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11. 发明申请

US20050062062A1 One-time programmable, non-volatile field effect devices and methods of making same 失效
标题翻译：一次性可编程，非易失性场效应器件及其制作方法
公开(公告)号：US20050062062A1
公开(公告)日：2005-03-24
申请号：US10864572
申请日：2004-06-09
申请人： Claude Bertin , Thomas Rueckes , Brent Segal , Bernhard Vogeli , Darren Brock , Venkatachalam Jaiprakash
发明人： Claude Bertin , Thomas Rueckes , Brent Segal , Bernhard Vogeli , Darren Brock , Venkatachalam Jaiprakash
IPC分类号： G11C7/06 , G11C8/02 , G11C11/00 , G11C11/50 , G11C13/02 , G11C16/02 , G11C16/04 , G11C17/16 , G11C23/00 , H01H59/00 , H01J1/62 , H01L20060101 , H01L21/336 , H01L21/82 , H01L21/8246 , H01L27/112 , H01L27/115 , H01L27/28 , H01L29/06 , H01L29/423 , H01L29/739 , H01L29/745 , H01L29/76 , H01L51/00 , H01L51/05 , H01L51/30 , H03K17/16
CPC分类号： H01L29/78 , B82Y10/00 , B82Y99/00 , G11C7/065 , G11C13/025 , G11C16/0416 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/16 , G11C2213/17 , G11C2213/79 , H01H1/0094 , H01L27/10 , H01L27/1052 , H01L27/112 , H01L27/11206 , H01L27/115 , H01L27/286 , H01L29/0665 , H01L29/0673 , H01L29/42324 , H01L51/0048 , H01L51/0052 , H01L51/0508 , Y10S977/708 , Y10S977/724 , Y10S977/742 , Y10S977/762 , Y10S977/936 , Y10S977/938 , Y10S977/94 , Y10S977/943
摘要： One-time programmable, non-volatile field effect devices and methods of making same. Under one embodiment, a one-time-programmable, non-volatile field effect device includes a source, drain and gate with a field-modulatable channel between the source and drain. Each of the source, drain, and gate has a corresponding terminal. An electromechanically-deflectable, nanotube switching element is electrically coupled to one of the source, drain and gate and has an electromechanically-deflectable nanotube element that is positioned to be deflectable in response to electrical stimulation to form a non-volatile closed electrical state between the one of the source, drain and gate and its corresponding terminal.
摘要翻译：一次性可编程，非易失性场效应器件及其制作方法。在一个实施例中，一次性可编程的非易失性场效应器件包括源极，漏极和栅极，源极和漏极之间具有场可调整通道。源极，漏极和栅极中的每一个具有相应的端子。电机械可偏转的纳米管开关元件电耦合到源极，漏极和栅极中的一个，并且具有可机电偏转的纳米管元件，其被定位成响应于电刺激而可偏转以在第二电极之间形成非易失性闭合电状态源，漏，门之一及其相应的终端。

12. 发明申请

US20050056877A1 Nanotube-on-gate fet structures and applications 有权
标题翻译：纳米管对门结构和应用
公开(公告)号：US20050056877A1
公开(公告)日：2005-03-17
申请号：US10811373
申请日：2004-03-26
申请人： Thomas Rueckes , Brent Segal , Bernhard Vogeli , Darren Brock , Venkatachalam Jaiprakash , Claude Bertin
发明人： Thomas Rueckes , Brent Segal , Bernhard Vogeli , Darren Brock , Venkatachalam Jaiprakash , Claude Bertin
IPC分类号： G11C13/02 , G11C16/04 , G11C23/00 , H01L27/108 , H01L29/06 , H01L29/423 , H01L29/76 , H01L29/94 , H01L31/119 , H01L51/00
CPC分类号： H01L51/055 , B82Y10/00 , G11C13/025 , G11C16/0416 , G11C23/00 , G11C2213/17 , H01L29/0665 , H01L29/0673 , H01L29/42324 , H01L51/0048 , H01L51/0052
摘要： Nanotube on gate FET structures and applications of such, including n2 crossbars requiring only 2n control lines. A non-volatile transistor device includes a source region and a drain region of a first semiconductor type of material and a channel region of a second semiconductor type of material disposed between the source and drain region. A gate structure is made of at least one of semiconductive or conductive material and is disposed over an insulator over the channel region. A control gate is made of at least one of semiconductive or conductive material. An electromechanically-deflectable nanotube switching element is in fixed contact with one of the gate structure and the control gate structure and is not in fixed contact with the other of the gate structure and the control gate structure. The device has a network of inherent capacitances, including an inherent capacitance of an undeflected nanotube switching element in relation to the gate structure. The network is such that the nanotube switching element is deflectable into contact with the other of the gate structure and the control gate structure in response to signals being applied to the control gate and one of the source region and drain region. Certain embodiments of the device have an area of about 4 F2. Other embodiments include a release line is positioned in spaced relation to the nanotube switching element, and having a horizontal orientation that is parallel to the orientation of the source and drain diffusions. Other embodiments provide an n2 crossbar array having n2 non-volatile transistor devices, but require only 2n control lines.
摘要翻译：纳米管栅极FET结构及其应用，包括仅需要2n条控制线的n <2条交叉点。非挥发性晶体管器件包括第一半导体类型的材料的源极区域和漏极区域以及设置在源极和漏极区域之间的第二半导体类型的材料的沟道区域。栅极结构由半导体或导电材料中的至少一种制成，并且设置在沟道区域上方的绝缘体上。控制门由半导体或导电材料中的至少一种制成。机电偏转型纳米管开关元件与栅极结构和控制栅极结构中的一个固定接触，并且不与栅极结构和控制栅极结构中的另一个固定接触。该器件具有固有电容的网络，包括相对于栅极结构的未折射的纳米管开关元件的固有电容。网络使得纳米管开关元件响应于施加到控制栅极和源极区域和漏极区域之一的信号而偏转成与栅极结构和控制栅极结构中的另一个接触。该装置的某些实施例具有约4F 2的面积。其他实施例包括释放线与纳米管开关元件间隔开定位，并且具有平行于源极和漏极扩散的取向的水平取向。其他实施例提供了具有n 2个非易失性晶体管器件的n <2>交叉开关阵列，但是仅需要2n个控制线。

13. 发明申请

US20050047244A1 Four terminal non-volatile transistor device 有权
标题翻译：四端子非易失性晶体管器件
公开(公告)号：US20050047244A1
公开(公告)日：2005-03-03
申请号：US10811191
申请日：2004-03-26
申请人： Thomas Rueckes , Brent Segal , Bernard Vogeli , Darren Brock , Venkatachalam Jaiprakash , Claude Bertin
发明人： Thomas Rueckes , Brent Segal , Bernard Vogeli , Darren Brock , Venkatachalam Jaiprakash , Claude Bertin
IPC分类号： G11C13/02 , G11C16/04 , G11C23/00 , H01L27/115 , H01L29/788 , G11C7/00
CPC分类号： G11C23/00 , B82Y10/00 , G11C13/025 , G11C16/0416 , G11C2213/17 , H01L27/115 , H01L29/7881 , Y10S977/708 , Y10S977/932
摘要： A four terminal non-volatile transistor device. A non-volatile transistor device includes a source region and a drain region of a first semiconductor type of material and each in electrical communication with a respective terminal. A channel region of a second semiconductor type of material is disposed between the source and drain region. A floating gate structure is made of at least one of semiconductive or conductive material and is disposed over the channel region. A control gate is made of at least one of semiconductive or conductive material and is in electrical communication with a respective terminal. An electromechanically-deflectable nanotube switching element is in electrical communication with one of the floating gate structure and the control gate structure, and is positioned to be electromechanically deflectable into contact with the other of the floating gate structure and the control gate structure. When the nanotube switching element is in communication with both the control gate and the floating gate, the control gate may be used to modulate the conductivity of the channel region. The nanotube switching element may be formed from a porous fabric of a monolayer of single-walled carbon nanotubes. Under certain embodiments, the nanotube article is suspended vertically in relation to the horizontal substrate. Under certain embodiments, a release gate and release node are positioned in spaced relation to the nanotube switching element, and, in response to a signal on the release node, the release gate electromechanically deflects the nanotube switching element out of contact with the one of the control gate and floating gate. Under certain embodiments, the contact between the nanotube switching element and the one of the control gate and floating gate is a non-volatile state. Under certain embodiments, the device occupies an area of 8F2.
摘要翻译：四端非易失性晶体管器件。非挥发性晶体管器件包括第一半导体类型的材料的源极区域和漏极区域，并且各自与相应的端子电连通。第二半导体类型的材料的沟道区域设置在源区和漏区之间。浮栅结构由半导体或导电材料中的至少一种制成，并且设置在沟道区域上。控制门由半导体或导电材料中的至少一种制成，并与相应的端子电连通。机电可偏转的纳米管开关元件与浮动栅极结构和控制栅极结构中的一个电连通，并且被定位成机电可偏转地与浮动栅极结构和控制栅极结构中的另一个接触。当纳米管开关元件与控制栅极和浮置栅极两者连通时，控制栅极可用于调制沟道区的导电性。纳米管切换元件可以由单壁碳纳米管单层的多孔织物形成。在某些实施例中，纳米管制品相对于水平基底垂直悬挂。在某些实施例中，释放栅极和释放节点以与纳米管开关元件隔开的关系定位，并且响应于释放节点上的信号，释放门电磁机械地使纳米管开关元件偏转与控制门和浮动门。在某些实施例中，纳米管开关元件与控制栅极和浮置栅极之间的接触是非易失性状态。在某些实施例中，该装置占据8F 2的面积。

14. 发明申请

US20050059176A1 Process for making byte erasable devices having elements made with nanotubes 失效
标题翻译：用于制造具有由纳米管制成的元件的字节可擦除器件的过程
公开(公告)号：US20050059176A1
公开(公告)日：2005-03-17
申请号：US10824678
申请日：2004-04-15
申请人： Thomas Rueckes , Venkatachalam Jaiprakash , Claude Bertin
发明人： Thomas Rueckes , Venkatachalam Jaiprakash , Claude Bertin
IPC分类号： G11C13/02 , G11C23/00 , H01L51/00 , H01L21/00
CPC分类号： H01L51/0048 , B82Y10/00 , G11C13/025 , G11C23/00 , Y10S977/943
摘要： A method of making byte erasable devices having elements made with nanotubes. Under one aspect of the invention, a device is made having nanotube memory elements. A structure is provided having a plurality of transistors, each with a drain and a source with a defined channel region therebetween, each transistor further including a gate over said channel. For a predefined set of transistors, a corresponding trench is formed between gates of adjacent transistors. For each trench, a defined pattern of nanotube fabric is provided over at least a horizontal portion of the structure and extending into the trench. An electrode is provided in each trench. Each defined pattern of nanotube fabric is suspended so that at least a portion is vertically suspended in spaced relation to the vertical walls of the trench and positioned so that the vertically suspended defined pattern of nanotube fabric is electromechanically deflectable into electrical communication with one of the drain and source of a transistor. An electrical communication path is provided electrically connecting each electrode so that all electrodes may electro-statically attract a corresponding defined pattern of nanotube fabric away from a transistor and toward the electrode.
摘要翻译：一种制造具有由纳米管制成的元件的字节可擦除器件的方法。在本发明的一个方面，制造具有纳米管存储元件的装置。提供了具有多个晶体管的结构，每个具有漏极和源极之间的沟道区域，每个晶体管还包括位于所述沟道上的栅极。对于预定义的一组晶体管，在相邻晶体管的栅极之间形成相应的沟槽。对于每个沟槽，在结构的至少水平部分上提供限定的纳米管织物图案并且延伸到沟槽中。在每个沟槽中设置电极。每个限定的纳米管织物图案被悬挂，使得至少一部分垂直悬挂在与沟槽的垂直壁隔开的关系中，并且定位成使得垂直悬挂的限定图案的纳米管织物可机电偏转成与漏斗之一电连通和晶体管的源极。电气连接路径被电连接每个电极，使得所有电极可以静电吸引相应的限定图案的纳米管织物远离晶体管并朝向电极。

15. 发明申请

US20050059210A1 Process for making bit selectable devices having elements made with nanotubes 有权
标题翻译：用于制造具有由纳米管制成的元件的位选择器件的工艺
公开(公告)号：US20050059210A1
公开(公告)日：2005-03-17
申请号：US10824706
申请日：2004-04-15
申请人： Thomas Rueckes , Venkatachalam Jaiprakash , Claude Bertin
发明人： Thomas Rueckes , Venkatachalam Jaiprakash , Claude Bertin
IPC分类号： G11C13/02 , G11C23/00 , H01L27/28 , H01L51/00 , H01L51/30 , H01L21/82 , H01L21/336
CPC分类号： G11C13/025 , B82Y10/00 , G11C23/00 , H01L27/28 , H01L51/0048 , H01L51/0052
摘要： A method is used to make a bit selectable device having nanotube memory elements. A structure having at least two transistors is provided, each with a drain and a source with a defined channel region therebetween, each transistor further including a gate over said channel. A trench is formed between one of the source and drain of a first transistor and one of the source and drain of a second transistor. An electrical communication path is formed in the trench between one of the source and drain of a first transistor and one of the source and drain of a second transistor. A defined pattern of nanotube fabric is provided over at least a horizontal portion of the structure and extending into the trench. An electrode is provided in the trench. A pattern of nanotube fabric is suspended so that at least a portion is vertically suspended in spaced relation to the vertical walls of the trench and positioned so that the vertically suspended defined pattern of nanotube fabric is electromechanically deflectable into electrical communication with one of the drain and source of a first transistor and one of the source and drain of a second transistor.
摘要翻译：一种方法用于制造具有纳米管存储元件的位选择器件。提供了具有至少两个晶体管的结构，每个具有漏极和源极之间具有限定的沟道区域，每个晶体管还包括位于所述沟道上的栅极。在第一晶体管的源极和漏极之一以及第二晶体管的源极和漏极之一之间形成沟槽。在第一晶体管的源极和漏极之一以及第二晶体管的源极和漏极中的一个之间的沟槽中形成电连通路径。在结构的至少一个水平部分上提供限定的纳米管织物图案并且延伸到沟槽中。在沟槽中设置电极。纳米管织物的图案被悬浮，使得至少一部分垂直悬挂在与沟槽的垂直壁隔开的位置上，并且被定位成使得垂直悬挂的限定图案的纳米管织物可机电偏转成与排水管之一电连通第一晶体管的源极和第二晶体管的源极和漏极之一。

16. 发明申请

US20070020859A1 Method of making non-volatile field effect devices and arrays of same 审中-公开
标题翻译：制造非易失性场效应器件及其阵列的方法
公开(公告)号：US20070020859A1
公开(公告)日：2007-01-25
申请号：US11527127
申请日：2006-09-26
申请人： Claude Bertin , Thomas Rueckes , Brent Segal
发明人： Claude Bertin , Thomas Rueckes , Brent Segal
IPC分类号： H01L21/8234
CPC分类号： H01L29/78 , B82Y10/00 , B82Y99/00 , G11C7/065 , G11C13/025 , G11C16/0416 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/16 , G11C2213/17 , G11C2213/79 , H01H1/0094 , H01L27/10 , H01L27/1052 , H01L27/112 , H01L27/11206 , H01L27/115 , H01L27/286 , H01L29/0665 , H01L29/0673 , H01L29/42324 , H01L51/0048 , H01L51/0052 , H01L51/0508 , Y10S977/708 , Y10S977/724 , Y10S977/742 , Y10S977/762 , Y10S977/936 , Y10S977/938 , Y10S977/94 , Y10S977/943
摘要： Methods of making non-volatile field effect devices and arrays of same. Under one embodiment, a method of making a non-volatile field effect device includes providing a substrate with a field effect device formed therein. The field effect device includes a source, drain and gate with a field-modulatable channel between the source and drain. An electromechanically-deflectable, nanotube switching element is formed over the field effect device. Terminals and corresponding interconnect are provided to correspond to each of the source, drain and gate such that the nanotube switching element is electrically positioned between one of the source, drain and gate and its corresponding terminal, and such that the others of said source, drain and gate are directly connected to their corresponding terminals.
摘要翻译：制造非易失性场效应器件及其阵列的方法。在一个实施例中，制造非易失性场效应器件的方法包括提供其中形成有场效应器件的衬底。场效应器件包括在源极和漏极之间具有场可调通道的源极，漏极和栅极。在场效应器件上形成机电偏转的纳米管开关元件。提供端子和相应的互连件以对应于源极，漏极和栅极中的每一个，使得纳米管开关元件电气地定位在源极，漏极和栅极之间及其对应的端子之间，并且使得其他源极，漏极并且门直接连接到其相应的端子。

17. 发明申请

US20060231865A1 Electromechanical three-trace junction devices 有权
公开(公告)号：US20060231865A1
公开(公告)日：2006-10-19
申请号：US11454216
申请日：2006-06-15
申请人： Thomas Rueckes , Brent Segal , Claude Bertin
发明人： Thomas Rueckes , Brent Segal , Claude Bertin
IPC分类号： H01L27/10 , H01L29/73
CPC分类号： G11C11/56 , B82Y10/00 , G11C13/025 , G11C23/00 , G11C2213/77 , H01H1/0094 , Y10S977/742 , Y10S977/932 , Y10S977/936 , Y10S977/943
摘要： Three-trace electromechanical devices and methods of using same are described. The device of the present invention includes first and second electrically conductive elements with a nanotube ribbon (or other electromechanical elements) disposed therebetween. The nanotube ribbon is capable of maintaining its position after removing an electrical stimulus applied to at least one of the first and second electrically conductive elements. Such devices may be formed into arrays of cells. One of the conductive elements may be used to create an attractive force to cause the nanotube ribbon to contact a conductive element, and the other conductive element may be used to create an attractive force to pull the nanotube ribbon from contact with the contacted conductive element. The electrically conductive traces may be aligned or unaligned with one another.

18. 发明申请

US20050035344A1 Isolation structure for deflectable nanotube elements 有权
标题翻译：可偏转纳米管元件的隔离结构
公开(公告)号：US20050035344A1
公开(公告)日：2005-02-17
申请号：US10917606
申请日：2004-08-13
申请人： Claude Bertin , Thomas Rueckes , Brent Segal
发明人： Claude Bertin , Thomas Rueckes , Brent Segal
IPC分类号： G11C13/02 , H01H1/027 , H01H59/00 , H01L27/28 , H01L29/06 , H01L29/73 , H01L29/78 , H01L51/30
CPC分类号： H01L29/0665 , B82Y10/00 , G11C13/025 , G11C23/00 , H01H1/0094 , H01H1/027 , H01H2001/0005 , H01L27/28 , H01L29/0673 , H01L29/73 , H01L29/78 , H01L51/0048 , H01L51/0508 , Y10S977/94 , Y10S977/943
摘要： Nanotube-based switching elements and logic circuits. Under one embodiment of the invention, a switching element includes an input node, an output node, a nanotube channel element having at least one electrically conductive nanotube, and a control electrode. The control electrode is disposed in relation to the nanotube channel element to controllably form an electrically conductive channel between the input node and the output node. The channel at least includes said nanotube channel element. The output node is constructed and arranged so that channel formation is substantially unaffected by the electrical state of the output node. Under another embodiment of the invention, the control electrode is arranged in relation to the nanotube channel element to form said conductive channel by causing electromechanical deflection of said nanotube channel element. Under another embodiment of the invention, the output node includes an isolation structure disposed in relation to the nanotube channel element so that channel formation is substantially invariant from the state of the output node. Under another embodiment of the invention, the isolation structure includes electrodes disposed on opposite sides of the nanotube channel element and said electrodes produce substantially the same electric field. Under another embodiment of the invention, a Boolean logic circuit includes at least one input terminal and an output terminal, and a network of nanotube switching elements electrically disposed between said at least one input terminal and said output terminal. The network of nanotube switching elements effectuates a Boolean function transformation of Boolean signals on said at least one input terminal. The Boolean function transformation includes a Boolean inversion within the function, such as a NOT or NOR function.
摘要翻译：基于纳米管的开关元件和逻辑电路。在本发明的一个实施例中，开关元件包括输入节点，输出节点，具有至少一个导电纳米管的纳米管通道元件和控制电极。控制电极相对于纳米管通道元件设置，以在输入节点和输出节点之间可控制地形成导电通道。通道至少包括所述纳米管通道元件。输出节点的构造和布置使得通道形成基本上不受输出节点的电气状态的影响。在本发明的另一实施例中，控制电极相对于纳米管通道元件布置，以通过引起所述纳米管通道元件的机电偏转而形成所述导电通道。在本发明的另一个实施例中，输出节点包括相对于纳米管通道元件设置的隔离结构，使得通道形成从输出节点的状态基本上是不变的。在本发明的另一个实施例中，隔离结构包括设置在纳米管通道元件的相对侧上的电极，所述电极产生基本上相同的电场。在本发明的另一个实施例中，布尔逻辑电路包括至少一个输入端子和输出端子，以及电气地布置在所述至少一个输入端子和所述输出端子之间的纳米管开关元件网络。纳米管切换元件的网络在所述至少一个输入端上实现布尔信号的布尔函数变换。布尔函数变换包括函数内的布尔反转，如NOT或NOR函数。

19. 发明申请

US20070063740A1 Nanotube-based switching elements and logic circuits 有权
标题翻译：基于纳米管的开关元件和逻辑电路
公开(公告)号：US20070063740A1
公开(公告)日：2007-03-22
申请号：US11602795
申请日：2006-11-21
申请人： Claude Bertin , Thomas Rueckes , Brent Segal
发明人： Claude Bertin , Thomas Rueckes , Brent Segal
IPC分类号： H03K19/20
CPC分类号： H01L29/0665 , B82Y10/00 , G11C13/025 , G11C23/00 , G11C2213/16 , G11C2213/17 , H01H1/0094 , H01H1/027 , H01H2001/0005 , H01L27/28 , H01L29/0673 , H01L29/73 , H01L29/78 , H01L51/0048 , H01L51/0508 , Y10S977/762 , Y10S977/932 , Y10S977/94 , Y10T29/49002
摘要： Nanotube-based switching elements and logic circuits. Under one embodiment of the invention, a switching element includes an input node, an output node, a nanotube channel element having at least one electrically conductive nanotube, and a control electrode. The control electrode is disposed in relation to the nanotube channel element to controllably form an electrically conductive channel between the input node and the output node. The channel at least includes said nanotube channel element. The output node is constructed and arranged so that channel formation is substantially unaffected by the electrical state of the output node. Under another embodiment of the invention, the control electrode is arranged in relation to the nanotube channel element to form said conductive channel by causing electromechanical deflection of said nanotube channel element. Under another embodiment of the invention, the output node includes an isolation structure disposed in relation to the nanotube channel element so that channel formation is substantially invariant from the state of the output node. Under another embodiment of the invention, the isolation structure includes electrodes disposed on opposite sides of the nanotube channel element and said electrodes produce substantially the same electric field. Under another embodiment of the invention, a Boolean logic circuit includes at least one input terminal and an output terminal, and a network of nanotube switching elements electrically disposed between said at least one input terminal and said output terminal. The network of nanotube switching elements effectuates a Boolean function transformation of Boolean signals on said at least one input terminal. The Boolean function transformation includes a Boolean inversion within the function, such as a NOT or NOR function.
摘要翻译：基于纳米管的开关元件和逻辑电路。在本发明的一个实施例中，开关元件包括输入节点，输出节点，具有至少一个导电纳米管的纳米管通道元件和控制电极。控制电极相对于纳米管通道元件设置，以在输入节点和输出节点之间可控制地形成导电通道。通道至少包括所述纳米管通道元件。输出节点的构造和布置使得通道形成基本上不受输出节点的电气状态的影响。在本发明的另一实施例中，控制电极相对于纳米管通道元件布置，以通过引起所述纳米管通道元件的机电偏转而形成所述导电通道。在本发明的另一个实施例中，输出节点包括相对于纳米管通道元件设置的隔离结构，使得通道形成从输出节点的状态基本上是不变的。在本发明的另一个实施例中，隔离结构包括设置在纳米管通道元件的相对侧上的电极，所述电极产生基本上相同的电场。在本发明的另一个实施例中，布尔逻辑电路包括至少一个输入端子和输出端子，以及电气地布置在所述至少一个输入端子和所述输出端子之间的纳米管开关元件网络。纳米管切换元件的网络在所述至少一个输入端上实现布尔信号的布尔函数变换。布尔函数变换包括函数内的布尔反转，如NOT或NOR函数。

20. 发明申请

US20050074926A1 Method of making non-volatile field effect devices and arrays of same 有权
标题翻译：制造非易失性场效应器件及其阵列的方法
公开(公告)号：US20050074926A1
公开(公告)日：2005-04-07
申请号：US10864751
申请日：2004-06-09
申请人： Claude Bertin , Thomas Rueckes , Brent Segal
发明人： Claude Bertin , Thomas Rueckes , Brent Segal
IPC分类号： G11C7/06 , G11C8/02 , G11C11/00 , G11C11/50 , G11C13/02 , G11C16/02 , G11C16/04 , G11C17/16 , G11C23/00 , H01H59/00 , H01J1/62 , H01L20060101 , H01L21/336 , H01L21/82 , H01L21/8246 , H01L27/112 , H01L27/115 , H01L27/28 , H01L29/06 , H01L29/423 , H01L29/739 , H01L29/745 , H01L29/76 , H01L51/00 , H01L51/05 , H01L51/30 , H03K17/16
CPC分类号： H01L29/78 , B82Y10/00 , B82Y99/00 , G11C7/065 , G11C13/025 , G11C16/0416 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/16 , G11C2213/17 , G11C2213/79 , H01H1/0094 , H01L27/10 , H01L27/1052 , H01L27/112 , H01L27/11206 , H01L27/115 , H01L27/286 , H01L29/0665 , H01L29/0673 , H01L29/42324 , H01L51/0048 , H01L51/0052 , H01L51/0508 , Y10S977/708 , Y10S977/724 , Y10S977/742 , Y10S977/762 , Y10S977/936 , Y10S977/938 , Y10S977/94 , Y10S977/943
摘要： Methods of making non-volatile field effect devices and arrays of same. Under one embodiment, a method of making a non-volatile field effect device includes providing a substrate with a field effect device formed therein. The field effect device includes a source, drain and gate with a field-modulatable channel between the source and drain. An electromechanically-deflectable, nanotube switching element is formed over the field effect device. Terminals and corresponding interconnect are provided to correspond to each of the source, drain and gate such that the nanotube switching element is electrically positioned between one of the source, drain and gate and its corresponding terminal, and such that the others of said source, drain and gate are directly connected to their corresponding terminals.
摘要翻译：制造非易失性场效应器件及其阵列的方法。在一个实施例中，制造非易失性场效应器件的方法包括提供其中形成有场效应器件的衬底。场效应器件包括在源极和漏极之间具有场可调通道的源极，漏极和栅极。在场效应器件上形成机电偏转的纳米管开关元件。提供端子和相应的互连件以对应于源极，漏极和栅极中的每一个，使得纳米管开关元件电气地定位在源极，漏极和栅极之间及其对应的端子之间，并且使得其他源极，漏极并且门直接连接到其相应的端子。

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