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11. 发明授权

US08753903B1 Methods and apparatuses for performing wafer level characterization of a plasmon element 有权
标题翻译：用于执行等离子体元件的晶片级表征的方法和装置
公开(公告)号：US08753903B1
公开(公告)日：2014-06-17
申请号：US13478058
申请日：2012-05-22
申请人： Shawn M. Tanner , Yufeng Hu , Sergei Sochava
发明人： Shawn M. Tanner , Yufeng Hu , Sergei Sochava
IPC分类号： H01L21/66
CPC分类号： H01L22/12
摘要： Improved pump-probe testing methods and apparatuses for measuring the performance of a plasmon element at wafer level are provided. In one embodiment, the apparatus includes a light source configured to output a first light beam on a grating located at a first end of a waveguide, the waveguide being configured to couple energy of the first light beam to the plasmon element located at a second end of the waveguide, and an optical probe assembly positioned above a top surface of the wafer. The optical probe assembly is configured to direct a second light beam on an area of the wafer including the plasmon element and detect a portion of the second light beam reflected from the area.
摘要翻译：提供了用于测量晶圆级别的等离子体元件的性能的改进的泵浦探针测试方法和装置。在一个实施例中，该设备包括配置成在位于波导的第一端的光栅上输出第一光束的光源，该波导被配置为将第一光束的能量耦合到位于第二端的等离子体元件以及位于晶片顶表面上方的光学探头组件。光探针组件被配置为将第二光束引导到包括等离子体元件的晶片的区域上，并检测从该区域反射的第二光束的一部分。

12. 发明授权

US08077418B1 Reducing thermal protrusion of a near field transducer in an energy assisted magnetic recording head 有权
标题翻译：减少能量辅助磁记录头中近场传感器的热突起
公开(公告)号：US08077418B1
公开(公告)日：2011-12-13
申请号：US12415465
申请日：2009-03-31
申请人： Yufeng Hu , Wentao Yan
发明人： Yufeng Hu , Wentao Yan
IPC分类号： G11B5/02
CPC分类号： G11B5/314 , G11B5/3136 , G11B5/3169 , G11B2005/001 , G11B2005/0021 , Y10T29/49032 , Y10T29/49048
摘要： Methods of fabricating an energy-assisted magnetic recording (EAMR) head to compensate for a heat-induced protrusion of a near field transducer formed therein are disclosed. The methods can include applying optical power to the near field transducer to generate heat therein. The near field transducer protrudes beyond an air bearing surface of the EAMR head by the generated heat. The methods can further include removing a protruded portion of the near field transducer.
摘要翻译：公开了制造能量辅助磁记录（EAMR）头以补偿其中形成的近场换能器的热诱导突起的方法。这些方法可以包括将光功率施加到近场换能器以在其中产生热量。近场传感器通过产生的热量突出超过EAMR头的空气轴承表面。所述方法还可以包括去除近场换能器的突出部分。

13. 发明授权

US08758083B1 Method and system for adjusting lapping of a transducer using a disk windage 有权
标题翻译：使用磁盘风挡调整传感器研磨的方法和系统
公开(公告)号：US08758083B1
公开(公告)日：2014-06-24
申请号：US12880913
申请日：2010-09-13
申请人： Steven C. Rudy , Changqing Shi , Yufeng Hu , Mark D. Moravec , Eric R. McKie , Nurul Amin
发明人： Steven C. Rudy , Changqing Shi , Yufeng Hu , Mark D. Moravec , Eric R. McKie , Nurul Amin
IPC分类号： B24B1/00
CPC分类号： G11B5/4866 , G11B5/314 , G11B5/3163 , G11B5/3166 , G11B5/3169 , G11B5/6005 , G11B21/21 , Y10T29/49021 , Y10T29/49037 , Y10T29/49046 , Y10T29/49048
摘要： A method and system for providing transducer(s) including a disk structure and having an air-bearing surface (ABS) are described. The disk structure resides a distance from the ABS and has a disk dimension substantially perpendicular to the ABS. Lapping control and disk windage ELGs are provided. The lapping control ELG has first and second edges first and second distances from the ABS. The disk windage ELG has edges different distances from the ABS. A difference between these edges corresponds to the disk dimension. A windage resistance of the disk windage ELG is measured and a disk windage determined. The disk windage corresponds to a difference between designed and actual disk dimensions perpendicular to the ABS. A lapping ELG target resistance is determined based on the disk windage. The transducer is lapped. Lapping is terminated based on a resistance of the lapping control ELG and the lapping ELG target resistance.
摘要翻译：描述了一种用于提供包括盘结构并具有空气轴承表面（ABS）的换能器的方法和系统。盘结构离ABS有一段距离，并且具有基本上垂直于ABS的盘尺寸。提供研磨控制和磁盘风挡ELG。研磨控制ELG具有第一和第二边缘与ABS之间的第一和第二距离。磁盘风挡ELG与ABS的距离不同。这些边缘之间的差异对应于磁盘维度。测量磁盘风挡ELG的防风阻力并确定磁盘风速。磁盘风挡对应于垂直于ABS的设计和实际磁盘尺寸之间的差异。基于磁盘风向确定研磨ELG目标电阻。。基于研磨控制ELG的电阻和研磨ELG目标电阻来终止研磨。

14. 发明授权

US08279719B1 Method and system for coupling a laser with a slider in an energy assisted magnetic recording disk drive 有权
标题翻译：用于将能量辅助磁记录磁盘驱动器中的激光与滑块耦合的方法和系统
公开(公告)号：US08279719B1
公开(公告)日：2012-10-02
申请号：US12572060
申请日：2009-10-01
申请人： Yufeng Hu , Yugang Wang
发明人： Yufeng Hu , Yugang Wang
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/105 , G11B5/1278 , G11B5/6088 , G11B2005/0021
摘要： A method and system for providing an energy assisted magnetic recording (EAMR) transducer coupled with a laser are described. The EAMR transducer has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The method and system include providing at least one waveguide, at least one write pole, and at least one coil. The waveguide(s) are for directing the energy from the laser toward the ABS. The write pole(s) each include a write pole tip, a yoke, a back pedestal and a return pole. The write pole tip is coupled to the back pedestal through the yoke. The back pedestal has at least one aperture therein. The aperture(s) are configured to allow the energy from the laser to pass therethrough. The coil(s) are for energizing the at least one write pole.
摘要翻译：描述了一种用于提供与激光器耦合的能量辅助磁记录（EAMR）传感器的方法和系统。 EAMR传感器具有配置成在使用期间驻留在介质附近的空气轴承表面（ABS）。该方法和系统包括提供至少一个波导，至少一个写极点和至少一个线圈。波导用于将来自激光器的能量引导到ABS。写极点各自包括写极端，磁轭，后基座和返回极。写极尖通过轭耦合到后基座。后座具有至少一个孔。孔被配置为允许来自激光器的能量通过。线圈用于激励至少一个写极。

15. 发明授权

US08721902B1 Method and system for providing an energy assisted magnetic recording writer having a heat sink and NFT 有权
标题翻译：用于提供具有散热器和NFT的能量辅助磁记录写入器的方法和系统
公开(公告)号：US08721902B1
公开(公告)日：2014-05-13
申请号：US13046380
申请日：2011-03-11
申请人： Zhongyan Wang , Wei Gao , Shawn M. Tanner , Mirzafer Abatchev , Yanfeng Chen , Yufeng Hu
发明人： Zhongyan Wang , Wei Gao , Shawn M. Tanner , Mirzafer Abatchev , Yanfeng Chen , Yufeng Hu
IPC分类号： B44C1/22
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/0021
摘要： A method provides an EAMR transducer. The EAMR transducer is coupled with a laser and has an ABS configured to reside in proximity to a media during use. The EAMR transducer includes an NFT for focusing the energy onto the media. A sacrificial layer is deposited on the NFT and a mask having an aperture provided on the sacrificial layer. A portion of the sacrificial layer exposed by the aperture is removed to form a trench above the NFT. A heat sink is then provided. At least part of the heat sink resides in the trench. The heat sink is thermally coupled to the NFT. Optical material(s) are provided around the heat sink. A write pole configured to write to a region of the media is also provided. The write pole is thermally coupled with the top of the heat sink. Coil(s) for energizing the write pole are also provided.
摘要翻译：一种方法提供一种EAMR传感器。 EAMR传感器与激光器耦合并且具有被配置为在使用期间驻留在介质附近的ABS。 EAMR传感器包括用于将能量聚焦到介质上的NFT。牺牲层沉积在NFT上，并且具有设置在牺牲层上的孔的掩模。被孔径暴露的牺牲层的一部分被去除以在NFT上方形成沟槽。然后提供散热器。散热片的至少一部分位于沟槽中。散热器与NFT热耦合。光学材料设置在散热器的周围。还提供了被配置为写入介质的区域的写入极。写柱与散热器的顶部热耦合。还提供用于激励写入极的线圈。

16. 发明授权

US08565049B1 Method and system for reducing thermal protrusion of an NFT 有权
标题翻译：减少NFT热突起的方法和系统
公开(公告)号：US08565049B1
公开(公告)日：2013-10-22
申请号：US13533150
申请日：2012-06-26
申请人： Shawn M. Tanner , Yufeng Hu
发明人： Shawn M. Tanner , Yufeng Hu
IPC分类号： G11B11/00
CPC分类号： G11B5/3136 , G11B5/314 , G11B5/3173 , G11B5/6088 , G11B2005/0021
摘要： A method and system provide a near-field transducer (NFT) for an energy assisted magnetic recording (EAMR) transducer. The method and system include forming an NFT having a disk and a pin. A dielectric layer that substantially covers the NFT is deposited. A portion of the dielectric layer is removed such that the dielectric layer has an aperture therein. The aperture exposes the pin of the NFT. The EAMR transducer is annealed at a temperature greater than the expected operating temperature of the EAMR transducer.
摘要翻译：一种方法和系统为能量辅助磁记录（EAMR）传感器提供近场换能器（NFT）。该方法和系统包括形成具有盘和销的NFT。沉积基本覆盖NFT的电介质层。介电层的一部分被去除，使得介电层在其中具有孔。孔径暴露了NFT的引脚。 EAMR传感器在大于EAMR传感器的预期工作温度的温度下退火。

17. 发明授权

US08495813B1 Method of making an energy-assisted magnetic recording apparatus 有权
标题翻译：制造能量辅助磁记录装置的方法
公开(公告)号：US08495813B1
公开(公告)日：2013-07-30
申请号：US13568931
申请日：2012-08-07
申请人： Yufeng Hu , Jinshan Li
发明人： Yufeng Hu , Jinshan Li
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/6088 , G11B5/314 , G11B2005/0021 , Y10T29/49039 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048 , Y10T29/49052
摘要： A method of making an energy-assisted magnetic recording apparatus is provided. The method comprises the step of aligning a first wafer including a plurality of vertical cavity surface emitting lasers (VCSELs) with a second wafer including a plurality of magnetic recording heads, such that an emitting region of each of the plurality of VCSELs is disposed over a light redirecting structure of a corresponding one of the plurality of magnetic recording heads. The method further comprises the step of bonding the first wafer to the second wafer.
摘要翻译：提供一种制造能量辅助磁记录装置的方法。该方法包括将包括多个垂直腔表面发射激光器（VCSEL）的第一晶片与包括多个磁记录头的第二晶片对准的步骤，使得多个VCSEL中的每一个的发射区域设置在所述多个磁记录头中对应的一个磁记录头的光重定向结构。该方法还包括将第一晶片接合到第二晶片的步骤。

18. 发明授权

US08375565B2 Method for providing an electronic lapping guide corresponding to a near-field transducer of an energy assisted magnetic recording transducer 有权
标题翻译：提供对应于能量辅助磁记录传感器的近场换能器的电子研磨导轨的方法
公开(公告)号：US08375565B2
公开(公告)日：2013-02-19
申请号：US12789813
申请日：2010-05-28
申请人： Yufeng Hu , Zhongyan Wang , Jinshan Li
发明人： Yufeng Hu , Zhongyan Wang , Jinshan Li
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B13/04 , B24B37/013 , G11B5/314 , G11B5/3169 , G11B2005/001 , G11B2005/0021 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method fabricates a transducer having an air-bearing surface (ABS). The method includes providing at least one near-field transducer (NFT) film and providing an electronic lapping guide (ELG) film substantially coplanar with a portion of the at least one NFT film. The method also includes defining a disk portion of an NFT from the portion of the at least one NFT film and at least one ELG from the ELG film. The disk portion corresponds to a critical dimension of the NFT from an ABS location. The method also includes lapping the at least one transducer. The lapping is terminated based on a signal from the ELG.
摘要翻译：一种制造具有空气轴承表面（ABS）的换能器的方法。该方法包括提供至少一个近场换能器（NFT）膜，并提供与所述至少一个NFT膜的一部分基本共面的电子研磨导向器（ELG）膜。该方法还包括从至少一个NFT膜的部分和来自ELG膜的至少一个ELG限定NFT的盘部分。盘部分对应于来自ABS位置的NFT的临界尺寸。该方法还包括研磨至少一个换能器。基于ELG的信号终止研磨。

19. 发明授权

US08343364B1 Double hard-mask mill back method of fabricating a near field transducer for energy assisted magnetic recording 有权
标题翻译：制造用于能量辅助磁记录的近场换能器的双重硬掩模回磨方法
公开(公告)号：US08343364B1
公开(公告)日：2013-01-01
申请号：US12796585
申请日：2010-06-08
申请人： Wei Gao , Guanxiong Li , Zhongyan Wang , Yufeng Hu , Ge Yi
发明人： Wei Gao , Guanxiong Li , Zhongyan Wang , Yufeng Hu , Ge Yi
IPC分类号： G11B5/33
CPC分类号： G11B5/3163 , G11B5/314 , G11B2005/0021 , Y10T29/49032
摘要： A method of forming a near field transducer (NFT) for energy assisted magnetic recording is disclosed. A structure comprising an NFT metal layer and a first hardmask layer over the NFT metal layer is provided A first patterned hardmask is formed from the first hardmask layer, the first patterned hardmask disposed over a disk section and a pin section of the NFT to be formed. An etch process is performed on the NFT metal layer via the first patterned hardmask, the etch process forming the NFT having the disk section and the pin section.
摘要翻译：公开了一种形成用于能量辅助磁记录的近场传感器（NFT）的方法。提供了包括在NFT金属层上的NFT金属层和第一硬掩模层的结构。第一图案化硬掩模由第一硬掩模层，设置在盘部分上的第一图案化硬掩模和待形成的NFT的销部分形成。通过第一图案化硬掩模在NFT金属层上进行蚀刻工艺，形成具有盘部分和销部分的NFT的蚀刻工艺。

20. 发明申请

US20070039641A1 Cobalt oxide thermoelectric compositions and uses thereof 审中-公开
标题翻译：氧化钴热电组合物及其用途
公开(公告)号：US20070039641A1
公开(公告)日：2007-02-22
申请号：US11207148
申请日：2005-08-19
申请人： Yufeng Hu , Qiang Li , Weidong Si
发明人： Yufeng Hu , Qiang Li , Weidong Si
IPC分类号： H01L35/16
CPC分类号： H01L35/22
摘要： The present invention relates to thermoelectric cobalt oxide compositions and their use in thermal management and generation of electrical power. The invention particularly relates to thin films of these cobalt oxide compositions on a variety of substrates, particularly silicon-group substrates.
摘要翻译：本发明涉及热电钴氧化物组合物及其在热功率管理和发电方面的应用。本发明特别涉及这些氧化钴组合物在各种衬底，特别是硅基衬底上的薄膜。

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