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11. 发明授权

CN100426440C 冷阴极电子枪和采用该冷阴极电子枪的真空规管失效
公开(公告)号：CN100426440C
公开(公告)日：2008-10-15
申请号：CN200410027020.4
申请日：2004-04-21
申请人：清华大学 , 鸿富锦精密工业(深圳)有限公司
发明人：柳鹏 , 盛雷梅 , 魏洋 , 刘亮 , 齐京 , 范守善
IPC分类号： H01J3/02 , H01J41/00 , G01L21/34
CPC分类号： G01L21/34
摘要：一种用于超高真空和极高真空量测的冷阴极电子枪，其包括一栅极和一设置于该栅极下方的阴极，其特征在于在该栅极上方平行设置一屏蔽极。本发明还提供一种使用上述冷阴极电子枪的真空规管，其包括一外壳、一收集极、一阳极和一冷阴极电子枪；该冷阴极电子枪和该收集极相对该阳极同轴对称放置；该外壳开口一端与待测器件相接，其特征在于该冷阴极电子枪包括一栅极、一平行设置于该栅极上方的屏蔽极和一设置于该栅极下方的阴极。本发明采用冷阴极电子枪的真空规管具有阴极体积小、功耗小、灵敏度高和降低吸放气率的优点。

12. 发明公开

CN101133308A 真空测量仪有权转让
公开(公告)号：CN101133308A
公开(公告)日：2008-02-27
申请号：CN200680007086.4
申请日：2006-03-01
申请人：英飞康有限责任公司
发明人： W·克纳普 , M·沃斯特
IPC分类号： G01L21/30 , G01L21/32 , G01L21/34 , H01J1/30 , H01J1/304 , H01J41/00 , H01J41/02 , H01J41/04 , H01J41/06 , H01J41/08 , H01J41/10 , H01J19/00 , H01J19/02 , H01J19/04 , H01J19/10
CPC分类号： G01L21/32 , G01L21/12 , H01J1/3042 , H01J41/04
摘要：本发明提出一种发射电子的阴极(6)，它由装接到由不锈钢制成的侧壁(2)上的导电的发射层(7)和门(9)，将该门以很小的距离固定在发射层(7)的凹入的发射表面的内部。阴极(6)围绕着一个反应区域(3)，该反应区域包含一个圆柱形的筛网状的阳极(5)和一个位于中心的离子收集器(4)，该离子收集器包括一直的轴向细丝。电流计(11)测量反映在反应区域(3)中气体密度的离子收集器电流(IIC)，同时将门电压(VG)保持在发射层(7)的地电压与较高的阳极电压(VA)之间，并且调节门电压，其方式使得将阳极电流(IA)保持不变。发射层(7)可包括碳纳米管，金刚石状的碳，一种金属或一种金属混合物，或者一种半导体材料，半导体材料例如是可以比如用碳化物或钼涂布的硅。然而，发射表面也可是例如被化学刻蚀过程变粗糙的侧壁的内表面的一部分。门(9)可以是一种筛网，或者，它可以包括覆盖分布在发射区上的隔离器的金属薄膜小片或覆盖设置在发射表面上的电子可穿透层的一层金属薄膜。

13. 实用新型

JPS54162759U JPS54162759U - 失效
公开(公告)号：JPS54162759U
公开(公告)日：1979-11-14
申请号：JP6091978
申请日：1978-05-06
IPC分类号： H01J41/16 , H01J23/00 , H01J41/00

14. 发明专利

JP4252064B2 Feather Backed beam stop to reduce the x-ray limit of the total pressure gauge 有权
公开(公告)号：JP4252064B2
公开(公告)日：2009-04-08
申请号：JP2005518088
申请日：2002-05-28
申请人：インフィコンインコーポレイティッド
发明人：シーフリーズルイス , イーエレフソンロバート
IPC分类号： G01L21/36 , G01L21/32 , H01J41/00 , H01J41/04
CPC分类号： H01J41/04

15. 发明专利

JPS62503186A 失效
公开(公告)号：JPS62503186A
公开(公告)日：1987-12-17
申请号：JP50442085
申请日：1985-06-27
IPC分类号： G01M3/16 , G01M3/20 , G01N27/62 , H01J41/00

16. 发明专利

JP2006510036A Feather Backed beam stop to reduce the x-ray limit of the total pressure gauge 有权
公开(公告)号：JP2006510036A
公开(公告)日：2006-03-23
申请号：JP2005518088
申请日：2002-05-28
申请人：インフィコンインコーポレイティッド
发明人：シーフリーズルイス , イーエレフソンロバート
IPC分类号： G01L21/36 , G01L21/32 , H01J41/00 , H01J41/04
CPC分类号： H01J41/04
摘要：電離真空計において、平行化された電子ビームが計器構造のグリッド表面に当たるときに出射されるＸ線の影響を、羽板付ビーム止めにより低減した。この羽板付ビーム止めはＸ線を持たない影領域を形成し、これによりコレクタプレートに当たるＸ線の量を最小にし、残留電流のＸ線作用部分を減少させる。

17. 发明专利

JPS5550200A SHIELD 失效
公开(公告)号：JPS5550200A
公开(公告)日：1980-04-11
申请号：JP12328878
申请日：1978-10-06
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： SUKENOBE SATORU
IPC分类号： H01J41/20 , G21F3/00 , H01J41/00

18. 发明专利

JP2001050845A POWER SUPPLY FOR IONIZATION 失效
公开(公告)号：JP2001050845A
公开(公告)日：2001-02-23
申请号：JP22483699
申请日：1999-08-09
申请人： SHIMADZU CORP
发明人： OSANAI KATSUTOYO
IPC分类号： H01J41/00 , G01L21/30 , H02M3/28
摘要： PROBLEM TO BE SOLVED: To obtain a power supply for an ionization in which the capacity, heat generation and size are reduced by realizing output characteristics corresponding to the voltage-current characteristics of an ionization load where the load current is low under high voltage and high under low voltage. SOLUTION: The power supply for ionization comprises a high voltage DC/DC converter 2 applying a DC voltage to an ionization electrode and a voltage control section 4 controls the primary voltage of the high voltage DC/DC converter 2 based on a load current generated through ionization to vary the secondary voltage of the high voltage DC/DC converter 2 reversely to the varying direction of the load current I. In place of output voltage control using voltage drop across a resistor, output voltage control depending on the load current I is carried out and the capacity, heat generation and size of the power supply are reduced by realizing output characteristics corresponding to the voltage- current characteristics of an ionization load.

19. 发明专利

JPS51113772A COLDDCATHOD DISCHARGING UNIT 失效
公开(公告)号：JPS51113772A
公开(公告)日：1976-10-07
申请号：JP3782275
申请日：1975-03-31
申请人： TOKYO SHIBAURA ELECTRIC CO
发明人： KAGEYAMA KATSUKOU
IPC分类号： G01L21/34 , F04B37/14 , G01L21/30 , H01J17/14 , H01J17/38 , H01J41/00 , H01J41/12
摘要： PURPOSE:In order to reduce the delay due to the change in discharging time, by way of preventing the change of quality and consumption of the cathode (or trigger electrode) which emits the elctrron.

20. 发明授权

US3796917A Devices for ionizing residual gases in vacuum systems 失效
标题翻译：真空系统中残留气体的离子化装置
公开(公告)号：US3796917A
公开(公告)日：1974-03-12
申请号：US3796917D
申请日：1972-08-21
申请人： NAT ELECTROSTATICS CORP
发明人： HILLER D
IPC分类号： H01J41/06 , H01J41/16 , H01J19/70 , H01J41/00
CPC分类号： H01J41/16 , H01J41/06
摘要： The disclosed ionizers are of the orbitron type utilizing a high voltage anode in the form of a wire or rod extending axially within an outer generally cylindrical electrode which may be in the form of a cylindrical conductive screen connected to the negative terminal of the power supply. One or more of the ionizers are mounted within a vacuum space containing residual gas molecules to be ionized. The resulting ions may be propelled by electrostatic field forces to the cylindrical screen and also to the walls of the vacuum chamber where the ions may be absorbed or gettered by freshly deposited titanium or some other gettering material. By this mechanism of ion getter pumping, gas molecules are effectively removed from the vacuum space so as to improve the vacuum. In accordance with the present invention, electrons are injected into the space between the axial anode and the outer cylindrical electrode by an electron-emitting electrode which is typically in the form of a generally circular loop or ring encircling the axial anode and spaced inwardly from the cylindrical outer electrode in the radial electric field beween the inner and outer electrodes. The electron-emitting electrode is preferably energized with a direct current which causes heating of the electron-emitting electrode so that electrons are emitted thermionically therefrom. The current also produces an axial magnetic field in the space between the electron-emitting electrode and the anode. The combination of the radial electric field and the axial magnetic field causes a high percentage of the emitted electrons to go into orbits around the anode so that the electrons have extremely long mean-free paths before finally being attracted to the anode. In this way, the orbiting electrons produce a high degree of ionization of the residual gas molecules in the vacuum space. The axial magnetic field may be enhanced by an electromagnet or a permanent magnet disposed near the circular electron-emitting electrode and preferably aligned axially therewith. The electromagnet may take the form of a loop having one or more turns disposed near the electron-emitting electrode or a coil having a multiplicity of turns and preferably having a core of magnetic material. The permanent magnet may be generally cylindrical in shape and disposed axially. The ionizer may also be used to provide an ion gage in which the ion current to the cylindrical electrode is measured.

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