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    • 22. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20070114574A1
    • 2007-05-24
    • US11599356
    • 2006-11-15
    • Hidekatsu Onose
    • Hidekatsu Onose
    • H01L29/80
    • H01L29/8083H01L29/1066H01L29/1608H01L29/41741H01L29/66068
    • An object of the present invention is to achieve both the high withstand voltage and the low on-resistance in a polycrystalline Si embedded gate SiC junction FET. n+ —SiC is formed as a drain layer; and n− —SiC which contacts an n+ drain layer is formed as a drift layer. By using n+ —SiC, which is formed on an n− drift layer, as a source layer, and by forming a trench from an n+ source layer up to a position having the specified depth of the n− drift layer, part of the n− drift layer is used as a channel region. As a result, in a junction FET including, as a gate region, p-type polycrystalline Si that is embedded in the trench, at least a side wall of the channel region contacts the p-type polycrystalline Si gate region without using oxidation film.
    • 本发明的目的是在多晶Si嵌入式栅极SiC结FET中实现高耐受电压和低导通电阻。 n + -SiC形成为漏极层; 并且与n +漏极层接触的n-SiC形成为漂移层。 通过使用形成在n-漂移层上的n + -SiC作为源极层,并且通过形成从n +源层到具有n漂移层的指定深度的位置的沟槽,n - 漂移层用作通道区域。 结果,在包括嵌入在沟槽中的p型多晶Si作为栅极区域的结型FET中,沟道区域的至少侧壁不使用氧化膜与p型多晶硅栅极区域接触。
    • 26. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20070252178A1
    • 2007-11-01
    • US11740728
    • 2007-04-26
    • Hidekatsu ONOSE
    • Hidekatsu ONOSE
    • H01L31/112
    • H01L29/8083H01L29/0692H01L29/1608H01L29/66409H01L29/7722
    • The present invention can maintain a blocking state, even at a low gate bias voltage, in a diode-containing type of junction FET, and achieves a large saturation current.The junction FET includes: an n+ SiC substrate 10 as a drain layer; an n− SiC layer 11 contiguous to the drain layer as a drift layer; an n+ SiC layer 12 formed on the drift layer as a source layer; trench grooves formed ranging from the source layer to a required depth of the drift layer and part of the drift layer as a channel region; and p-type polycrystalline Si formed in the trench grooves as gate regions. The gate region at one side of the channel is electrically shorted to a source electrode to form a p− emitter of a diode.
    • 本发明即使在低二极管的类型的结型FET中也能保持低的栅极偏置电压下的阻塞状态,并且实现了大的饱和电流。 结型FET包括:作为漏极层的n + S + SiC衬底10; 与漏极层邻接的n + SiC层11作为漂移层; 形成在漂移层上的作为源层的n + S + SiC层12; 从源极层到漂移层的所需深度和漂移层的一部分形成为沟道区的沟槽, 以及形成在沟槽中的p型多晶Si作为栅极区。 通道一侧的栅极区域与源电极电短路以形成二极管的p-O - 发射极。
    • 29. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20050218424A1
    • 2005-10-06
    • US11135417
    • 2005-05-24
    • Hidekatsu OnoseHideo HommaAtsuo Watanabe
    • Hidekatsu OnoseHideo HommaAtsuo Watanabe
    • H01L29/80H01L21/337H01L29/10H01L29/772H01L29/808H01L29/32
    • H01L29/1066H01L29/1608H01L29/7722
    • A semiconductor switching device for an inverter includes a first conductivity type, low impurity concentration, semiconductor substrate having a band gap equal to or greater than 2.0 eV, a first conductivity type first region formed in a first plane of the substrate having a resistance lower than the substrate, a first electrode formed in another plane of the first region, a first conductivity type second region formed in a second plane of the substrate, and a second electrode formed on the second region. A trench is formed in the second plane, a control region is formed from a bottom of the trench into the substrate and a control electrode of a different conductivity type is formed on the control region. The second electrode is formed over the control electrode through an insulator film, and the control electrode is formed on the trench sidewalls so the control region contacts the second region.
    • 用于逆变器的半导体开关器件包括第一导电类型,低杂质浓度,具有等于或大于2.0eV的带隙的半导体衬底,形成在衬底的第一平面中的电阻低于 所述基板,形成在所述第一区域的另一平面中的第一电极,形成在所述基板的第二平面中的第一导电类型的第二区域和形成在所述第二区域上的第二电极。 在第二平面中形成沟槽,控制区域从沟槽的底部形成到衬底中,并且在控制区域上形成不同导电类型的控制电极。 第二电极通过绝缘膜形成在控制电极上,并且控制电极形成在沟槽侧壁上,使得控制区域接触第二区域。