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21. 发明专利

DE102005053990A1 未知
公开(公告)号：DE102005053990A1
公开(公告)日：2006-07-13
申请号：DE102005053990
申请日：2005-11-10
申请人： HITACHI VIA MECHANICS LTD
发明人： ITO YASUSHI , KIMURA FUMIAKI
IPC分类号： B21D1/06 , B23K26/02
摘要： There is provided a method and a device capable of holding a sheet-like workpiece without wrinkles. The sheet-like workpiece holding method includes mounting the sheet-like workpiece such that almost no tensile force is applied thereon on a machining table, and pressing out wrinkles of the sheet-like workpiece by lowering a pressing member whose surface facing to the workpiece protrudes in the shape of a convex lens toward the workpiece so that the workpiece is pressed against the machining table. The method also includes retaining the sheet-like workpiece on the machining table using suction while continuously pressing the sheet-like workpiece with the pressing member and releasing the pressing force of the pressing member while retaining the sheet-like workpiece.

22. 发明专利

DE102004062381A1 未知
公开(公告)号：DE102004062381A1
公开(公告)日：2006-07-06
申请号：DE102004062381
申请日：2004-12-23
申请人： HITACHI VIA MECHANICS LTD
发明人： MAYER HANS JUERGEN
IPC分类号： B23K26/067 , B23K26/38 , H05K3/00
摘要： A switch-over device is disclosed for selectively switching a linearly polarized input laser beam to a first output laser beam or to a second output laser beam. The switch-over device includes a primary optical switch-over element having a primary optical element for selectively rotating the polarization direction of the input laser beam and a downstream primary polarization-dependent reflector which guides the input laser beam depending on its polarization direction to a first course of ray or to a second course of ray. In each of the two courses of ray, a further optical switch-over element is respectively provided which includes a secondary optical element for selectively rotating the polarization direction of the respective laser beam and a secondary polarization-dependent reflector which guides the respective laser beam depending on its polarization direction to an output laser beam. Furthermore, a laser machining device is disclosed, including a laser beam switch-over device as mentioned above.

23. 发明专利

HK1082970A1 PATTERN EXPOSURE METHOD AND PATTERN EXPOSURE APPARATUS 未知
公开(公告)号：HK1082970A1
公开(公告)日：2006-06-23
申请号：HK06102763
申请日：2006-03-02
申请人： HITACHI VIA MECHANICS LTD
发明人： OSHIDA YOSHITADA , NAITO YOSHITATSU , SUZUKI MITSUHIRO , UCHIYAMA BUNJI , YAMAGUCHI TSUYOSHI
IPC分类号： G02B26/10 , G02B20060101 , G02B26/12 , G03B27/54 , G03F20060101 , G03F7/20 , G03F7/22
摘要： A pattern exposure method and a pattern exposure apparatus in which the throughput is improved with an inexpensive apparatus and without a low running cost. Output faces of a plurality of laser beams emitted from a plurality of semiconductor lasers respectively are arranged in two directions. One of the directions is the same direction as the scanning direction of a polygon mirror while the other is a direction crossing the scanning direction of the polygon mirror. In this event, the array pitch of the output faces arranged in the direction crossing the scanning direction of the polygon mirror is made equal to resolution of an exposure pattern. In this event, the wavelength of each laser may be made not longer than 410 nm.

24. 发明专利

DE102005054694A1 未知
公开(公告)号：DE102005054694A1
公开(公告)日：2006-06-22
申请号：DE102005054694
申请日：2005-11-16
申请人： HITACHI VIA MECHANICS LTD
发明人： OHMAE GOICHI , AOYAMA HIROSHI
IPC分类号： G02F1/35
摘要： The invention provides a method and an apparatus for forming a plurality of ultraviolet-wavelength laser beams, and a laser machining apparatus, in which the machining efficiency can be improved due to easy maintenance and inspection while deterioration of wavelength conversion means can be prevented to reduce the running cost. A laser beam with a near infrared wavelength output from a laser oscillator is branched into a plurality of laser beams by a laser distribution unit. Each branched laser beam is partially converted into a laser beam whose wavelength is ½ of the near infrared wavelength by a wavelength converter. An ultraviolet laser beam whose wavelength is 1/3 of the near infrared wavelength of the laser beam is formed out of the branched laser beam and the laser beam with the wavelength which is ½ of the near infrared wavelength by another wavelength converter, both the branched laser beam and the laser beam with the wavelength which is ½ of the near infrared wavelength being output from the wavelength converter. The ultraviolet laser beam is extracted and supplied to a portion to be machined, by a wavelength separator.

25. 发明专利

GB2413393A Pattern exposure method and apparatus 未知
公开(公告)号：GB2413393A
公开(公告)日：2005-10-26
申请号：GB0504957
申请日：2005-03-10
申请人： HITACHI VIA MECHANICS LTD
发明人： OSHIDA YOSHITADA , NAITO YOSHITATSU , SUZUKI MITUHIRO
IPC分类号： G02B26/10 , G02B26/12 , G03B27/54 , G03F7/20 , G03F7/22
摘要： A pattern exposure method uses a plurality of light beams emitted from a plurality of sources to expose a substrate a plurality of times with different beams. Apparatus is disclosed including a polygon mirror which is used for beam scanning. The light sources may be semiconductor lasers. The apparatus and method are used for pattern exposure on a PCB, LCD or substrate of a plasma display.

26. 发明专利

NL1028549A1 Patroonbelichtingswerkwijze en patroonbelichtingsinrichting. 未知
公开(公告)号：NL1028549A1
公开(公告)日：2005-10-03
申请号：NL1028549
申请日：2005-03-15
申请人： HITACHI VIA MECHANICS LTD
发明人： OSHIDA YOSHITADA , NAITO YOSHITATSU , SUZUKI MITUHIRO , UCHIYAMA BUNJI , YAMAGUCHI TSUYOSHI
IPC分类号： G02B26/12 , G02B26/10 , G03B27/54 , G03F7/20 , G03F7/22

27. 发明专利

DE102004042032A1 未知
公开(公告)号：DE102004042032A1
公开(公告)日：2005-08-04
申请号：DE102004042032
申请日：2004-08-31
申请人： HITACHI VIA MECHANICS LTD
发明人： ARAI KUNIO , ISHII KAZUHISA , ASHIZAWA HIROAKI
IPC分类号： B23K26/06 , B23K26/073 , B23K26/382 , B23K101/40 , B23K101/42 , H05K3/00 , B23K26/40
摘要： A laser machining method and a laser machining apparatus superior in hole position accuracy and hole quality. An outgoing beam outputted as short pulses is shaped by a pulse shaping unit so as to form a #1 branch beam. The #1 branch beam is supplied to a portion to be machined, so as to machine the portion. In this case, the #1 branch beam may be controlled to synchronize with the outgoing beam. When a piece to be machined is made from a metal material and at least one of an organic material and an inorganic material, the metal material is machined with a laser beam shaped to have a pulse width not shorter than 100 ns, and at least one of the organic material and the inorganic material is machined with a laser beam shaped to have a pulse width shorter than 100 ns.

28. 发明专利

DE10149559A1 未知
公开(公告)号：DE10149559A1
公开(公告)日：2002-04-11
申请号：DE10149559
申请日：2001-10-08
申请人： HITACHI VIA MECHANICS LTD
发明人： ARAI KUNIO , ISHII KAZUHISA , KITA YASUHIKO
IPC分类号： B23K26/06 , B23K26/067 , B23K26/38 , H05K1/03 , H05K3/00 , H05K3/40

29. 发明专利

DE10149559B4 Vorrichtung und Verfahren zur Laserbearbeitung einer gedruckten Verdrahtungsplatte 未知
公开(公告)号：DE10149559B4
公开(公告)日：2012-12-20
申请号：DE10149559
申请日：2001-10-08
申请人： HITACHI VIA MECHANICS LTD
发明人： ARAI KUNIO , ISHII KAZUHISA , KITA YASUHIKO
IPC分类号： H05K3/00 , B23K26/06 , B23K26/067 , B23K26/38 , H05K1/03
摘要： Vorrichtung zur Laserbearbeitung einer gedruckten Verdrahtungsplatte, mit • einem Laserkopf (1), • einer optischen Ablenkvorrichtung (6) zum Umschalten von optischen Pfaden des von dem Laserkopf (1) emittierten Laserstrahls (2), • entlang den optischen Pfaden angeordneten optischen Elementen (3i, 4i, 5i, 30i, 3k, 4k, 5k, 30k) zum individuellen Einstellen der Energiedichten, der räumlichen Energieverteilungen und der Strahlendurchmesser der Laserstrahlen (2i, 2k), gekennzeichnet durch eine Strahlenkombiniervorrichtung (10), um die mittels der optischen Elemente eingestellten Laserstrahlen (2i, 2k) auf einem gemeinsamen optischen Pfad zur Weiterbewegung zu leiten.

30. 发明专利

DE102008038443A1 Maskless exposure device for substrate to form wiring pattern on printed circuit board, has projection lens producing image in plane, which is positioned at substrate surfaces, when distance between wedge-shaped surfaces is held constant 未知
公开(公告)号：DE102008038443A1
公开(公告)日：2009-04-02
申请号：DE102008038443
申请日：2008-08-20
申请人： HITACHI VIA MECHANICS LTD
发明人： OSHIDA YOSHITADA , KOBAYASHI KAZUO
IPC分类号： G03F7/20
摘要： The device has a movement device for moving wedge-shaped glasses (717, 727) with wedge-shaped surfaces. One of the wedge-shaped surfaces is moved in an upward direction or a downward direction longitudinal to an inclination by the movement unit, when an imaging position of a projection lens (67) is moved from surfaces of a substrate (8). The projection lens produces an image longitudinal to its optical axis in a plane in the imaging position. The plane is positioned at the surfaces of the substrate, when the distance between the wedge-shaped surfaces is held constant.

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