会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 29. 发明申请
    • MEMS BASED MULTI-POLAR ELECTROSTATIC CHUCK
    • 基于MEMS的多极静电卡盘
    • WO2005020316A1
    • 2005-03-03
    • PCT/US2004/026896
    • 2004-08-18
    • AXCELIS TECHNOLOGIES INC.KELLERMAN, PeterQIN, ShuBROWN, Douglas
    • KELLERMAN, PeterQIN, ShuBROWN, Douglas
    • H01L21/68
    • H01L21/6875H01L21/6833
    • The present invention is directed to a semiconductor processing apparatus and a method for clamping a semiconductor substrate and controlling a heat transfer associated therewith. According to one aspect of the present invention, a multi-polar electrostatic chuck and associated method is disclosed which provides a controlled and uniform heat transfer coefficient across a surface thereof. The multi-polar electrostatic chuck comprises a semiconductor platform having a plurality of protrusions that define gaps therebetween, wherein a distance or depth of the gaps is uniform and associated with a mean free path of the cooling gas therein. The electrostatic chuck is permits a control of a backside pressure of a cooling gas within the plurality of gaps to thus control a heat transfer coefficient of the cooling gas. The plurality of protrusions further provide a uniform contact surface, wherein a contact conductivity between the plurality of protrusions and the substrate is controllable and significantly uniform across the substrate.
    • 本发明涉及一种用于夹持半导体衬底并控制与之相关的热传递的半导体处理装置和方法。 根据本发明的一个方面,公开了一种多极静电卡盘和相关方法,其提供跨越其表面的受控且均匀的传热系数。 多极静电卡盘包括具有限定间隙的多个突起的半导体平台,其中间隙的距离或深度是均匀的,并且与其中的冷却气体的平均自由路径相关联。 静电吸盘可以控制多个间隙内的冷却气体的背侧压力,从而控制冷却气体的传热系数。 多个突起还提供均匀的接触表面,其中多个突起和基底之间的接触导电性在基底上是可控的和显着均匀的。