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    • 12. 发明授权
    • Confocal wafer depth scanning inspection method
    • 共焦晶圆深度扫描检测方法
    • US07109458B2
    • 2006-09-19
    • US11079614
    • 2005-03-14
    • Christopher R. FairleyTao-Yi FuBin-Ming Benjamin TsaiScott A. Young
    • Christopher R. FairleyTao-Yi FuBin-Ming Benjamin TsaiScott A. Young
    • G02B7/04
    • G01N21/9501G02B3/0056G02B21/0024G02B21/0028G02B21/008G02B27/40
    • A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask. The offset pattern of the offset fly lens array is chosen such that spots produced can be recombined into a continuous image, and the system utilizes a time delay and integration charge coupled device for rapid sensing along with an autofocus system that measures and cancels topological features of the specimen.
    • 提供了使用多重元件布置的半导体晶片检查系统和方法,例如偏移飞行透镜阵列。 优选实施例使用激光将光能传递到光束扩展器,其扩展光能以产生照明场。 偏移飞行透镜阵列将来自照明场的光能转换成照明点的偏移图案。 包括第一透镜,发射器/反射器,物镜和Mag管的透镜装置将光能量施加到样本上并将光能传递给针孔掩模。 针孔掩模与偏置飞行透镜阵列机械对准。 通过针孔掩模中的每个针孔的光能被引向中继透镜,该中继透镜将光能引导到传感器上。 偏移飞行透镜阵列对应于针孔掩模。 选择偏移飞行透镜阵列的偏移图案,使得所产生的斑点可以重新组合成连续图像,并且系统利用时间延迟和积分电荷耦合器件与快速感测以及自动对焦系统一起测量和消除拓扑特征 标本。
    • 13. 发明授权
    • Active planar autofocus
    • 主动平面自动对焦
    • US08643835B2
    • 2014-02-04
    • US12833093
    • 2010-07-09
    • Scott A. YoungDaniel L. CavanYale ZhangAviv Balan
    • Scott A. YoungDaniel L. CavanYale ZhangAviv Balan
    • G01N21/00G01B11/14G06K9/00
    • G01N21/956G01N21/9501
    • A system for inspecting a depth relative to a layer using a sensor with a fixed focal plane. A focus sensor senses the surface of the substrate and outputs focus data. In setup mode the controller scans a first portion of the substrate, receives the focus data and XY data, and stores correlated XYZ data for the substrate. In inspection mode the controller scans a second portion of the substrate, receives the focus data and XY data, and subtracts the stored Z data from the focus data to produce virtual data. The controller feeds the virtual data plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance.
    • 一种用于使用具有固定焦平面的传感器检查相对于层的深度的系统。 聚焦传感器感测基板的表面并输出焦点数据。 在设置模式下,控制器扫描基板的第一部分,接收聚焦数据和XY数据,并存储基板的相关XYZ数据。 在检查模式下,控制器扫描基板的第二部分,接收焦点数据和XY数据,并从焦点数据中减去存储的Z数据,以产生虚拟数据。 控制器将虚拟数据加上偏移量供给电机,以在检查期间上下移动基板,从而将焦平面保持在所需的Z距离。
    • 15. 发明申请
    • Confocal wafer inspection system and method
    • 共聚焦晶片检测系统及方法
    • US20080273196A1
    • 2008-11-06
    • US12218189
    • 2008-07-11
    • Christopher R. FairleyTao-Yi FuBin-Ming Benjanim TsaiScott A. Young
    • Christopher R. FairleyTao-Yi FuBin-Ming Benjanim TsaiScott A. Young
    • G01N21/956G01N21/93
    • G01N21/9501G02B3/0056G02B21/0024G02B21/0028G02B21/008G02B27/40
    • A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask. The offset pattern of the offset fly lens array is chosen such that spots produced can be recombined into a continuous image, and the system utilizes a time delay and integration charge coupled device for rapid sensing along with an autofocus system that measures and cancels topological features of the specimen.
    • 提供了使用多重元件布置的半导体晶片检查系统和方法,例如偏移飞行透镜阵列。 优选实施例使用激光将光能传递到光束扩展器,其扩展光能以产生照明场。 偏移飞行透镜阵列将来自照明场的光能转换成照明点的偏移图案。 包括第一透镜,发射器/反射器,物镜和Mag管的透镜装置将光能量施加到样本上并将光能传递给针孔掩模。 针孔掩模与偏置飞行透镜阵列机械对准。 通过针孔掩模中的每个针孔的光能被引向中继透镜,该中继透镜将光能引导到传感器上。 偏移飞行透镜阵列对应于针孔掩模。 选择偏移飞行透镜阵列的偏移图案,使得所产生的斑点可以重新组合成连续图像,并且系统利用时间延迟和积分电荷耦合器件与快速感测以及自动对焦系统一起测量和消除拓扑特征 标本。
    • 20. 发明授权
    • Confocal wafer inspection method and apparatus using fly lens arrangement
    • 共焦晶片检查方法和使用飞行透镜装置的装置
    • US06867406B1
    • 2005-03-15
    • US09533203
    • 2000-03-23
    • Christopher R. FairleyTao-Yi FuBin-Ming Benjamin TsaiScott A. Young
    • Christopher R. FairleyTao-Yi FuBin-Ming Benjamin TsaiScott A. Young
    • G02B21/00G02B27/40
    • G01N21/9501G02B3/0056G02B21/0024G02B21/0028G02B21/008G02B27/40
    • A semiconductor wafer inspection system and method is provided which uses a multiple element arrangement, such as an offset fly lens array. The preferred embodiment uses a laser to transmit light energy toward a beam expander, which expands the light energy to create an illumination field. An offset fly lens array converts light energy from the illumination field into an offset pattern of illumination spots. A lensing arrangement, including a first lens, a transmitter/reflector, an objective, and a Mag tube imparts light energy onto the specimen and passes the light energy toward a pinhole mask. The pinhole mask is mechanically aligned with the offset fly lens array. Light energy passing through each pinhole in the pinhole mask is directed toward a relay lens, which guides light energy onto a sensor. The offset fly lens array corresponds to the pinhole mask. The offset pattern of the offset fly lens array is chosen such that spots produced can be recombined into a continuous image, and the system utilizes a time delay and integration charge coupled device for rapid sensing along with an autofocus system that measures and cancels topological features of the specimen.
    • 提供了使用多重元件布置的半导体晶片检查系统和方法,例如偏移飞行透镜阵列。 优选实施例使用激光将光能传递到光束扩展器,其扩展光能以产生照明场。 偏移飞行透镜阵列将来自照明场的光能转换成照明点的偏移图案。 包括第一透镜,发射器/反射器,物镜和Mag管的透镜装置将光能量施加到样本上并将光能传递给针孔掩模。 针孔掩模与偏置飞行透镜阵列机械对准。 通过针孔掩模中的每个针孔的光能被引向中继透镜,该中继透镜将光能引导到传感器上。 偏移飞行透镜阵列对应于针孔掩模。 选择偏移飞行透镜阵列的偏移图案,使得所产生的斑点可以重新组合成连续图像,并且系统利用时间延迟和积分电荷耦合器件与快速感测以及自动对焦系统一起测量和消除拓扑特征 标本。