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21. 发明申请

WO2016094711A3 ORGANOSILANE PRECURSORS FOR ALD/CVD SILICON-CONTAINING FILM APPLICATIONS AND METHODS OF USING THE SAME 审中-公开
标题翻译：用于ALD / CVD含硅薄膜应用的有机硅烷前体及使用该方法的方法
公开(公告)号：WO2016094711A3
公开(公告)日：2016-10-13
申请号：PCT/US2015065077
申请日：2015-12-10
申请人： AIR LIQUIDE , AIR LIQUIDE AMERICAN , KUCHENBEISER GLENN , FAFARD CLAUDIA
发明人： KUCHENBEISER GLENN , FAFARD CLAUDIA
IPC分类号： C07F7/21 , C07F7/02 , C23C16/40 , C23C16/455 , H01L21/02
CPC分类号： C23C16/45553
摘要： Disclosed are organosilane precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes. The disclosed organosilane precursors have the following formula: SiHx(RN-(CR)n-NR)y(NRR)z wherein R may each independently be H, a C1 to C6 alkyl group, or a C3-C20 aryl or heterocycle group, x+y+z = 4 and n, x, y and z are integers, provided that x≠3 when y=1. Preferably, n = 1 to 3, x = 0 to 2, y = 1 to 2, and z = 1 to 3.
摘要翻译：公开了有机硅烷前体，其合成方法，以及使用该方法使用气相沉积工艺沉积含硅膜的方法。所公开的有机硅烷前体具有下式：其中R可以各自独立地为H，C 1至C 6烷基或C 3 -C 20芳基或杂环基，其中R 1，R 2，R 3， x + y + z = 4且n，x，y和z是整数，条件是当y = 1时x≠3。优选地，n = 1至3，x = 0至2，y = 1至2和z = 1至3。

22. 发明申请

WO2011103282A3 VAPOR DEPOSITION METHODS OF SiCOH LOW-K FILMS 审中-公开
标题翻译： SiCOH低K膜的蒸气沉积方法
公开(公告)号：WO2011103282A3
公开(公告)日：2012-02-02
申请号：PCT/US2011025234
申请日：2011-02-17
申请人： AIR LIQUIDE , AIR LIQUIDE AMERICAN , DUSSARRAT CHRISTIAN , DONIAT FRANCOIS , ANDERSON CURTIS , MCANDREW JAMES J F
发明人： DUSSARRAT CHRISTIAN , DONIAT FRANCOIS , ANDERSON CURTIS , MCANDREW JAMES J F
IPC分类号： C23C16/30 , C23C16/18 , C23C16/50 , H01L21/205
CPC分类号： H01L21/02126 , C23C16/30 , C23C16/401 , C23C16/56 , H01L21/02203 , H01L21/02211 , H01L21/02214 , H01L21/02274
摘要： Disclosed are precursors that are adapted to deposit SiCOH films with dielectric constant and Young's Modulus suitable for future generation dielectric films.
摘要翻译：公开了适于沉积具有介电常数的SiCOH膜的前体，并且适用于下一代介电膜的杨氏模量。

23. 发明申请

WO0032713A9 STABILIZED SLURRY COMPOSITIONS 审中-公开
标题翻译：稳定的浆料组合物
公开(公告)号：WO0032713A9
公开(公告)日：2002-08-22
申请号：PCT/US9928087
申请日：1999-11-24
申请人： AIR LIQUIDE AMERICAN , MISRA ASHUTOSH
发明人： MISRA ASHUTOSH
IPC分类号： H01L21/304 , C09K3/14 , C23F3/00 , H01L21/302 , H01L21/321 , C09G1/02
CPC分类号： H01L21/3212 , B24B37/044 , C09K3/1463
摘要： Provided are slurry compositions suitable for use in a chemical-mechanical planarization process and methods for making same. The compositions include: (a) abrasive particles dispersed in a suspension medium; (b) a peroxygen compound; and (c) a stabilizing agent. The stabilizing agent includes a phosphoric acid, a salt of a phosphoric acid or combinations thereof. The invention has particular applicability to the semiconductor manufacturing industry.
摘要翻译：提供适用于化学机械平面化方法的浆料组合物及其制备方法。组合物包括：（a）分散在悬浮介质中的磨料颗粒; （b）过氧化合物; 和（c）稳定剂。稳定剂包括磷酸，磷酸的盐或其组合。本发明特别适用于半导体制造业。

24. 发明申请

WO0235169A2 METHODS AND APPARATUS FOR RECYCLING CRYOGENIC LIQUID OR GAS FROM TEST CHAMBERS 审中-公开
标题翻译：从测试室回收低温液体或气体的方法和装置
公开(公告)号：WO0235169A2
公开(公告)日：2002-05-02
申请号：PCT/US0146167
申请日：2001-10-22
申请人： AIR LIQUIDE AMERICAN , THERIAULT MARTIN , BLOSTEIN PHILIPPE
发明人： THERIAULT MARTIN , BLOSTEIN PHILIPPE
IPC分类号： G01R31/26 , F25D3/10 , F25D9/00 , G01R31/00 , G01R31/28 , G01R31/30 , F28D15/00
CPC分类号： G01R31/2849 , G01R31/2862 , G01R31/2874
摘要： Methods and apparatus are presented which allow efficient environmental testing of components such as printed circuit boards, integrated circuits, sub-systems and other components. In one method of the invention, a component can be placed into a chamber having an internal space filled with a gaseous atmosphere. The component is indirectly cooled by smartly positioning one or more cooling coils near the component to be tested, and the cooling coils are fed with a cryogenic fluid from a source of cryogenic fluid. The warm cryogenic fluid is recycled by one or two means: a thermosiphon conduit loop, and a storage and compression facility for reusing the warm cryogenic fluid. The internal space is preferably filled with a dry gas.
摘要翻译：提出了允许诸如印刷电路板，集成电路，子系统和其它部件的组件的有效环境测试的方法和装置。在本发明的一种方法中，组件可以放置在具有填充有气体气氛的内部空间的室中。通过将待测试部件附近的一个或多个冷却盘管巧妙地定位，并且冷却盘管从低温流体源供给低温流体，间接地冷却该部件。温暖的低温流体通过一种或两种方式再循环：热虹吸管回路，以及用于重新使用温热低温流体的储存和压缩设备。内部空间优选用干燥气体填充。

25. 发明申请

WO2011020042A3 HAFNIUM- AND ZIRCONIUM-CONTAINING PRECURSORS AND METHODS OF USING THE SAME 审中-公开
标题翻译：含铪和锆的前体及使用该前体的方法
公开(公告)号：WO2011020042A3
公开(公告)日：2011-06-09
申请号：PCT/US2010045506
申请日：2010-08-13
申请人： AIR LIQUIDE , AIR LIQUIDE AMERICAN , DUSSARRAT CHRISTIAN , OMARJEE VINCENT M , PALLEM VENKATESWARA R
发明人： DUSSARRAT CHRISTIAN , OMARJEE VINCENT M , PALLEM VENKATESWARA R
IPC分类号： C07F7/00 , C23C16/18 , C23C16/30
CPC分类号： C07F17/00 , C23C16/18
摘要： Disclosed are hafnium- and zirconium-containing precursors and methods of providing the same. The disclosed precursors include a ligand and at least one aliphatic group as substituent selected to have greater degrees of freedom than the usual substituents. The disclosed precursors may be used to deposit hafnium- or zirconium-containing layers using vapor deposition methods such as chemical vapor deposition or atomic layer deposition.
摘要翻译：公开了含铪和锆的前体及其提供方法。所公开的前体包括配体和至少一个脂肪族基团作为取代基，所述取代基被选择为具有比常规取代基更大的自由度。所公开的前体可用于使用气相沉积方法如化学气相沉积或原子层沉积来沉积含铪或锆的层。

26. 发明申请

WO2011020028A3 SILANE BLEND FOR THIN FILM VAPOR DEPOSITION 审中-公开
标题翻译：硅烷共混用于薄膜蒸气沉积
公开(公告)号：WO2011020028A3
公开(公告)日：2011-08-11
申请号：PCT/US2010045484
申请日：2010-08-13
申请人： AIR LIQUIDE , AIR LIQUIDE AMERICAN , DUSSARRAT CHRISTIAN , OMARJEE VINCENT M
发明人： DUSSARRAT CHRISTIAN , OMARJEE VINCENT M
IPC分类号： H01L21/205 , C23C16/24
CPC分类号： H01L21/0237 , C23C16/24 , C23C16/308 , C23C16/401 , C23C16/44 , C23C16/45553 , H01L21/02532 , H01L21/0262
摘要： Disclosed are non-pyrophoric mixtures of silicon compounds and solvents. Also disclosed are methods of stabilizing the pyrophoric silicon compounds (precursors). The non-pyrophoric mixtures may be used to deposit silicon-containing layers using vapor deposition methods such as chemical vapor deposition or atomic layer deposition.
摘要翻译：公开了硅化合物和溶剂的非引火混合物。还公开了稳定引火性硅化合物（前体）的方法。非引火混合物可以用于使用气相沉积方法如化学气相沉积或原子层沉积来沉积含硅层。

27. 发明授权

US6361750B2 Systems for purification of boron trichloride 失效
标题翻译：三氯化硼净化系统
公开(公告)号：US6361750B2
公开(公告)日：2002-03-26
申请号：US72596500
申请日：2000-11-29
申请人： AIR LIQUIDE AMERICAN
发明人： ZHOU DERONG , JURSICH GREGORY M , KEBBEKUS EARLE R , BORZIO JOHN P , UNER JASON R
IPC分类号： C01B35/06 , F25J3/06 , F25J3/08 , B01J8/04
CPC分类号： C01B35/061 , F17C2227/0302 , F17C2270/0518
摘要： Processes are disclosed for increasing the condensed phase production of BCl3 comprising less than about 10 ppm phosgene, less than 10 ppm chlorine, and less than 10 ppm HCl. In one embodiment the process comprises injecting an inert gas into a container having condensed BCl3 therein, the condensed BCl3 having therein a minor portion of phosgene impurity. A major portion of the phosgene in the condensed BCl3 is decomposed to carbon monoxide and chlorine by increasing temperature to produce a phosgene deficient stream. The temperature of the phosgene deficient stream is then decreased, and contacted with an adsorbent to remove the chlorine in the stream by adsorption to form a chlorine and phosgene free condensed stream. The chlorine and phosgene free stream is stripped using an inert gas to form a BCl3 product condensed stream, and an inert gas is used to pump the BCl3 product condensed stream to a product receiver.
摘要翻译：公开了用于增加包含小于约10ppm光气，小于10ppm氯和小于10ppm HCl的BCl 3的冷凝相生产的方法。在一个实施方案中，该方法包括将惰性气体注入其中具有冷凝的BCl 3的容器中，冷凝的BCl 3中有少部分光气杂质。浓缩的BCl 3中的光气的主要部分通过升高温度而分解成一氧化碳和氯，以产生光气不足的物流。然后减少光气缺乏物流的温度，并与吸附剂接触以通过吸附除去流中的氯以形成无氯和无光气的冷凝物流。使用惰性气体汽提氯和无光气流以形成BCl 3产物冷凝流，并使用惰性气体将BCl 3产物冷凝流泵送到产品接收器。

28. 发明授权

US6444011B2 Process and system for separation and recovery of perfluorocompound gases 失效
标题翻译：分离和回收全氟化合物气体的方法和系统
公开(公告)号：US6444011B2
公开(公告)日：2002-09-03
申请号：US76826201
申请日：2001-01-25
申请人： AIR LIQUIDE AMERICAN
发明人： LI YAO-EN , PAGANESSI JOSPEH E , VASSALLO DAVID , FLEMING GREGORY K
IPC分类号： B01D53/68 , B01D53/00 , B01D53/02 , B01D53/22 , B01D53/32 , B01D63/02 , B01D71/48 , B01D71/50 , B01D71/56 , B01D71/62 , B01D71/64 , B01D71/68 , C07C17/38 , B01D3/00 , B01D5/00 , B01D53/04
CPC分类号： B01D53/225 , B01D53/22 , B01D53/226 , B01D53/229 , B01D2257/204 , B01D2257/2066 , C07C17/38 , Y02C20/30 , Y02P20/154 , Y02P20/155 , C07C19/08
摘要： Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least once glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.
摘要翻译：提供了从气体混合物中回收至少一种全氟化合物气体的方法和系统。在一个实施方案中，本发明的方法包括以下步骤：a）提供包含至少一种全氟化合物气体和至少一种载气的气体混合物，所述气体混合物处于预定压力; b）提供至少一次具有进料侧和渗透侧的玻璃状聚合物膜; c）使至少一个膜的进料侧与气体混合物接触; d）以基本上等于预定压力的压力从作为非渗透物流的膜的进料侧排出基本上包含至少一种全氟化合物气体的浓缩气体混合物; 和e）作为渗透物流从膜的渗透侧排出基本上包含至少一种载气的贫化气体混合物。

29. 发明公开

EP2464652A4 HAFNIUM- AND ZIRCONIUM-CONTAINING PRECURSORS AND METHODS OF USING THE SAME 审中-公开
标题翻译：铪和锆含使用易制毒化学及其方法
公开(公告)号：EP2464652A4
公开(公告)日：2013-01-09
申请号：EP10808835
申请日：2010-08-13
申请人： AIR LIQUIDE , AIR LIQUIDE AMERICAN
发明人： DUSSARRAT CHRISTIAN , OMARJEE VINCENT M , PALLEM VENKATESWARA R
IPC分类号： C07F7/00 , C23C16/18 , C23C16/30
CPC分类号： C07F17/00 , C23C16/18

30. 发明专利

AU2002334853A1 CHEMICAL PURIFICATION CARTRIDGE 未知
公开(公告)号：AU2002334853A1
公开(公告)日：2004-05-04
申请号：AU2002334853
申请日：2002-10-04
申请人： AIR LIQUIDE AMERICAN
发明人： URQUHART KARL J , HOFFMAN JOE G , SNYDER DAVID , RAGHAVAN VINOD , HAVLICEK MARY D , GEURIAN JOHN
IPC分类号： B01D15/04 , C01B15/013

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