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    • 11. 发明申请
    • Probe area setting method and probe device
    • 探头区域设置方法和探头设备
    • US20040257101A1
    • 2004-12-23
    • US10492557
    • 2004-04-14
    • Youzou MiuraTomokazu Ozawa
    • G01R031/02G01R027/08
    • H01L22/20G01R1/06794H01L21/681H01L2924/0002H01L2924/00
    • With a wafer having an indefinite shape or a broken wafer, it is hard for an operator to assign the design address of an edge chip and set a probe area. In a probe-area setting method of this invention, a wafer W is placed on a main chuck (18) that is movable at least in the X- and Y-directions. The main chuck (18) is moved, thus moving wafer W in the X- and Y-directions. All edge chips formed on the wafer W are retrieved by means of an upper camera (21A), thereby setting a probe area. To retrieve the edge chips, an edge chip is selected as one with which the retrieval should be started. The edge chips are successively retrieved in the turning direction of the wafer, as the chip retrieval direction is changed to the X- or Y-direction.
    • 对于具有不确定形状或破碎的晶片的晶片,操作者难以分配边缘芯片的设计地址并设置探针区域。 在本发明的探针区域设定方法中,将晶片W放置在能够至少沿X方向和Y方向移动的主卡盘(18)上。 主卡盘(18)移动,从而使晶片W沿X方向和Y方向移动。 形成在晶片W上的所有边缘芯片通过上摄像机(21A)被检索,从而设置探针区域。 为了检索边缘芯片,选择一个边缘芯片作为启动检索的芯片。 当芯片取回方向改变为X方向或Y方向时,沿着晶片的转动方向连续地取出边缘芯片。
    • 12. 发明申请
    • Conductive coil contact member
    • 导电线圈接触件
    • US20040257099A1
    • 2004-12-23
    • US10892642
    • 2004-07-15
    • Toshio Kazama
    • G01R031/02
    • G01R1/06716G01R1/0466G01R1/0483
    • In a conductive coil contact member having at least one tapered end consisting of a plurality of turns of coil wire having a progressively smaller coil radius toward a free end thereof, the coil wire comprises a core wire and at least one highly electrically conductive layer formed over the core wire, a last turn of the coil wire at the free end having a smaller coil radius than would be possible by coiling the coil wire. Thus, the core wire is coiled to a smallest possible radius in the last turn, and the coil wire diameter is thereafter increased by forming layers formed by plating or other similar methods. The final result is that the last turn of the coil wire at the free end has a smaller coil radius than would be possible by coiling the coil wire. The reduction in the coil radius of the last turn contributes to the improvement in the positional accuracy of the free end of the tapered end of the conductive coil contact member.
    • 在具有至少一个锥形端的导电线圈接触构件中,所述至少一个锥形端由多圈的线圈绕组组成,线圈线的自由端具有逐渐更小的线圈半径,所述线圈线包括芯线和至少一个高导电层, 芯线,在自由端的线圈线的最后一圈具有比通过卷绕线圈线可能的更小的线圈半径。 因此,芯线在最后一圈被卷绕成尽可能小的半径,然后通过形成通过电镀形成的层或其它类似方法来增加线圈线直径。 最后的结果是线圈线在自由端的最后一圈具有比通过卷绕线圈线可能的更小的线圈半径。 最后一圈的线圈半径的减小有助于提高导电线圈接触构件的锥形端部的自由端的位置精度。
    • 15. 发明申请
    • Output buffer circuit having signal path used for testing and integrated circuit and test method including the same
    • 具有用于测试和集成电路的信号路径的输出缓冲电路及包括其的测试方法
    • US20040239358A1
    • 2004-12-02
    • US10851332
    • 2004-05-24
    • Si-Young Choi
    • G01R031/02
    • G01R31/31715G01R31/31713
    • An output buffer circuit includes a signal path used for testing and designed for outputting output signals at predetermined logic levels in response to internal output signals from an internal logic circuit. The output buffer circuit and includes a first control input, a second control input, a test signal input circuit, and a plurality of output buffers. The first control input receives a predetermined control signal. The second control input receives a test signal having a predetermined voltage. The test signal input circuit switches between a test mode and a normal mode in response to the control signal, receives and outputs the test signal while in the test mode, and receives and outputs the internal output signals while in the normal mode. The plurality of output buffers output the output signals through a plurality of outputs, in response to the internal output signals or the test signal. The output buffer circuit, and a test method using the same, are advantageous in that the characteristics of the output buffers can be exactly evaluated without being affected by the internal logic circuit.
    • 输出缓冲电路包括用于测试的信号路径,用于响应于来自内部逻辑电路的内部输出信号以预定逻辑电平输出输出信号。 输出缓冲电路,包括第一控制输入,第二控制输入,测试信号输入电路和多个输出缓冲器。 第一控制输入接收预定的控制信号。 第二控制输入接收具有预定电压的测试信号。 测试信号输入电路响应于控制信号在测试模式和正常模式之间切换,在测试模式下接收并输出测试信号,并在正常模式下接收和输出内部输出信号。 响应于内部输出信号或测试信号,多个输出缓冲器通过多个输出输出输出信号。 输出缓冲电路和使用该输出缓冲电路的测试方法的优点在于可以精确地估计输出缓冲器的特性而不受内部逻辑电路的影响。
    • 19. 发明申请
    • Multi point contactor and blade construction
    • 多点接触器和叶片结构
    • US20040232929A1
    • 2004-11-25
    • US10877418
    • 2004-06-25
    • Ceramic Component Technologies, Inc.
    • Christian R. SaulnierJames G. GasqueManuel A. Gallardo
    • G01R031/02
    • G01R1/0425
    • A multi point contactor (MPC) on a component testing system for electrically contacting a terminal on a device under test (DUT) includes at least three independently moveable contacts to help insure at least two of them contact the DUT terminal. At least one of the contacts includes an integral spring, preferably in the form of a blade laser machined from a sheet of electrically conductive material to include a first portion for bearing against the contact-holding structure, a second portion for bearing against the terminal on the DUT, and a third portion interconnecting the first and second portions that functions as an integral spring bias for spring biasing the second portion from the first portion toward the terminal on the DUT. Preferably, the third portion of the blade has a serpentine shape that consistently results in desired constant-force spring characteristics over a nominal range of blade travel.
    • 用于电接触待测器件(DUT)上的端子的元件测试系统上的多点接触器(MPC)包括至少三个可独立移动的触点,以帮助确保其中至少两个接触DUT端子。 触点中的至少一个包括整体式的弹簧,优选地以从导电材料片加工的刀片激光器的形式,包括用于抵靠接触保持结构的第一部分,用于抵靠端子的第二部分 所述DUT和第三部分互连,所述第一和第二部分用作一体的弹簧偏压,用于将所述第二部分从所述第一部分向所述DUT的所述端子弹簧偏置。 优选地,叶片的第三部分具有蛇形形状,其一致地在叶片行进的标称范围内产生期望的恒定力弹簧特性。