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    • 11. 发明专利
    • Pattern inspection device
    • 图案检查装置
    • JP2012078164A
    • 2012-04-19
    • JP2010222430
    • 2010-09-30
    • Nuflare Technology IncToshiba Corp株式会社ニューフレアテクノロジー株式会社東芝
    • OGAWA TSUTOMUHIRONO MASATOSHINISHISAKA TAKESHIHIRANO RYOICHIISOMURA IKUNAOMATSUKI KAZUTOOZAKI FUMIO
    • G01B11/30G01B11/02G01N21/956G03F1/84H01L21/027
    • G01N21/956
    • PROBLEM TO BE SOLVED: To provide a pattern inspection device capable of efficiently inspecting even an inspection sample having a step between a pattern region and a non-pattern region.SOLUTION: This pattern inspection device includes: an inspection area storage section for storing an inspection area that is specified in the pattern region; a pattern surface height detecting section for detecting a pattern surface height signal with respect to a pattern surface height measuring position on the inspection sample; an autofocus mechanism focusing to the inspection sample using the pattern surface height signal detected by the pattern surface height detecting section; a determination section for determining whether the pattern surface height measuring position is within the inspection area; and an autofocus mechanism control section adapted to actuate the autofocus mechanism when the determination section determines that the pattern surface height measuring position is within the inspection area, and to stop the autofocus mechanism when the determination section determines that the pattern surface height measuring position is not within the inspection area.
    • 要解决的问题:提供一种能够有效地检查具有图案区域和非图案区域之间的台阶的检查样本的图案检查装置。 解决方案:该图案检查装置包括:检查区域存储部,用于存储在图案区域中指定的检查区域; 图案表面高度检测部,用于相对于检查样本上的图案表面高度测量位置检测图案表面高度信号; 使用由图案表面高度检测部检测到的图案表面高度信号来聚焦于检查样本的自动聚焦机构; 确定部,用于确定图案表面高度测量位置是否在检查区域内; 以及自动对焦机构控制部,所述自动对焦机构控制部在所述判定部判断为所述图案表面高度测量位置在所述检查区域内时,使所述自动聚焦机构动作,并且当所述判定部判断出所述图案表面高度测量位置不在所述检查区域内时停止所述自动聚焦机构 在检查区内。 版权所有(C)2012,JPO&INPIT
    • 12. 发明专利
    • Optical quantizer and optical analog/digital converter
    • 光学量测器和光学模拟/数字转换器
    • JP2007187757A
    • 2007-07-26
    • JP2006004214
    • 2006-01-11
    • Toshiba Corp株式会社東芝
    • HIRONO MASATOSHISUZUKI TAKAHIROITO HIDEKIMORINO TSUYOSHI
    • G02F7/00G02B6/122H03M1/60
    • G02F7/00G02F3/02
    • PROBLEM TO BE SOLVED: To provide an optical quantizer and an optical analog/digital converter which are simple in configuration. SOLUTION: The optical quantizer includes: an optical splitting means 21 that outputs an optical pulse P10 to be quantized, a quantization target, by dividing it into a plurality of field paths; a plurality of optical filters 23a-23e that transmit each of the divided optical pulses to be quantized P10 1 -P10 5 with a different transmissivity; and an optical threshold filter 25 that successively receives optical pulses to be quantized P23a-P23e outputted through the optical filters 23a-23e and that outputs an optical pulse P25 when the light intensity of the optical pulses to be quantized exceeds a threshold. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种配置简单的光量化器和光模拟/数字转换器。 光量化器包括:光分路装置21,其通过将量化目标分成多个场路径来输出要量化的光脉冲P10; 多个光学滤波器23a-23e,其以不同的透射率透射要被量化的每个划分的光脉冲P10 -P10 5 ; 以及光阈值滤波器25,其连续地接收通过滤光器23a-23e输出的要被量化的光脉冲P23a-P23e,并且当待量化的光脉冲的光强度超过阈值时,输出光脉冲P25。 版权所有(C)2007,JPO&INPIT
    • 15. 发明专利
    • プロジェクタ及び携帯端末
    • 投影机和便携式终端
    • JP2014219565A
    • 2014-11-20
    • JP2013098786
    • 2013-05-08
    • 株式会社東芝Toshiba Corp
    • HIRONO MASATOSHISHIRATO MASATAKA
    • G02B26/10G02F1/13H04N5/74
    • G03B21/53G02B13/14G02B26/06G02B26/0816G02B26/101G02B26/105G03B21/2033H04N9/3129H04N9/3173H04N9/3185
    • 【課題】小型で高解像度のプロジェクタ及び携帯端末を提供する。【解決手段】実施形態によれば、光源部と、光走査部と、フォーカス制御部と、を含むプロジェクタが提供される。光源部は、レーザ光を出射する。光走査部は、保持部と反射面とを含む。保持部は、第1方向を軸とした第1回転動作が可能である。反射面は、保持部に保持され、第1方向と交差する第2方向を軸とした第2回転動作が可能である。反射面にはレーザ光が入射される。光走査部は、第1回転動作及び第2回転動作によりレーザ光を走査する。フォーカス制御部は、レーザ光の光路上において光源部と光走査部との間に設けられる。フォーカス制御部は、第1回転動作に連動してレーザ光の収束度を変更する。光走査部から出射したレーザ光が形成する像面と、第1方向及び第2方向を含む平面と、の間の角度は、80度以上100度以下である。【選択図】図1
    • 要解决的问题:提供小型和高分辨率投影仪和便携式终端。解决方案:投影仪包括光源部分,光学扫描部分和聚焦控制部分。 光源部分发射激光束。 光学扫描部包括:保持部,其允许围绕第一方向的轴的第一旋转操作; 以及由所述保持部保持的反射面,允许围绕与所述第一方向相交的第二方向的轴线的第二旋转操作,以及接收所述激光束。 光学扫描部件通过第一旋转操作和第二旋转操作来扫描激光束。 焦点控制部分设置在激光束的光路上的光源部分和光学扫描部分之间,并且与第一旋转操作互锁地改变激光束的会聚度。 在由光学扫描部分发射的激光束形成的图像表面和包括第一和第二方向的平坦表面之间形成80度以上且100度以下的角度。
    • 16. 发明专利
    • White led lighting device
    • 白色LED照明设备
    • JP2014063614A
    • 2014-04-10
    • JP2012207459
    • 2012-09-20
    • Toshiba Corp株式会社東芝Toshiba Materials Co Ltd東芝マテリアル株式会社
    • ONO HIROSHIKATO MITSUAKIKUNO KATSUMIMOTOMIYA YOSHINORISHIRATO MASATAKAYAMAMOTO YUICHIROHAYASHIBARA HIROMICHIHIRONO MASATOSHIMORINO TSUYOSHI
    • F21V8/00F21Y101/02
    • F21K9/64F21K9/52F21K9/61F21V9/16F21V29/89H01L33/507H01L33/54H01L33/60
    • PROBLEM TO BE SOLVED: To provide a white LED lighting device which has low loss and low heat generation, and is compact.SOLUTION: A white LED lighting device includes: an LED light source (11) which emits light of ultra-violet light region or visible light region; an axially symmetrical transparent member (12) which is disposed so as to cover the LED light source therewith and is transparent to visible light; and an axially symmetrical light scattering member (13) which is separated from the LED light source and is arranged on an internal part of the axially symmetrical transparent member. A closest approach distance Lbetween the LED light source and the axially symmetrical light scattering member and an area C of the light emission surface of the LED light source satisfy a predetermined relation, a length Lof the axially symmetrical light scattering member and an absorption coefficient μ(1/mm) of the axially symmetrical light scattering member satisfy a predetermined relation, and a diameter dof the bottom surface of the axially symmetrical light scattering member, the closest approach distance Land a refractive index n of the axially symmetrical transparent member satisfy a predetermined relation.
    • 要解决的问题:提供一种具有低损耗和低发热,并且紧凑的白光LED照明装置。解决方案:一种白色LED照明装置,包括:LED光源(11),其发射紫外光区域 或可见光区域; 轴向对称的透明构件(12),其被设置成覆盖LED光源并对可见光透明; 以及与LED光源分离并且布置在轴向对称的透明构件的内部上的轴对称的光散射构件(13)。 LED光源与轴向对称的光散射构件之间的最接近距离L和LED光源的发光面的面积C满足预定关系,轴对称光散射构件的长度L和吸收系数μ( 轴对称的光散射构件满足预定关系,并且在轴向对称的光散射构件的底面的直径为轴向对称的透明构件的最接近距离Land的折射率n满足预定关系 。
    • 17. 发明专利
    • Photo mask
    • 照片掩码
    • JP2012002908A
    • 2012-01-05
    • JP2010135945
    • 2010-06-15
    • Nec CorpToshiba Corp日本電気株式会社株式会社東芝
    • HIRONO MASATOSHI
    • G03F1/84G03F1/68
    • PROBLEM TO BE SOLVED: To provide a photo mask with which the defect such as foreign body or pattern deformation can be detected with high accuracy in the defect inspection using a reflection image.SOLUTION: A photo mask in which a pattern is formed in a pattern region includes a glass substrate, a reflective film provided on the entire surface of the pattern region on the glass substrate and having higher reflectance with respect to light than that of the glass substrate, and a light shielding film forming patterns on the reflective film and having higher reflectance with respect to light than that of the reflective film.
    • 要解决的问题:提供一种可以在使用反射图像的缺陷检查中以高精度检测诸如异物或图案变形的缺陷的光掩模。 解决方案:在图案区域中形成图案的光掩模包括玻璃基板,设置在玻璃基板上的图案区域的整个表面上的反射膜,并且相对于光的反射率高于 玻璃基板和遮光膜,其在反射膜上形成图案,并且相对于反射膜具有比光更高的反射率。 版权所有(C)2012,JPO&INPIT
    • 19. 发明专利
    • Optical pickup head device, and device and method for reproducing optical storage medium
    • 光学拾取头装置,以及用于再现光存储介质的装置和方法
    • JP2007234087A
    • 2007-09-13
    • JP2006051284
    • 2006-02-27
    • Toshiba Corp株式会社東芝
    • HIRONO MASATOSHI
    • G11B7/135G11B7/09
    • G11B7/1353G11B7/131G11B7/133G11B7/1381G11B2007/0013
    • PROBLEM TO BE SOLVED: To provide an optical pickup device capable of reducing interlayer crosstalk more by separating a reflected light from an information recording layer for recording or reproducing, from a reflected light from an information recording layer other than the information recording layer when recording or reproducing is carried out in the optical storage medium of a one-side multilayer type, and a device and a method for reproducing an optical storage medium. SOLUTION: The optical pickup head device is provided with a diffraction optical element 113 for diffracting beams emitted from a semiconductor laser 100 into a 0-order diffracted lights and ± primary diffracted lights, an objective lens 105 for condensing the 0-order and ± primary diffracted lights on the information recording layer 106 of the optical disk 114 of a one-side multilayer type, a photodetector 110 having a light receiving part 111 for detected a reflected light from an optical disk 115, and a limitation element 114 for introducing a plurality of reflected lights 112 obtained by reflecting the 0-order and ± primary diffracted lights on an information recording layer 107 other than the information recording layer 106 to a place other than the light receiving part 111. COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:提供一种能够通过从除信息记录层之外的信息记录层的反射光中分离来自用于记录或再现的信息记录层的反射光而能够减少层间串扰的光学拾取装置 当在单面多层型的光存储介质中进行记录或再现时,以及用于再现光学存储介质的装置和方法。 光拾取头装置设置有用于将从半导体激光器100发射的光束衍射成0级衍射光和±一次衍射光的衍射光学元件113,用于使0级聚光的物镜105 在一侧多层型光盘114的信息记录层106上具有±一次衍射光,具有用于检测来自光盘115的反射光的光接收部111的光检测器110,以及用于 引入通过将除了信息记录层106以外的信息记录层107上的0次和±一次衍射光反射到除了光接收部111之外的位置而获得的多个反射光112.权利要求(C )2007,JPO&INPIT
    • 20. 发明专利
    • Optical disk system, and method for cooling pickup of optical disk system
    • 光盘系统,以及用于冷却光盘系统的方法
    • JP2007080364A
    • 2007-03-29
    • JP2005265828
    • 2005-09-13
    • Toshiba Corp株式会社東芝
    • YAOITA AKIKOTATSUTA SHINICHIHIRONO MASATOSHIITO HIDEKI
    • G11B33/14G11B33/02
    • G11B17/056
    • PROBLEM TO BE SOLVED: To provide a small optical disk system where a temperature rise of a component mounted to a pickup is reduced, and to provide a method for cooling the pickup of the optical disk system. SOLUTION: An opening is provided at a case. A disk tray provided with a through part is supported in a reciprocable manner so that the opening part may be openable and closable. A shutter is provided at the disk tray. When the opening part is closed, the shutter opens at least a part of the through part. When the opening part is changed from the closed state to an opened state, the shutter closes at least a part of the opened through part. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种小型光盘系统,其中安装在拾取器上的部件的温度升高减小,并提供冷却光盘系统的拾取器的方法。

      解决方案:在壳体处设置开口。 设置有贯通部的盘托盘以可往复运动的方式被支撑,使得开口部分可以是可开闭的。 在盘托架上设有快门。 当开口部分关闭时,快门打开穿通部分的至少一部分。 当打开部分从关闭状态改变到打开状态时,快门关闭打开的通过部分的至少一部分。 版权所有(C)2007,JPO&INPIT