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21. 发明授权

US09673778B2 Solid mount bulk acoustic wave resonator structure comprising a bridge 有权
公开(公告)号：US09673778B2
公开(公告)日：2017-06-06
申请号：US13337458
申请日：2011-12-27
申请人： Chris Feng , John Choy , Phil Nikkel
发明人： Chris Feng , John Choy , Phil Nikkel
IPC分类号： H03H9/15 , H03H9/13 , H03H9/02 , H03H9/17
CPC分类号： H03H9/132 , H03H9/02118 , H03H9/02149 , H03H9/175
摘要： A solid mount bulk acoustic wave resonator, comprises a first electrode; a second electrode; a piezoelectric layer disposed between the first and second electrodes; and an acoustic reflector comprising a plurality of layers and disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the acoustic reflector, the first electrode, the second electrode and the piezoelectric layer defines an active area of the acoustic resonator, and the piezoelectric layer extends over an edge of the first electrode. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator. The bridge overlaps a portion of the first electrode.

22. 发明授权

US09608589B2 Method of forming acoustic resonator using intervening seed layer 有权
公开(公告)号：US09608589B2
公开(公告)日：2017-03-28
申请号：US12911986
申请日：2010-10-26
申请人： Kevin J. Grannen , Chris Feng , Phil Nikkel , John Choy
发明人： Kevin J. Grannen , Chris Feng , Phil Nikkel , John Choy
IPC分类号： H03H3/02 , H01L41/314 , H01L41/317 , H03H9/17
CPC分类号： H03H3/02 , H01L41/314 , H01L41/317 , H01L41/319 , H03H9/173 , H03H9/175 , H03H2003/021 , H03H2003/025 , Y10T29/42
摘要： A method of forming an acoustic resonator includes forming a seed layer on a first electrode layer, forming a piezoelectric layer directly on a surface of the seed layer, and forming a second electrode layer on the piezoelectric layer. The piezoelectric layer includes multiple crystals of piezoelectric material, and the seed layer causes crystal axis orientations of the crystals to be substantially perpendicular to the surface of the seed layer.

23. 发明授权

US08902023B2 Acoustic resonator structure having an electrode with a cantilevered portion 有权
标题翻译：具有具有悬臂部分的电极的声谐振器结构
公开(公告)号：US08902023B2
公开(公告)日：2014-12-02
申请号：US12626035
申请日：2009-11-25
申请人： John Choy , Chris Feng , Phil Nikkel
发明人： John Choy , Chris Feng , Phil Nikkel
IPC分类号： H03H9/15 , H03H9/13 , H03H9/52 , H03H9/54 , H03H9/17 , H03H9/02
CPC分类号： H03H9/173 , H03H9/02086 , H03H9/02118 , H03H9/02149 , H03H9/132 , H03H9/171 , H03H9/177
摘要： An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. An electrical filter comprises an acoustic resonator.
摘要翻译：声谐振器包括第一电极和包括多个侧面的第二电极。第二电极的至少一个侧面包括悬臂部分。压电层设置在第一和第二电极之间。电滤波器包括声谐振器。

24. 发明授权

US08872604B2 Double film bulk acoustic resonators with electrode layer and piezo-electric layer thicknesses providing improved quality factor 有权
标题翻译：具有电极层和压电层厚度的双膜体声共振器提供改善的品质因数
公开(公告)号：US08872604B2
公开(公告)日：2014-10-28
申请号：US13101376
申请日：2011-05-05
申请人： Dariusz Burak , Chris Feng , Alexandre Shirakawa , Stefan Bader
发明人： Dariusz Burak , Chris Feng , Alexandre Shirakawa , Stefan Bader
IPC分类号： H03H9/54 , H03H9/56 , H03H9/58 , H03H9/205
CPC分类号： H03H9/56 , H03H9/132 , H03H9/205 , H03H9/566 , H03H9/582 , H03H9/585 , H03H9/587 , H03H2003/028
摘要： A device includes: a first electrode having a first electrode thickness; a first acoustic propagation layer disposed on the first electrode, the first piezo-electric layer having a first acoustic propagation layer thickness; a second electrode having a second electrode thickness; a second piezo-electric layer disposed on the first electrode, the second piezo-electric layer having a second acoustic propagation layer thickness; and a third electrode having a third electrode thickness, wherein the second electrode thickness is between 1.15 and 1.8 times the first electrode thickness. The first and third electrode thicknesses may be equal to each other, and the first and second piezo-electric layer thicknesses may be equal to each other. The first and third electrodes may be connected together to provide two acoustic resonators in parallel with each other.
摘要翻译：一种器件包括：具有第一电极厚度的第一电极; 设置在所述第一电极上的第一声传播层，所述第一压电层具有第一声传播层厚度; 具有第二电极厚度的第二电极; 设置在所述第一电极上的第二压电层，所述第二压电层具有第二声传播层厚度; 以及具有第三电极厚度的第三电极，其中所述第二电极厚度在所述第一电极厚度的1.15和1.8倍之间。第一和第三电极厚度可以彼此相等，并且第一和第二压电层厚度可以彼此相等。第一和第三电极可以连接在一起以提供彼此平行的两个声谐振器。

25. 发明授权

US08575820B2 Stacked bulk acoustic resonator 有权
标题翻译：堆叠体声共振器
公开(公告)号：US08575820B2
公开(公告)日：2013-11-05
申请号：US13074094
申请日：2011-03-29
申请人： Alexandre Augusto Shirakawa , Paul Bradley , Dariusz Burak , Stefan Bader , Chris Feng
发明人： Alexandre Augusto Shirakawa , Paul Bradley , Dariusz Burak , Stefan Bader , Chris Feng
IPC分类号： H01L41/047 , H03H9/15
CPC分类号： H03H3/02 , H03H9/132 , H03H9/585 , H03H2003/0428
摘要： A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric layer stacked on the second electrode, and a third electrode stacked on the second piezoelectric layer. The stacked bulk acoustic resonator further includes an inner raised region formed in an inner portion on a surface of at least one of the first, second and third electrodes, and an outer raised region formed along an outer perimeter on the surface of the at least one of the first, second or third electrodes. The outer raised region surrounds the inner raised region and defines a gap between the inner raised region and the outer raised region.
摘要翻译：层叠的体声波谐振器包括堆叠在第一电极上的第一压电层，堆叠在第一压电层上的第二电极; 堆叠在第二电极上的第二压电层和堆叠在第二压电层上的第三电极。层叠的体声波谐振器还包括形成在第一，第二和第三电极中的至少一个的表面上的内部的内部凸起区域，以及沿着至少一个的表面上的外周边形成的外部凸起区域的第一，第二或第三电极。外部凸起区域围绕内部凸起区域并且在内部升高区域和外部凸起区域之间限定间隙。

26. 发明授权

US09065421B2 Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making 有权
标题翻译：具有多层不同压电材料的薄膜体声共振器及制作方法
公开(公告)号：US09065421B2
公开(公告)日：2015-06-23
申请号：US13362321
申请日：2012-01-31
申请人： Chris Feng , John Choy , Kevin J. Grannen , Phil Nikkel , Tom Yeh
发明人： Chris Feng , John Choy , Kevin J. Grannen , Phil Nikkel , Tom Yeh
IPC分类号： H01L41/09 , H03H9/12 , H03H9/17 , H03H9/02 , H03H9/58
CPC分类号： H03H9/173 , H03H9/02149 , H03H9/171 , H03H9/178 , H03H9/585 , Y10T29/42
摘要： A thin film bulk acoustic resonator (FBAR) includes a first electrode, a first piezoelectric layer having a first c-axis orientation and on the first electrode, a second piezoelectric layer having a second c-axis orientation over the first piezoelectric layer, and a second electrode on the second piezoelectric layer. The first and second piezoelectric layers are made of respective different piezoelectric materials. The FBAR can be set to have different resonance frequencies by selecting the first and second c-axis orientations to be respectively the same or different. The high and low frequency range of the FBAR can thus be extended.
摘要翻译：薄膜体声波谐振器（FBAR）包括第一电极，具有第一c轴取向的第一压电层，在第一电极上具有在第一压电层上具有第二c轴取向的第二压电层，以及在第二压电层上的第二电极。第一和第二压电层由相应的不同的压电材料制成。通过选择第一和第二c轴取向分别相同或不同，可以将FBAR设置为具有不同的谐振频率。因此可以扩展FBAR的高低频范围。

27. 发明申请

US20120326807A1 ACOUSTIC RESONATOR STRUCTURE HAVING AN ELECTRODE WITH A CANTILEVERED PORTION 审中-公开
标题翻译：具有可拆卸部分的电极的声学谐振器结构
公开(公告)号：US20120326807A1
公开(公告)日：2012-12-27
申请号：US13529192
申请日：2012-06-21
申请人： John Choy , Chris Feng , Phil Nikkel
发明人： John Choy , Chris Feng , Phil Nikkel
IPC分类号： H03H9/17
CPC分类号： H03H9/02149 , H03H9/02118 , H03H9/132 , H03H9/173
摘要： An acoustic resonator comprises (a) a substrate having atop surface and a bottom surface, a first end portion and an opposite, second end portion, and a body portion defined therebetween; (b) an acoustic mirror having a top surface and a bottom surface, a first end portion and an opposite, second end portion, and a body portion defined therebetween, wherein the bottom surface is formed on the top surface of the substrate; (c) a first electrode having a top surface and a bottom surface, a first end portion and an opposite, second end portion, and a body portion defined therebetween, wherein the bottom surface is formed on the top surface of the acoustic mirror; (d) a piezoelectric layer having a top surface and a bottom surface, a first end portion and an opposite, second end portion, and a body portion defined therebetween, wherein the bottom surface is formed on the top surface of the first electrode; and (e) a second electrode having a top surface and a bottom surface, a first end portion and an opposite, second end portion, and a body portion defined therebetween. The bottom surface is formed on the top surface of the piezoelectric layer, wherein the overlapped area of body portions of the substrate, the acoustic mirror, the first electrode, the piezoelectric layer and the second electrode is defined as an active area A.
摘要翻译：声谐振器包括（a）具有顶表面和底表面的基底，第一端部和相对的第二端部以及限定在其间的主体部分; （b）具有顶表面和底表面的声反射镜，第一端部和相对的第二端部以及限定在其间的主体部分，其中底表面形成在基板的顶表面上; （c）具有顶表面和底表面的第一电极，第一端部和相对的第二端部，以及限定在其间的主体部分，其中所述底表面形成在所述声反射镜的顶表面上; （d）具有顶表面和底表面的压电层，第一端部和相对的第二端部以及限定在其间的主体部分，其中所述底表面形成在所述第一电极的顶表面上; 和（e）具有顶表面和底表面的第二电极，第一端部和相对的第二端部，以及限定在其间的主体部分。底表面形成在压电层的顶表面上，其中衬底，声镜，第一电极，压电层和第二电极的主体部分的重叠区域被定义为有效区域A.

28. 发明申请

US20120248941A1 STACKED BULK ACCOUSTIC RESONATOR AND METHOD OF FABRICATING THE SAME 有权
标题翻译：堆叠式散热器共振器及其制造方法
公开(公告)号：US20120248941A1
公开(公告)日：2012-10-04
申请号：US13074094
申请日：2011-03-29
申请人： Alexandre Augusto Shirakawa , Paul Bradley , Dariusz Burak , Stefan Bader , Chris Feng
发明人： Alexandre Augusto Shirakawa , Paul Bradley , Dariusz Burak , Stefan Bader , Chris Feng
IPC分类号： H03H9/17 , H01L41/047
CPC分类号： H03H3/02 , H03H9/132 , H03H9/585 , H03H2003/0428
摘要： A stacked bulk acoustic resonator includes a first piezoelectric layer stacked on a first electrode, a second electrode stacked on the first piezoelectric layer; a second piezoelectric layer stacked on the second electrode, and a third electrode stacked on the second piezoelectric layer. The stacked bulk acoustic resonator includes further includes an inner raised region formed in an inner portion on a surface of at least one of the first, second and third electrodes, and an outer raised region formed along an outer perimeter on the surface of the at least one of the first, second or third electrodes. The outer raised region surrounds the inner raised region and defines a gap between the inner raised region and the outer raised region.
摘要翻译：层叠的体声波谐振器包括堆叠在第一电极上的第一压电层，堆叠在第一压电层上的第二电极; 堆叠在第二电极上的第二压电层和堆叠在第二压电层上的第三电极。所述层叠的体声波谐振器还包括形成在所述第一，第二和第三电极中的至少一个的表面上的内部部分中的内部凸起区域，以及沿所述至少一个表面上的外周边形成的外部凸起区域第一，第二或第三电极之一。外部凸起区域围绕内部凸起区域并且在内部升高区域和外部凸起区域之间限定间隙。

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