25
申请号：US13093351
申请日：2011-04-25
申请人： Bo Xie , Alexandros T. Demos , Kang Sub Yim , Thomas Nowak , Kelvin Chan
发明人： Bo Xie , Alexandros T. Demos , Kang Sub Yim , Thomas Nowak , Kelvin Chan
IPC分类号： H01L21/30
CPC分类号： H01L21/3105 , H01L21/02203 , H01L21/02337 , H01L21/0234 , H01L21/02348 , H01L21/76814 , H01L21/76825 , H01L21/76826
摘要： Methods for the repair of damaged low k films are provided. Damage to the low k films occurs during processing of the film such as during etching, ashing, and planarization. The processing of the low k film causes water to store in the pores of the film and further causes hydrophilic compounds to form in the low k film structure. Repair processes incorporating ultraviolet (UV) radiation and silylation compounds remove the water from the pores and further remove the hydrophilic compounds from the low k film structure.
摘要翻译：提供修复损坏的低k膜的方法。在薄膜的处理期间，例如在蚀刻，灰化和平坦化期间，低k膜的损伤发生。低k膜的处理导致水存储在膜的孔中，并进一步在低k膜结构中形成亲水性化合物。包含紫外线（UV）辐射和甲硅烷基化合物的修复过程从孔中除去水分，并从低k膜结构中进一步除去亲水性化合物。

23. 发明授权

US08236684B2 Prevention and reduction of solvent and solution penetration into porous dielectrics using a thin barrier layer 有权
标题翻译：使用薄的阻挡层防止和减少溶剂和溶液渗透到多孔电介质中
公开(公告)号：US08236684B2
公开(公告)日：2012-08-07
申请号：US12147986
申请日：2008-06-27
申请人： Kelvin Chan , Khaled A. Elsheref , Alexandros T. Demos , Meiyee Shek , Lipan Li , Li-Qun Xia , Kang sub Yim
发明人： Kelvin Chan , Khaled A. Elsheref , Alexandros T. Demos , Meiyee Shek , Lipan Li , Li-Qun Xia , Kang sub Yim
IPC分类号： H01L21/4763
CPC分类号： H01L21/3141 , H01L21/02164 , H01L21/02216 , H01L21/02274 , H01L21/0228 , H01L21/31105 , H01L21/31116 , H01L21/31608 , H01L21/76814 , H01L21/76831
摘要： A method and apparatus for treating a substrate is provided. A porous dielectric layer is formed on the substrate. In some embodiments, the dielectric may be capped by a dense dielectric layer. The dielectric layers are patterned, and a dense dielectric layer deposited conformally over the substrate. The dense conformal dielectric layer seals the pores of the porous dielectric layer against contact with species that may infiltrate the pores. The portion of the dense conformal pore-sealing dielectric layer covering the field region and bottom portions of the pattern openings is removed by directional selective etch.
摘要翻译：提供了一种处理基板的方法和装置。在基板上形成多孔介电层。在一些实施例中，电介质可以由致密的电介质层封盖。对电介质层进行图案化，并且将致密的电介质层保形地沉积在衬底上。密实的保形介电层密封多孔介电层的孔隙，防止与可能渗入孔隙的物质接触。通过定向选择性蚀刻去除覆盖图案开口的场区域和底部部分的致密保形孔隙电介质层的部分。

24. 发明申请

US20100015816A1 METHODS TO PROMOTE ADHESION BETWEEN BARRIER LAYER AND POROUS LOW-K FILM DEPOSITED FROM MULTIPLE LIQUID PRECURSORS 审中-公开
标题翻译：促进多层液体前体沉积的阻挡层与多孔低K膜之间粘合的方法
公开(公告)号：US20100015816A1
公开(公告)日：2010-01-21
申请号：US12173659
申请日：2008-07-15
申请人： Kelvin Chan , Kang Sub Yim , Alexandros T. Demos
发明人： Kelvin Chan , Kang Sub Yim , Alexandros T. Demos
IPC分类号： H01L21/31
CPC分类号： H01L21/31633 , C23C16/30 , C23C16/45523 , C23C16/56 , H01L21/02126 , H01L21/02203 , H01L21/02205 , H01L21/02211 , H01L21/02214 , H01L21/02274
摘要： A method for processing a substrate is provided, wherein a first organosilicon precursor, a second organosilicon precursor, a porogen, and an oxygen source are provided to a processing chamber. The first organosilicon precursor comprises compounds having generally low carbon content. The second organosilicon precursor comprises compounds having higher carbon content. The porogen comprises hydrocarbon compounds. RF power is applied to deposit a film on the substrate, and the flow rates of the various reactant streams are adjusted to change the carbon content as portions of the film are deposited. In one embodiment, an initial portion of the deposited film has a low carbon content, and is therefore oxide-like, while successive portions have higher carbon content, becoming oxycarbide-like. Another embodiment features no oxide-like initial portion. Post-treating the film generates pores in portions of the film having higher carbon content.
摘要翻译：提供一种处理基板的方法，其中第一有机硅前体，第二有机硅前体，致孔剂和氧源被提供到处理室。第一有机硅前体包括具有通常低碳含量的化合物。第二有机硅前体包括具有较高碳含量的化合物。致孔剂包括烃化合物。施加RF功率以在衬底上沉积膜，并且调节各种反应物流的流速以随着膜的部分沉积而改变碳含量。在一个实施方案中，沉积膜的初始部分具有低碳含量，因此是氧化物，而连续部分具有较高的碳含量，变成碳氧化物。另一个实施方案不具有类似氧化物的初始部分。膜的后处理在具有较高碳含量的膜的部分中产生孔。

25. 发明申请

US20090325381A1 PREVENTION AND REDUCTION OF SOLVENT AND SOLUTION PENETRATION INTO POROUS DIELECTRICS USING A THIN BARRIER LAYER 有权
标题翻译：使用薄壁隔离层防止和减少溶剂和溶液渗透到多孔电介质
公开(公告)号：US20090325381A1
公开(公告)日：2009-12-31
申请号：US12147986
申请日：2008-06-27
申请人： KELVIN CHAN , Khaled A. Elsheref , Alexandros T. Demos , Meiyee Shek , Lipan Li , Li-Qun Xia , Kang sub Yim
发明人： KELVIN CHAN , Khaled A. Elsheref , Alexandros T. Demos , Meiyee Shek , Lipan Li , Li-Qun Xia , Kang sub Yim
IPC分类号： H01L21/44
CPC分类号： H01L21/3141 , H01L21/02164 , H01L21/02216 , H01L21/02274 , H01L21/0228 , H01L21/31105 , H01L21/31116 , H01L21/31608 , H01L21/76814 , H01L21/76831
摘要： A method and apparatus for treating a substrate is provided. A porous dielectric layer is formed on the substrate. In some embodiments, the dielectric may be capped by a dense dielectric layer. The dielectric layers are patterned, and a dense dielectric layer deposited conformally over the substrate. The dense conformal dielectric layer seals the pores of the porous dielectric layer against contact with species that may infiltrate the pores. The portion of the dense conformal pore-sealing dielectric layer covering the field region and bottom portions of the pattern openings is removed by directional selective etch.
摘要翻译：提供了一种处理基板的方法和装置。在基板上形成多孔介电层。在一些实施例中，电介质可以由致密的电介质层封盖。对电介质层进行图案化，并且将致密的电介质层保形地沉积在衬底上。密实的保形介电层密封多孔介电层的孔隙，防止与可能渗入孔隙的物质接触。通过定向选择性蚀刻去除覆盖图案开口的场区域和底部部分的致密保形孔隙电介质层的部分。

26. 发明授权

US07563734B2 Chemical vapor deposition of antimicrobial polymer coatings 失效
标题翻译：化学气相沉积抗菌聚合物涂层
公开(公告)号：US07563734B2
公开(公告)日：2009-07-21
申请号：US11103360
申请日：2005-04-11
申请人： Karen K. Gleason , Tyler Phillip Martin , Kelvin Chan
发明人： Karen K. Gleason , Tyler Phillip Martin , Kelvin Chan
IPC分类号： B32B27/04 , A61F13/00 , A61L15/00
CPC分类号： C09D133/14 , A61L15/24 , A61L15/46 , A61L27/34 , A61L27/54 , A61L29/085 , A61L29/16 , A61L31/10 , A61L31/16 , A61L2300/204 , A61L2300/404 , A61L2300/606 , B05D1/60 , C09D5/14 , C09D125/18 , Y10T442/2525 , Y10T442/2861 , Y10T442/2926 , C08L33/14 , C08L25/18
摘要： One aspect of the present invention is directed to antimicrobial surfaces comprised of hydrocarbon polymers with significant hydrophobic character which also contain an amino group with a pKa greater than or equal to about 8. In certain embodiments initiated chemical vapor deposition (iCVD) is used to coat a surface with an antimicrobial polymer.
摘要翻译：本发明的一个方面涉及由具有显着疏水特征的烃聚合物组成的抗微生物表面，其还含有pKa大于或等于约8的氨基。在某些实施方案中，引发化学气相沉积（iCVD）用于涂覆具有抗微生物聚合物的表面。

27. 发明申请

US20060069612A1 System and method for generating an orchestrated advertising campaign 审中-公开
标题翻译：用于生成策划广告活动的系统和方法
公开(公告)号：US20060069612A1
公开(公告)日：2006-03-30
申请号：US10950429
申请日：2004-09-28
申请人： Michael Hurt , Trevor Norrington , Kelvin Chan , Kenneth Tittle , Shawn Horwat
发明人： Michael Hurt , Trevor Norrington , Kelvin Chan , Kenneth Tittle , Shawn Horwat
IPC分类号： G06Q30/00
CPC分类号： G06Q30/02 , G06Q30/0267 , G06Q30/0269
摘要： A system and related techniques host and serve selective, orchestrated advertising campaigns and other content to users depending on contributing advertisers' campaign strategies as well as use interests, prior history or experiences. According to embodiments, users may navigate to a Web or other network site which contains or invokes ads or other media or content. When ad or other content is called, according to the invention in one regard a user identifier may be checked, to determine whether the user has subscribed to or had a profile established with the orchestrated ad platform of the invention. If the user does have a unique identifier associated with them, an ad engine may perform a lookup of the identifier against potential ad campaigns or delivery modes, to deliver a more coherent or orchestrated stream of ads or other media to the user. Those selected campaigns may include for instance immersive delivery modes in which a number of ads related to an area of interest, such as cars and related services or foods and restaurants, may be delivered or streamed to the user's browser or other application at a comparatively high frequency or intensity. The sequence of that content may in one regard be conditioned on the user's browsing or other history, including topics of interest as expressed for example in prior search activity, in explicit questionnaires, or in prior purchase or shopping activity, as well as other behavioral patterns such as averaged length of browsing sessions, or other parameters. Because the experience which the user receives is targeted or tailored in nature, and in addition presents a set or series of content which is selected to reflect a meaningful relationship or theme, the effectiveness of the advertising or other content delivery campaign may be enhanced compared to undifferentiated delivery techniques.
摘要翻译：系统和相关技术托管并根据贡献广告者的广告系列战略以及使用兴趣，先前的历史或经验，为用户提供选择性的，协调的广告活动和其他内容。根据实施例，用户可以导航到包含或调用广告或其他媒体或内容的Web或其他网络站点。当呼叫广告或其他内容时，根据本发明，可以在一方面检查用户标识符，以确定用户是否已订阅或具有与本发明的协调广告平台建立的简档。如果用户确实具有与其相关联的唯一标识符，则广告引擎可以针对潜在的广告活动或传递模式执行对标识符的查找，以向用户传送更连贯或协调的广告或其他媒体流。那些所选择的活动可以包括例如身临其境的递送模式，其中与感兴趣的区域（例如汽车和相关服务或食品和餐馆）相关的多个广告可以以相当高的速度被传送或流传输到用户的浏览器或其他应用频率或强度。该内容的顺序可以在一个方面受到用户的浏览或其他历史的限制，包括例如在先前的搜索活动中，在明确的问卷调查中，或在先前的购买或购物活动中表达的兴趣主题，以及其他行为模式例如浏览会话的平均长度或其他参数。因为用户接收的体验本质上是针对性或量身定制的，并且另外呈现出被选择以反映有意义的关系或主题的一组或一系列内容，所以可以增强广告或其他内容传送活动的有效性未分化递送技术。

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