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    • 12. 发明授权
    • Method of inspecting holes using charged-particle beam
    • 使用带电粒子束检查孔的方法
    • US06787770B2
    • 2004-09-07
    • US10060944
    • 2002-01-30
    • Naoki KikuchiTsutomu NegishiYuki Ono
    • Naoki KikuchiTsutomu NegishiYuki Ono
    • G01N2304
    • G01N23/00
    • This disclosure is directed to a method of inspecting how contact holes or via holes are formed in a sample, such as a wafer. An electron beam is directed to the contact holes in succession. An absorbed current flowing through the sample is detected by a current amplifier. Data about the obtained absorbed current is stored in a memory. The electric current flowing through a reference sample and ground is measured, and the relation of the current to the etch depths of contact holes into the substrate is previously found. A control unit compares data about the measured current with the previously found relation and determines the depths of holes of interest into the substrate (i.e., inspects how they are etched).
    • 本公开涉及一种检查诸如晶片的样品中如何形成接触孔或通孔的方法。 电子束依次被引导到接触孔。 通过电流放大器检测流过样品的吸收电流。 关于获得的吸收电流的数据被存储在存储器中。 测量流过参考样品和地面的电流,并且预先发现电流与衬底中的接触孔的蚀刻深度之间的关系。 控制单元将关于测量的电流的数据与先前发现的关系进行比较,并确定感兴趣的空穴的深度(即,检查它们如何被蚀刻)。
    • 14. 发明申请
    • SILICONE RESIN, PROCESS FOR PRODUCING THE SAME, AND CURABLE RESIN COMPOSITION COMPRISING THE SAME
    • 硅树脂,其制造方法和包含其的可固化树脂组合物
    • US20100311919A1
    • 2010-12-09
    • US12864684
    • 2009-02-04
    • Yuki OnoMasayoshi IsozakiTakashi Saito
    • Yuki OnoMasayoshi IsozakiTakashi Saito
    • C08L83/06C08G77/08C08G77/14
    • C08G77/38C08F299/08C08G77/12C08G77/14C08G77/16C08G77/20C08G77/44C08G77/70C08L83/04G02B1/04G11B7/2533C08L83/00
    • Provided are a silicone resin that yields a cured product excellent in flexibility, toughness, and heat resistance and high in transparency, a process for producing the said silicone resin, and a curable resin composition comprising the said silicone resin. The silicone resin is obtained by reacting an organopolysiloxane containing SiH groups represented by general formula (3) with an organopolysiloxane containing hydroxyl groups at both ends represented by general formula (5) and an alcohol containing radically reactive groups represented by general formula (6) in the presence of a hydroxylamine compound represented by general formula (4) as a catalyst and this silicone resin is used in formulating a curable resin composition. In the general formulas, R is an alkyl group of 1-12 carbon atoms optionally containing an oxygen atom or an aryl group, R1 is an alkyl group, Y is a hydrocarbon group of 1-12 carbon atoms optionally containing an oxygen atom, Z is a (meth)acryloyl group, a vinyl group, or an allyl group, and n, s, m, and r are numbers respectively expressed as 0
    • 提供了产生柔软性,韧性和耐热性优异,透明度高的固化产物的硅氧烷树脂,所述有机硅树脂的制备方法和包含所述有机硅树脂的固化性树脂组合物。 有机硅树脂通过使通式(3)表示的SiH基的有机聚硅氧烷与通式(5)表示的两端含羟基的有机聚硅氧烷和通式(6)表示的自由基反应性基团的醇反应, 存在通式(4)表示的羟胺化合物作为催化剂,该有机硅树脂用于配制可固化树脂组合物。 在通式中,R是任选含有氧原子或芳基的1-12个碳原子的烷基,R1是烷基,Y是任选地含有氧原子的1-12个碳原子的烃基,Z 是(甲基)丙烯酰基,乙烯基或烯丙基,n,s,m和r分别表示为0